Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
07/1997
07/02/1997EP0782173A2 Apparatus for coating a substrate by means of a chemical vapour deposition process
07/02/1997EP0781921A1 Closed ion drift source
07/02/1997EP0781618A1 Highly efficient processing method based on high density radical reaction and using rotary electrode, apparatus therefor and rotating electrode used therefor
07/02/1997EP0781599A2 Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
07/02/1997CN1153448A Device for producing plasma, enabling microwave propagation and absorption zones to be dissociated
07/01/1997US5643639 Plasma treatment method for treatment of a large-area work surface apparatus and methods
07/01/1997US5643394 Plasma reactor having gas distribution apparatus including disk surrounded by annular member with gap therebetween comprising elongate thin slit nozzle, spacers between disk and annular so gap is of equal width over circumference
07/01/1997US5643364 Plasma chamber with fixed RF matching
06/1997
06/26/1997WO1997022631A1 Plasma deposited film networks
06/26/1997WO1997022556A1 Thermal plasma reactor and wastewater treatment method
06/26/1997CA2213328A1 Plasma deposited film networks
06/25/1997CN1035303C High performance induction plasma torch with water-cooled ceramic confinement tube
06/24/1997US5640843 Integrated arcjet having a heat exchanger and supersonic energy recovery chamber
06/24/1997CA2093027C Plasma torch nozzle
06/19/1997WO1997022233A1 Torch for inductively coupled plasma spectrometry
06/19/1997WO1997022136A1 HF-PLASMA COATING CHAMBER OR PECVD COATING CHAMBER, ITS USE AND METHOD OF PLATING CDs USING THE CHAMBER
06/19/1997WO1997021923A1 Hall effect motor
06/18/1997EP0779771A1 Plasma cutting apparatus
06/18/1997EP0779645A2 Plasma reactors for processing work pieces
06/17/1997US5639519 Method for igniting low pressure inductively coupled plasma
06/17/1997US5639308 Plasma apparatus
06/12/1997WO1997021332A1 A high-frequency plasma process wherein the plasma is excited by an inductive structure in which the phase and anti-phase portions of the capacitive currents between the inductive structure and the plasma are balanced
06/12/1997WO1997021331A1 Apparatus for generating plasma
06/12/1997WO1997021330A1 Process depending on plasma discharges sustained by inductive coupling
06/12/1997WO1997020620A1 Improvements in method and apparatus for isotope enhancement in a plasma apparatus
06/12/1997DE19546187A1 Plasma-aided surface treatment at atmospheric pressure
06/11/1997EP0778608A2 Plasma generators and methods of generating plasmas
06/11/1997EP0778607A1 Method and apparatus for cleaning a plasma reactor
06/11/1997EP0526562B1 Improved process and apparatus for reducing electrode wear in a plasma arc torch
06/10/1997US5637966 Method for generating a plasma wave to accelerate electrons
06/10/1997US5637962 Plasma wake field XUV radiation source
06/10/1997US5637961 Concentric rings with different RF energies applied thereto
06/10/1997US5637242 High velocity, high pressure plasma gun
06/10/1997US5637150 Device and method for forming a plasma by application of microwaves
06/05/1997WO1997020453A1 Pta plasma torch with a tapered cathode
06/05/1997WO1997019895A1 Process for obtaining titanium dioxide and a plasmo-chemical reactor for carrying out said process
06/04/1997EP0784417A4 Plasma accelerator with closed electron drift
06/04/1997EP0777258A2 Self-cleaning plasma processing reactor
06/04/1997EP0776594A1 Apparatus for and method of forming uniform thin coatings on large substrates
06/04/1997EP0776523A1 Fuel pellets for thermonuclear reactions
06/04/1997CN2255710Y Pulse gas-charging device for electric arc plasma generator
06/03/1997US5635714 Data reduction system for real time monitoring of radiation machinery
06/03/1997US5635088 Liquid cooled plasma arc torch system and method for replacing a torch in such system
05/1997
05/28/1997EP0775436A1 Plasma torch with axial injection of feedstock
05/28/1997EP0668843B1 PROCESS FOR PLASMACHEMICAL TRANSFORMATION OF N2O INTO NOx AND/OR INTO DERIVATIVES THEREOF
05/28/1997EP0547105B1 Plasma cycling sterilizing process
05/22/1997WO1997018694A1 Plasma jet reactor
05/22/1997WO1997018693A1 Plasma stream generator with a closed-configuration arc
05/22/1997WO1997018692A1 Four-nozzle plasma generator for forming an activated jet
05/22/1997WO1997018691A1 Plasma stream generation method and device therefor
05/22/1997WO1997018341A1 Nanostructured feeds for thermal spray
05/22/1997WO1997018056A1 Cartridge type plasma torch
05/22/1997CA2237668A1 Cartridge type plasma torch
05/22/1997CA2237588A1 Nanostructured feeds for thermal spray
05/21/1997EP0774886A1 Method and apparatus for generating a plasma
05/21/1997EP0773852A1 High velocity, high pressure plasma gun
05/20/1997US5631461 Apparatus for, and methods of, detecting the direction and focal properties of neutral particle beams
05/20/1997US5630952 Plasma-arc power supply apparatus
05/20/1997CA2136203C Improved electrode for high current density plasma arc torch
05/20/1997CA2136202C Plasma arc torch ignition method
05/14/1997EP0772957A1 Electrode for a plasma arc torch
05/13/1997US5628924 Very long electrode life-time and improper electrical discharge prevention due to excellent heat resistance
05/13/1997US5628831 Method for cleaning contaminants from a body in space using a space charge neutral plasma
05/09/1997WO1997016947A1 Plasma torch
05/09/1997WO1997016246A1 Unibody gas plasma source technology
05/09/1997WO1996041897A3 Durable plasma treatment apparatus and method
05/07/1997EP0772203A1 Device for generating and exploiting the thermonuclear micro-fusion
05/07/1997EP0771483A1 Plasma superconfinement generator for producing positive or negative ions in a gaseous medium
05/07/1997EP0771469A1 Method of and apparatus for microwave-plasma production
05/07/1997EP0752924A4 Apparatus and method for starting a plasma arc treatment system
05/07/1997EP0650557B1 Fixed plasma motor
05/07/1997DE19540587A1 Plasmabrenner Plasma torch
05/07/1997DE19540543A1 Apparatus for coating a substrate by means of a chemical vapour deposition process
05/07/1997CN1149237A Strike enhancement circuit for plasma generator
05/06/1997US5627435 Hollow cathode array and method of cleaning sheet stock therewith
05/06/1997US5626714 Method for detecting etching endpoint and etching apparatus and etching system using the method thereof
05/06/1997US5626679 Method and apparatus for preparing a silicon oxide film
05/06/1997US5626249 Plasmalysis treatment method for waste matter
05/02/1997EP0640426B1 Electric arc plasma torch
05/02/1997EP0524970B1 Process and apparatus for reducing electrode wear in a plasma arc torch
04/1997
04/29/1997US5625259 Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube
04/29/1997US5624586 Alignment device and method for a plasma arc torch system
04/24/1997WO1997014528A1 Plasmalysis treatment method for waste matter
04/24/1997DE19627497A1 Zündsteigerungsschaltkreis für einen Plasmagenerator Zündsteigerungsschaltkreis for a plasma generator
04/23/1997CN1148105A Plasma etching apparatus utilizing plasma confinement
04/22/1997US5622635 Method for enhanced inductive coupling to plasmas with reduced sputter contamination
04/17/1997WO1997014278A1 Method and device for providing plasma
04/17/1997WO1997014172A1 Method and apparatus for plasma processing
04/17/1997WO1997013886A1 Method for deposition of diamondlike carbon films
04/17/1997CA2234153A1 Method and device for providing plasma
04/16/1997EP0768702A1 Gas injection slit nozzle for a plasma process reactor
04/15/1997US5620617 Circuitry and method for maintaining a plasma arc during operation of a plasma arc torch system
04/15/1997US5620616 Plasma torch electrode
04/09/1997EP0767483A1 Device for coating substrates in vacuum
04/09/1997EP0767001A1 Surface treatment method by gas jetting and surface treatment device
04/09/1997EP0570484B1 System for generating a high density plasma
04/08/1997US5618382 Using inert gas withing plasma reactor for soft etching, cleaning
04/08/1997US5617717 Flame stabilization system for aircraft jet engine augmentor using plasma plume ignitors
04/03/1997WO1997012502A1 Methods and apparatus for generating plasma
04/03/1997WO1997012372A1 A compound plasma configuration, and method and apparatus for generating a compound plasma configuration