Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2006
09/28/2006US20060213053 Double layer patterning and technique for milling patterns for a servo recording head
09/28/2006DE102005014031A1 Beschichtetes Substrat mit einer temporären Schutzschicht sowie Verfahren zu seiner Herstellung A coated substrate with a temporary protective layer, and method for its preparation
09/28/2006CA2601834A1 Sputtering devices and methods
09/28/2006CA2601729A1 Method for operating a pulsed arc vaporizer source as well as a vacuum process installation with pulsed arc vaporization source
09/28/2006CA2601722A1 Hard material layer
09/27/2006EP1705262A1 Vapor aluminide coating using a gas manifold
09/27/2006EP1704266A2 High integrity sputtering target material and method for producing bulk quantities of same
09/27/2006EP1704265A2 Melting and vaporizing apparatus and method
09/27/2006EP1704264A1 A layered structure
09/27/2006EP1704126A2 Scratch resistant coated glass article resistant to fluoride-based etchant(s)
09/27/2006EP1704058A1 Write-once-read-many optical recording medium and sputtering target thereof
09/27/2006EP1157598A4 Method and apparatus for deposition of diamond-like carbon coatings from a hall-current ion source
09/27/2006CN1839459A Control of plasma transitions in sputter processing systems
09/27/2006CN1839215A Ito溅射靶 Ito sputtering target
09/27/2006CN1839214A Control system for a sputtering system
09/27/2006CN1839213A PVD targets comprising copper in ternary mixtures, and methods of forming copper-containing PVD targets
09/27/2006CN1838381A Method for electrically discharging substrate, substrate processing apparatus and program
09/27/2006CN1837401A Method for preparing barium strontium titanate ferroelectric film
09/27/2006CN1836829A Heat radiator preparation method
09/27/2006CN1277352C Method for making electronic part, electronic part and elastic surface wave filter
09/27/2006CN1277262C Phase change optical recording medium
09/27/2006CN1277128C Process for preparing optical element with anti-reflect film
09/26/2006US7112760 Laser annealer and laser thin-film forming apparatus
09/26/2006US7112370 polymer material and a vapor deposition layer formed on the substrate and consisting essentially of a ceramic material
09/26/2006US7112286 Thin film resistor structure and method of fabricating a thin film resistor structure
09/21/2006WO2006098781A2 Methods for making sputtering targets
09/21/2006WO2006098451A1 Automatic heat conditioning color tone conditioning light shielding glass and method for producing the same
09/21/2006WO2006097994A1 Sputtering apparatus
09/21/2006WO2006097152A1 Flat end-block for carrying a rotatable sputtering target
09/21/2006WO2006060597A9 Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
09/21/2006US20060211273 Method of manufacturing an injector plate
09/21/2006US20060210783 Coated article with anti-reflective coating and method of making same
09/21/2006US20060207876 Sputtering target and method for preparation thereof
09/21/2006US20060207873 Split magnet ring on a magnetron sputter chamber
09/21/2006US20060207872 Dual magnetron thin film deposition system
09/21/2006US20060207871 Sputtering devices and methods
09/21/2006US20060207740 Processes for producing a sputtering target from a silicon-based alloy, a sputtering target
09/21/2006DE102005010979A1 Photoaktives Bauelement mit organischen Schichten A photoactive device with organic layers
09/21/2006DE102005010681A1 Messanordnung zum optischen Monitoring von Beschichtungsprozessen Measuring arrangement for optical monitoring of coating processes
09/21/2006DE102005001334B4 Kompartmentsystem einer längserstreckten Vakuumbeschichtungsanlage Kompartmentsystem an elongated vacuum coating system
09/21/2006CA2597623A1 System and process for high-density,low-energy plasma enhanced vapor phase epitaxy
09/20/2006EP1703504A1 Recording film for use in optical information recording medium, optical information recording medium, and sputtering target
09/20/2006EP1702997A2 Hard film for cutting tools
09/20/2006EP1702971A1 Electroluminescent material and electroluminescent element using the same
09/20/2006EP1702963A1 Anti-moisture and soil-repellent coatings
09/20/2006EP1702087A2 Vacuum coating unit and a method for the differentiated coating of spectacle lenses
09/20/2006EP1702086A2 Apparatus and method for implantation of elements, species and compositions in nanostructured materials
09/20/2006EP1573084B1 Composite sputter target and phosphor deposition method
09/20/2006CN2818495Y Planar megnetron sputtering device
09/20/2006CN2818494Y Formative coating target material for vacuum coater
09/20/2006CN1836307A Method and design for sputter target attachment to a backing plate
09/20/2006CN1836256A Thermography test method and apparatus for bonding evaluation in sputtering targets
09/20/2006CN1836059A 新型金属带产品 The new metal band Product
09/20/2006CN1836058A 新型金属带产品 The new metal band Product
09/20/2006CN1835241A Oxide ferroelectric memory cell and prepn process
09/20/2006CN1835200A Vacuum apparatus, method for measuring a leak rate thereof, program used in measuring the leak rate and storage medium storing the program
09/20/2006CN1835140A High speed winding multi-layer capacity film coater and its technique
09/20/2006CN1834285A Sputter source and sputtering device
09/20/2006CN1834284A Sputter target and its mfg. method
09/20/2006CN1834283A Method of preparing Ti ceramic nano membrane on medical stainless steel
09/20/2006CN1834282A Device and method of forming film
09/20/2006CN1276533C Method for manufacturing alkaline battery
09/20/2006CN1276503C ZnO/saphire substrate and its making process
09/20/2006CN1276124C Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
09/20/2006CN1276121C UV waveband optic film plating method using baffle
09/20/2006CN1276120C Producing process for high-separation vacuum aluminium-plating thin film
09/19/2006US7108894 Supplying the material to be deposited;atomizing the material to produce a plurality of discrete particles;applying a force; collimating particles by surrounding the carrier gas with a coflowing sheath gas; passing the particles through no more than one orifice; depositing
09/19/2006CA2132825C Process for coating a substrate with a material giving a polished effect
09/14/2006WO2006096127A1 Non-stick metal product coated by pvd with a hydrophobic metal oxide.
09/14/2006WO2006095733A1 Amorphous transparent conductive film, target and production method for amorphous conductive film
09/14/2006WO2006095642A1 Process for target production
09/14/2006WO2006094905A1 Single, right-angled end-block
09/14/2006WO2006094821A2 Method for producing a thin magnesium oxide layer
09/14/2006WO2006094647A1 Measuring arrangement for the optical monitoring of coating processes
09/14/2006WO2006094321A1 Evaporator source for evaporating alkali/alkaline earth metals
09/14/2006WO2006078348A3 Durable thermal barrier coatings
09/14/2006WO2006012174A3 System and method of cleaning and etching a substrate
09/14/2006WO2005071135A3 Tantalum and other metals with (110) orientation
09/14/2006US20060204672 Coated product and method of production thereof
09/14/2006US20060204648 Multiple vacuum evaporation coating device and method for controlling the same
09/14/2006US20060204534 Drug delivery system and method of manufacturing thereof
09/14/2006US20060201803 Sacrificial cathode target for sputtering cathode assembly
09/14/2006US20060201618 Device for fixing substrate for thin film sputter and method of fixing substrate using the same
09/14/2006US20060201589 Components comprising metallic material, physical vapor deposition targets, thin films, and methods of forming metallic components
09/14/2006US20060201583 Surface-nitriding a deoxidized metal powder to form a surface-nitrided metal powder; consolidating the surface-nitrided metal powder by a powder metallurgy technique to form a metallurgical article; as barrier materials for copper interconnects in semiconductor device
09/14/2006DE10308968B4 Verfahren zur Herstellung einer leitenden Barrierenschicht mit verbesserter Bedeckung innerhalb kritischer Öffnungen A method for producing a conductive barrier layer with an improved cover within critical openings
09/14/2006DE102006004192A1 Heat exchange tube for cooling chip, comprises closed tube with capillary structure for carrying condensed fluid back to heat-receiving end
09/14/2006DE102005011414A1 Verfahren zum Herstellen einer dünnen Magnesiumoxidschicht mittels Plasma-Oxidation A method for producing a thin magnesium oxide layer by means of plasma oxidation
09/14/2006DE10049579B4 Verfahren zur Herstellung einer dekorativen Oberfläche A process for producing a decorative surface
09/13/2006EP1700928A1 AL-Ni-rare earth element alloy sputtering target
09/13/2006EP1700324A1 Self-healing liquid contact switch
09/13/2006EP1699944A1 A stainless steel strip coated with a decorative layer
09/13/2006EP1368131B1 Protective cage for coating of medical devices
09/13/2006EP1366203B1 Refractory metal plates with uniform texture and methods of making the same
09/13/2006CN1833295A Superconducting wire and its production method
09/13/2006CN1833048A Method of forming sputtering articles by multidirectional deformation
09/13/2006CN1832656A Plasma apparatus and apparatus for fabricating optical fiber preform by using the same
09/13/2006CN1832110A 外延生长方法 Epitaxial growth
09/13/2006CN1832106A Temperature control system and substrate processing apparatus
09/13/2006CN1831186A Method of forming optical recording medium