| Patents for B81C 3 - Assembling of devices or systems from individually processed components (2,210) |
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| 08/08/2002 | US20020104823 Fabrication integration of micro-components |
| 08/07/2002 | EP1228998A2 Micromechanical device and process for the manufacture of a micromechanical device |
| 08/01/2002 | US20020102716 Microarrayer |
| 08/01/2002 | US20020100714 Microfluidic devices |
| 07/31/2002 | EP1226098A1 Method for assembling reinforcing elements by bonding and device obtained by said method |
| 07/31/2002 | EP1226089A1 Electromechanical component and method for producing said component |
| 07/25/2002 | US20020097963 Optical waveguide device and method of manufacturing the same |
| 07/24/2002 | EP1225460A2 Optical waveguide device and method of manufacturing the same |
| 07/19/2002 | CA2368568A1 Optical waveguide device and method of manufacturing the same |
| 07/18/2002 | US20020093143 Micromachined rubber O-ring microfluidic couplers |
| 07/17/2002 | EP1222142A1 Electro-mechanical component and method for producing the same |
| 07/17/2002 | EP1222141A1 Modular microfluidic devices comprising sandwiched stencils |
| 07/11/2002 | WO2000065641A9 Microwave bonding of mems component |
| 07/04/2002 | US20020086458 Precision micromirror positioning |
| 07/03/2002 | EP1219565A1 Process for manufacturing integrated devices having connections on separate wafers and stacking the same |
| 07/03/2002 | EP1218790A2 Microelectromechanical device with moving element |
| 06/27/2002 | US20020082172 Accurate etching of an strontium titanate single crystal substrate by forming a patterned silica protective film and etching with phosphoric acid; superconducting quantum interfers; magnetic/electric field sensors; microscope probes |
| 06/20/2002 | US20020075568 Process for producing a microoptical functional unit |
| 06/20/2002 | US20020074310 Method of fabricating a cooperating array of rotatable microstructure devices |
| 06/19/2002 | EP1215168A1 Magnetically packaged optical mems device and method for making the same |
| 06/19/2002 | EP1214630A2 Microfabricated devices and method of manufacturing the same |
| 06/13/2002 | US20020072201 Method for electrostatic force bonding and a system thereof |
| 06/13/2002 | US20020071166 Magnetically packaged optical MEMs device and method for making the same |
| 06/11/2002 | US6401544 Micromechanical component protected from environmental influences |
| 06/06/2002 | DE10058074A1 Verfahren zur Herstellung einer mikrooptischen Funktionseinheit A process for producing a micro-optical function unit |
| 05/29/2002 | EP1209499A2 Method of manufacturing a micro-optical functional unit |
| 05/28/2002 | US6393685 Microjoinery methods and devices |
| 05/23/2002 | WO2002040901A1 Micromachined rubber o-ring microfluidic couplers |
| 05/21/2002 | US6392144 Micromechanical die attachment surcharge |
| 05/21/2002 | US6391742 Small size electronic part and a method for manufacturing the same, and a method for forming a via hole for use in the same |
| 05/21/2002 | US6391673 Method of fabricating micro electro mechanical system structure which can be vacuum-packed at wafer level |
| 05/16/2002 | US20020057041 Piezoelectric/electrostrictive device and method of manufacturing same |
| 05/15/2002 | EP1204479A1 Multiple fluid sample processor and system |
| 05/14/2002 | US6387851 Strontium titanate |
| 05/02/2002 | US20020051281 Galvano-mirror and method of making the same |
| 04/25/2002 | WO2002010684A3 Three-axes sensor and a method of making same |
| 04/18/2002 | US20020044745 Method of aligning an optical component with an inclined guide mounted on a base and the associated optical device |
| 03/20/2002 | EP1188047A1 Miniaturized analytical system |
| 03/14/2002 | WO2001058803A3 Method for producing a micromechanical component, and a component produced according to said method |
| 03/07/2002 | WO2001056921A3 Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
| 03/07/2002 | US20020026724 Method of aligning micro structures using guides |
| 02/28/2002 | US20020025280 Methods and devices for enhancing bonded substrate yields and regulating temperature |
| 02/28/2002 | US20020024662 Micro-fluidic cell for optical detection of gases and method for producing same |
| 02/27/2002 | EP1181716A1 Microwave bonding of mems component |
| 02/27/2002 | CN1338195A Flexible microsystem and building techniques |
| 02/27/2002 | CN1338116A Micro-relay |
| 02/21/2002 | US20020021055 Micro-actuator and manufacturing method thereof |
| 02/20/2002 | EP1180493A2 Micro-actuator and manufacturing method thereof |
| 02/14/2002 | US20020019079 Small size electronic part and a method for manufacturing the same, and a method for forming a via hole for use in the same |
| 02/13/2002 | EP1179139A1 Micromechanic pump |
| 02/07/2002 | WO2002011189A2 A tunneling sensor or switch and a method of making same |
| 02/07/2002 | WO2002010684A2 Three-axes sensor and a method of making same |
| 01/17/2002 | US20020004991 Micro positioning device with shared actuators |
| 01/09/2002 | EP1169891A1 Flexible microsystem and building techniques |
| 01/02/2002 | EP1166352A1 Micro-relay |
| 12/27/2001 | WO2001097974A1 Methods and devices for enhancing bonded substrate yields and regulating temperature |
| 12/27/2001 | US20010054315 Micromechanical component protected from environmental influences |
| 12/27/2001 | CA2410238A1 Methods and devices for enhancing bonded substrate yields and regulating temperature |
| 12/05/2001 | EP1160602A1 Alignment of flip-chip mounted laser in a tilted position on a base using alignment studs |
| 12/04/2001 | US6325886 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 11/29/2001 | WO2001090577A1 Micromachined fluidic device and method for making same |
| 11/29/2001 | US20010045610 Micro-machined surface structure |
| 11/28/2001 | EP1157967A2 Packaging micromechanical devices |
| 11/22/2001 | US20010042598 Apparatus for manufacturing micro-structure |
| 11/22/2001 | CA2342409A1 Packaging micromechanical devices |
| 11/20/2001 | US6318177 Micromechanical component and method for producing the micromechanical component |
| 11/15/2001 | WO2001085602A1 Micro channel in a substrate |
| 11/11/2001 | CA2308015A1 Method for manufacturing carbon nanotubes as functional elements of mems devices |
| 11/08/2001 | US20010038148 Structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material, composite structure using the electric connection structure, and manufacturing process thereof |
| 11/07/2001 | EP1151962A1 Structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material, composite structure using the electric connection structure, and manufacturing process thereof |
| 10/24/2001 | CN1318508A Layout and partition method of multiple processer unit in photoelectronic multichip module |
| 10/18/2001 | DE10016017A1 Verfahren zur Montage von magazinierten Mikrobauteilen Method for mounting of microcomponents collated |
| 10/17/2001 | EP1146533A1 Micromachine switch and its production method |
| 10/09/2001 | US6300676 Small size electronic part and a method for manufacturing the same, and a method for forming a via hole for use in the same |
| 10/04/2001 | WO2001072467A1 Method for assembling cassette-loaded microcomponents |
| 09/26/2001 | EP1135792A1 Method for manufacturing carbon nanotubes as functional elements of mems devices |
| 09/20/2001 | US20010023010 Multilayer films on substrate |
| 09/19/2001 | EP1133642A1 Interconnection support for plate-like microcomponents |
| 09/04/2001 | US6283730 Micro pump and method of producing the same |
| 08/30/2001 | WO2001007506A3 Microfabricated devices and method of manufacturing the same |
| 08/30/2001 | US20010017058 Micromechanical component and method for producing the micromechanical component |
| 08/23/2001 | WO2001060614A1 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 08/16/2001 | WO2001058803A2 Method for producing a micromechanical component, and a component produced according to said method |
| 08/16/2001 | DE10006035A1 Micro-mechanical component production, used as sensor element or actuator element, comprises providing functional element and/or functional layer with protective layer |
| 08/09/2001 | WO2001056921A2 Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
| 07/31/2001 | US6268232 Method for fabricating a micromechanical component |
| 07/26/2001 | US20010009776 Growing epitaxial layer on substrate to form semiconductor wafer, removing selective portion of epitaxial layer to define rotor element and stator element capacitively coupled to rotor, removing portion of substrate below rotor |
| 07/19/2001 | US20010008300 Semiconductor device with flat protective adhesive sheet and method of manufacturing the same |
| 07/11/2001 | EP1113832A1 Surface micromachined microneedles |
| 07/03/2001 | US6255741 Semiconductor device with a protective sheet to affix a semiconductor chip |
| 06/26/2001 | US6251567 Process for manufacturing microstructured bodies |
| 06/21/2001 | WO2001044140A1 Bonded products and methods of fabrication therefor |
| 06/20/2001 | EP1108203A2 Micromechanical component protected against environmental influences |
| 06/12/2001 | US6245593 Semiconductor device with flat protective adhesive sheet and method of manufacturing the same |
| 06/12/2001 | US6245249 Micro-structure and manufacturing method and apparatus |
| 05/31/2001 | DE19964218A1 Elektromechanisches Bauelement und Verfahren zur Herstellung desselben An electromechanical component and method of manufacturing the same |
| 05/29/2001 | US6238805 Low-stress interface between materials having different coefficients of expansion and method for fabricating same |
| 05/25/2001 | WO2001006543A3 Microelectromechanical device with moving element |
| 05/22/2001 | US6236111 Hybrid circuit substrate mountable micro-electromechanical component |
| 05/10/2001 | WO2001033648A1 Piezoelectric macro-fiber composite actuator and manufacturing method |