| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 05/08/2013 | DE102011085723A1 Bauelement und Verfahren zur Herstellung eines Bauelements Device and method for manufacturing a device |
| 05/08/2013 | DE102011085658A1 Elektronische Schaltung Electronic circuit |
| 05/08/2013 | DE102010006132B4 Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC Miniaturized electrical component comprising a stack of a MEMS and an ASIC |
| 05/08/2013 | CN103097282A Air cavity package configured to electrically couple to a printed circuit board and method of providing same |
| 05/08/2013 | CN103097281A Micro optical device |
| 05/08/2013 | CN103091510A Micromechanical Component And Method For Manufacturing A Micromechanical Component |
| 05/08/2013 | CN103090914A Four-film-structured silicon micro-flow sensor chip |
| 05/08/2013 | CN102126703B Two-dimensional multi-shell hollow sphere ordered structure array and preparation method thereof |
| 05/08/2013 | CN101815235B Miniature MEMS condenser microphone packages and fabrication method thereof |
| 05/08/2013 | CN101571422B High-insulation heat detector |
| 05/02/2013 | WO2013063339A1 Thin semiconductor die package |
| 05/02/2013 | WO2013061281A1 Apparatus, system and methods for measuring a blood pressure gradient |
| 05/02/2013 | WO2013060260A1 Micro-channel chip |
| 05/02/2013 | US20130108856 Artificial microstructure and artificial electromagnetic material using the same |
| 05/02/2013 | DE102012209838A1 Halbleiterdrucksensor und Verfahren zum Herstellen eines Halbleiterdrucksensors A semiconductor pressure sensor and method for manufacturing a semiconductor pressure sensor |
| 05/02/2013 | DE102012200740A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 05/02/2013 | DE102012110416A1 Siliziumbasierte Multiplexereinrichtungen für optische Leitungen Silicon-based multiplexing for optical cables |
| 05/02/2013 | DE102012110308A1 Optische Schalteinrichtungen auf Siliziumbasis Optical switching devices based on silicon |
| 05/02/2013 | DE102011085511A1 Membran zum Abdecken einer Öffnung in einem Hörgerät Membrane for covering an opening in a hearing aid |
| 05/02/2013 | DE102011085371A1 Lab-on-chip for e.g. analytic applications, has structure and film layers that are formed in bonding regions and below recess portions, and non-bonding areas that are provided under metallic portions provided in structured metal films |
| 05/02/2013 | CA2849717A1 Apparatus, system and methods for measuring a blood pressure gradient |
| 05/01/2013 | CN103076372A Capacitive-type humidity sensor |
| 05/01/2013 | CN103076051A Silicon micro-flow-rate sensor chip in beam film four-beam structure |
| 05/01/2013 | CN103075951A Three-dimensional micro touch probe based on capacitive sensor array |
| 04/30/2013 | CA2687127C Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset |
| 04/25/2013 | WO2013059345A1 Stacked vias for vertical integration |
| 04/25/2013 | WO2013012396A9 A method and apparatus for analyzing interactions of molecules |
| 04/25/2013 | US20130099332 Wafer level packaging |
| 04/25/2013 | DE102011085088A1 Micromechanical acceleration sensor for electronic stability program (ESP) system installed motor car, has two rocker arms whose length and mass is different |
| 04/25/2013 | DE102011085084A1 Verfahren zum Herstellen einer elektrischen Durchkontaktierung in einem Substrat sowie Substrat mit einer elektrischen Durchkontaktierung A method of making an electrical plated-through hole in a substrate as well as substrate to an electrical through-contact |
| 04/25/2013 | DE102011085023A1 Component e.g. yaw rate sensor for use in electronic device, has stop that is provided for limiting maximum deflection of seismic mass perpendicular to main plane, and for suppressing levitation force acting on seismic mass |
| 04/24/2013 | CN103064060A Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure |
| 04/24/2013 | CN103063876A Variable area type capacitive horizontal accelerated speed sensor and manufacture method |
| 04/24/2013 | CN103058125A Method for producing electrical feedthrough in substrate, and substrate having electrical feedthrough |
| 04/24/2013 | CN103058124A Copper oxide grading array film and preparation method thereof |
| 04/24/2013 | CN103056887A Multi-finger micro-gripper |
| 04/24/2013 | CN102539832B Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| 04/24/2013 | CN102076601B Mems device with independent rotation in two axes of rotation |
| 04/18/2013 | WO2013053039A1 Microfluidic reconfigurable device for multi-plexed sample analysis |
| 04/18/2013 | DE102012207048A1 Method for manufacturing e.g. field faucet mirror of illumination optical device, involves arranging structural element with broken mirror element so that one of defective mirror elements is provided out of range of reflection surfaces |
| 04/18/2013 | DE102011084541A1 Mikro-elektromechanisches Lautsprecherarray und Verfahren zum Betreiben eines mikro-elektromechanischen Lautsprecherarrays Micro-electro-mechanical speaker array, and method for operating a micro-electro-mechanical speaker array |
| 04/18/2013 | DE102011084537A1 Ultraschallsensorarray Ultrasonic sensor array |
| 04/18/2013 | DE102011084393A1 Mikromechanische Funktionsvorrichtung, insbesondere Lautsprechervorrichtung, und entsprechendes Herstellungsverfahren Micromechanical device function, particularly the speaker apparatus, and corresponding method of production |
| 04/17/2013 | CN103052011A Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture |
| 04/17/2013 | CN103048784A Passively-driven MEMS (Micro Electro Mechanical Systems) optical switch and machining process |
| 04/17/2013 | CN103048680A Electrochemical seism radiodetector based on MEMS (Micro-electromechanical Systems) technology |
| 04/17/2013 | CN103043603A Attaching a mems to a bonding wafer |
| 04/17/2013 | CN102134052B Making method of MIS capacitor lower piezoresistance structure adopting substrate grid |
| 04/17/2013 | CN102107846B Hermetic mems device and method for fabricating hermetic mems device and package structure of hermetic mems device |
| 04/17/2013 | CN102092670B Carbon nano-tube composite structure and preparation method thereof |
| 04/16/2013 | US8420427 Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch |
| 04/11/2013 | WO2013052317A1 Methods of creating spacers by self-assembly |
| 04/11/2013 | DE102011102266B4 Anordnung mit einem MEMS-Bauelement mit einer PFPE Schicht und Verfahren zur Herstellung Arrangement with a MEMS device having a PFPE layer and processes for preparing |
| 04/11/2013 | DE102008013116B4 Verfahren zur Erzeugung einer mikromechanischen Struktur Method for producing a micromechanical structure |
| 04/10/2013 | EP2576428A2 Analysis device including a mems and/or nems network |
| 04/10/2013 | CN103038871A Module and production method |
| 04/10/2013 | CN103030101A Method for producing a two-chip assembly and corresponding two-chip assembly |
| 04/10/2013 | CN103030095A Silver nanoparticle-modified zinc oxide nanorod array and preparation method and application thereof |
| 04/10/2013 | CN103030094A Infrared emission and split integrated chip and preparation method thereof |
| 04/10/2013 | CN103030093A 3D integrated electronic device structure including increased thermal dissipation capabilities |
| 04/10/2013 | CN102020236B Micro-electromechanical system chip and package method thereof |
| 04/09/2013 | CA2468139C Electrical cross-talk shields for mems micromirrors |
| 04/04/2013 | WO2013049695A1 Surface mount mems actuator |
| 04/04/2013 | DE102011114774A1 Sensor component e.g. gas sensor component integrated in e.g. ball grid array package, has conductive layer that is made to contact with sensor chip by electrical contacts of conductive layer |
| 04/03/2013 | EP2575164A2 3d integrated electronic device structure including increased thermal dissipation capabilities |
| 04/03/2013 | EP2574973A2 Optical deflector apparatus including optical deflector chip sandwiched by two substrates |
| 04/03/2013 | CN103018895A Simulation micro-mirror for surface micro-machining |
| 04/03/2013 | CN103011053A Face-down exposed packaging structure of sensor chip and packaging method |
| 04/03/2013 | CN103011052A Sacrificial layer of MEMS (Micro-Electro-Mechanical-System) device, MEMS device and manufacturing method thereof |
| 04/03/2013 | CN103011051A Electronic device, manufacturing method thereof, and electronic apparatus |
| 04/03/2013 | CN103011050A Semiconductor package and method of fabricating the same |
| 04/03/2013 | CN101410717B Device and method for measuring electrical power |
| 03/28/2013 | WO2013043953A1 Vented mems apparatus and method of manufacture |
| 03/28/2013 | WO2013040839A1 Metamaterial and preparation method therefor |
| 03/28/2013 | DE112011102130T5 MEMS-Strukturen mit planarem Hohlraum und verwandte Strukturen, Herstellungsverfahren und Design-Strukturen MEMS structures with planar cavity and related structures, manufacturing processes and design structures |
| 03/28/2013 | DE102011083644A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture |
| 03/28/2013 | DE102011083487A1 Acceleration sensor has detection unit, which is coupled with seismic mass such that amplitude of deflection movement along direction of deflection is greater than amplitude of detecting motion along direction of detection |
| 03/27/2013 | EP2572788A1 Method and device for thermal insulation of micro-reactors |
| 03/27/2013 | CN102992258A Integrated circuit and manufacturing method thereof |
| 03/27/2013 | CN102297689B Electrostatically driven piezoelectric detection closed loop controlled micro-solid modal gyro |
| 03/27/2013 | CN102261979B Low-range piezoresistive pressure sensor for vacuum measurement and manufacturing method thereof |
| 03/27/2013 | CN102046514B Device with miniature electromechanical system sensor and preparation method thereof |
| 03/27/2013 | CN101995295B Non-refrigerating infrared focal plane array as well as preparation method and application thereof |
| 03/27/2013 | CN101970338B Microfluidic device and method of operation |
| 03/21/2013 | WO2013039239A1 Semiconductor device and microphone |
| 03/21/2013 | WO2012170850A3 Mems devices made with isotopic materials |
| 03/21/2013 | DE102012216695A1 Mikrolinsenarray und verfahren zum herstellen eines mikrolinsenarrays Microlens array and method of manufacturing a microlens array |
| 03/21/2013 | DE102012215251A1 Micro-electro-mechanical systems component e.g. valve component, has anchorage structure setting counter-element under tensile stress so that deflections of counter-element counteract perpendicular to layer planes |
| 03/20/2013 | EP2571048A2 Method for producing a structure with a cavity sealed hermetically under a controlled atmosphere |
| 03/20/2013 | CN202817148U Micro mechanical filter with wholly sealed structure |
| 03/20/2013 | CN202808341U Conducting structure with insulated slot through structural layer |
| 03/20/2013 | CN102976262A Optically-measurable MEMS (Micro-electromechanical System) encapsulating structure provided with sealing cap electrode |
| 03/20/2013 | CN102976261A A MEMS airflow sensor die incorporating additional circuitry on the die |
| 03/20/2013 | CN102313821B Physical quantity sensor and electronic apparatus |
| 03/20/2013 | CN102213673B MEMS infrared emission gas-sensitive sensor |
| 03/20/2013 | CN102064021B Comb tooth capacitor of micromachine |
| 03/20/2013 | CN101999080B Spring member for use in a microelectromechanical systems sensor |
| 03/19/2013 | US8400697 Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators |
| 03/14/2013 | WO2013036480A2 Backplate interconnect with integrated passives |
| 03/14/2013 | WO2012177488A3 Planarized spacer for cover plate over electromechanical systems device array |