| Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827) |
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| 04/11/2007 | CN1946527A Saw for semiconductor device |
| 04/11/2007 | CN1943990A In-situ substrate imaging |
| 04/10/2007 | US7203564 Treatment condition decision method, treatment condition decision system, treatment system, treatment condition decision calculator program, program recording medium, and semiconductor device manufacturing method |
| 04/10/2007 | US7201635 Methods and systems for conditioning planarizing pads used in planarizing substrates |
| 04/10/2007 | US7201631 Automatic or semi-automatic device for trimming an ophthalmic lens |
| 04/05/2007 | US20070077862 System for Endpoint Detection with Polishing Pad |
| 04/04/2007 | EP1769885A1 Automatic machine for arrissing and grinding the edges of glass sheets |
| 04/04/2007 | EP1622743A4 Whole-substrate spectral imaging system for cmp |
| 04/04/2007 | EP1370393B1 Method of reducing thermal distortion in grinding machines |
| 04/04/2007 | CN2885496Y Railway steel rail flatness repairing and grinding device |
| 04/04/2007 | CN1941323A Chemical mechanical polishing and method for manufacturing semiconductor device using the same |
| 04/03/2007 | USRE39547 Method and apparatus for endpointing mechanical and chemical-mechanical polishing of substrates |
| 04/03/2007 | US7198551 Substrate polishing apparatus |
| 04/03/2007 | US7198548 Polishing apparatus and method with direct load platen |
| 04/03/2007 | US7198547 Lens edger |
| 04/03/2007 | US7198546 Method to monitor pad wear in CMP processing |
| 04/03/2007 | US7198545 Method of calibration and data evaluation for eddy current metrology systems |
| 04/03/2007 | US7198544 Polishing pad with window |
| 04/03/2007 | US7198542 Method and system for controlling the chemical mechanical polishing by using a seismic signal of a seismic sensor |
| 03/29/2007 | US20070072517 Devices for altering the position of the scanning element unit on inclined installation of a segmented grinding platen and controller for control thereof |
| 03/28/2007 | EP1766482A2 Method and apparatus for controlling the machining of mechanical pieces |
| 03/28/2007 | CN1935456A Pressure-speed-regulating die curve grinding-polishing system |
| 03/27/2007 | US7196011 Apparatus and method for treating substrates |
| 03/27/2007 | US7195548 Method and apparatus for post-CMP cleaning of a semiconductor work piece |
| 03/27/2007 | US7195544 CMP porous pad with component-filled pores |
| 03/27/2007 | US7195543 Machine tool with 5 machining axes with a continuous grinding tool profilling system |
| 03/27/2007 | US7195541 Endpoint detection system for wafer polishing |
| 03/27/2007 | US7195540 Method and system for endpoint detection |
| 03/27/2007 | US7195539 Polishing pad with recessed window |
| 03/27/2007 | US7195538 Eyeglass lens processing apparatus |
| 03/27/2007 | US7195536 Integrated endpoint detection system with optical and eddy current monitoring |
| 03/27/2007 | US7195535 Metrology for chemical mechanical polishing |
| 03/22/2007 | US20070066183 Control structure of grinding machine |
| 03/22/2007 | US20070066182 Machine for grinding internal diameter and end surface of workpiece |
| 03/21/2007 | EP1764187A2 Method for machining a surface and simultaneously measuring parameters of the surface being machined |
| 03/21/2007 | EP1438158B1 Abrasive flow machining apparatus and method |
| 03/21/2007 | CN2880371Y Feeding device of drilling bit grinding machine |
| 03/21/2007 | CN1931524A Pawl measuring system with independent oil path for full automatic grinder |
| 03/20/2007 | US7193724 Method for measuring thickness of thin film-like material during surface polishing, and surface polishing method and surface polishing apparatus |
| 03/20/2007 | US7193714 Lens blank alignment and blocking device and method |
| 03/15/2007 | US20070061088 System and Method for the Identification of Chemical Mechanical Planarization Defects |
| 03/15/2007 | US20070061036 Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus |
| 03/15/2007 | US20070060022 Gear manufacturing machine and process for the operation of such a gear manufacturing machine |
| 03/15/2007 | US20070059935 Polishing method for semiconductor wafer |
| 03/15/2007 | US20070058128 Eyeglass lens processing apparatus |
| 03/14/2007 | EP1594657B1 Grinding machine |
| 03/14/2007 | CN1929952A Devices and methods for optical endpoint detection during semiconductor wafer polishing |
| 03/14/2007 | CN1927535A Tracking method of on-line measuring roundness error and machine tool main axle error |
| 03/14/2007 | CN1305027C Polish cleaning apparatus and method in manufacture of HGA. |
| 03/13/2007 | US7189148 Polishing apparatus |
| 03/13/2007 | US7189141 Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus |
| 03/13/2007 | US7189140 Methods using eddy current for calibrating a CMP tool |
| 03/13/2007 | US7189139 Polishing apparatus |
| 03/08/2007 | US20070054599 Apparatus and method of controlling the temperature of polishing pads used in planarizing micro-device workpieces |
| 03/07/2007 | EP1758711A1 Polishing apparatus and polishing method |
| 03/07/2007 | CN1925952A Tire uniformity machine grinding assembly |
| 03/07/2007 | CN1923452A Processing method of three-pyramidal face large angle crossing point metric gage |
| 03/06/2007 | US7186164 Processing pad assembly with zone control |
| 03/06/2007 | US7185552 Movable sample holder |
| 03/01/2007 | WO2007024807A2 Apparatus and methods for spectrum based monitoring of chemical mechanical polishing |
| 03/01/2007 | US20070049173 Process, apparatus and slurry for wire sawing |
| 03/01/2007 | US20070049172 Apparatus and method for removing material from microfeature workpieces |
| 03/01/2007 | US20070049171 Flexible CNC belt grinding machine |
| 03/01/2007 | US20070049167 Sealed polishing pad, system and methods |
| 03/01/2007 | US20070049166 Polishing method and polishing apparatus |
| 02/28/2007 | CN1921984A Device for production of a pre-formed shape on a workpiece by grinding and corresponding method |
| 02/27/2007 | US7182882 Method of improving chemical mechanical polish endpoint signals by use of chemical additives |
| 02/27/2007 | US7182673 Method and apparatus for post-CMP cleaning of a semiconductor work piece |
| 02/27/2007 | US7182670 CMP pad having a streamlined windowpane |
| 02/27/2007 | US7182669 Methods and systems for planarizing workpieces, e.g., microelectronic workpieces |
| 02/27/2007 | US7182668 Methods for analyzing and controlling performance parameters in mechanical and chemical-mechanical planarization of microelectronic substrates |
| 02/27/2007 | CA2395949C Grinder |
| 02/22/2007 | WO2006134234A3 Method for grinding a variable crown roll |
| 02/22/2007 | US20070042681 Spectrum based endpointing for chemical mechanical polishing |
| 02/22/2007 | US20070042680 Spectrum based endpointing for chemical mechanical polishing |
| 02/22/2007 | US20070042679 Substrate polishing apparatus |
| 02/22/2007 | US20070042676 Blasting apparatus and blasting method |
| 02/22/2007 | US20070042675 Spectrum based endpointing for chemical mechanical polishing |
| 02/22/2007 | US20070039196 Method for the in-process dimensional checking of orbitally rotating crankpins |
| 02/22/2007 | DE102005039010A1 Bearbeitungsvorrichtung mit Vermessungseinrichtung für ein Modell Processing apparatus with measuring device for a model |
| 02/21/2007 | EP1754571A1 Retaining ring in a carrier head for a chemical mechanical polishing system |
| 02/21/2007 | CN1917984A Detection signal transmitting apparatus |
| 02/20/2007 | US7180591 Semiconductor processors, sensors, semiconductor processing systems, semiconductor workpiece processing methods, and turbidity monitoring methods |
| 02/15/2007 | US20070037490 Methods and apparatus for selectively removing conductive material from a microelectronic substrate |
| 02/15/2007 | US20070037489 Centerless grinder |
| 02/15/2007 | US20070037488 Polishing pad having a window with reduced surface roughness |
| 02/15/2007 | US20070037487 Polishing pad having a sealed pressure relief channel |
| 02/15/2007 | US20070034506 Pad assembly for electrochemical mechanical processing |
| 02/15/2007 | DE102005039094A1 Verfahren und Vorrichtung zum Führen eines Maschinenteils entlang einer definierten Bewegungsbahn über einer Werkstücksoberfläche A method and apparatus for guiding a machine part along a defined movement path over a workpiece surface |
| 02/14/2007 | EP1578562B1 Grinding wheel monitoring |
| 02/14/2007 | CN1300769C Multi-chambered, compliant apparatus for restraining workpiece and applying variable pressure thereto during lapping to improve flatness characteristics of workpiece |
| 02/13/2007 | US7177019 Apparatus for imaging metrology |
| 02/13/2007 | US7175505 Method for adjusting substrate processing times in a substrate polishing system |
| 02/13/2007 | US7175504 Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus |
| 02/13/2007 | US7175503 Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device |
| 02/08/2007 | WO2007015163A1 Precision machining apparatus and precision machining method |
| 02/08/2007 | US20070032172 Polishing liquids for activating and/or conditioning fixed abrasive polishing pads, and associated systems and methods |
| 02/08/2007 | US20070032171 Methods and systems for conditioning planarizing pads used in planarizing susbstrates |
| 02/08/2007 | US20070032170 Polishing pad with built-in optical sensor |
| 02/07/2007 | EP1748867A1 Substrate peripheral portion measuring device and method, substrate peripheral portion polishing apparatus and method, and substrate rinsing apparatus and method |