Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
04/1997
04/03/1997DE19536150A1 Appts. for gas control of a torch of a plasma cutting plant
04/02/1997EP0766502A1 Single cathode plasma gun with powder feed along central axis of exit barrel
04/02/1997EP0586370B1 A method for generating and exploiting a plasma ball or a similar phenomenon in a chamber and the chamber
04/02/1997CN2251243Y Magnetic declination filtering guide-tube type cathod arc plasma source
04/01/1997US5616225 Use of multiple anodes in a magnetron for improving the uniformity of its plasma
03/1997
03/27/1997WO1997011587A1 Method and device for measuring ion flow in a plasma
03/26/1997EP0764968A2 Method for radiofrequency wave etching
03/26/1997EP0674805B1 Process for carrying out stable low pressure discharge processes
03/25/1997US5614110 Varying protective gas composition between piercing and cutting with plasma torch
03/25/1997US5614055 High density plasma CVD and etching reactor
03/25/1997US5614025 Plasma processing apparatus
03/20/1997WO1997010688A1 Method and apparatus for plasma cvd
03/20/1997WO1997010605A1 Fusion reactor that produces net power from the p-b11 reaction
03/20/1997WO1997004478A3 Plasma treatment apparatus for large area substrates
03/20/1997DE19636750A1 Nozzle unit for plasma torches allowing inclined cutting and welding
03/20/1997DE19548606A1 Initiating operation of plasma cutting machine
03/20/1997CA2231756A1 Fusion reactor that produces net power from the p-b11 reaction
03/19/1997EP0653147A4 On-site, biohazardous waste disposal system.
03/19/1997EP0530297B1 A process for the surface treatment of powder particles
03/18/1997US5611947 Induction steam plasma torch for generating a steam plasma for treating a feed slurry
03/18/1997US5611899 Device for suppressing flashovers in cathode sputtering installations
03/18/1997US5611896 Production of fluorocarbon compounds
03/18/1997US5611862 Method and apparatus for manufacturing head drums coated with diamond-like carbon coating film using high-frequency plasma
03/12/1997EP0762518A2 Improvements in or relating to semiconductor devices
03/12/1997EP0761415A2 Method and apparatus for surface pretreatment of articles
03/12/1997EP0628235B1 Method for making a sealed passage in a refractory composite part, and application to the production of a refractory composite structure cooled by fluid circulation
03/11/1997US5609777 Electric-arc plasma steam torch
03/11/1997US5609736 Methods and apparatus for controlling toxic compounds using catalysis-assisted non-thermal plasma
03/11/1997US5609690 Vacuum plasma processing apparatus and method
03/06/1997WO1997008734A1 Plasma reactor having an inductive antenna coupling power through a parallel plate electrode
03/06/1997DE19532435A1 Unit generating plasma for surface treatment of substrates by e.g. plasma polymerisation or hard facing
03/05/1997EP0760160A1 Soft plasma ignition in plasma processing chambers
03/05/1997EP0759829A1 Process for cleaning a device for welding under protective gas
03/05/1997EP0753241A4 Plasma gas mixture for sterilizer and method
03/05/1997EP0633821B1 Welding assembly for feeding powdered filler material into a torch
03/04/1997US5607542 Generation of plasma for reactive ion etching
02/1997
02/26/1997EP0759215A1 Pulse power generating circuit with energy recovery
02/26/1997CN2248442Y Small size plasma nozzle for metal surface intensification
02/26/1997CN1143853A Plasma-arc power supply apparatus
02/25/1997US5606588 Method and apparatus for generating laser plasma x-rays
02/25/1997US5605640 Reactor for the treatment of particulate matter by electrical discharge
02/25/1997US5605637 Adjustable dc bias control in a plasma reactor
02/25/1997US5605599 Method of generating plasma having high ion density for substrate processing operation
02/25/1997US5605576 High frequency magnetron plasma apparatus
02/20/1997WO1997005994A1 Chemical vapor deposition and powder formation using thermal spray with near supercritical and supercritical fluid solutions
02/18/1997US5604776 Method for making a sealed passage in a refractory composite part with a plastically deformable metal lining which seals passage walls, and application of the production of a refractory composite structure cooled by fluid circulation
02/18/1997US5603893 Pollution treatment cells energized by short pulses
02/12/1997EP0757972A2 Plasma furnace
02/12/1997EP0757884A1 Method of forming a fluorinated silicon oxide layer using plasma chemical vapor deposition
02/12/1997EP0724652A4 Method and apparatus for sputtering magnetic target materials
02/12/1997EP0616755B1 A torch device for chemical processes
02/11/1997US5601734 Electrode for a plasma arc torch
02/11/1997US5601653 Apparatus for performing plasma process on semiconductor wafers and the like and method of performing plasma process
02/06/1997WO1997004626A1 Electrodynamic confinement
02/06/1997WO1997004478A2 Plasma treatment apparatus for large area substrates
02/06/1997WO1997003746A1 Process and device for the plasma-chemical decomposition and/or destruction of harmful substances
02/05/1997EP0757374A1 Etching electrode and manufacturing process thereof
01/1997
01/30/1997WO1997003279A1 Combustion of nanopartitioned fuel
01/30/1997WO1997002919A1 Plasma torch
01/30/1997WO1997002917A1 Highly efficient processing method based on high density radical reaction and using rotary electrode, apparatus therefor and rotating electrode used therefor
01/30/1997CA2226562A1 Plasma torch
01/29/1997EP0756318A1 Method for real-time in-situ monitoring of a trench formation process
01/29/1997EP0756309A1 Plasma systems for processing substrates
01/29/1997EP0755461A1 Process and device for ion-supported vacuum coating
01/29/1997EP0605534B1 Apparatus for rapid plasma treatments and method
01/29/1997EP0526560B1 Swirl ring and flow control process for a plasma arc torch
01/28/1997US5597624 Optical fibers
01/28/1997US5597497 Switch mechanism for operating a plasma arc torch, other tools or weapons
01/28/1997US5597439 Process gas inlet and distribution passages
01/23/1997WO1997002593A1 An improved method and apparatus for detecting optimal endpoints in plasma etch processes
01/23/1997WO1997002589A1 Power segmented electrode
01/23/1997WO1997002588A1 Low inductance large area coil for an inductively coupled plasma source
01/22/1997EP0722376A4 Treatment of particulate matter by electrical discharge
01/22/1997EP0641270B1 Plasma arc torch ignition method
01/22/1997EP0533884B1 High performance induction plasma torch with a water-cooled ceramic confinement tube
01/21/1997US5595627 Plasma etching method
01/16/1997WO1997001848A1 Fuel pellets for thermonuclear reactions
01/16/1997WO1997001655A1 A scalable helicon wave plasma processing device with a non-cylindrical source chamber
01/15/1997EP0753881A1 Plasma etching apparatus utilising plasma confinement
01/15/1997EP0753876A2 Aliasing sampler for plasma probe detection
01/15/1997EP0753241A1 Plasma gas mixture for sterilizer and method
01/15/1997EP0752924A1 Apparatus and method for starting a plasma arc treatment system
01/15/1997EP0721514A4 Magnetically enhanced multiple capacitive plasma generation apparatus and related method
01/14/1997US5593740 Method and apparatus for making carbon-encapsulated ultrafine metal particles
01/14/1997US5593649 Canister with plasma gas mixture for sterilizer
01/14/1997US5593550 Modifying slip characteristics of surface of elongated passageway in polymeric tubing, e. g., by forming glow discharge in gas in passageway of plastic tubing by reactance coupling using pulsed radio frequency power
01/08/1997EP0610392B1 Methods for treating a work surface
01/07/1997US5592055 Radio-frequency plasma source
01/07/1997US5591493 Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber
01/07/1997US5591357 Plasma arc cutting process and apparatus using an oxygen-rich gas shield
01/07/1997US5591356 Plasma torch having cylindrical velocity reduction space between electrode end and nozzle orifice
01/02/1997EP0750832A1 Apparatus for treating metal surfaces with a magnetically impelled arc
01/02/1997DE19513345A1 Electron cyclotron resonance ion source with cylindrical cavity and hollow conductor
12/1996
12/31/1996US5589737 Plasma processor for large workpieces
12/31/1996US5589727 Energy storage system
12/31/1996US5589427 Substantially spherical particles of lithium silicates with improved mechanical properties and impaired surface quality
12/31/1996US5589041 Plasma sputter etching system with reduced particle contamination
12/27/1996WO1996041897A2 Durable plasma treatment apparatus and method
12/27/1996EP0750451A1 Plasma torch with electromagnetic coil for independent and integral arc base displacement
12/27/1996EP0750450A1 Plasma torch having an essentially axisymmetrical general structure