| Patents for B81C 3 - Assembling of devices or systems from individually processed components (2,210) |
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| 05/10/2001 | WO2001032579A1 Method for assembling reinforcing elements by bonding and device obtained by said method |
| 05/10/2001 | CA2831366A1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 05/10/2001 | CA2389146A1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 05/09/2001 | EP1097901A2 Method of fabricating micro electro mechanical system structure which can be vacuum-packaged at wafer level |
| 05/03/2001 | WO2000065641A8 Microwave bonding of mems component |
| 04/19/2001 | WO2001027026A1 Electromechanical component and method for producing said component |
| 04/19/2001 | WO2001027025A1 Electro-mechanical component and method for producing the same |
| 04/18/2001 | EP1093142A2 Dual motion electrostatic actuator design for mems micro-relay |
| 04/15/2001 | CA2323189A1 Dual motion electrostatic actuator design for mems micro-relay |
| 04/12/2001 | WO2001025138A1 Modular microfluidic devices comprising sandwiched stencils |
| 04/11/2001 | EP1090419A1 Device and method for forming a device having a cavity with controlled atmosphere |
| 04/04/2001 | EP1089358A2 Piezoelectric/electrostrictive device and method of manufacturing same |
| 03/20/2001 | US6204086 Method for manufacturing semiconductor components having micromechanical structures |
| 03/15/2001 | WO2001018857A1 Process for fabrication of 3-dimensional micromechanisms |
| 03/06/2001 | US6198145 Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby |
| 02/06/2001 | US6185107 MEMS based tile assemblies and methods of fabrication |
| 02/01/2001 | WO2001007506A2 Microfabricated devices and method of manufacturing the same |
| 01/25/2001 | WO2001006543A2 Microelectromechanical device with moving element |
| 01/25/2001 | CA2379537A1 Microelectromechanical device with moving element |
| 01/18/2001 | WO2001004524A1 Apparatus and method for mounting micromechanical fluid control components |
| 01/18/2001 | DE19927533A1 Miniaturisiertes Analysensystem Miniaturized Analysis System |
| 01/17/2001 | EP0948408A4 Microfabricated sleeve devices for chemical reactions |
| 01/09/2001 | US6171886 Method of making integrated hybrid silicon-based micro-actuator devices |
| 01/09/2001 | US6170155 System of components to be hybridized and hybridization process allowing for thermal expansions |
| 12/27/2000 | CN1278365A Electrical interface to integrated device having high density I/O count |
| 12/26/2000 | US6166478 Method for assembly of microelectromechanical systems using magnetic actuation |
| 12/21/2000 | WO2000077509A1 Miniaturized analytical system |
| 12/07/2000 | WO2000072968A1 Multiple fluid sample processor and system |
| 12/07/2000 | CA2374908A1 Multiple fluid sample processor and system |
| 11/29/2000 | CN1275202A Device for transporting very small quantites of liquid and method for producing same |
| 11/23/2000 | WO2000070224A1 Micromechanic pump |
| 11/16/2000 | DE19922075A1 Bonding two microstructured plastics workpieces together, comprises introducing a plastics-dissolving organic solvent into a groove between the workpieces |
| 11/02/2000 | WO2000065641A1 Microwave bonding of mems component |
| 10/03/2000 | US6126765 Method of producing microchannel/microcavity structures |
| 09/26/2000 | US6123107 Apparatus and method for mounting micromechanical fluid control components |
| 08/10/2000 | WO2000046852A1 Micro-relay |
| 08/10/2000 | CA2361756A1 Micro-relay |
| 08/02/2000 | EP1023593A1 Device for transporting very small quantities of liquid and method for producing same |
| 08/01/2000 | US6096576 Method of producing an electrical interface to an integrated circuit device having high density I/O count |
| 07/27/2000 | WO2000044208A1 Flexible microsystem and building techniques |
| 07/26/2000 | EP1021834A1 Electrical interface to integrated device having high density i/o count |
| 07/11/2000 | US6087701 Semiconductor device having a cavity and method of making |
| 07/11/2000 | US6086705 Bonding of micro elements |
| 07/06/2000 | DE19962650A1 Oberflächenkleinstgerät Surface micro device |
| 06/29/2000 | WO2000038209A1 Micromachine switch and its production method |
| 06/28/2000 | EP1014457A2 Micro-fabrication method and sensor using the same |
| 06/28/2000 | EP1014094A1 A small size electronic part and a method for manufacturing the same, and a method for forming a via hole in the same |
| 06/22/2000 | WO2000012987A3 Micromechanical component protected against environmental influences |
| 06/02/2000 | WO2000031422A1 Interconnection support for plate-like microcomponents |
| 05/31/2000 | DE19957111A1 Semiconductor component, e.g. wafer of sensor chips or chips with air bridge wiring structures, has attached adhesive foil with low adhesion region above wafer structure portion |
| 05/25/2000 | DE19854096A1 Connection carrier for plate shaped micro-components, comprises at least one carrier rail fixed to a carrier plate, with a slot for a micro-component insert edge. |
| 04/06/2000 | WO2000019494A1 Method for manufacturing carbon nanotubes as functional elements of mems devices |
| 03/30/2000 | WO2000016833A1 Surface micromachined microneedles |
| 03/30/2000 | CA2344398A1 Surface micromachined microneedles |
| 03/09/2000 | WO2000012987A2 Micromechanical component protected against environmental influences |
| 03/09/2000 | DE19839122A1 Vor Umwelteinflüssen geschützter mikromechanischer Sensor Protected from environmental influences micromechanical sensor |
| 03/02/2000 | WO2000011461A1 Device for transporting very small quantities of liquid and method for producing same |
| 02/29/2000 | US6030229 Electromagnetic detachable connector |
| 02/15/2000 | US6025767 Encapsulated micro-relay modules and methods of fabricating same |
| 02/02/2000 | EP0977260A2 Semiconductor-supporting devices, processes for the production of the same, joined bodies and processes for the production of the same |
| 01/11/2000 | US6013573 Method of manufacturing an air bridge type structure for supporting a micro-structure |
| 12/29/1999 | WO1999067818A1 Device and method for forming a device having a cavity with controlled atmosphere |
| 11/23/1999 | US5989974 Method of manufacturing a semiconductor device |
| 11/04/1999 | DE19819458A1 Micromechanical component manufacturing method for e.g. capacitive acceleration sensor |
| 11/04/1999 | DE19819456A1 Micromechanical component manufacturing method, e.g. for micromechanical acceleration sensor manufacture |
| 10/19/1999 | US5970315 Particularly useful for data storage applications, isotropically etching sacrificial layer under at least a beam portion of said microelectromechanical device |
| 10/13/1999 | EP0948408A1 Microfabricated sleeve devices for chemical reactions |
| 10/06/1999 | EP0946969A1 Two-stage kinematic mount |
| 10/05/1999 | US5961767 Method for forming micron-sized and smaller liquid droplets |
| 09/23/1999 | DE19911916A1 Semiconductor component e.g. an acceleration or pressure sensor chip |
| 09/21/1999 | US5955818 Machine structures fabricated of multiple microstructure layers |
| 09/08/1999 | EP0871545A4 Silicon-based sleeve devices for chemical reactions |
| 06/24/1999 | DE19859627A1 Semiconducting device, especially sensor forming part of integrated circuit |
| 06/09/1999 | EP0921566A1 Microelectromechanical component, such as a microsensor or a microactuator transferable onto a hybrid circuit substrate |
| 05/19/1999 | EP0916145A1 Encapsulated micro-relay modules and methods of fabricating same |
| 05/06/1999 | EP0913921A1 Method for manufacturing a semiconductor material integrated micractuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby |
| 03/31/1999 | CN1212382A Process for manufacturing microstructured bodies |
| 03/24/1999 | EP0903638A1 Process for manufacturing microstructured bodies |
| 03/23/1999 | US5885425 Angled sputtering using a collimation grid having angled vanes which limit the distribution of trajectories of particles in at least one coordinate direction around a central axis oriented at an angle of less than 90 degrees to said surface |
| 03/11/1999 | WO1999012208A1 Electrical interface to integrated device having high density i/o count |
| 02/16/1999 | US5872489 Integrated tunable inductance network and method |
| 11/18/1998 | EP0878244A2 Method for forming micron-sized and smaller liquid droplets |
| 10/21/1998 | EP0871545A1 Silicon-based sleeve devices for chemical reactions |
| 09/17/1998 | DE19710324A1 Semiconductor devices with micro-mechanical structures |
| 09/15/1998 | US5808331 Monolithic semiconductor device having a microstructure and a transistor |
| 06/23/1998 | US5769997 Anodic bonding |
| 06/18/1998 | WO1998025701A1 Microfabricated sleeve devices for chemical reactions |
| 06/09/1998 | US5763318 Method of making a machine structures fabricated of mutiple microstructure layers |
| 05/05/1998 | US5748827 Two-stage kinematic mount |
| 04/30/1998 | WO1998018157A1 Two-stage kinematic mount |
| 02/17/1998 | US5719979 Optical semiconductor module and method for manufacturing the same |
| 02/12/1998 | WO1998006118A1 Encapsulated micro-relay modules and methods of fabricating same |
| 02/12/1998 | CA2261683A1 Encapsulated micro-relay modules and methods of fabricating same |
| 02/10/1998 | US5717631 Microelectromechanical structure and process of making same |
| 01/14/1998 | EP0818813A1 Component system for bonding and method of bonding enabling thermal dilatations |
| 10/30/1997 | DE19616970A1 Verfahren zur Herstellung von mikromechanische Strukturen aufweisenden Halbleiterbauelementen A process for producing micromechanical structures having semiconductor devices |
| 10/01/1997 | EP0738306B1 Method of producing microchannel/microcavity structures |
| 02/06/1997 | WO1997004451A1 Microelectromechanical structure and process of making same |
| 02/05/1997 | EP0757431A2 Machine structures fabricated of multiple microstructure layers |
| 01/09/1997 | WO1997000726A1 Silicon-based sleeve devices for chemical reactions |