Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05H - Plasma technique; Production of accelerated electrically- charged particles or of neutrons; Production or acceleration of neutral molecular or atomic beams › H05H 1 - Generating plasma; Handling plasma
Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
12/1996
12/27/1996EP0750449A1 Plasma torch head and plasma torch equipped with it
12/27/1996EP0750448A1 Plasma torch external cooling device
12/27/1996EP0737256A4 Microwave plasma reactor
12/27/1996EP0700577A4 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
12/27/1996EP0632847B1 Process for coating a substrate with a material giving a polished effect
12/24/1996US5587226 Porcelain-coated antenna for radio-frequency driven plasma source
12/24/1996US5587205 Plasma processing method and an apparatus for carrying out the same
12/24/1996US5587093 Safe potential arc channel enhanced arc head
12/24/1996CA2179654A1 Plasma torch with integrated independant coil
12/21/1996CA2179535A1 External cooling device for plasma torch
12/19/1996WO1996041505A1 Microwave-driven plasma spraying apparatus and method for spraying
12/19/1996WO1996041366A1 Plasma processing system with reduced particle contamination
12/19/1996WO1996041365A1 Plasma sputter etching system with reduced particle contamination
12/19/1996WO1996041034A1 Electrically tunable coatings
12/19/1996DE19521419A1 One-piece arc evapn. unit esp. cathode
12/19/1996DE19521387A1 Matching or adaptor network tuning method e.g. for HF plasma generation
12/19/1996CA2224068A1 Electrically tunable coatings
12/18/1996EP0749149A2 Plasma processing apparatus
12/18/1996EP0749148A2 Plasma processing apparatus
12/18/1996EP0749147A2 Method and device for controlling the electrical current density over a workpiece during heat treatment by plasma
12/17/1996US5585766 Plasma processing system for use in fabricating electronic devices
12/17/1996US5585020 Process for the production of nanoparticles
12/17/1996US5585012 Self-cleaning polymer-free top electrode for parallel electrode etch operation
12/12/1996WO1996039794A1 Power supply for multielectrode discharge
12/11/1996EP0748149A1 Plasma arc torch having water injection nozzle assembly
12/11/1996EP0747928A1 Electrode designs for controlling uniformity profiles in plasma processing reactors
12/11/1996EP0696327B1 An electrical method for conversion of molecular weights of particulates
12/10/1996US5583895 Method for making a sealed passage in a refractory composite part, and application to the production of a refractory composite structure cooled by fluid circulation
12/05/1996WO1996039011A1 Slow-wave high-power discharge cavity operating in the radiofrequency range
12/05/1996WO1996038848A1 Energy storage device
12/05/1996WO1996038311A1 Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
12/05/1996CA2222620A1 Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
12/05/1996CA2219033A1 Energy storage device
12/04/1996EP0746017A2 Method of forming connection hole
12/03/1996US5581155 Plasma accelerator with closed electron drift
12/03/1996US5580385 Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber
12/03/1996US5579705 Plasma furnace and a method of operating the same
11/1996
11/28/1996WO1996037690A1 Process and device for treating exhaust gas
11/26/1996US5579332 Plasma light source
11/26/1996US5578165 Coil configurations for improved uniformity in inductively coupled plasma systems
11/21/1996WO1996036984A1 Electrode clamping assembly and method for assembly and use thereof
11/21/1996DE19518970C1 Verfahren und Vorrichtung zur Behandlung von Abgas Method and apparatus for treatment of exhaust gas
11/21/1996DE19518598A1 Method for evaluating spectral lines emitted from inductively coupled plasma
11/21/1996DE19518182A1 Arc striking surge diverter for plasma cutting machine
11/21/1996CA2220678A1 Electrode clamping assembly and method for assembly and use thereof
11/20/1996EP0743811A1 Direct current arc plasma torch, specially conceived for the obtention of a chemical body by decomposition of a plasma gas
11/20/1996EP0742994A1 Plasma-generating device
11/20/1996CA2174571A1 Direct current arc plasma torch, especially for obtaining a chemical body through plasma gas decomposition
11/19/1996US5577092 Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources
11/19/1996US5576593 Apparatus for accelerating electrically charged particles
11/19/1996US5576071 Injecting hydrogen gas to react with carbon in layer
11/19/1996US5575887 Semiconductors
11/19/1996US5575883 Apparatus and process for fabricating semiconductor devices
11/13/1996EP0742579A2 A method and apparatus for concentrating plasma on a substrate surface during processing
11/13/1996EP0742577A2 Inductively and multi-capacitively coupled plasma reactor
11/13/1996EP0742572A2 Method of making plasma display apparatus
11/13/1996EP0546121B1 High velocity electric-arc spray apparatus and method of forming materials
11/12/1996US5574410 Impedance matching network
11/12/1996US5573682 Plasma spray nozzle with low overspray and collimated flow
11/12/1996US5573597 Plasma processing system with reduced particle contamination
11/12/1996US5573596 Arc suppression in a plasma processing system
11/12/1996US5573595 Methods and apparatus for generating plasma
11/06/1996EP0741404A1 A method and an electrode system for excitation of a plasma
11/05/1996US5572170 Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
11/05/1996US5571577 Method and apparatus for plasma treatment of a surface
11/05/1996US5571576 Method of forming a fluorinated silicon oxide layer using plasma chemical vapor deposition
10/1996
10/30/1996EP0740328A2 Method and apparatus for producing plasma uniformity in a magnetic field-enhanced plasma reactor
10/30/1996EP0740327A2 Ion beam processing apparatus
10/29/1996US5570175 Method for determination of degree of molecular dissociation in plasma using combined electrostatic measurement and emission spectroscopy
10/29/1996US5569397 Plasma torch
10/29/1996US5569363 Having shade on inner wall covering protected zone of wall opposite inductive coil to prevent accumulation of sputtered material and formation of eddy currents
10/29/1996US5569356 Dry plasma etching
10/24/1996WO1996033597A1 Electrode for plasma arc torch
10/24/1996WO1996033130A1 Apparatus and method for producing an antibiotic liquid
10/24/1996CA2218332A1 Electrode for plasma arc torch
10/23/1996EP0739155A1 Device for generating two or more plasma discharges within a single waveguide tube
10/23/1996EP0610177B1 Plasma torch
10/23/1996CN1134217A Plasma torch
10/22/1996US5568015 Fluid-cooled dielectric window for a plasma system
10/17/1996WO1996032827A1 Field controlled plasma discharge printing device
10/17/1996CA2220027A1 Field controlled plasma discharge printing device
10/16/1996EP0737256A1 Microwave plasma reactor
10/16/1996EP0685003B1 Method of stabilizing plasma generation by an electron-beam evaporator
10/15/1996US5565738 Plasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamber
10/15/1996US5565737 Aliasing sampler for plasma probe detection
10/15/1996US5565681 Ion energy analyzer with an electrically controlled geometric filter
10/15/1996US5565249 Method for producing diamond by a DC plasma jet
10/15/1996US5565118 Self starting plasma plume igniter for aircraft jet engine
10/15/1996US5565036 Apparatus and method for igniting plasma in a process module
10/10/1996WO1996031898A1 Method and device for controlling the energy of at least one charged species bombarding a body immersed in a plasma
10/09/1996EP0736320A1 Process and device for the continuous removal of nitrogen oxides from combustion engine exhaust gases
10/09/1996CN1132930A Plasma treating device
10/08/1996US5562841 Methods and apparatus for treating a work surface
10/08/1996US5562775 Plasma downstream processing
10/02/1996EP0735805A1 Electric arc plasma torch
10/02/1996EP0734463A1 Gas diffuser plate assembly and rf electrode
10/02/1996EP0734459A1 Plasma-activated vapour-deposition process and device
10/02/1996DE19511915A1 Plasma burner with micro-wave generator e.g. for diamond coating of objects
10/01/1996US5560844 Liquid film stabilized induction plasma torch
10/01/1996US5560779 Apparatus for synthesizing diamond films utilizing an arc plasma
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