Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
06/2005
06/15/2005EP1540695A2 A method and apparatus for the compensation of edge ring wear in a plasma processing chamber
06/15/2005EP1540694A1 Method and apparatus for producing uniform processing rates
06/15/2005CN1206698C Device for producing excited/ionized particles in plasma
06/15/2005CN1206384C Method for forming nano TiO2 light catalystic active agenbt coating on substrate
06/14/2005US6906280 Provides high voltage electrical discharge into gaseous medium; destroying air pollutants; breaking into smaller molecules for efficient combustion
06/14/2005US6905969 Plasma etch reactor and method
06/12/2005CA2487970A1 Plasma arc torch deflector nozzle
06/09/2005WO2005017937A3 Sensor array for measuring plasma characteristics in plasma processing enviroments
06/09/2005WO2004090943A3 Plasma uniformity
06/09/2005US20050122050 Multi-phase alternating current plasma generator
06/09/2005US20050121321 Ignition device
06/09/2005US20050121305 Irradiating a surface with plasma of a corona discharge produced by a pulse voltage between pointed ends of the discharge electrodes where a magnetic field and charged particles are formed; activated plasma becomes a pushing force moving the particles to the treated surface; uniformcoatings; efficiency
06/09/2005US20050120960 Substrate holder for plasma processing
06/09/2005US20050120754 Vitrification furnace and method with dual heating means
06/09/2005DE10353313A1 Device for the selective reduction of nitrogen oxides contained in I.C. engine exhaust gases comprises a nitrogen monoxide production unit having a plasma generator with an air or exhaust gas channel with a reaction region
06/09/2005DE10259831B4 Plasmagenerator Plasma generator
06/08/2005EP1538656A1 System for plasma treatment of gases in a vacuum pump
06/08/2005EP1537766A1 Generation of diffuse non-thermal atmospheric plasmas
06/08/2005EP1537597A1 Sputtering cathode, production method and corresponding cathode
06/08/2005EP1537596A1 Plasma processing apparatus and plasma processing method
06/08/2005EP1537591A1 An electrostatic fluid accelerator for and method of controlling a fluid flow
06/08/2005EP1536910A1 Radial pulsed arc discharge gun for synthesizing nanopowders
06/08/2005CN1625624A Method for hydrophilizing materials using hydrophilic polymeric materials with discrete charges
06/08/2005CN1204981C Container with material coating having barrier effect and method and apparatus for making same
06/08/2005CA2484679A1 Plasma-cutting torch with integrated high frequency starter
06/07/2005US6903521 Electromagnetic induced accelerator
06/07/2005US6903301 Comprises electrode, tip, and initiator which is movable against resilient bias
06/07/2005US6902646 Sensor array for measuring plasma characteristics in plasma processing environments
06/07/2005CA2250915C Hall effect plasma accelerator and thrusters
06/02/2005WO2005004556A3 Vortex reactor and method of using it
06/02/2005US20050118810 Method of cleaning surface of semiconductor substrate, method of manufacturing thin film, method of manufacturing semiconductor device, and semiconductor device
06/02/2005US20050118353 Using a plasma gases to heat a substrate with inert gases such as argon, krypton, helium and xenon and ignition of plasma gases for etching substrates with dielectrics then heat treatment
06/02/2005US20050118351 Method of forming film, electro-optic device and electronic equipment
06/02/2005US20050118350 Generation of plasma jets using a plasma generator,electrical generators and discharging, ionization enthalpy in gas environment, purging gases and forming plasma on surfaces
06/02/2005US20050118094 Plasma synthesis of metal oxide nanoparticles
06/02/2005US20050118090 Continuous, catalytic growth to desired length during passage through furnace
06/02/2005US20050118079 Suppressing generation of nitrogen oxides; low cost; discharge electrodes; photocatalytic decomposition of waste gases
06/02/2005US20050117704 X-ray tube system and apparatus with conductive proximity between cathode and electromagnetic shield
06/02/2005US20050116653 Plasma electron-emitting source
06/02/2005US20050116599 Storage battery on the basis of a high frequency plasma
06/02/2005US20050115933 Plasma generators, reactor systems and related methods
06/02/2005US20050115932 Method of improving the service life of a plasma torch electrode
06/02/2005US20050115822 Sputtering cathode and device and method for coating a substrate with several layers
06/02/2005US20050115673 On-wafer monitoring system
06/02/2005US20050115504 Method and apparatus for forming thin films, method for manufacturing solar cell, and solar cell
06/02/2005US20050115500 Thermal spraying instrument
06/02/2005US20050115361 Methods and apparatus for spray forming, atomization and heat transfer
06/02/2005DE102004054092A1 Zündvorrichtung Primer
06/01/2005EP1536671A1 Plasma processing device
06/01/2005EP1535307A2 Discharge radiation source, in particular uv radiation
06/01/2005EP1535303A1 Gas tube end cap for a microwave plasma generator
06/01/2005EP1451846B1 Electron source
06/01/2005EP1355734A4 Activated water apparatus and methods
06/01/2005EP1226343B1 Low power compact plasma fuel converter
06/01/2005EP1123641B1 Gas-filled particle accelerator with a pulsed plasma source
06/01/2005CN2703025Y Plasma surface processing device
06/01/2005CN1621743A Plasma multi-stage cracking technology and apparatus capable of processing multiple organic wastes simultaneously
06/01/2005CN1621352A Plasma synthesis of metal oxide nanoparticles
06/01/2005CN1204685C Fuzzy logic tuning of RF matching network
06/01/2005CN1204591C Plasma focus light source with improved pulse power system
06/01/2005CN1204399C Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma
05/2005
05/31/2005US6901136 X-ray tube system and apparatus with conductive proximity between cathode and electromagnetic shield
05/31/2005US6900592 Method and apparatus for stabilizing of the glow plasma discharges
05/31/2005US6900408 Centralized control architecture for a plasma arc system
05/31/2005US6899817 Device and method for etching a substrate using an inductively coupled plasma
05/31/2005US6899799 Providing a sputtering gas into a chamber at a pressure below 20 mTorr, applying radio frequency to a coil to ionize the sputtering gas to form a plasma, sputtering a target to sputter target material toward a workpiece
05/31/2005US6899787 Plasma processing apparatus and plasma processing system with reduced feeding loss, and method for stabilizing the apparatus and system
05/31/2005US6899527 Closed-drift hall effect plasma vacuum pump for process reactors
05/31/2005US6899054 Device for hybrid plasma processing
05/26/2005WO2005048662A1 Method for generating high-temperature high-density plasma by cusp cross-section pinch
05/26/2005WO2005047180A1 Method for producing nanostructured carbon material, nanostructured carbon material produced by such method, and substrate having such nanostructured carbon material
05/26/2005WO2005022623B1 High aspect ratio etch using modulation of rf powers of various frequencies
05/26/2005US20050112289 By heating and spraying lanthanum oxide (La2O3), lanthanum aluminate (LaAlO3), magnesium lanthanum aluminate (MgLaAl11O19), and/or a mixture of La2O3 and Al2O3; wear resistant undercoatings
05/26/2005US20050109739 Gas generator for a sterilizing system
05/26/2005US20050109738 Color coding of plasma arc torch parts and part sets
05/26/2005US20050109736 One-piece consumable assembly
05/26/2005US20050109279 Surface wave excitation plasma CVD system
05/25/2005EP1532355A1 Low current plasmatron fuel converter having enlarged volume discharges
05/25/2005EP1532286A1 Component protected against corrosion and method for the production thereof and device for carrying out said method
05/25/2005DE102004043441A1 Assembly to measure atoms or molecules in gas associated e.g. with gas chromatography, gas discharge lasers or surface cleaning
05/25/2005CN1620711A Apparatus and method for radio frequency decoupling and bias voltage control in a plasma reactor
05/25/2005CN1619767A Plasma chamber having multiple RF source frequencies
05/25/2005CN1618562A Motion control device for a head of a machine for plasma cutting, oxygen cutting and the like
05/24/2005US6897402 Plasma-arc spray anode and gun body
05/24/2005US6897156 Vacuum plasma processor method
05/24/2005US6896854 Nonthermal plasma systems and methods for natural gas and heavy hydrocarbon co-conversion
05/24/2005US6896765 Method and apparatus for the compensation of edge ring wear in a plasma processing chamber
05/19/2005WO2005046296A2 Device for controlling the electronic temperature in an ecr plasma
05/19/2005WO2005045899A2 Low temperature deposition of silicone nitride
05/19/2005WO2005045873A2 Plasma processing system and plasma treatment process
05/19/2005US20050106873 Plasma chamber having multiple RF source frequencies
05/19/2005US20050106094 Method for forming nanostructured carbons, nanostructured carbons and a substrate having nanostructured carbons formed thereby
05/19/2005US20050104605 Sensor and electrode extraction structure and method
05/19/2005US20050103778 Microwave desorder
05/19/2005US20050103752 Plasma arc cutting torch nozzle
05/19/2005US20050103442 Chamber configuration for confining a plasma
05/19/2005US20050103439 Stabilization of electronegative plasmas with feedback control of RF generator systems
05/19/2005US20050103267 Flat panel display manufacturing apparatus
05/19/2005DE20380291U1 Brennerkopf für Schweißbrenner sowie Gasdüse, Kontaktdüse und Isolierdüse für einen solchen Brennerkopf Burner head for welding torch and gas nozzle, contact tip and insulating for such a burner head
05/18/2005EP1531652A2 Plasma arc cutting torch nozzle