C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2006
10/10/2006	US7118778 on a SiO2 layer of a wafer in an closed container to ensure the photoresist adheres to the layer tightly without instability and subsequent flaking off or resist lifting due to the insufficient binding force.
10/10/2006	US7118657 Pulsed ion beam control of solid state features
10/10/2006	US7118656 Thin film stent
10/10/2006	US7118630 Apparatus for depositing a low work function material
10/05/2006	WO2006104056A1 Droplet removal device and droplet removal method in plasma generation device
10/05/2006	WO2006104055A1 Droplet removing device and method in plasma generator
10/05/2006	WO2006104027A1 Magnesium oxide single crystal and method for producing same
10/05/2006	WO2006103982A1 Edge replacement cutter tip and method of manufacturing the same
10/05/2006	WO2006103966A1 METHOD FOR FORMING In-Ga-Zn-O FILM AND SOLAR CELL
10/05/2006	WO2006103871A1 Electrically conductive material
10/05/2006	WO2006103833A1 Deep-pot-shaped copper sputtering target and process for producing the same
10/05/2006	WO2006103134A1 Method for producing a polycrystalline ceramic film on a substrate, capacitor structure having a ceramic film and use of said capacitor structure
10/05/2006	WO2006102914A1 Device and method for the transport of a tube from a first chamber into a second chamber
10/05/2006	WO2006102913A1 Device and method for coating substrates
10/05/2006	WO2006102780A1 Multi-layered hard material coating for tools
10/05/2006	WO2006069774A3 Vacuum deposition system
10/05/2006	WO2006036393A3 Protected polymeric film
10/05/2006	WO2006029747A3 Cutting tool with oxide coating
10/05/2006	WO2006019981A3 Sputtering magnetron control devices
10/05/2006	WO2004013661A3 Methods and apparatus for preparing specimens for microscopy
10/05/2006	US20060223323 Method of forming an interconnect structure
10/05/2006	US20060223322 Method of forming a trench structure
10/05/2006	US20060223020 Resistance-heated vaporizer boat
10/05/2006	US20060222968 For semiconductors, microelectronic and microelectromechanical devices, and microfluidic and photonic devices; eliminating image distorting charging effects during electron beam patterning of the template and charging effects during scanning electron microscope inspection
10/05/2006	US20060222905 Magnetic recording medium and manufacturing method therefor
10/05/2006	US20060222902 Perpendicular magnetic recording medium, manufacturing method thereof, and magnetic storage device
10/05/2006	US20060222899 Magnetic recording media
10/05/2006	US20060222772 Method and apparatus for the production of thin film coatings
10/05/2006	US20060222767 Production device for multiple-system film and coating tool for multiple-system film
10/05/2006	US20060221474 Optical thin film and mirror using the same
10/05/2006	US20060219988 Comprising indium oxide as the major component, tungsten and germanium ; low in resistance and excellent in surface smoothness; high transmittance in the low-wavelength region of visible rays
10/05/2006	US20060219678 Wafer characteristics via reflectometry and wafer processing apparatus and method
10/05/2006	US20060219550 Magnet arrangement for a planar magnetron
10/05/2006	US20060219549 Sputtering target of silver alloy for producing reflection layer of optical recording medium
10/05/2006	US20060219548 Magnetron
10/05/2006	US20060219547 Vertical production of photovoltaic devices
10/05/2006	US20060219546 Concentration-graded alloy sputtering target
10/05/2006	US20060219325 Method for producing alpha-alumina layer-formed member and surface treatment
10/05/2006	US20060219322 Superconducting wire and its production method
10/05/2006	US20060219172 PVD equipment and electrode and deposition ring thereof
10/05/2006	US20060218774 Method for manufacturing a magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in hard magnetic bias layers
10/05/2006	US20060218773 Method for manufacturing a magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in a hard magnetic in-stack bias layer
10/05/2006	US20060218770 Laser generation of thermal insulation blanket
10/05/2006	DE102006000149A1 Cutting tool, with an alpha aluminum oxide surface coating, has a crystal structure through vacuum deposition followed by ion bombardment using a noble gas in a plasma
10/04/2006	EP1707649A2 Method for coating surfaces with a mixture.
10/04/2006	EP1707648A2 Deposition mask.
10/04/2006	EP1706519A2 Transparent and conductive oxide layer, production and use thereof in a thin film solar cell
10/04/2006	EP1706518A1 Protective layer for an aluminium-containing alloy for using at high temperatures, and method for producing one such protective layer
10/04/2006	EP1706068A2 Radiopaque coating for biomedical devices
10/04/2006	EP1523757B1 Cathode for vacuum sputtering treatment machine
10/04/2006	EP1479267B1 System and method for lamp split zone control
10/04/2006	EP1015657A4 Apparatus and method for sputtering a magnetron target
10/04/2006	CN2823273Y Computer controlled film plating device
10/04/2006	CN1842903A Semiconductor device and method for fabricating same
10/04/2006	CN1842878A Superconducting film and method of manufacturing the same
10/04/2006	CN1842670A Method for manufacturing wearable side for ladder-shaped ring for internal combustion engine
10/04/2006	CN1842614A Strip processing device
10/04/2006	CN1842613A Spattering target and method of manufacturing the same
10/04/2006	CN1842612A Film-forming apparatus and firm-forming method thereof
10/04/2006	CN1842500A Dielectric-layer-coated substrate and method and installation for production thereof
10/04/2006	CN1841696A Apparatus for processing substrate
10/04/2006	CN1841654A Device and method for controlling temperature of a mounting table, a program therefor, and a processing apparatus including same
10/04/2006	CN1840737A Reflective and resistant coatings and methods for applying to composite structures
10/04/2006	CN1840732A Transitional optical thin-film coating device and its smelting tool ring
10/04/2006	CN1278385C P-ZnO thin film and preparation method thereof
10/04/2006	CN1277951C Surface processer
10/04/2006	CN1277950C Method for improving MCrAlY coating life on surface of titanium alloy basement
10/04/2006	CN1277949C Ti-Al-O-N hard composite coating and its preparing method
10/04/2006	CN1277622C Masking article for use in vehicle structure
10/03/2006	US7116420 analyzing radiation transparent solutions or suspensions comprising colors such as dyes or pigments using spectrometers, for use as finishes
10/03/2006	US7115516 Method of depositing a material layer
10/03/2006	US7115219 Mixing a raw aqueous solution containing indium and tin compounds and more with an alkali aqueous solution, separating the product into solid and liquid, and calcinating
10/03/2006	US7115194 Magnetron sputtering apparatus
10/03/2006	US7115193 Sputtering target producing very few particles, backing plate or apparatus within sputtering device and roughening method by electric discharge machining
10/03/2006	US7115191 Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system
10/03/2006	US7115168 Patterned thin-film deposition using collimating heated masked assembly
10/03/2006	US7114643 Friction fit target assembly for high power sputtering operation
10/03/2006	CA2479663C Method of an apparatus for sputtering
09/2006
09/28/2006	WO2006101994A2 Coated article with anti-reflective coating and method of making same
09/28/2006	WO2006101843A2 Sputtering devices and methods
09/28/2006	WO2006101772A2 Split magnet ring on a magnetron sputter chamber
09/28/2006	WO2006101693A2 Coils utilized in vapor deposition applications and methods of production
09/28/2006	WO2006101171A1 Production method for vacuum component, resin coating forming device and vacuum film forming system
09/28/2006	WO2006100968A1 Method of film formation, film formation apparatus, permanent magnet, and process for producing permanent magnet
09/28/2006	WO2006100867A1 Film forming device, film forming method, and method of producing organic el element
09/28/2006	WO2006100058A2 Heating device coating plant and method for evaporation or sublimation of coating materials
09/28/2006	WO2006099776A1 Preparing a single component metal nanowire directly by physical vapor phase method
09/28/2006	WO2006099754A1 Hard material layer
09/28/2006	WO2006076333A3 High integrity sputtering target material and method for producing bulk quantities of same
09/28/2006	US20060216945 Methods of depositing materials over semiconductor substrates
09/28/2006	US20060216840 Methods for assessing alignments of substrates within deposition apparatuses; and methods for assessing thicknesses of deposited layers within deposition apparatuses
09/28/2006	US20060216534 Ceramic of zirconia stabilized with metal oxides (e.g. yttria, ytterbia, hafnia or tantalum oxide); turbine engines
09/28/2006	US20060216161 Material evaporation chamber with differential vacuum pumping
09/28/2006	US20060215409 Visible light-reflecting member
09/28/2006	US20060213770 Sputtering device
09/28/2006	US20060213769 Coils utilized in vapor deposition applications and methods of production
09/28/2006	US20060213764 deposition of uniform barrier layers into high aspect ratio nanostructure patterns on semiconductor substrates: radio frequency energy is coupled into the chamber to form a high density plasma, and a biasing voltage can be applied to aid in enhancing surface coverage
09/28/2006	US20060213763 Temperature control method and apparatus, and plasma processing apparatus
09/28/2006	US20060213762 Cylindrical sputtering apparatus
09/28/2006	US20060213761 Method of Arc Detection

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