| Patents for B08B 7 - Cleaning by methods not provided for in a single other subclass or a single group in this subclass (12,806) |
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| 09/02/2003 | US6613157 Methods for removing particles from microelectronic structures |
| 09/02/2003 | US6612317 Supercritical fluid delivery and recovery system for semiconductor wafer processing |
| 08/28/2003 | WO2003071004A2 Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method |
| 08/28/2003 | WO2003070390A2 Cleaning apparatus using atmospheric pressure plasma |
| 08/28/2003 | US20030162035 Substrate with photocatalytic and /or hydrophilic coating |
| 08/28/2003 | US20030161780 Recycle for supercritical carbon dioxide |
| 08/28/2003 | US20030159716 Supplying fluid at high temperature |
| 08/28/2003 | US20030159710 Cleaning apparatus and method |
| 08/28/2003 | DE20308788U1 Surface treatment unit for e.g. cleaning or excavation, combines high energy laser beam, high velocity dry ice jet and suction connection in portable unit |
| 08/27/2003 | EP1337281A1 Method and device for treating the surfaces of items |
| 08/27/2003 | EP0693001B1 Cleaning and finishing a ceramic mold |
| 08/27/2003 | CN1439089A Apparatus for removing dust accretions from a smelting furance |
| 08/26/2003 | US6610611 Method of removing diamond coating and method of manufacturing diamond-coated body |
| 08/26/2003 | US6610257 Low RF power electrode for plasma generation of oxygen radicals from air |
| 08/26/2003 | US6610168 Resist film removal apparatus and resist film removal method |
| 08/21/2003 | WO2003069659A1 Cleaning gas and etching gas |
| 08/21/2003 | WO2003068846A1 Methods of treating polymeric substrates |
| 08/21/2003 | WO2003068502A1 Method of making window unit |
| 08/21/2003 | WO2003068380A1 Distributor bottom for the distribution of a gas charged with fine solid particles |
| 08/21/2003 | US20030157786 Treatment to eliminate polysilicon defects induced by metallic contaminants |
| 08/21/2003 | US20030155065 Method of making window unit |
| 08/21/2003 | CA2472720A1 Distributor base for distributing a gas which is laden with fine solids particles |
| 08/20/2003 | EP1335801A1 AN i IN SITU /i MODULE FOR PARTICLE REMOVAL FROM SOLID-STATE SURFACES |
| 08/20/2003 | EP1095180B1 Cleaning apparatus with dense phase fluid |
| 08/20/2003 | EP1044077B1 Apparatus for cleaning surfaces with a cleaning roller assembly |
| 08/20/2003 | CN1437534A Apparatus and method for thermally removing coating and/or impurities |
| 08/19/2003 | US6607608 Translatable fiber stripper |
| 08/14/2003 | US20030150475 Method and apparatus for sanitizing reusable articles |
| 08/13/2003 | EP1039977A4 A method for removing surface contaminants on moulds used in semiconductor packaging tools |
| 08/12/2003 | US6604468 Device, system and method for on-line explosive deslagging |
| 08/07/2003 | WO2003064065A1 Method for reducing the formation of contaminants during supercritical carbon dioxide processes |
| 08/07/2003 | WO2002031861A3 Substrate processing in an immersion, scrub and dry system |
| 08/07/2003 | US20030145876 Pressure sensing method for determining gas clean end point |
| 08/07/2003 | US20030145875 Using cleaning compound and ozone vapors ; impregnating semiconductor wafer; removal |
| 08/07/2003 | US20030145482 Apparatus and method thermally removing coatings and/or impurities |
| 08/06/2003 | EP1123166A4 Method of removing organic materials from substrates |
| 08/06/2003 | EP0932460B1 Method and apparatus for a powder metallurgical process |
| 08/05/2003 | US6603091 Cleaning device with deeply reaching plasma and assisting electrodes |
| 08/05/2003 | US6602560 Method for removing residual fluorine in HDP-CVD chamber |
| 08/05/2003 | US6602542 Device for cleaning an article |
| 08/05/2003 | US6602351 Remove water, entrained solvents and solid particles using high density carbon dioxide |
| 08/05/2003 | US6602349 Supercritical fluid cleaning process for precision surfaces |
| 08/05/2003 | US6601594 Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece |
| 07/31/2003 | WO2003062322A1 Apparatus and method for cleaning test probes |
| 07/31/2003 | WO2003062166A2 Treatment of organic pollution on an inorganic substrate |
| 07/31/2003 | WO2003061861A1 Laser-based cleaning method and system |
| 07/31/2003 | WO2003061860A1 Supercritical fluid processes with megasonics |
| 07/31/2003 | US20030143846 Gas compositions for cleaning the interiors of reactors as well as for etching films of silicon- containing compounds |
| 07/31/2003 | US20030141815 Method for removing impurities of plasma display panel |
| 07/31/2003 | US20030141016 Exhaust system for processing apparatus |
| 07/31/2003 | US20030140950 Cryogenic methods for removing lead based paints from large steel structure |
| 07/31/2003 | CA2473888A1 Laser-based cleaning method and system |
| 07/30/2003 | CN1433342A Label sheel for cleaning conveying member having cleaning function |
| 07/30/2003 | CN1433341A Cleaning sheet conveying member using the same and substrate processing equipment cleaning method using them |
| 07/30/2003 | CN1433053A Semiconductor device manufacturing process and equipment |
| 07/29/2003 | US6599618 Wavelength selective photocatalytic dielectric elements on polytetrafluoroethylene (PTFE) refractors having indices of refraction greater than 2.0 |
| 07/24/2003 | WO2003059542A1 Method for neutralizing or recycling carrier materials for film-like coatings |
| 07/24/2003 | WO2003059535A1 Cleaning roller device with vertical movement mechanism |
| 07/24/2003 | US20030138644 Apparatus and method for cleaning test probes |
| 07/24/2003 | US20030136769 Laser ablation technique using in IC etching process |
| 07/24/2003 | US20030136714 Vapor transferring apparatus for purification |
| 07/24/2003 | US20030136430 Laminated three-dimensional sheet |
| 07/24/2003 | US20030136429 Vapor cleaning and liquid rinsing process vessel |
| 07/24/2003 | US20030136423 Semiconductor device production method and semiconductor device production apparatus |
| 07/23/2003 | EP0958068B1 Novel cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants |
| 07/23/2003 | CN1431056A Dynamic cleaning device of environmental protection and its cleaning methods |
| 07/22/2003 | US6596093 Using carbon dioxide for removing water and solutes from semiconductor substrates |
| 07/17/2003 | WO2003057811A1 Supercritical fluid cleaning of semiconductor substrates |
| 07/17/2003 | WO2003057377A1 Method for cleaning an article |
| 07/17/2003 | US20030133864 Method and apparatus for supplying carbon dioxide to a plurality of applications, as in the processing of integrated circuits |
| 07/17/2003 | CA2472478A1 Method for cleaning an article |
| 07/16/2003 | EP1326720A1 Labeling method and corresponding device |
| 07/16/2003 | CN1430243A Cleaning device of on-line laser wafer bearing |
| 07/15/2003 | US6592676 Chemical solution and method for reducing the metal contamination on the surface of a semiconductor substrate |
| 07/15/2003 | US6591845 Apparatus and method for processing the surface of a workpiece with ozone |
| 07/10/2003 | WO2003055820A1 Method for adhering transparent articles and quartz glass plate prepared through adhesion and device using the same |
| 07/10/2003 | US20030129835 Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source |
| 07/10/2003 | US20030129103 Method of separating electrophotographic carrier compositions and recycling the compositions |
| 07/10/2003 | US20030127115 Contacting a printed circuit board or silicon wafer with supercritical 1,1,1,3,3-pentafluoropropane fluid |
| 07/09/2003 | EP0959991A4 Process and apparatus for cryogenically cleaning residue from containers and intermediate bulk containers designed for cryogenic cleaning |
| 07/08/2003 | US6589592 Utilize liquid carbon dioxide (CO2) as a cleaning solvent |
| 07/08/2003 | US6589357 Process and apparatus for removing impurities from surfaces contaminated with liquid |
| 07/08/2003 | US6589355 1,1,1,3,3-pentafluoropropane as a supercritical fluid; printed circuit board |
| 07/08/2003 | US6589353 Oxidizing gas employed is ozone and the surface is irradiated with ultraviolet light; removing material from a protective coating that has been applied to the surface |
| 07/08/2003 | US6588122 Minimal distance between ultraviolet radiator and substrate while irradiating in translational or rotational movement achieves intense and uniform illumination |
| 07/03/2003 | WO2003054247A2 Cleaning gas composition for semiconductor production equipment and cleaning method using the gas |
| 07/03/2003 | WO2003053601A1 Method for cleaning, roughening and stripping surfaces |
| 07/03/2003 | WO2003011599A8 Method and device for cleaning using ultrasound |
| 07/03/2003 | WO2002091453A9 High pressure wafer-less auto clean for etch applications |
| 07/03/2003 | US20030125225 Chemical formulations and methods for removing unwanted material, such as unexposed photoresist, metal oxides, CMP residue, and the like, from semiconductor wafers or other substrates. The formulations utilize a supercritical |
| 07/03/2003 | US20030123324 Fluid driven agitator used in densified gas cleaning system |
| 07/03/2003 | US20030121896 Apparatus for on-line cleaning a wafer chuck with laser |
| 07/03/2003 | US20030121171 Method and apparatus for performing multiple cleaning and vacuum drying operations in enclosed vessels |
| 07/02/2003 | EP1323187A2 Wafer cleaning module and method for cleaning the surface of a substrate |
| 07/02/2003 | EP1124653A4 Method for continuous removal of oxides from metal |
| 07/02/2003 | CN1426817A Container cleaner |
| 07/01/2003 | US6584987 Method for improved cleaning in HDP-CVD process with reduced NF3 usage |
| 06/26/2003 | WO2003052805A1 Film removing device, film removing method, and substrate processing system |
| 06/26/2003 | WO2003052216A2 Device for removing jointing material |
| 06/26/2003 | WO2003052166A1 Method and device for removing adhesions, especially oily or fatty adhesions that are present on the surface of metal parts |