| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 03/14/2013 | US20130063801 Scanner apparatus having electromagnetic radiation devices coupled to mems actuators |
| 03/14/2013 | US20130061672 Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection |
| 03/14/2013 | DE102012216150A1 Mikroelektromechanisches System mit Biegeauslenkung der Rückplattenstruktur The micro-electro mechanical system with bending deflection of the backplate structure |
| 03/14/2013 | DE102011113431A1 Mikrofonverstärker Microphone Amplifier |
| 03/14/2013 | DE102011082320A1 Micro-electromechanical magnetic field sensor i.e. linear magnetic field sensor, for detecting e.g. direction of three-dimensional earth's magnetic field, has conductive layer whose vibrating element is excitable relative to carrier |
| 03/13/2013 | CN202785632U Film sealing cap packaging structure for MEMS (micro-electro-mechanical system) optical device |
| 03/13/2013 | CN102963859A Testing structure for corrosion time of sacrificial layer and preparation method of MEMS (Micro-electromechanical System) device |
| 03/13/2013 | CN102963858A Micro-electromechanical device and manufacturing method thereof |
| 03/13/2013 | CN101939252B Micromechanical component and method for producing the same |
| 03/13/2013 | CN101661012B Microfilm capacitive type surface stress sensor used for biochemical detection and manufacture method thereof |
| 03/13/2013 | CN101644725B Mems probe fabricating a probe card on a reusable substrate |
| 03/12/2013 | US8394312 Method for forming polymerized microfluidic devices |
| 03/12/2013 | US8394249 Methods for manipulating droplets by electrowetting-based techniques |
| 03/12/2013 | CA2519893C Electrical connections in substrates |
| 03/07/2013 | WO2013033124A1 Die-cut through-glass via and methods for forming same |
| 03/07/2013 | WO2013032781A1 Release activated thin film getter |
| 03/07/2013 | WO2013032728A2 Glass as a substrate material and a final package for mems and ic devices |
| 03/07/2013 | WO2013029177A1 Monolithic package for housing microelectromechanical systems |
| 03/07/2013 | DE102012108305A1 Sensorbauelement und Verfahren Sensor device and method |
| 03/07/2013 | DE102012003462A1 Messvorrichtungsanbringungsverfahren und -struktur Measuring device attachment method and structure |
| 03/07/2013 | DE102011112476A1 Bauelement und Verfahren zum Herstellen eines Bauelements Device and method for manufacturing a device |
| 03/07/2013 | DE102009021957B4 Kombinierter Resonator/Beschleunigungssensor für ein Reifendrucküberwachungssystem Combined resonator / acceleration sensor for a tire pressure monitoring system |
| 03/06/2013 | CN202770545U Package structure of MEMS temperature sensor |
| 03/06/2013 | CN202770456U MEMS (Micro Electro Mechanical System) film capacitive type multi-parameter sensor structure |
| 03/06/2013 | CN202766286U Micro-electromechanical systems (MEMS) packaging structure |
| 03/06/2013 | CN102959403A Dynamic quantity sensor |
| 03/06/2013 | CN102958826A Mems microphone and method for producing the mems microphone |
| 03/06/2013 | CN102955609A Micro structure substrate for sensor panel |
| 03/06/2013 | CN102955046A Monolithic integrated CMOS (Complementary Metal Oxide Semiconductor) MEMS (Micro-electromechanical Systems) multilayer metal three-axis capacitive accelerometer and manufacturing method thereof |
| 03/06/2013 | CN102951601A Method for manufacturing micromechanical structure, and micromechanical structure |
| 03/06/2013 | CN102951596A Vacuum packaging structure of semiconductor MEMS (Micro Electronic Mechanical System) |
| 03/06/2013 | CN102951595A Structure and method for motion sensor |
| 03/06/2013 | CN102951594A Tube shell for vacuum package of micro-optical-electronic-mechanic system and manufacture method thereof |
| 03/06/2013 | CN101877362B Silicon substrate with period structure |
| 03/06/2013 | CN101592626B Quasi-one-dimensional metal oxide nano-material biosensor and method for manufacturing same |
| 02/28/2013 | US20130052394 Wafer-level passivation structure of micro-device, micro-device including the same, and methods of manufacturing wafer-level passivation structure and micro-device |
| 02/28/2013 | DE102011081641A1 Sensor und Verfahren zum Herstellen eines Sensors Sensor and method for manufacturing a sensor |
| 02/27/2013 | EP2562837A1 Ferroelectric device |
| 02/27/2013 | EP2560753A1 Microreactors |
| 02/27/2013 | CN102944339A Piezoresistive pressure sensor of MEMS (Micro-Electro-Mechanical Systems) and preparation method thereof |
| 02/27/2013 | CN102944297A Broadband vector hydrophone with glass fiber reinforced plastics acoustic transmission cap package |
| 02/27/2013 | CN102175381B Pressure sensor and preparation method thereof based on composite plating of carbon nano tube and metallic copper |
| 02/21/2013 | WO2013024926A1 Acoustic detection device and acoustic camera using a mems microphone array |
| 02/21/2013 | WO2013024658A1 Electronic component |
| 02/21/2013 | US20130044375 Security Device With A Zero-Order Diffractive Microstructure |
| 02/21/2013 | DE102012107403A1 Chip-Gehäuse-Modul für einen Chip und ein Verfahren zum Herstellen eines Chip-Gehäuse-Moduls Chip package for a chip module and a method of manufacturing a chip package module |
| 02/21/2013 | DE102011084582B3 Micromechanical sensor device, particularly micromechanical pressure sensors, microphones, acceleration sensors or optical sensors, has substrate, circuit chip fixed on substrate and mold package, in which circuit chip is packaged |
| 02/21/2013 | DE102011081014A1 Micromechanical component used in e.g. acceleration sensor, has a stator electrode finger or an actuator electrode finger which partially overlaps a separating trench formed partially surrounding the outer side of a movable mass |
| 02/21/2013 | DE102011075428B4 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 02/21/2013 | DE102008025599B4 Gehäuste aktive Mikrostrukturen mit Direktkontaktierung zu einem Substrat Packaged active microstructures with direct contacting a substrate |
| 02/20/2013 | EP2560235A1 Artificial microstructure and artificial electromagnetic material using same |
| 02/19/2013 | US8378434 Tilting actuator with close-gap electrodes |
| 02/19/2013 | CA2598740C Methods and apparatus for actuating displays |
| 02/19/2013 | CA2520384C Photonic mems and structures |
| 02/13/2013 | EP2556014A1 Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing |
| 02/13/2013 | CN102928977A Manufacturing method for micro electro mechanical system (MEMS) micromirror bistable state structure and optical switch |
| 02/13/2013 | CN102928153A Three-dimensional vacuum sensor and preparation method of three-dimensional vacuum sensor |
| 02/13/2013 | CN102923645A High-density nano electrode array and preparation method thereof |
| 02/13/2013 | CN102923644A Three-dimensional vacuum sensor and manufacturing method thereof |
| 02/13/2013 | CN102923638A Hermetic sealing assembly and sealing method |
| 02/07/2013 | WO2013019515A1 Metal thin shield on electrical device |
| 02/07/2013 | WO2013017530A1 Housing for semiconductor chip and semiconductor chip with a housing |
| 02/07/2013 | WO2013016936A1 Method for preparing meta-material |
| 02/07/2013 | DE102012200658A1 Mirror assembly e.g. pupil facet mirror, for optical system of micro-lithographic projection exposure system, has carrier for individual mirrors, and vibration excitation unit designed such that mirrors displace vibration oscillation |
| 02/07/2013 | DE102011104843B4 Mikrospiegelbauteil mit linienförmiger Biegefeder sowie Verfahren zu dessen Herstellung Micro-mirror device having line-shaped bending spring and to processes for the preparation thereof |
| 02/07/2013 | DE102011052336A1 Einrichtung zur variablen Umlenkung von Licht Device for variable deflection of light |
| 02/07/2013 | DE102009016487B4 Mikrofonchip Microphone chip |
| 02/06/2013 | CN202720387U Direct optical driving scanning micro mirror |
| 02/06/2013 | CN102917976A Stress-based sensor, method and applications |
| 02/06/2013 | CN102081174B Condensing lens array device and manufacturing method thereof |
| 01/31/2013 | WO2013013304A1 Methods and devices for electrical sample preparation |
| 01/31/2013 | DE102006047203B4 Mikrophonanordnung und Verfahren zu deren Herstellung Microphone arrangement and methods for their preparation |
| 01/31/2013 | CA2842720A1 Methods and devices for electrical sample preparation |
| 01/30/2013 | EP2551866A1 Electrical distribution system |
| 01/30/2013 | CN202705026U Apparatus having MEMS devices |
| 01/30/2013 | CN102906871A Planar cavity mems and related structures, methods of manufacture and design structures |
| 01/30/2013 | CN102904543A Mems vibrator and oscillator |
| 01/30/2013 | CN102901715A Fluorescence enhanced microarray biochip based on micro/nano periodic structures and method for preparing same |
| 01/30/2013 | CN102901568A Infrared detector and manufacturing method for same |
| 01/30/2013 | CN102901567A Thermopile infrared detector, array and preparation method of thermopile infrared detector |
| 01/30/2013 | CN102897706A Method and apparatus for protecting wiring and integrated circuit device |
| 01/30/2013 | CN102897705A Micro-electric field gradient structure and preparation method thereof |
| 01/30/2013 | CN102020233B Micro-electro-mechanical systems (mems), systems, and operating methods thereof |
| 01/24/2013 | WO2013012396A1 A method and apparatus for analyzing interactions of molecules |
| 01/23/2013 | CN202693906U Photic driving scanning micro-mirror |
| 01/23/2013 | CN202687944U MEMS (Micro-Electro-Mechanical Systems) film packaging structure for integrating getter |
| 01/23/2013 | CN102892064A Electroacoustic sensor packaging structure for microcomputer |
| 01/23/2013 | CN102890107A Microsensor with integrated temperature control |
| 01/23/2013 | CN102887477A Polymer surface nanowire array and preparation method thereof |
| 01/23/2013 | CN102887476A Hanger beam structure and circuit chip |
| 01/23/2013 | CN102084480B Packaging device and base member for package |
| 01/22/2013 | US8358004 Surface mount silicon condenser microphone package |
| 01/17/2013 | WO2013010182A1 Gyroscopes based on optomechanical sensing |
| 01/17/2013 | WO2012144794A3 Method for manufacturing a microvalve device mounted on a lab-on-a-chip, and microvalve device manufactured by same |
| 01/17/2013 | DE10300594B4 Bauelement und Verfahren Device and method |
| 01/17/2013 | DE102011107649A1 Micromechanical sensor for, e.g. analyzing topographies in grid force microscopy, has unilateral bendable cantilever in which gate electrode of FET is inserted, and is spaced at free space from semiconductor substrate |
| 01/17/2013 | DE102011107046A1 Micro pump of micro-fluidic chip in micro-fluidic lab-on-chip system for, e.g. chemical and biological sample analysis, has several nanoscale surface structures that are provided at regions of fluid inflow and outflow micro channel |
| 01/16/2013 | EP2546187A1 Getter structure with optimised pumping capacity |
| 01/16/2013 | EP2546070A1 Micro-optical system for forming visual images |
| 01/16/2013 | EP2545754A2 Attachment of a device to a substrate for operation under variable conditions |