Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2013
01/30/2013CN102903633A Methods for fabricating anode shorted field stop insulated gate bipolar transistor
01/30/2013CN102903632A Manufacture method of Schottky diode NiCr barrier low-temperature alloy
01/30/2013CN102903631A Annealing technology for transferring graphene by GaN substrate and device manufactured thereby
01/30/2013CN102903630A Method for curing defects in a semiconductor layer
01/30/2013CN102903629A Photoactive compound gradient photoresist
01/30/2013CN102903628A Manufacturing method of semiconductor device
01/30/2013CN102903627A Masking method for deep etching based on buffer layer
01/30/2013CN102903626A Silicon nitride coating method with silicon wafer surface cleaning function
01/30/2013CN102903625A Germanium-base substrate surface passivation method
01/30/2013CN102903624A Temperature-controlled semiconductor processing device
01/30/2013CN102903623A Method for manufacturing gate structure
01/30/2013CN102903622A Manufacturing method of memory
01/30/2013CN102903621A Production method of semiconductor device
01/30/2013CN102903620A Method for forming dielectric layer
01/30/2013CN102903619A Crystalline silicon diffusion process for realizing deep-freeze low surface concentration
01/30/2013CN102903618A AlN substrate-based graphene CVD direct epitaxial growth method and manufactured device
01/30/2013CN102903617A GaN substrate-based graphene CVD direct epitaxial growth method and manufactured device
01/30/2013CN102903616A ZnO substrate-based graphene CVD direct epitaxial growth method and manufactured device
01/30/2013CN102903615A Preparation method of p type GaN and AlGaN semiconductor material
01/30/2013CN102903614A Method for preparing non-polar A face GaN thin film
01/30/2013CN102903613A Method for eliminating bridging in contact hole technique
01/30/2013CN102903612A Manufacture method of metal-oxide-metal capacitor
01/30/2013CN102903611A Metal-dielectric-metal capacitor and manufacturing method thereof
01/30/2013CN102903610A Process for manufacturing a semiconductor structure comprising a functionalized layer on a support substrate
01/30/2013CN102903609A Method of hard mask CD control by Ar sputtering
01/30/2013CN102903608A Preparation method of nano patterned sapphire substrate
01/30/2013CN102903607A Method for preparing substrate with buried insulation layers by selective etching
01/30/2013CN102903606A Multi-cavity semiconductor processing device
01/30/2013CN102903605A Semiconductor processing device and control method
01/30/2013CN102903604A Opening type semiconductor processing device
01/30/2013CN102903592A Baffle and substrate treating apparatus including the same
01/30/2013CN102902165A Device for laminated virtual mask and integration method of silicon photonics integrated chip
01/30/2013CN102902123A Solar liquid crystal panel and manufacturing method thereof
01/30/2013CN102902118A In-plane switching mode liquid crystal display device and method of fabricating the same
01/30/2013CN102902111A Method of forming transparent electrode and fabricating array substrate for liquid crystal display device
01/30/2013CN102899723A One hundred millimeter high purity semi-insulating single crystal silicon carbide wafer
01/30/2013CN102898951A Polishing reagent liquid composition for semiconductor chip, polishing reagent liquid and preparation method thereof
01/30/2013CN102896714A Molding die set and resin molding apparatus having same
01/30/2013CN102896703A Processing apparatus
01/30/2013CN102896114A Novel flat-mouth type equipment for cleaning by atmospheric-pressure double-dielectric barrier active radicals
01/30/2013CN102315177B Processing method of high pressure resistant passivation protection diode chip
01/30/2013CN102304700B Preparation method of nitrogen-doped zinc oxide film
01/30/2013CN102280487B Power MOSFET (Metal-Oxide -Semiconductor Field Effect Transistor) device of novel groove structure and manufacture method thereof
01/30/2013CN102270645B Display device and manufacturing method thereof
01/30/2013CN102254940B Low-capacitance transistor power device and manufacturing method thereof
01/30/2013CN102225874B 湿蚀刻溶液 Wet etch solution
01/30/2013CN102208451B Metal insulated gate field effect transistor structure for high-voltage integrated circuit and preparation method thereof
01/30/2013CN102205522B Gas path positive pressure system used for chemico-mechanical polishing and chemico-mechanical polishing equipment
01/30/2013CN102169819B Method of preparing nanometer metal structure
01/30/2013CN102163559B Manufacturing method of stack device and device chip process method
01/30/2013CN102163540B Three-plate heating plate scanning device for annealing deep ultraviolet laser
01/30/2013CN102157435B Contact hole forming method
01/30/2013CN102157347B High-yield laser heat treatment device and method
01/30/2013CN102157344B Heating-stage scanner for deep ultraviolet laser annealing and annealing process
01/30/2013CN102142461B Grid controlled Schottky junction tunneling field effect transistor and forming method thereof
01/30/2013CN102136439B Method for detecting square resistance of alloy
01/30/2013CN102122615B Method for pretreating solution for wet etching
01/30/2013CN102088036B 集成电路结构 Integrated circuit structure
01/30/2013CN102084475B Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber
01/30/2013CN102077330B Rapid thermal processing chamber with shower head
01/30/2013CN102074572B 集成电路结构 Integrated circuit structure
01/30/2013CN102067278B High efficiency photovoltaic cell and manufacturing method free of metal disulfide barrier material
01/30/2013CN102054745B Method for forming contact hole
01/30/2013CN102054742B Semiconductor porefilling method for three-step power deposition aluminum
01/30/2013CN102054734B Method for improving filling capacity of wafer channel
01/30/2013CN102047400B Wire payout measurement and calibration techniques for a wire bonding machine
01/30/2013CN102047394B Process for cleaning semiconductor element
01/30/2013CN102044485B Metalizing method and method for preventing corrosive defects of copper-aluminum alloy
01/30/2013CN102044478B Method for making metal plug
01/30/2013CN102034725B Automatic substrate positioning and loading device
01/30/2013CN102024788B Semiconductor device for interconnection process and manufacturing method thereof
01/30/2013CN102024786B Semiconductor device for interconnection process and manufacturing method thereof
01/30/2013CN102024754B Method for manufacturing semiconductor device
01/30/2013CN102017098B Method for formation of oxide film for silicon wafer
01/30/2013CN102017069B Silicon monocrystal wafer, method for manufacturing the silicon monocrystal wafer and method for evaluating the silicon monocrystal wafer
01/30/2013CN102013403B Wafer level chip size packaging structure and manufacturing method thereof
01/30/2013CN101996901B Method for manufacturing aluminum pad
01/30/2013CN101990710B High aspect ratio openings
01/30/2013CN101989532B Method for processing products by machine
01/30/2013CN101981684B Methods and apparatuses for large diameter wafer handling
01/30/2013CN101970728B Single-crystal manufacturing apparatus and method for manufacturing single crystal
01/30/2013CN101952952B Wafer-supporting member, method for producing the same, and electrostatic chuck using the same
01/30/2013CN101939821B Plasma immersion ion implantation method using a pure or nearly pure silicon seasoning layer on the chamber interior surfaces
01/30/2013CN101937144B Method of manufacturing liquid crystal display device
01/30/2013CN101924129B Field effect transistor
01/30/2013CN101922611B Gas delivery device and dry etching device
01/30/2013CN101901744B Circular ring-shaped member for plasma process and plasma processing apparatus
01/30/2013CN101894868B Gallium nitride semiconductor device with improved forward conduction
01/30/2013CN101889334B High density FET with integrated schottky
01/30/2013CN101874309B Nitride semiconductor optical device, epitaxial wafer for nitride semiconductor optical device, and method for manufacturing semiconductor light-emitting device
01/30/2013CN101872753B Restoration of electrical and mechanical connectability to an electrical device with a face equipped with contact studs
01/30/2013CN101868561B Sputtering apparatus, and filming method
01/30/2013CN101847590B Method for packaging multi-laminated multi-chip on flexible circuit board and packaging chipset
01/30/2013CN101842712B Insert, tray and electronic component testing apparatus
01/30/2013CN101840938B Gallium nitride heterojunction schottky diode
01/30/2013CN101816061B Parasitic particle suppression in the growth of III-V nitride films using MOCVD and HVPE
01/30/2013CN101771053B Nonvolatile memory device and method of fabricating the same
01/30/2013CN101743626B Method for fabricating a 3-D integrated circuit using a hard mask of silicon-oxynitride on amorphous carbon
01/30/2013CN101728239B Removal method of water vapor on crystal wafer surface
01/30/2013CN101714517B Inspecting apparatus and method