Patents
Patents for B08B 7 - Cleaning by methods not provided for in a single other subclass or a single group in this subclass (12,806)
07/2004
07/01/2004DE10261875A1 Cleaning system for removing contamination from surface of component in lithographic projection apparatus that is used in manufacture of integrated circuits, comprises cleaning particle provider with electric field generator
06/2004
06/30/2004EP1433198A2 Methods and apparatus for cleaning and/or treating a substrate using co2
06/30/2004CN1508848A Method and apparauts for removing residual material from substrate of electronic device
06/29/2004US6756021 Device for eliminating gas or paraffin hydrate deposits that form in well drilling equipment or in hydrocarbon production or transportation equipment
06/29/2004US6755871 Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
06/29/2004US6755156 Device, system and method for on-line explosive deslagging
06/24/2004WO2004053185A1 Method for the conservation of metal surfaces
06/24/2004US20040121269 exposing the process surface to a supercritical CO2 containing medium -
06/24/2004US20040118810 Treatment to eliminate polysilicon defects induced by metallic contaminants
06/24/2004US20040118430 Pressure processing apparatus with improved heating and closure system
06/24/2004US20040118281 CO2 recovery process for supercritical extraction
06/23/2004EP1431830A2 Lithographic apparatus, device manufacturing method, and device manufactured thereby
06/23/2004EP1431828A1 Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
06/23/2004EP1429875A1 Dense-phase fluid cleaning system utilizing ultrasonic transducers
06/23/2004CN1507502A Duo-step plasma cleaning of chamber residues
06/23/2004CN1506766A Method for producing optical etching equipment and devices
06/22/2004US6752192 Label release and separation system
06/17/2004WO2004050936A2 Method for cleaning a process chamber
06/17/2004WO2003107396A3 Substrate processing apparatus and related systems and methods
06/17/2004WO2003043751A8 An apparatus and method for cleaning glass substrates using a cool hydrogen flame
06/17/2004US20040114019 Conveyor cleaner and ink-jet printing apparatus including it
06/17/2004US20040112409 Cleaning solution; controlling fluoride concentration; rsupercritical solution; emoval residues afteretching of semiconductor
06/17/2004US20040112406 Solid CO2 cleaning
06/17/2004US20040112405 Method and apparatus for cleaning a semiconductor substrate
06/17/2004US20040112403 Microwave absorber on substrates; damaging coating; removal
06/17/2004US20040112402 Surface cleaning; heat exchanging; holding semiconductor; heating, cooling cycles
06/17/2004US20040112306 Method for cleaning combustion devices
06/17/2004DE10255988A1 Verfahren zum Reinigen einer Prozesskammer A method of cleaning a process chamber
06/17/2004DE10255889A1 Manufacture of an electrostatic holding body containing a pedestal, carrying a film system useful in the semiconductor industry
06/16/2004EP1429189A1 Lithographic apparatus and device manufacturing method
06/16/2004EP1428907A1 Thermal activation of gas for use in a semiconductor process chamber
06/16/2004EP1237734B1 Coating removal system having a solid particle nozzle with a detector for detecting particle flow and associated method
06/16/2004EP1200789B1 An ultrasonic cleaning method
06/10/2004WO2004049419A1 Plasma processing method and apparatus
06/10/2004WO2004048783A2 High-pressure device for closing a container
06/10/2004US20040109852 Contacting with acylases and a carrier to degrade a lactone such as an N-acyl-L-homoserine lactone produced by one or more microorganisms
06/10/2004US20040108059 System and method for removal of materials from an article
06/10/2004US20040107905 Surface silanization
06/10/2004US20040107858 Device, System and Method for On-Line Explosive Deslagging
06/09/2004EP1426719A2 Device, system and method for on-line explosive deslagging
06/09/2004EP1425780A1 Pressure chamber assembly including drive means
06/09/2004EP1425115A1 Supercritical fluid delivery and recovery system for semiconductor wafer processing
06/09/2004DE10255231A1 Hochdruckvorrichtung und -verfahren zum hydraulischen Krafthub und Behälterverschluss im Reinraum High pressure apparatus and method for hydraulic power stroke and container closure in the clean room
06/08/2004US6747243 Spot cleaning of particles after inspection
06/08/2004US6746974 Tack pad having opposite major surfaces and thickness of at least 5 mm comprising non-woven cross-laid carded web having needle-tacked and bonded multilayer structure, at least one major surface of which is impregnated with acrylic tackifier
06/08/2004US6745494 Method and apparatus for processing wafers under pressure
06/03/2004WO2004046423A1 An apparatus and process for the dry removal of the scale found on the surface of metal products
06/03/2004WO2004045783A2 Method for cleaning cookware and tableware with film forming liquid dishwashing compositions
06/03/2004WO2004045739A2 Substrate processing apparatus for processing substrates using dense phase gas and sonic waves
06/03/2004WO2004029990A3 Surface treatment of concrete
06/03/2004US20040104206 Methods for preparing ball grid array substrates via use of a laser
06/03/2004US20040103922 Method of high pressure treatment
06/03/2004US20040103919 Single wafer cleaning with ozone
06/03/2004US20040103917 Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus
06/03/2004US20040103914 Method for cleaning a plasma chamber
06/03/2004US20040103913 Apparatus for washing glass substrates and process for producing a liquid crystal device
06/02/2004EP1423491A1 Method and composition to decrease iron sulfide deposits in pipe lines
06/02/2004EP1259333A4 Contact lens treatment apparatus and methods
06/02/2004CN1502122A Method to restore hydrophobicity in dielectric films and materials
06/02/2004CN1501846A Edge bead removal for spin-on materials using carbon-dioxide cleaning
06/01/2004US6744592 Cleaner strip for rollers of cartridge loader
05/2004
05/27/2004WO2004044257A1 Method and device for descaling and/or cleaning a metal casting
05/27/2004WO2002101784B1 Plasma processor
05/27/2004US20040099284 Spraying steam on the surfaces photoresists using nozzles, then peeling
05/27/2004US20040099281 Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy
05/27/2004DE10252178A1 Process for descaling and/or cleaning a metal strand, especially a hot-rolled strip made from normal steel or a stainless steel, comprises feeding the strand with a high degree of planarity through a plasma descaling and/or cleaning device
05/26/2004EP1422316A1 Method for cleaning reaction container and film deposition system
05/26/2004EP1422026A2 Method for cleaning/scraping and apparatus therefor
05/26/2004EP1421609A1 Process and apparatus for treating a workpiece such as a semiconductor wafer
05/26/2004CN1498698A Substrate processor
05/25/2004US6739347 System for spin-cleaning closed-end filter cartridges
05/25/2004US6739346 Apparatus for cleaning filters
05/25/2004US6739073 Method and apparatus for performing multiple cleaning and vacuum drying operations in enclosed vessels
05/21/2004WO2004042810A1 Method for cleaning microstructure
05/21/2004WO2004042794A2 Removal of particle contamination on patterned slilicon/silicon dioxide using supercritical carbon dioxide/chemical formulations
05/21/2004WO2004041658A2 Substrate process tank with acoustical source transmission and method of processing substrates
05/21/2004WO2004030037A3 System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (xfn) compounds for use in cleaning semiconductor processing chambers
05/20/2004US20040094508 Surface treating method
05/20/2004US20040094183 Dense phase gases such as supercritical fluids can be used in combination with sonic energy (e.g., megasonic acoustic waves) to process substrates such as semiconductor wafers
05/19/2004CN2616312Y Viscos dust-cleaning device
05/19/2004CN1497667A High-Pressure processing method and high-pressure processing device
05/19/2004CN1497666A Fluoration thermal active for semiconductor working chamber
05/18/2004US6736906 Workpiece holder includes cylindrically shaped rotator having an exterior wall having fluid guide
05/18/2004US6736859 Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
05/13/2004WO2004040370A2 Apparatus and method for cleaning surfaces of semiconductor wafers using ozone
05/13/2004WO2004011181A3 Method and apparatus for removing minute particle(s) from a surface
05/13/2004US20040089322 Cleaning system and a method of cleaning
05/12/2004CN1495285A Chemical vapour phase deposition coating coating equipment
05/12/2004CN1494956A Cleaning method for removing particles from surface, cleaning equipment and photo-engraving projection equipment
05/12/2004CN1494954A Method and composition for removing residue from microstructure of body
05/11/2004US6734444 Substrate treatment device using a dielectric barrier discharge lamp
05/11/2004US6734388 Dry surface cleaning apparatus
05/11/2004US6734102 Plasma treatment for copper oxide reduction
05/06/2004WO2004038731A2 Radioactive decontamination and translocation method
05/06/2004WO2004037506A1 Scrub washing method, scrub washing device, lens forming die drying method, lens forming die drying device, and plastic lens manufacturing method
05/06/2004US20040087456 enables damage-free, residue-free cleaning of substrates having particulate contamination on Si/SiO2 substrates
05/06/2004US20040084063 Multi-motion stainbrush
05/05/2004CN1494733A High-pressure treatment method
04/2004
04/29/2004WO2003100118A3 Method and device for treating workpieces
04/29/2004US20040082186 Method for cleaning plasma etching apparatus, method for plasma etching, and method for manufacturing semiconductor device
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