C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2006
11/30/2006	DE102005062482A1 Verfahren und Vorrichtungen zur Messung und Steuerung von Dünnschichtverarbeitungen Methods and apparatus for measurement and control of thin film processing
11/30/2006	DE102005024180A1 Transfer chamber for a vacuum coating assembly, e.g. for coating glass panes by vacuum deposition, has horizontal transport rollers in a housing with a separate roller group in a pump chamber with vacuum pumps
11/30/2006	DE102005024118A1 Process chamber for heating rotating semiconductor wafers, for dosing, has a dividing wall giving part-chambers for the wafer and the rotating unit with prevention of particle deposition on the wafer
11/30/2006	CA2609075A1 Deposition chamber desiccation systems and methods of use thereof
11/29/2006	EP1727406A1 Plasma generator
11/29/2006	EP1726687A2 Coated tool
11/29/2006	EP1726686A1 Hard-coated member
11/29/2006	EP1726685A1 Thermal barrier coating
11/29/2006	EP1726682A1 Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers.
11/29/2006	EP1726680A1 Carbonaceous thin film, process for producing the same and member utilizing the thin film
11/29/2006	EP1726190A2 Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
11/29/2006	EP1725699A1 Plasma coating system for non-planar substrates
11/29/2006	EP1725696A1 Method to reduce thermal stresses in a sputter target
11/29/2006	EP1725695A2 Coated piston pin
11/29/2006	EP1725694A2 Device for nitriding by ionic implantation of an aluminium alloy part, and corresponding method
11/29/2006	EP1725290A1 A matrix assisted pulsed-laser evaporation technique for coating a medical device and associated system and medical device
11/29/2006	EP1725188A1 Medical devices including metallic films and methods for making same
11/29/2006	EP1725187A1 Medical devices including metallic films and methods for making same
11/29/2006	EP1725186A2 Medical devices including metallic films and methods for making same
11/29/2006	EP1349966A4 A method of coating insulative substrates
11/29/2006	EP0975435B1 Modular coating fixture
11/29/2006	CN2841677Y Plated article fixing device for physical vapour phase deposition vapour deposition machine
11/29/2006	CN1871662A Silver selenide film stoichiometry and morphology control in sputter deposition
11/29/2006	CN1871372A 钽溅射靶 Tantalum sputtering target
11/29/2006	CN1870863A Casing of portable electronic device and its manufacturing method
11/29/2006	CN1870325A Lithium ion secondary battery negative plate material with three-layer cell structure and preparation method
11/29/2006	CN1870217A Method for controlling and removing fog-shaped micro-defect of silicon gas-phase epitaxial layer
11/29/2006	CN1869281A Film coating equipment and its film coating method
11/29/2006	CN1869280A Multiple target tiles with complementary beveled edges forming a slanted gap therebetween
11/29/2006	CN1869279A Sensitive component and its film coating method and device
11/29/2006	CN1869278A Method for raising property of lanthanum barium manganese oxide film by laser irradiation
11/29/2006	CN1869277A Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein
11/29/2006	CN1287650C Manufacturing method of anti electromagnetic interference shielding cover
11/29/2006	CN1287425C Capping layer for improved silicide formation in narrow semiconductor structures
11/29/2006	CN1287003C Method for preparing transparent conducting film made from multi-element oxides with antimony being doped into
11/29/2006	CN1287002C Process and apparatus for organic vapor jet deposition
11/29/2006	CN1286747C Method of manufacturing glass optical device
11/29/2006	CN1286576C Continuous coating apparatus
11/28/2006	US7141339 Process for manufacturing half-tone phase shifting mask blanks
11/28/2006	US7141319 Method for processing the surface of an insulating article, printer head and substrate for recording medium
11/28/2006	US7141277 Self-generating inorganic passivation layers for polymer-layered silicate nanocomposites
11/28/2006	US7141269 Molding technique for copper interconnecting wires by electrochemical displacement deposition on the pre-shaped metal layer
11/28/2006	US7141208 Fe-Co-B alloy target and its production method, and soft magnetic film produced by using such target, and magnetic recording medium and TMR device
11/28/2006	US7141186 Oxide sintered body and sputtering target, and manufacturing method for transparent conductive oxide film as electrode
11/28/2006	US7141145 Gas injection for uniform composition reactively sputter-deposited thin films
11/28/2006	US7141135 Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus
11/28/2006	US7141118 Apparatus and method for treating and impregnating porous structures
11/28/2006	CA2225234C Bendable mirrors and method of manufacture
11/28/2006	CA2199634C Double-sided reflector films
11/23/2006	WO2006123630A1 Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask
11/23/2006	WO2006073965A3 Evaporation method and apparatus using infrared guiding heater
11/23/2006	WO2006036547A3 Methods for forming superconducting conductors
11/23/2006	WO2005106067A3 Thin-film coating for wheel rims
11/23/2006	US20060263640 Alumina protective coating film and method for formation thereof
11/23/2006	US20060263626 Depositing by physical vapor deposition first layer of aluminum at least 1000 A thick on substrate, depositing layer of chromium about 200 A in thickness on the first layer of aluminum, and depositing second layer of aluminum about 100 A in thickness on chromium layer; flexible, corrosion resistance
11/23/2006	US20060263610 Visible-light-responsive photoactive coating, coated article, and method of making same
11/23/2006	US20060261397 Lanthanide oxide/hafnium oxide dielectric layers
11/23/2006	US20060260938 Module for Coating System and Associated Technology
11/23/2006	US20060260937 Interior antenna for substrate processing chamber
11/23/2006	US20060260936 flowing a coolant in a linear flowpath within the gap between the sputtering target and the backing plate, wherein there are a plurality of elongated portions present at the ends of the coolent deflectors proximate to a coolant inlet; cooling efficiency
11/23/2006	US20060260930 Multi-layered radiopaque coating on intravascular devices
11/23/2006	US20060260547 Apparatus for coating substrates on both sides
11/23/2006	DE102005024010A1 Testing routine process for component of vacuum coating unit maintenance or testing routine is applied to partial process automatically useful for industrial series production of coated parts
11/23/2006	CA2544922A1 Hydrogen permeable member and method for production thereof
11/22/2006	EP1724790A1 Thin-film transistor and thin-film transistor substrate and production methods for them and liquid crystal display unit using these and related device and method, and, sputtering target and transparent conductive film formed by using this and transparent electrode and related device and method
11/22/2006	EP1724616A2 Process for manufacturing patterned optical filter layers on substrates
11/22/2006	EP1724368A2 Low oxygen content alloy compositions
11/22/2006	EP1724367A2 Low oxygen content alloy compositions
11/22/2006	EP1724366A2 Low oxygen content alloy compositions
11/22/2006	EP1724365A2 Low oxygen content compositions
11/22/2006	EP1724364A1 HIGH-PURITY Ru POWDER, SPUTTERING TARGET OBTAINED BY SINTERING THE SAME, THIN FILM OBTAINED BY SPUTTERING THE TARGET AND PROCESS FOR PRODUCING HIGH-PURITY RU POWDER
11/22/2006	EP1723264A1 Laser-induced explosive vaporization coating method, associated system, and device made by the method
11/22/2006	EP1540032B1 Thin film deposition apparatus
11/22/2006	EP1429885B1 Workpiece feeder device for an electron beam processing device
11/22/2006	EP1428049B1 Optical and optoelectronic articles
11/22/2006	EP1203105B1 Loading system for pvd coating of cutting inserts
11/22/2006	EP0966756B1 Ion implantation process
11/22/2006	CN2839301Y Electric source for sputter ion pump
11/22/2006	CN1867796A Air lock valve for a strip processing unit
11/22/2006	CN1867699A Protective layer for the protection of a component against corrosion and oxidation at elevated temperatures, and component
11/22/2006	CN1867693A 溅射靶材 Sputtering Targets
11/22/2006	CN1867692A Modular device for surface coating
11/22/2006	CN1867522A Transparent substrate incorporating an anti-glare coating
11/22/2006	CN1867489A Packaging device and packaging method for hollow cathode type spattering target
11/22/2006	CN1866465A Growth process capable of increasing zb-CrSb thickness
11/22/2006	CN1865494A Process for improving oxidation resistance of magnesium alloy surface by ion-implantation method
11/22/2006	CN1865493A Process for preparing antibacterial stainless steel by using binary ion-implantation method
11/22/2006	CN1865492A Method for surface metal coating of flexible strip-like articles and dedicated device therefor
11/22/2006	CN1865491A Process for epitaxial growth of In-As-Sb film on Ga-As substrate by magnetron sputtering method
11/22/2006	CN1865490A Sputtering target and its production method
11/22/2006	CN1865489A Continuous coating device for patch inductance framework
11/22/2006	CN1865488A Target system for surface metal coating device
11/22/2006	CN1865487A Process for making bacteriostatic backing material with silver film
11/22/2006	CN1865486A Vaporization coating template and application thereof
11/22/2006	CN1285761C Injector and method for prolonged introduction of reagents into plasma
11/22/2006	CN1285758C Low contamination plasma chamber components and method for making same
11/22/2006	CN1285756C Method for preparing wide caliber high-precision super-glossy aspheric surface
11/22/2006	CN1285755C Cathode sputtering equipment
11/22/2006	CN1285754C Physical vapor deposition targets comprising Ti and Zr and using method
11/21/2006	US7138350 MgO vapor deposition material and method for preparation thereof

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