Patents
Patents for B08B 7 - Cleaning by methods not provided for in a single other subclass or a single group in this subclass (12,806)
11/2004
11/25/2004WO2004101180A1 Method for hydrodynamic processing a surface and device for carrying out said method
11/25/2004WO2004064244A3 Method for releasing and drying moveable elements of micro-electronic mechanical structures with organic thin film sacrificial layers
11/25/2004US20040236468 Robot vacuum with remote control mode
11/25/2004US20040235303 Endpoint determination of process residues in wafer-less auto clean process using optical emission spectroscopy
11/25/2004US20040234904 Compositions suitable for removing photoresist, photoresist byproducts and etching residue, and use thereof
11/25/2004US20040231707 Supercritical cleaning step uses a surfactant to clean a wafer and a supercritical rinse solution in a post-cleaning step to decontaminate the processing apparatus, the wafer or both from processing residues
11/25/2004US20040231706 Cleaning a component of a process chamber
11/25/2004US20040231702 Flushing for refrigeration system components
11/25/2004US20040231698 High pressure processing apparatus and method
11/25/2004US20040231695 For removing deposits in equipment for producing semiconductor or liquid crystal, comprising fluorine gas containing 1 vol % or less of oxygen and/or oxygen-containing compound; fluorine may be produced in situ through decomposition of a fluorine compound such as SiF4, HF, CF4, NF3 and WF6
11/25/2004US20040231597 Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation
11/25/2004US20040231358 Gases are vented from a waste site, separated into three streams: hydrocarbon, carbon dioxide, and residue streams, condensing hydrocarbon/CO2 stream portions to liquid or supercritical liquid, also using hydrocarbon to generate energy
11/25/2004DE10359586A1 Tinted film remover for use on car windows, has removing device which includes steamer, cutter and scraper for removing tinted film from car window stably set in predetermined position using fastening device
11/24/2004EP1320699B1 Rinsing device for a sealing system and method for using the same
11/24/2004CN2657804Y Improved structure of cleaner
11/23/2004US6821906 Irradiation with ultraviolet ray emitted from a dielectric barrier discharge lamp
11/23/2004US6821620 Cutting cleaning sheet; then curing; semiconductors
11/23/2004US6821356 Cleaning device and method for cleaning, using liquid and/or supercritical gases
11/23/2004US6821200 Low-cost/disposable hazardous material handling and anti-contamination hoods
11/18/2004WO2004098259A2 Plasma treatment for purifying copper or nickel
11/18/2004WO2003030219A3 High pressure processing chamber for multiple semiconductor substrates
11/18/2004US20040226914 Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation
11/18/2004US20040226588 Cleaning apparatus
11/18/2004US20040226582 Apparatus and method for substrate processing
11/17/2004EP1476588A1 Method of cleaning the surface of a material coated with an organic substance and a generator and device for carrying out said method
11/17/2004EP1476494A1 Methods of treating polymeric substrates
11/17/2004EP1476299A1 Method of making window unit
11/17/2004EP1476256A1 Label release and separation system
11/17/2004EP1358670A4 Process and apparatus for removing residues from the microstructure of an object
11/16/2004US6819969 Chemical vapor deposition process and apparatus for performing the same
11/16/2004US6818566 Thermal activation of fluorine for use in a semiconductor chamber
11/16/2004US6818069 Low pressure steam softening adhesive; easy peeling
11/16/2004US6817370 Method for processing the surface of a workpiece
11/16/2004US6817052 Apparatuses and methods for cleaning test probes
11/11/2004WO2004096491A2 Apparatus and method of securing a workpiece during high-pressure processing
11/11/2004WO2004096000A2 Rotating operating handle for vaccum cleaner
11/11/2004US20040224508 Apparatus and method for cleaning a substrate using a homogenized and non-polarized radiation beam
11/11/2004US20040222188 Method of cleaning a deposition chamber and apparatus for depositing a metal on a substrate
11/11/2004US20040221877 Process and apparatus for treating a workpiece with gases
11/11/2004US20040221876 using water-free, gaseous sulfur trioxide as an agent to remove various organic coatings, films, layers and residues from the surface of a substrate such as semiconductor and non-semiconductor devices and displays so that it is completely removed by subsequent chemical or physical treatment
11/11/2004US20040221875 Cleaning method
11/11/2004DE102004014387A1 Reinigungsmittel und Reinigungsverfahren, welches das Reinigungsmittel einsetzt Cleaning agent and cleaning method using the cleaning agent
11/10/2004EP1475822A1 Cleaning gas and etching gas
11/10/2004EP1474227A1 Distributor bottom for the distribution of a gas charged with fine solid particles
11/10/2004EP1105041B1 Method of and device for cleaning a slip ring
11/10/2004CN1545722A Plasma reactor coil magnet
11/09/2004US6815371 Edge bead removal for spin-on materials containing low volatility solvents using carbon dioxide cleaning
11/09/2004US6815362 End point determination of process residues in wafer-less auto clean process using optical emission spectroscopy
11/09/2004US6814814 Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates
11/09/2004US6814770 Vapor transferring apparatus for purification
11/09/2004US6814092 Systems and methods for conditioning ultra high purity gas bulk containers
11/04/2004WO2004094696A1 Microelectronic device manufacturing in coordinated carbon dioxide processing chambers
11/04/2004WO2004085491A3 Removal of cmp and post-cmp residue from semiconductors using supercritical carbon dioxide process
11/04/2004WO2004066365A3 Cleaning of cvd chambers using remote source with cxfyoz based chemistry
11/04/2004US20040218157 Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
11/04/2004US20040216845 Non-thermal plasma generator device
11/04/2004US20040216770 Process for rinsing and drying substrates
11/04/2004US20040216769 Method of cleaning a plasma processing apparatus
11/04/2004US20040216763 Process and apparatus for treating a workpiece using ozone
11/04/2004US20040216698 Device, system and method for on-line explosive deslagging
11/04/2004DE10317199A1 Serging method for thermally cut sections of workpiece, by striking impact bodies in the direction of the section to be serged with high delivery force and speed to destroy and remove the oxide layer
11/03/2004EP1473105A2 Apparatus and method for removal of surface oxides via fluxless technique involving electron attachement and remote ion generation
11/03/2004EP1472017A1 Method for cleaning an article
11/03/2004CN1542910A Process and apparatus for removing residues from the microstructure of an object
11/03/2004CN1542907A Substrate processing apparatus
11/02/2004US6811615 Introducing a halogen containing cleaning gas to the process chamber via a section connected to the process chamber; and applying a high power density light beam, which assists dissociation of cleaning gas to acheive cleaning activity
11/02/2004US6810886 Chamber cleaning via rapid thermal process during a cleaning period
11/02/2004US6810548 Cleaning apparatus
10/2004
10/28/2004WO2004093166A2 Chamber and associated methods for wafer processing
10/28/2004WO2004032200A3 Systems and methods for improved gas delivery
10/28/2004US20040213915 automation of programming robots for treating a surface of a part such as painting applications for small lot sizes with a very high number of variants
10/28/2004US20040211448 Apparatus for in-situ cleaning of carbon contaminated surfaces
10/28/2004US20040211447 Apparatus and method of securing a workpiece during high-pressure processing
10/28/2004US20040211444 Robot vacuum with particulate detector
10/28/2004US20040211440 System and method for dampening high pressure impact on porous materials
10/28/2004US20040211028 Rotating operating handle for vacuum cleaner
10/28/2004DE20315149U1 Laufbildkamera mit Filmmagazin Motion picture camera with film magazine
10/28/2004DE10316224A1 Continuous chain cleaning assembly, where the stamped chain link components have loose chips and dirt, has a lubricating station followed by a suction chamber with an oscillation generator
10/27/2004EP1470090A2 Treatment of organic pollution on an inorganic substrate
10/26/2004CA2322869C A method of cleaning the inside surface of ducts
10/21/2004WO2004090339A2 Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom
10/21/2004US20040206732 Method and apparatus for particle removal
10/21/2004US20040206731 Method and apparatus for cleaning surfaces
10/21/2004DE20220973U1 Method for cleaning, roughening and stripping surfaces involves exploding a gas mixture containing water to direct highly accelerated fluid medium jet onto surface with high kinetic energy
10/21/2004DE10316285A1 Cleaning device for sink boxes, has vibration fixing device with eccentric driver which causes emptying of pit bucket corresponding to swivel motion of the system fixing device relative to the movement of the tilting equipment
10/20/2004EP1468752A2 Cleaning sheet and method of cleaning a substrate
10/20/2004EP1468048A1 Apparatus and method for cleaning test probes
10/20/2004CN1539161A Process and apparatus for treating a workpiece such as a semiconductor wafer
10/19/2004US6805801 Method and apparatus to remove additives and contaminants from a supercritical processing solution
10/19/2004US6805752 Controlled heating; heat exchanging; vaporization of acidicresidues
10/19/2004US6805751 Arranging energy transfer medium under and around particles adhered to surface, irradiating with laser, absorbing energy sufficient to dislodge particles, forming temperature gradient near surface by heating and/or cooling to prevent redeposition
10/19/2004US6805138 Semiconductor device production method and semiconductor device production apparatus
10/19/2004US6805137 Method for removing contamination particles from substrates
10/14/2004WO2004088735A1 Cleaning method, method for removing foreign particle, cleaning apparatus and cleaning liquid
10/14/2004WO2004086932A1 Device for steam washing and making cutting blades more hygienic
10/14/2004US20040204792 Robotic vacuum with localized cleaning algorithm
10/14/2004US20040204334 Cleaning sheet, carrying member with a cleaning function and method of cleaning substrate processing equipment
10/14/2004US20040200576 Method and apparatus for plasma cleaning of workpieces
10/14/2004US20040200505 Robot vac with retractable power cord
10/14/2004US20040200499 Backflush chamber clean
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