Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2013
01/16/2013CN102881639A Method for improving KINK defect in dual damascene process
01/16/2013CN102881638A Damascene process with air gaps
01/16/2013CN102881637A Systems and methods for back end of line processing of semiconductor circuits
01/16/2013CN102881636A Chip, manufacturing method thereof and method for locally rendering a carbonic layer conductivity
01/16/2013CN102881635A Method for forming openings in semiconductor device
01/16/2013CN102881634A Semiconductor device structure and fabrication method thereof
01/16/2013CN102881633A Manufacturing method of copper interconnection structure
01/16/2013CN102881632A Manufacturing method of semiconductor device
01/16/2013CN102881631A Manufacturing method of semiconductor device
01/16/2013CN102881630A Manufacturing method for layer with ultralow dielectric constant
01/16/2013CN102881629A Preparation method of floating grid capable of increasing height of shallow-trench isolating platform column
01/16/2013CN102881628A Method for forming strained silicon shallow trench isolating structure
01/16/2013CN102881627A Method of forming isolation structure
01/16/2013CN102881626A 浅沟槽隔离结构及其制造方法 Shallow trench isolation structure and manufacturing method
01/16/2013CN102881625A Formation methods for isolation structure and semiconductor structure
01/16/2013CN102881624A Stably-running variable-pitch clamp for reversing silicon wafers
01/16/2013CN102881623A Bearing platform
01/16/2013CN102881622A Heater tip used for flip chip
01/16/2013CN102881621A Inverting and aligning method and device
01/16/2013CN102881620A Method for cleaning and saturating quartz boat
01/16/2013CN102881619A Yield monitoring system and monitoring method thereof
01/16/2013CN102881618A Substrate transfer device, substrate processing system, substrate transfer method, and storage medium
01/16/2013CN102881617A Substrate processing method and substrate processing apparatus
01/16/2013CN102881616A Semiconductor device assembly fixture and the use of the semiconductor device manufacturing method
01/16/2013CN102881615A Heat treating equipment and method for semiconductor chip
01/16/2013CN102881614A Biaxial drive mechanism, die bonder and die bonder operating method
01/16/2013CN102881613A Die bonder
01/16/2013CN102881612A Frame feeding system and frame feeding method
01/16/2013CN102881611A Wafer electrical property testing method
01/16/2013CN102881610A Quick quality inspection combination tooling for surface mount diodes
01/16/2013CN102881609A Method for detecting repetitive defect and design weakness of multi-project wafer (MPW) product
01/16/2013CN102881608A Method for detecting carrier mobility in ion well
01/16/2013CN102881607A Novel focal plane array electrical interconnection process
01/16/2013CN102881606A Chip welding device
01/16/2013CN102881605A Method for manufacturing a semiconductor package
01/16/2013CN102881604A Solder bump cleaning before reflow
01/16/2013CN102881603A Biaxial drive mechanism and die bonder
01/16/2013CN102881602A Integrating method of working temperature controllable multi-chip component
01/16/2013CN102881601A High-voltage diode packaging and manufacturing process
01/16/2013CN102881600A Quad flat no-lead (QFN) packaging, repairing and dismantling process
01/16/2013CN102881599A Ball attachment process for ball grid array
01/16/2013CN102881598A Method for manufacturing thin film transistor, method for manufacturing array substrate and display device
01/16/2013CN102881597A Method for manufacturing transistor
01/16/2013CN102881596A Thin-film transistor active device and manufacturing method thereof
01/16/2013CN102881595A Method for manufacturing super-junction high-voltage power device
01/16/2013CN102881594A Method of manufacturing power device
01/16/2013CN102881593A Semiconductor devices with layout controlled channel and associated processes of manufacturing
01/16/2013CN102881592A Manufacturing method for semiconductor device
01/16/2013CN102881591A Fabrication method of semiconductor device
01/16/2013CN102881590A Forming method for repair layer and metal oxide semiconductor transistor structure
01/16/2013CN102881589A Crimping IGBT (insulated gate bipolar transistor) module and method for manufacturing same
01/16/2013CN102881588A Manufacture method of bipolar junction transistor
01/16/2013CN102881587A Novel laminated diode manufacturing process and chip sieve tray thereof
01/16/2013CN102881586A Method for improving flatness of contact hole subjected to tungsten chemical mechanical polishing (CMP)
01/16/2013CN102881585A Manufacturing method for semiconductor device
01/16/2013CN102881584A Manufacturing method for layer with ultralow dielectric constant
01/16/2013CN102881583A Method for improving defects in dual damascene process
01/16/2013CN102881582A Deep silicon etching method
01/16/2013CN102881581A Process of forming slit in substrate and etching gas composition
01/16/2013CN102881580A Method for manufacturing a semiconductor device
01/16/2013CN102881579A Method for improving data retention through corner rounding floating gate and MOS (Metal Oxide Semiconductor) transistor
01/16/2013CN102881578A Method for etching polycrystalline silicon gates
01/16/2013CN102881577A Single crystal u-mos gates using microwave crystal regrowth
01/16/2013CN102881576A Self-aligned source and drain structures and method of manufacturing same
01/16/2013CN102881575A Methods of anneal after deposition of gate layers
01/16/2013CN102881574A Production method for semiconductor element
01/16/2013CN102881573A Transistor and semiconductor device, and production methods of transistor and semiconductor device
01/16/2013CN102881572A Method for preparing crystalline silicon battery back electrode by laser sintering
01/16/2013CN102881571A Active layer ion implantation method and active layer ion implantation method for thin-film transistor
01/16/2013CN102881570A Method for manufacturing semiconductor material
01/16/2013CN102881569A Preparation method of polycrystalline silicon thin film
01/16/2013CN102881568A PN junction and method for preparing same
01/16/2013CN102881567A Dual-diagramming method
01/16/2013CN102881566A Forming method for through-hole graphs
01/16/2013CN102881565A Method for forming metal-oxide-metal (MOM) capacitor
01/16/2013CN102881564A MOM (metal oxide metal) capacitor manufacturing method
01/16/2013CN102881563A Preparation method of polycrystalline silicon film component
01/16/2013CN102881562A Surface passivation method of germanium-based substrate
01/16/2013CN102881561A Method for increasing MOM (mass optical memory) capacitance density
01/16/2013CN102881560A Wafer control method and wafer control equipment
01/16/2013CN102881559A Device and method for preventing water drops from being condensed on mechanical arm
01/16/2013CN102880005A Interference exposure apparatus, interference exposure method, and manufacturing method of semiconductor device
01/16/2013CN102879963A Array substrate and preparation method thereof, liquid crystal display panel and liquid crystal display device
01/16/2013CN102879958A Array substrate, method for manufacturing same and liquid crystal display device
01/16/2013CN102879116A Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device
01/16/2013CN102877041A Film deposition method
01/16/2013CN102877022A Evaporation mask, method of manufacturing evaporation mask, electronic device, and method of manufacturing electronic device
01/16/2013CN102876277A Adhesive composition, circuit connecting material using same, method for connecting circuit members, and circuit connection structure
01/16/2013CN102876245A Adhesive film for semiconductor device, film for backside of flip-chip semiconductor, and dicing tape-integrated film for backside of semiconductor
01/16/2013CN102876236A Cmp polishing liquid, method of polishing substrate, and electronic component
01/16/2013CN102874813A Filler for filling a gap, method of preparing the same and method of manufacturing semiconductor capacitor using the same
01/16/2013CN102874513A Silicon wafer cleaning device and liquid storage pot
01/16/2013CN102873596A Polishing pad, polishing method and polishing system
01/16/2013CN102872742A Container, system and method for blending mixture
01/16/2013CN102381718B Passivant and method for adopting passivant to realize surface pretreatment for germanium-base devices
01/16/2013CN102347217B Method for making fine pattern on semiconductor device
01/16/2013CN102315129B Preparation method of vertical silicon nanowire field effect transistor
01/16/2013CN102314078B Photoetching method
01/16/2013CN102290343B Trench gate manufacturing method for power device
01/16/2013CN102280427B Silicon controlled packaging structure capable of packaging metal and plastic in mixed mode and method thereof