| Patents for B81C 3 - Assembling of devices or systems from individually processed components (2,210) |
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| 09/15/2004 | EP1457804A1 Electrostatic driving device for a flexible thin film and manufacturing method of the same |
| 09/15/2004 | EP1133642B1 Interconnection support for plate-like microcomponents |
| 09/09/2004 | DE10308050A1 Connecting tubes to channels in carrier member e.g. for measuring device, by providing channel with support surface and guide for connecting tube |
| 09/08/2004 | EP1453606A2 Microfluidic devices with distributing inputs |
| 09/07/2004 | US6787929 Semiconductor device having a flat protective adhesive sheet |
| 09/07/2004 | US6787719 Switch and method for producing the same |
| 09/07/2004 | US6787384 Functional device, method of manufacturing therefor and driver circuit |
| 09/02/2004 | WO2003045559A8 Microfluidic devices with distributing inputs |
| 09/02/2004 | DE102004008148A1 Sensor mit Membran und Verfahren zur Herstellung des Sensors Sensor with membrane and method of manufacturing the sensor |
| 08/26/2004 | US20040163475 Sensor having membrane and method for manufacturing the same |
| 08/26/2004 | US20040163226 Method for manufacturing a micro-actuator |
| 08/25/2004 | CN1523331A Sensor having membrane and method for manufacturing the same |
| 08/24/2004 | US6781735 Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate |
| 08/24/2004 | US6781279 Micro-actuator with interdigitated combs perpendicular to a base |
| 08/24/2004 | US6781208 Functional device, method of manufacturing therefor and driver circuit |
| 08/19/2004 | US20040159631 Fabrication of a reflective spatial light modulator |
| 08/17/2004 | US6776864 Plastic lab-on-a-chip system fabricated by coupling a plastic substrate having a metal pattern with another plastic substrate in a reversible or irreversible way. |
| 08/11/2004 | EP1444543A1 Digital optical switch apparatus and process for manufacturing same |
| 08/10/2004 | US6774327 Hermetic seals for electronic components |
| 08/05/2004 | DE10302771A1 Assembly of system parts for producing micro-components, creates a random inner template for electroforming of micro-components |
| 08/03/2004 | US6770997 Micro-electromechanical energy storage device |
| 07/29/2004 | US20040144835 situating sealing member between first and second member, positioning members to create bounded volume between members, creating pressure differential between ambient pressure outside bounded volume and pressure created within bounded volume |
| 07/28/2004 | EP1440322A1 Micro-sensor |
| 07/20/2004 | US6765300 Micro-relay |
| 07/15/2004 | WO2003106328A3 Micromechanical component and corresponding production method |
| 07/15/2004 | DE10319534A1 Verfahren zum Herstellen eines Mems-Fabry-Perot-Resonators A method of manufacturing a MEMS Fabry-Perot resonator |
| 07/08/2004 | WO2004017371A9 Method for microfabricating structures using silicon-on-insulator material |
| 07/08/2004 | DE10222964B4 Verfahren zur Gehäusebildung bei elektronischen Bauteilen sowie so hermetisch verkapselte elektronische Bauteile A method for encasing for electronic components and so hermetically encapsulated electronic components |
| 07/01/2004 | WO2004011177A3 Building a three-dimensional structure by manipulating individual particles |
| 07/01/2004 | DE10291877T5 Verbindungsstück, Mikroschalter, Verfahren zum Herstellen eines Verbindungsstücks und Verfahren zum Herstellen eines Mikroschalters Connector, micro switch, method for manufacturing a connector and method for manufacturing a micro-switch |
| 06/30/2004 | EP1433742A2 Electronic devices and production methods |
| 06/30/2004 | EP1433199A1 Method for forming a cavity structure on soi substrate and cavity structure formed on soi substrate |
| 06/24/2004 | US20040119354 MEMS based motor |
| 06/17/2004 | WO2003088370A3 Hermetic encapsulation of organic electro-optical elements |
| 06/17/2004 | US20040115856 Method and apparatus for vacuum-mounting a micro electro mechanical system on a substrate |
| 06/17/2004 | US20040112729 Switch and method for producing the same |
| 06/17/2004 | US20040111856 Method of manufacturing MEMS Fabry-Perot device |
| 06/16/2004 | EP1428249A1 Bonding method |
| 06/15/2004 | US6750078 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip |
| 06/08/2004 | US6747784 Compliant mechanism and method of forming same |
| 06/08/2004 | US6747775 Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
| 05/27/2004 | WO2004043850A2 An integrated structure and method for fabricating the same |
| 05/27/2004 | WO2003088340A3 Method for the production of structured layers on substrates |
| 05/27/2004 | US20040102021 Method for microfabricating structures using silicon-on-insulator material |
| 05/27/2004 | US20040100706 Bulk silicon mirrors with hinges underneath |
| 05/27/2004 | US20040099715 System and method for seal formation |
| 05/21/2004 | WO2004042442A1 Method of producing a movable lens structure for a light shaping unit |
| 05/20/2004 | US20040097004 Three-dimensional integrated CMOS-MEMS device and process for making the same |
| 05/20/2004 | US20040097002 Three-dimensional integrated CMOS-MEMS device and process for making the same |
| 05/13/2004 | WO2003084861A3 Method of manufacturing an electronic device in a cavity with a cover |
| 05/13/2004 | WO2003054524A9 Microfluidic devices and methods for two-dimensional separations |
| 05/12/2004 | EP1418154A2 Method and apparatus for vacuum-mounting a micro electro mechanical system on a substrate |
| 05/11/2004 | US6733683 Method of fabricating a cooperating array of rotatable microstructure devices |
| 05/06/2004 | WO2003032957A9 Methods for hermetically sealing microchip reservoir devices |
| 04/29/2004 | WO2003102631A3 Bulk silicon mirrors with hinges underneath |
| 04/29/2004 | US20040081391 2-D actuator and manufacturing method thereof |
| 04/28/2004 | EP1413776A2 Interconnection support for plate-like microcomponents |
| 04/28/2004 | EP1412283A2 Devices having substrates with openings passing through the substrates and conductors in the openings, and methods of manufacture |
| 04/21/2004 | EP1411024A2 2-D actuator and manufacturing method thereof |
| 04/21/2004 | EP1410083A1 Tooling fixture for packaged optical micro-mechanical devices |
| 04/21/2004 | CN1490240A Two-dimensional excitation set and manufacturing method thereof |
| 04/15/2004 | US20040069742 Fabrication of a reflective spatial light modulator |
| 04/14/2004 | CN1145846C Process for manufacturing microstructured bodies |
| 04/06/2004 | US6717254 Devices having substrates with opening passing through the substrates and conductors in the openings, and methods of manufacture |
| 04/01/2004 | US20040063239 Fabricating complex micro-electromechanical systems using an intermediate electrode layer |
| 04/01/2004 | US20040061924 Monolithic MEMS device for optical switches |
| 04/01/2004 | US20040061192 Fabricating complex micro-electromechanical systems using a flip bonding technique |
| 03/25/2004 | WO2004024327A1 Microfluidic apparatus with integrated porous-substrates/sensor for real-time(bio)chemical molecule detection |
| 03/25/2004 | WO2003088354A3 Method for producing a copy protection for an electronic circuit and corresponding component |
| 03/25/2004 | US20040055381 Integral resonator gyroscope |
| 03/24/2004 | EP1399135A2 Methods for hermetically sealing microchip reservoir devices |
| 03/23/2004 | US6711024 Flexible microsystem and building techniques |
| 03/18/2004 | WO2003090933A3 Method and structures for improved assembly of mems devices employing a centrifuge |
| 03/18/2004 | US20040052657 Micromachined fluidic device and method for making same |
| 03/18/2004 | US20040051154 Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio)chemical molecule detection |
| 03/18/2004 | US20040050160 Split-resonator integrated-post MEMS gyroscope |
| 03/11/2004 | US20040048403 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 03/11/2004 | US20040046473 Micro-electromechanical energy storage device |
| 03/04/2004 | US20040042287 Functional device, method of manufacturing therefor and driver circuit |
| 03/04/2004 | US20040040132 Piezoelectric composite apparatus and a method for fabricating the same |
| 03/04/2004 | DE19927533B4 Miniaturisiertes Analysensystem Miniaturized Analysis System |
| 03/03/2004 | EP1226098B1 Method for assembling reinforcing elements by bonding and device obtained by said method |
| 03/02/2004 | US6698798 Micromachined rubber O-ring microfluidic couplers |
| 02/26/2004 | WO2004017371A2 Method for microfabricating structures using silicon-on-insulator material |
| 02/24/2004 | US6695457 Bulk silicon mirrors with hinges underneath |
| 02/19/2004 | WO2004015764A2 Vertical system integration |
| 02/19/2004 | WO2003016206A3 System and method for precise positioning of microcomponents |
| 02/19/2004 | WO2002068320A3 Devices having substrates with openings passing through the substrates and conductors in the openings, and methods of manufacture |
| 02/18/2004 | EP1389307A2 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 02/17/2004 | US6692701 Microarrayer |
| 02/12/2004 | WO2003086958A3 Method for producing a product having a structured surface |
| 02/12/2004 | US20040029481 Method and apparatus used in fabrication of MEMS stacks |
| 02/12/2004 | US20040027034 Piezoelectric actuator array and manufacturing method |
| 02/05/2004 | WO2004011177A2 Building a three-dimensional structure by manipulating individual particles |
| 02/05/2004 | US20040020602 Field-assisted fusion bonding |
| 01/29/2004 | US20040017625 Bulk silicon mirrors with hinges underneath |
| 01/13/2004 | US6678458 System and method for precise positioning of microcomponents |
| 01/13/2004 | US6678084 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing |
| 01/06/2004 | US6674141 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 12/31/2003 | WO2004000720A1 Fabrication of a reflective spatial light modulator |