Patents for B24B 53 - Devices or means for dressing or conditioning abrasive surfaces (5,132)
05/2007
05/17/2007US20070111638 Pad assembly for electrochemical mechanical polishing
05/15/2007US7217172 Enhanced end effector arm arrangement for CMP pad conditioning
05/09/2007EP1782919A2 Rotary dressing tool containing abrasive inserts
05/09/2007EP1633527A4 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk
05/09/2007CN2897542Y Digital-controlled internal screw grinding center
05/09/2007CN2897519Y Machine tool for grinding nuts
05/09/2007CN1961410A Reactive fluid systems for removing deposition materials and methods for using same
05/09/2007CN1958233A Scatheless grinding method for rigid, fragile crystal wafer
05/09/2007CN1314514C Wafer carrier structure for chemical and mechanical grinder
05/03/2007US20070099426 Polishing method, polishing apparatus, and electrolytic polishing apparatus
05/02/2007EP1779973A1 Rotary diamond dresser
05/02/2007EP1779971A1 Pad conditioner for conditioning a CMP pad and method of making such a pad conditioner
05/02/2007EP1687118B1 Improvements in and relating to grinding machines
05/02/2007CN1313245C Method and device for training grinding tools, and grinding device
05/02/2007CN1313216C Modular controlled platen preparation system and method
05/01/2007US7210988 Method and apparatus for reduced wear polishing pad conditioning
05/01/2007US7210981 Smart conditioner rinse station
04/2007
04/26/2007WO2007045267A1 A system and method for cleaning a conditioning device
04/25/2007EP1459358A4 Methods and apparatus for conditioning and temperature control of a processing surface
04/24/2007US7207878 Conductive polishing article for electrochemical mechanical polishing
04/24/2007US7207864 Polishing apparatus
04/19/2007WO2007043263A1 Truing member for abrasive pad and truing method of abrasive pad
04/18/2007EP1773543A1 Belt cleaning system for a portable belt sander
04/18/2007CN1947945A Equipment for chemical-mechanical polishing, method for washing its polishing pad and flattening method
04/17/2007US7204243 Truing tool for truing a grinding worm
04/11/2007CN2887528Y Diamond thick film trimmer for grinding wheel
04/11/2007CN1943991A Flexible materials processing rotation tool
04/10/2007US7201645 Contoured CMP pad dresser and associated methods
04/10/2007US7201635 Methods and systems for conditioning planarizing pads used in planarizing substrates
04/05/2007US20070077871 Chemical mechanical polishing devices, pad conditioner assembly and polishing pad conditioning method thereof
04/05/2007US20070077870 Pad conditioner, pad conditioning method, and polishing apparatus
04/04/2007CN2885503Y Grinding wheel dressing device
04/03/2007US7198553 Corrosion resistant abrasive article and method of making
04/03/2007US7198551 Substrate polishing apparatus
04/03/2007US7198543 Gear grinding machine
03/2007
03/29/2007WO2007034646A1 Dresser for polishing cloth
03/28/2007EP1767312A1 CMPdiamond conditioning disk
03/28/2007EP1766669A1 Reactive fluid systems for removing deposition materials and methods for using same
03/28/2007CN1938128A CMP conditioner
03/27/2007US7195543 Machine tool with 5 machining axes with a continuous grinding tool profilling system
03/27/2007CA2281404C Automatic skate sharpener
03/22/2007WO2007032519A1 Polishing method and polishing apparatus, and program for controlling polishing apparatus
03/22/2007US20070066194 CMP diamond conditioning disk
03/22/2007US20070066189 Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system
03/21/2007CN1931522A Trimmer for trimming wafer grinding pan and its making process
03/15/2007DE102006040403A1 Polishing pad conditioning device e.g. diamond conditioning device, for e.g. chemically mechanical polishing device, has elastic part deformed with proximity of sharp end of part with polish pad to condition pad by scraping off pad surface
03/14/2007EP1762338A1 Abrasive member and method for the resurfacing of a lapping plate
03/14/2007EP1594657B1 Grinding machine
03/14/2007CN2877962Y Electronic numerical control diamond grinding wheel finishing machine
03/14/2007CN1929956A Undulated pad conditioner and method of using same
03/14/2007CN1929955A Insulated pad conditioner and method of using same
03/14/2007CN1929951A Centerless grinder
03/14/2007CN1927543A Abrasive member and method for the resurfacing of a lapping plate
03/14/2007CN1304166C Method for finishing grinding wheel based on involute of arc and dresser
03/13/2007US7189333 End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces
03/13/2007US7189151 Embedding tool designed to embed grains into faceplate for lapping apparatus
03/13/2007US7189149 Method of truing chamfering grindstone and chamfering device
03/13/2007US7189144 Centerless grinding apparatus and centerless grinding method
03/13/2007US7189139 Polishing apparatus
03/08/2007US20070054607 Lapping plate resurfacing abrasive member and method
03/08/2007US20070051355 Brazed diamond tools and methods for making the same
03/08/2007US20070051354 Brazed diamond tools and methods for making the same
03/08/2007DE202006019761U1 Abrichtwerkzeug Dressing
03/07/2007CN2875701Y Abrasive wheel reseater for inner, outer ball surface
03/01/2007WO2007023949A1 Tool with sintered body polishing surface and method of manufacturing the same
03/01/2007US20070049182 Methods and apparatus for machining a coupling
03/01/2007US20070049168 Polishing pad, pad dressing evaluation method, and polishing apparatus
03/01/2007CA2620407A1 Tool with sintered body polishing surface and method of manufacturing the same
02/2007
02/28/2007CN1922723A Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
02/27/2007US7182680 Apparatus for conditioning processing pads
02/22/2007DE102005039026A1 Verfahren und Vorrichtung zum Konditionieren von Schleifwerkzeugen Method and apparatus for conditioning of grinding tools
02/21/2007EP1754569A1 Method and device for dressing grinding tools
02/21/2007CN1917984A Detection signal transmitting apparatus
02/21/2007CN1915595A Method for batch processing polishing fluid in situ for chemico-mechanical polishing metal, and equipment utilized
02/15/2007US20070037493 Pad conditioner for conditioning a cmp pad and method of making such a pad conditioner
02/15/2007US20070034506 Pad assembly for electrochemical mechanical processing
02/15/2007US20070033810 Diamond tool, synthetic single crystal diamond and method of synthesizing single crystal diamond, and diamond jewlry
02/14/2007CN2868554Y Special dressing device for shaping abrasive wheel
02/14/2007CN2868553Y Polishing cushion dressing device
02/14/2007CN1914004A Multi-step pad conditioning system and method for chemical planarization
02/13/2007US7175515 Static pad conditioner
02/13/2007US7175510 Method and apparatus for conditioning a polishing pad
02/13/2007US7175509 Grinder and method of and apparatus for non-contact conditioning of tool
02/08/2007WO2007015911A1 Self-contained conditioning abrasive article
02/08/2007WO2007015909A1 Abrasive agglomerate polishing method
02/08/2007WO2007015486A1 Detection signal transmitter
02/08/2007US20070032171 Methods and systems for conditioning planarizing pads used in planarizing susbstrates
02/08/2007DE19910746B4 Vorrichtung und Verfahren zum Profilieren von Schleifschnecken Apparatus and method for profiling grinding worms
02/06/2007US7172491 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization
02/03/2007CA2553119A1 Polishing system and tool
01/2007
01/31/2007CN1297371C Diamond grinding wheel dresser based on auxiliary discharging in gas
01/30/2007US7169235 Cleaning method and polishing apparatus employing such cleaning method
01/25/2007US20070021041 Dressing method in vertical duplex-head surface grinding machine
01/24/2007CN2860739Y Abrasive wheel R fillet grinding equipment
01/23/2007US7166013 Polishing apparatus and method for producing semiconductors using the apparatus
01/18/2007WO2007008822A2 Enhanced end effector arm arrangement for cmp pad conditioning
01/18/2007CA2614483A1 Enhanced end effector arm arrangement for cmp pad conditioning
01/16/2007US7163447 Apparatus and method for conditioning a contact surface of a processing pad used in processing microelectronic workpieces
01/16/2007US7163441 Semiconductor wafer grinder
01/16/2007US7163439 Methods and systems for conditioning planarizing pads used in planarizing substrates
1 ... 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 ... 52