| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/24/2013 | WO2013011922A1 Polishing pad |
| 01/24/2013 | WO2013011921A1 Polishing pad |
| 01/24/2013 | WO2013011854A1 Wire saw |
| 01/24/2013 | WO2013011850A1 Method for manufacturing electronic component and adhesive sheet used in method for manufacturing electronic component |
| 01/24/2013 | WO2013011806A1 Bonding system, substrate processing system, and bonding method |
| 01/24/2013 | WO2013011788A1 Method for forming pattern and method for manufacturing electric wiring substrate |
| 01/24/2013 | WO2013011787A1 Method for manufacturing semiconductor device |
| 01/24/2013 | WO2013011776A1 Substrate processing device, and manufacturing device for thin-film solar cell |
| 01/24/2013 | WO2013011759A1 Semiconductor device manufacturing method |
| 01/24/2013 | WO2013011751A1 Silicon carbide substrate, semiconductor device, method for producing silicon carbide substrate, and method for manufacturing semiconductor device |
| 01/24/2013 | WO2013011740A1 Method for manufacturing semiconductor device |
| 01/24/2013 | WO2013011711A1 Stage device and stage control system |
| 01/24/2013 | WO2013011705A1 Processing method of substrate for semiconductor elements |
| 01/24/2013 | WO2013011673A1 Cleaning method, processing device, and storage medium |
| 01/24/2013 | WO2013011657A1 Ion beam generating apparatus, and ion beam plasma processing apparatus |
| 01/24/2013 | WO2013011617A1 Semiconductor device and method for manufacturing same |
| 01/24/2013 | WO2013011600A1 Method for driving semiconductor storage device |
| 01/24/2013 | WO2013011548A1 Method for manufacturing semiconductor device |
| 01/24/2013 | WO2013011547A1 Projection optical system and projection exposure device |
| 01/24/2013 | WO2013011399A1 Vaccum nano electronic switching and circuit elements. |
| 01/24/2013 | WO2013011372A1 Method for separating a layer from a composite structure |
| 01/24/2013 | WO2013010533A1 Group iii nitride-based layer sequence, component, and production method |
| 01/24/2013 | WO2013010352A1 Method for packaging low-k chip |
| 01/24/2013 | WO2013010340A1 Semiconductor device structure and manufacturing method thereof |
| 01/24/2013 | WO2013010299A1 Semiconductor device and method for manufacturing same |
| 01/24/2013 | WO2012166313A3 Apparatus and methods for positioning a substrate using capacitive sensors |
| 01/24/2013 | WO2012166265A3 Apparatus and methods for dry etch with edge, side and back protection |
| 01/24/2013 | WO2012166264A3 Dynamic ion radical sieve and ion radical aperture for an inductively coupled plasma (icp) reactor |
| 01/24/2013 | WO2012165822A3 Apparatus and method for forming an encapsulation material for a light-emitting device |
| 01/24/2013 | WO2012162196A3 Methods for improved growth of group iii nitride buffer layers |
| 01/24/2013 | WO2012158464A3 Gan hemts with a back gate connected to the source |
| 01/24/2013 | WO2012157894A3 Method and apparatus for forming a graphene pattern using a delamination technique |
| 01/24/2013 | WO2012154454A3 Mitigation of silicide formation on wafer bevel |
| 01/24/2013 | WO2012151167A3 Euv lithography flare calculation and compensation |
| 01/24/2013 | WO2012148827A3 Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspection |
| 01/24/2013 | WO2012145418A3 Construction of reference spectra with variations in environmental effects |
| 01/24/2013 | WO2012145205A3 Hot wire atomic layer deposition apparatus and methods of use |
| 01/24/2013 | WO2012129162A3 Methods of making patterned structures of materials, patterned structures of materials, and methods of using same |
| 01/24/2013 | WO2012116226A3 Predictive link processing |
| 01/24/2013 | WO2012115907A3 Edge ring for a thermal processing chamber |
| 01/24/2013 | WO2012106223A3 Pre-cut wafer applied underfill film on dicing tape |
| 01/24/2013 | WO2012097092A3 Laser removal of conductive seed layers |
| 01/24/2013 | WO2012082702A3 Chemical mechanical planarization (cmp) pad conditioner and method of making |
| 01/24/2013 | US20130023130 Stirring apparatus for combinatorial processing |
| 01/24/2013 | US20130023129 Pressure transmitter for a semiconductor processing environment |
| 01/24/2013 | US20130023128 Method for manufacturing nitride semiconductor substrate |
| 01/24/2013 | US20130023127 Method of forming a contact hole and apparatus for performing the same |
| 01/24/2013 | US20130023126 Method for the manufacture of electronic devices with purified fluorine |
| 01/24/2013 | US20130023125 Methods and apparatus for atomic layer etching |
| 01/24/2013 | US20130023124 Method of patterning a low-k dielectric film |
| 01/24/2013 | US20130023123 Method of removing a photoresist from a low-k dielectric film |
| 01/24/2013 | US20130023122 Method of multiple patterning of a low-k dielectric film |
| 01/24/2013 | US20130023121 Double patterning method using tilt-angle deposition |
| 01/24/2013 | US20130023120 Method of forming mask pattern and method of manufacturing semiconductor device |
| 01/24/2013 | US20130023119 Methods for fabricating semiconductor devices |
| 01/24/2013 | US20130023118 Method for forming pattern and method for fabricating semiconductor device using the same |
| 01/24/2013 | US20130023117 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
| 01/24/2013 | US20130023116 Method for the formation of co film and method for the formation of cu interconnection film |
| 01/24/2013 | US20130023115 Borderless Contacts in Semiconductor Devices |
| 01/24/2013 | US20130023114 Method for making semiconductor device |
| 01/24/2013 | US20130023113 Method for manufacturing semiconductor device |
| 01/24/2013 | US20130023112 Methods for post dopant implant purge treatment |
| 01/24/2013 | US20130023111 Low temperature methods and apparatus for microwave crystal regrowth |
| 01/24/2013 | US20130023110 Method and apparatus for forming amorphous silicon film |
| 01/24/2013 | US20130023109 Temporary Wafer Bonding Method for Semiconductor Processing |
| 01/24/2013 | US20130023108 Method for manufacturing soi substrate |
| 01/24/2013 | US20130023107 Method of processing device wafer |
| 01/24/2013 | US20130023106 Device having memristive memory |
| 01/24/2013 | US20130023105 Memory device with a textured lowered electrode |
| 01/24/2013 | US20130023104 Method for manufacturing semiconductor device |
| 01/24/2013 | US20130023103 Method for fabricating semiconductor device by using stress memorization technique |
| 01/24/2013 | US20130023102 Method of manufacturing semiconductor device |
| 01/24/2013 | US20130023100 Method of fabricating semiconductor device |
| 01/24/2013 | US20130023099 Method of manufacturing nonvolatile semiconductor memory device |
| 01/24/2013 | US20130023098 Manufacturing method for metal gate |
| 01/24/2013 | US20130023097 U-mos trench profile optimization and etch damage removal using microwaves |
| 01/24/2013 | US20130023096 Single crystal u-mos gates using microwave crystal regrowth |
| 01/24/2013 | US20130023095 Method of manufacturing device |
| 01/24/2013 | US20130023094 Method of fabricating an integrated circuit device |
| 01/24/2013 | US20130023093 Recessed contact for multi-gate fet optimizing series resistance |
| 01/24/2013 | US20130023092 Method of manufacturing semiconductor device |
| 01/24/2013 | US20130023091 Fused buss for plating features on a semiconductor die |
| 01/24/2013 | US20130023090 Fiber soi substrate, semiconductor device using this, and manufacturing method thereof |
| 01/24/2013 | US20130023089 Less expensive high power plastic surface mount package |
| 01/24/2013 | US20130023088 Methods of forming fully embedded bumpless build-up layer packages and structures formed thereby |
| 01/24/2013 | US20130023087 Method for processing oxide semiconductor film and method for manufacturing semiconductor device |
| 01/24/2013 | US20130023086 Active matrix substrate, display panel provided with same, and method for manufacturing active matrix substrate |
| 01/24/2013 | US20130023085 Method for forming metal oxides and silicides in a memory device |
| 01/24/2013 | US20130023082 Apparatus and Method of Wafer Bonding Using Compatible Alloy |
| 01/24/2013 | US20130023081 Method for fabricating integrated circuit |
| 01/24/2013 | US20130023080 Chemical vapor deposition and method of manufacturing light-emitting device using chemical vapor deposition |
| 01/24/2013 | US20130023070 Production method for oxidized carbon thin film, and element having oxidized carbon thin film and production method therefor |
| 01/24/2013 | US20130023069 Method for checking ion implantation condition and method for manufacturing semiconductor wafer |
| 01/24/2013 | US20130023067 Methods for Improving Integrated Photonic Device Uniformity |
| 01/24/2013 | US20130023066 System and method for increasing productivity of organic light emitting diode material screening |
| 01/24/2013 | US20130023065 Apparatus and Methods for End Point Determination in Reactive Ion Etching |
| 01/24/2013 | US20130023064 Negative Ion Control for Dielectric Etch |
| 01/24/2013 | US20130023063 Method for manufacturing ferroelectric device |
| 01/24/2013 | US20130023062 Thin film manufacturing apparatus, thin film manufacturing method and method for manufacturing semiconductor device |
| 01/24/2013 | US20130022759 Plasma processing method and apparatus |