| Patents for B81C 3 - Assembling of devices or systems from individually processed components (2,210) |
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| 05/08/2003 | US20030085438 Micro-mechanical device and method for producing the same |
| 05/08/2003 | US20030085109 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip |
| 05/06/2003 | US6557607 Apparatus for manufacturing micro-structure |
| 05/02/2003 | EP1305570A2 Three-axes sensor and a method of making same |
| 04/24/2003 | WO2003032957A2 Methods for hermetically sealing microchip reservoir devices |
| 04/24/2003 | US20030078690 Microarrayer |
| 04/24/2003 | US20030075790 Structure for aligning chips in stacked arrangement |
| 04/24/2003 | CA2451953A1 Methods for hermetically sealing microchip reservoir devices |
| 04/10/2003 | WO2002093122A3 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 04/10/2003 | WO2002061800A3 A method and system for electrostatic bonding |
| 04/08/2003 | US6545796 Article comprising a freestanding micro-tube and method therefor |
| 03/27/2003 | WO2003025986A1 Bonding method |
| 03/27/2003 | WO2002010684A9 Three-axes sensor and a method of making same |
| 03/27/2003 | US20030056351 Piezoelectric macro-fiber composite actuator and method for making same |
| 03/25/2003 | US6538362 Piezoelectric/electrostrictive device and method of manufacturing same |
| 03/20/2003 | US20030053233 Optical switching apparatus and method for assembling same |
| 03/20/2003 | US20030051339 Method for assembling cassette-loaded microcomponents |
| 03/19/2003 | EP1255642A4 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 03/18/2003 | US6534340 Cover cap for semiconductor wafer devices |
| 03/12/2003 | EP1289877A1 Micro channel in a substrate |
| 03/12/2003 | CN1402033A Functional device, mfg. method thereof and drive circuit |
| 03/05/2003 | EP1288697A2 Display device and method for producing the same |
| 03/04/2003 | US6527903 Substrate bonding method, bonded product, ink jet head, and image forming apparatus |
| 02/27/2003 | WO2003016206A2 System and method for precise positioning of microcomponents |
| 02/27/2003 | US20030040180 Heating nanomaterial comprising porous silicon; melting; bonding strength; low temperature welding |
| 02/25/2003 | US6524532 Microfabricated sleeve devices for chemical reactions |
| 02/20/2003 | US20030034542 Functional device, method of manufacturing therefor and driver circuit |
| 02/20/2003 | US20030033712 Method for assembling micro devices and related apparatus |
| 02/19/2003 | EP1283957A1 Micromachined fluidic device and method for making same |
| 02/18/2003 | US6522452 Latchable microelectromechanical structures using non-newtonian fluids, and methods of operating same |
| 02/18/2003 | US6521181 Microfabricated electrochemiluminescence cell for chemical reaction detection |
| 02/06/2003 | WO2003010580A1 Tooling fixture for packaged optical micro-mechanical devices |
| 02/06/2003 | US20030026740 Microfluidic devices |
| 02/06/2003 | US20030024632 Process for forming metal micro-patterns on plastic substrate |
| 02/05/2003 | CN1395128A Optical modulator and manufacturing method thereof |
| 02/04/2003 | US6513250 Micro positioning device with shared actuators |
| 01/30/2003 | US20030021570 Tooling fixture for packaged optical micro-mechanical devices |
| 01/29/2003 | CN1393710A Imaging technique using optical MEMS device |
| 01/23/2003 | US20030016436 Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate |
| 01/16/2003 | US20030011866 Compliant mechanism and method of forming same |
| 01/16/2003 | US20030010808 Methods for hermetically sealing microchip reservoir devices |
| 01/08/2003 | EP1272422A2 Vacuum package fabrication of microelectromechanical system devices with integrated circuit components |
| 01/07/2003 | US6504253 Structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material composite structure using electric connection structure |
| 01/07/2003 | US6503847 Spin coating, alignment, applying light pressure to assure surface contact and air bubble removal and curing; low pressure/voltage; biocompatible/radiation transparent; microsensors microelectronics; biomedical equipment |
| 01/02/2003 | US20030002782 Imaging technique for use with optical MEMS devices |
| 01/02/2003 | US20030001221 Micromechanical component as well as a method for producing a micromechanical component |
| 01/02/2003 | EP1271200A1 Imaging technique and optical switch using optical MEMS devices |
| 01/02/2003 | EP1268121A1 Method for assembling cassette-loaded microcomponents |
| 12/26/2002 | US20020196817 Tunable laser |
| 12/26/2002 | US20020196522 Compliant mechanism and method of forming same |
| 12/26/2002 | US20020196521 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing |
| 12/26/2002 | US20020196440 Structure for aligning chips in stacked arrangement |
| 12/26/2002 | US20020195673 Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication |
| 12/25/2002 | CN1387251A Processing method binded by selenide chip for atomic resolution store shuffling device |
| 12/25/2002 | CN1387250A Processing method binded by selenide chip for atomic resolution store shuffling device |
| 12/24/2002 | US6498053 Process of manufacturing a composite structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material |
| 12/19/2002 | WO2002100771A2 Low-temperature patterned wafer bonding with photosensitive benzocylobutene (bcb) and 3d microelectromechanical systems fabrication |
| 12/12/2002 | US20020185183 Microfluidic devices with distributing inputs |
| 12/05/2002 | WO2002097767A2 Fabrication integration of micro-components |
| 12/05/2002 | WO2002096640A1 Recessed patterns in a multilayered ceramic package |
| 12/05/2002 | US20020179439 Microelectronic system and method of use and fabrication |
| 12/03/2002 | US6488872 Microfabricated devices and method of manufacturing the same |
| 11/28/2002 | US20020174936 Cast-on-resist (COR) methods; Multilayered Microfluidic Device (MMD) for example |
| 11/28/2002 | DE10124497A1 Micro-reactor, used for carrying out chemical reactions under periodically changing temperatures, comprises parallel layers stacked over each other |
| 11/27/2002 | EP1261023A2 Atomic resolution storage system |
| 11/27/2002 | EP1260481A2 Atomic resolution storage system |
| 11/26/2002 | US6486542 Semiconductor-supporting devices, processes for the production of the same, joined bodies and processes for the production of the same |
| 11/26/2002 | US6485690 Multiple fluid sample processor and system |
| 11/21/2002 | WO2002093122A2 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 11/21/2002 | DE10123039A1 Sensor arrangement used as a micromechanical sensor comprises a sensor section to deliver sensor signals, and a covering section arranged on the sensor section to form a hermetically sealed sensor inner chamber |
| 11/20/2002 | EP1257496A2 Method for producing a micromechanical component, and a component produced according to said method |
| 11/13/2002 | EP1255642A1 Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby |
| 11/07/2002 | WO2002088017A1 Connection member, microswitch, method for manufacturing connection member, and method for manufacturing microwitch |
| 10/31/2002 | WO2002086587A1 Compliant mechanism and method of forming same |
| 10/31/2002 | WO2002086582A1 Mems-based tunable fabry-perot filters and method of forming same |
| 10/31/2002 | US20020160582 Hydrolysis and condensation of alkoxysilane; evaporating solvent; coating integrated circuits and semiconductors |
| 10/31/2002 | US20020158547 Latchable microelectromechanical structures using non-newtonian fluids, and methods of operating same |
| 10/29/2002 | US6473221 Galvano-mirror and method of making the same |
| 10/01/2002 | US6458616 Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby |
| 09/26/2002 | US20020135062 Process of manufacturing a composite structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material |
| 09/25/2002 | EP1242334A1 Bonded products and methods of fabrication therefor |
| 09/24/2002 | US6454925 Device for electrophoresis and component therefor |
| 09/17/2002 | US6452260 Electrical interface to integrated circuit device having high density I/O count |
| 09/12/2002 | WO2002071371A2 Fabrication integration of micro-components |
| 09/12/2002 | US20020125582 Process for manufacturing integrated devices having connections on a separate wafer, and integrated device thus obtained |
| 09/06/2002 | WO2002068320A2 Devices having substrates with openings passing through the substrates and conductors in the openings, and methods of manufacture |
| 08/29/2002 | WO2001018857A9 Process for fabrication of 3-dimensional micromechanisms |
| 08/27/2002 | US6440820 Process flow for ARS mover using selenidation wafer bonding after processing a media side of a rotor wafer |
| 08/22/2002 | US20020115234 Devices having substrates with opening passing through the substrates and conductors in the openings, and methods of manufacture |
| 08/22/2002 | US20020113321 Devices having substrates with opening passing through the substrates and conductors in the openings, and methods of manufacture |
| 08/22/2002 | DE10104868A1 Mikromechanisches Bauelement sowie ein Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component as well as a process for producing a micromechanical component |
| 08/20/2002 | US6436794 Process flow for ARS mover using selenidation wafer bonding before processing a media side of a rotor wafer |
| 08/15/2002 | WO2002063288A1 Microfluidic devices |
| 08/15/2002 | US20020110757 Low cost integrated out-of-plane micro-device structures and method of making |
| 08/15/2002 | US20020109903 Micro-electromechanical system |
| 08/14/2002 | EP1231616A1 Out-of-plane micro-device structures |
| 08/14/2002 | EP1230689A1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 08/13/2002 | US6433411 Packaging micromechanical devices |
| 08/08/2002 | WO2002061800A2 A method and system for electrostatic bonding |
| 08/08/2002 | WO2002060583A1 Microarrayer |