Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2006
09/13/2006CN1831185A Evaporate source module and vapor deposited apparatus using thereof
09/13/2006CN1831184A Displacement ferroelectric super-lattice thin film material having stress-limiting layer and preparation method thereof
09/13/2006CN1275098C Deposited mask of display device and its manufacturing method
09/13/2006CN1274876C Magnetron sputtering target production method and mould used by the method
09/13/2006CN1274875C Cylindrical magnetron target and apparatus for affixing target to rotatable spindle assembly
09/13/2006CN1274874C Apparatus and method for depositing film on glass substrate
09/13/2006CN1274873C Improved anti-dazzle optical device
09/13/2006CN1274872C Fixing member for evaporation apparatus
09/13/2006CN1274871C Evaporation apparatus
09/13/2006CN1274870C Artificial organs surface treatment method using sputtering technology
09/13/2006CN1274869C Method of introducing helium into metal material
09/13/2006CN1274620C Double silver low-emissivity coated glass based on composite dielectric layer
09/12/2006US7106515 Composition for vapor deposition, method for forming an antireflection film, and optical element
09/12/2006US7105898 Electronic circuit
09/12/2006US7105253 preventing an active material layer from oxidation and moisture absorption when making transition from electrode preparation to cell preparation; holding the collector formed with active material layer under an inert atmosphere or a vacuum atmosphere
09/12/2006US7105236 Thermal-insulating material having an essentially magnetoplumbitic crystal structure
09/12/2006US7105220 Mutlialyer automobile laminate; glazing unit; pair of glass sheets; sputter coating; silver film and dielectric
09/12/2006US7105199 Depositing a drug onto a surface of a medical device;forming a gas cluster ion beam in a vacuum chamber, irradiating the deposited drug and the surface of the medical device with the beam to adhere the drug to the surface of the medical device; coronary stents, implantable prostheses
09/12/2006US7105080 Digital, programmable unit with storage means for the operating programs
09/12/2006US7105037 Semiconductor manufacturing facility utilizing exhaust recirculation
09/12/2006US7104217 Plasma processing apparatus
09/08/2006WO2006093953A1 Sputtering target with an insulating ring and a gap between the ring and the target
09/08/2006WO2006093125A1 Metal double layer structure and method for manufacturing the same and regeneration method of sputtering target employing that method
09/08/2006WO2006092949A1 Optical element with laser damage suppression film
09/08/2006WO2006092927A1 Stain preventing film and device for producing stain preventing film
09/08/2006WO2006092919A1 Optical element and method for manufacturing optical element
09/07/2006US20060199082 Mask repair
09/07/2006US20060199044 High areal recording density exhibiting low noise; iron alloy is selected from alloy with cobalt, boron, zirconium, tantalum, boron
09/07/2006US20060199042 1st recording layer having upper sublayer of a CoPtCrB alloy; lower sublayer of a CoPtCrB alloy; middle sublayer of a CoCrB-alloy coupled to upper and lower layers and thinner than them; 2nd recording layer having a magnetization direction opposite to that of the first layer with CrMoB alloy underlayer
09/07/2006US20060198966 Method for forming a silicon-containing film
09/07/2006US20060198903 Antimicrobial coating methods
09/07/2006US20060197457 Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
09/07/2006US20060197080 Thin film forming device, method of forming a thin film, and self-light-emitting device
09/07/2006US20060196845 Quartz Tuning-Fork Resonators and Production Method
09/07/2006US20060196766 Plasma deposition apparatus and method
09/07/2006US20060196765 Metallization target optimization method providing enhanced metallization layer uniformity
09/07/2006US20060196423 Gradually changed film coating device and tool for using in the coating device
09/07/2006US20060196420 High density plasma chemical vapor deposition apparatus
09/07/2006US20060196414 System for coating a substrate, and an insert element
09/07/2006US20060196040 Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height
09/07/2006DE10204075B4 Vorrichtung für Einrichtungen zur Bestimmung von Eigenschaften aufgebrachter Schichten Apparatus for devices for determining properties applied layers
09/07/2006DE102006009504A1 Component module with cooling fins consisting of connector and numerous cooling fins and made of heat conductive materials containing metal and crystalline carbon with high heat conductive coefficient
09/07/2006DE102006003754A1 Air cooler system for chips with fan, numerous cooling fins, cooler body and heat exchange tube, with cooler body formed by metal and crystalline carbon of high heat
09/07/2006DE102005063312A1 Transportvorrichtung zum Handhaben von Linsen Transport device for handling of lenses
09/07/2006DE102005008889A1 Optisches Monitoringsystem für Beschichtungsprozesse Optical monitoring system for coating processes
09/06/2006EP1698715A1 Coating apparatus with parts on a drawer
09/06/2006EP1698714A2 Target used to form a hard film
09/06/2006EP1698713A1 Scratch-resistant material and method to manufacture
09/06/2006EP1698401A2 Protective cage for coating of medical devices
09/06/2006EP1697706A1 Use of spinel ferrites as sensitive material for bolometric infrared detection devices
09/06/2006EP1697661A2 Ion-beam assisted deposition of inorganic coatings for elastomeric seal wear resistance improvement
09/06/2006EP1697558A2 Growth of in-situ thin films by reactive evaporation
09/06/2006EP1697556A2 Rotating sputtering magnetron
09/06/2006EP1697555A2 Method and device for magnetron sputtering
09/06/2006EP1697102A2 Process for forming a patterned thin film structure for in-mold decoration
09/06/2006EP1099003B1 Pvd coated cutting tool and method of its production
09/06/2006CN2813638Y Multi-element sputtering target material structure
09/06/2006CN2813637Y Horizontal electronic beam evaporation type vacuum film coating machine
09/06/2006CN1830055A Sliding anode magnetron sputtering source
09/06/2006CN1829820A Sputtering target and method for production thereof
09/06/2006CN1829819A Process for the production of strongly adherent coatings
09/06/2006CN1829818A Process for the production of strongly adherent coatings
09/06/2006CN1829807A Highly pure hafnium material, target and thin film comprising the same and method for producing highly pure hafnium
09/06/2006CN1829421A Housing and making method
09/06/2006CN1827854A Surface plasmon crystal and preparation method thereof
09/06/2006CN1827853A Forming method and model manufactured by the forming method
09/06/2006CN1827847A Methods and devices for monitoring and controlling thin film processing
09/06/2006CN1827843A Pt-co based sputtering targets
09/06/2006CN1827842A Film forming method and device, self luminescent element producing method and device
09/06/2006CN1827841A Physical vapor deposition forming method
09/06/2006CN1827840A Method for preparing silver-enriched antibacterial film on pyrolytic carbon and TiN film for medical use
09/06/2006CN1827839A Metal surface treatment method
09/06/2006CN1827838A Method for improving anti-adhesion performance of metal part surface
09/06/2006CN1827837A Method for preparing ZnO nanostructure photocatalytic film with p-n junction
09/06/2006CN1827836A Shielding with isolation layer and equipment with the same
09/06/2006CN1274037C Lithium anodes for electrochemical cells
09/06/2006CN1273793C Heat exchanger surface treatment device capable of proceeding continuous treatment
09/06/2006CN1273639C Method for inhibiting production of projections in metal deposited-film
09/06/2006CN1273638C Process for making metal flakes
09/05/2006US7102229 Capacitor containing high purity tantalum
09/05/2006US7102132 Process monitoring using infrared optical diagnostics
09/05/2006US7101591 Process for producing an organic polymer film whereby when using it as an interlayer insulating film in a semiconductor device, the film exhibits higher adhesiveness at its interface where other semiconductor materials are in contact with the
09/05/2006US7101466 Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization
09/05/2006US7101447 Tantalum sputtering target with fine grains and uniform texture and method of manufacture
09/05/2006US7101442 Reaction apparatus
09/05/2006US7101155 vacuum pump unit with an inlet connectable with an outlet for exhausting gas; pumping gas from the chamber to the pump inlet using the vacuum pump unit, then allowing gas to be evacuated from the pump outlet to the chamber to reduce pressure
08/2006
08/31/2006WO2006091943A2 Cylindrical sputtering apparatus
08/31/2006WO2006091598A2 Effusion cell valve
08/31/2006WO2006090806A1 Gallium-containing zinc oxide
08/31/2006WO2006090749A1 Substrate mounting method and film forming method for film forming apparatus
08/31/2006WO2006090748A1 Mask aligning mechanism for film forming apparatus, and film forming apparatus
08/31/2006WO2006090747A1 Mask holding mechanism and film forming apparatus
08/31/2006WO2006090746A1 Mask clamp moving mechanism and film forming apparatus
08/31/2006WO2006090608A1 Vibrating bowl, vibrating bowl feeder, and vacuum deposition apparatus
08/31/2006WO2006090448A1 Process for producing transparent conductive laminate, and touch panel
08/31/2006WO2006090005A1 Pulsed laser deposition method
08/31/2006WO2006090004A1 Pulsed laser deposition method
08/31/2006WO2006089753A1 Saw band and method for the production of a saw band
08/31/2006WO2006089752A1 Optical monitoring system for coating processes
08/31/2006WO2005090629A3 Refurbishment of sputtering targets