Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2013
01/30/2013CN101681800B Print processing for patterned conductor, semiconductor and dielectric materials
01/30/2013CN101647098B Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components
01/30/2013CN101609254B A resist pattern-improving material and a method for preparing a resist pattern by using the same
01/30/2013CN101594980B Method and arrangement for manufacturing optical products with complex three-dimensional forms
01/30/2013CN101554098B Soft X-ray shielding sheet used in soft X-ray electrostatic removal device and its manufacturing method
01/30/2013CN101549545B Energy-efficient semiconductor plastic package die
01/30/2013CN101546716B Semiconductor device manufacturing method
01/30/2013CN101511494B Preparation method and device of copper interconnection resistance surface
01/30/2013CN101483146B Bonding structure and semiconductor device manufacturing apparatus
01/30/2013CN101442845B Planar heater
01/30/2013CN101355042B Thin plastic leadless package with exposed metal die paddle
01/30/2013CN101156228B A method for fabricating nanogap and nanogap sensor
01/30/2013CN101154564B Substrate processing apparatus
01/29/2013USRE43948 Formation of contacts on semiconductor substrates
01/29/2013USRE43945 Wiring layout of semiconductor device and design method of the same
01/29/2013US8365128 Routing interconnect of integrated circuit designs
01/29/2013US8365106 Method for optimization of light effective source while target pattern is changed
01/29/2013US8364422 Method of presuming interior situation of process chamber and storage medium
01/29/2013US8364304 Methods and apparatus for laser scribing wafers
01/29/2013US8363989 Semiconductor optical interconnection device and semiconductor optical interconnection method
01/29/2013US8363377 Electrostatic chuck and apparatus having the same
01/29/2013US8363219 Lateral shift measurement using an optical technique
01/29/2013US8363208 Lithographic apparatus and device manufacturing method
01/29/2013US8363136 Solid-state imaging device, method of fabricating solid-state imaging device, and camera
01/29/2013US8362830 Power semiconductor device
01/29/2013US8362693 Display device and manufacturing method of display device
01/29/2013US8362627 Reducing underfill keep out zone on substrate used in electronic device processing
01/29/2013US8362624 Multi-chip package and method of manufacturing thereof
01/29/2013US8362623 Semiconductor device and method for manufacturing the same
01/29/2013US8362613 Flip chip device having simplified routing
01/29/2013US8362612 Semiconductor device and manufacturing method thereof
01/29/2013US8362606 Wafer level chip scale package
01/29/2013US8362604 Ferroelectric tunnel FET switch and memory
01/29/2013US8362601 Wire-on-lead package system having leadfingers positioned between paddle extensions and method of manufacture thereof
01/29/2013US8362600 Method and structure to reduce soft error rate susceptibility in semiconductor structures
01/29/2013US8362596 Engineered interconnect dielectric caps having compressive stress and interconnect structures containing same
01/29/2013US8362594 Semiconductor assemblies and methods of manufacturing such assemblies including trench and channel intersects with through-hole in the mold material
01/29/2013US8362590 Power semiconductor component including a potential probe
01/29/2013US8362589 Integrated capacitor with cabled plates
01/29/2013US8362585 Junction barrier Schottky diode with enforced upper contact structure and method for robust packaging
01/29/2013US8362576 Transistor with reduced depletion field width
01/29/2013US8362575 Controlling the shape of source/drain regions in FinFETs
01/29/2013US8362574 Faceted EPI shape and half-wrap around silicide in S/D merged FinFET
01/29/2013US8362571 High compressive stress carbon liners for MOS devices
01/29/2013US8362570 Method for making complementary P and N MOSFET transistors, electronic device including such transistors, and processor including at least one such device
01/29/2013US8362569 Semiconductor device and semiconductor device fabrication method
01/29/2013US8362567 Semiconductor device
01/29/2013US8362566 Stress in trigate devices using complimentary gate fill materials
01/29/2013US8362564 Isolated epitaxial modulation device
01/29/2013US8362538 Memory device, semiconductor device, and electronic device
01/29/2013US8362534 Flux-closed STRAM with electronically reflective insulative spacer
01/29/2013US8362533 Semiconductor device including a transistor and a ferroelectric capacitor
01/29/2013US8362525 Field effect device having a channel of nanofabric and methods of making same
01/29/2013US8362524 Semiconductor device having a fuse element
01/29/2013US8362522 Semiconductor device and method for manufacturing the same
01/29/2013US8362521 III nitride semiconductor crystal, III nitride semiconductor device, and light emitting device
01/29/2013US8362509 Solid state lighting device including heatsink formed by stamping and/or die shaping
01/29/2013US8362504 Light emitting diode device using nanocrystal-metal oxide composite and method for fabricating the same
01/29/2013US8362496 Optical module package unit
01/29/2013US8362486 Solid state image pickup device and method of producing solid state image pickup device
01/29/2013US8362482 Semiconductor device and structure
01/29/2013US8362391 Laser thin film poly-silicon annealing optical system
01/29/2013US8362199 Borazine-based resin, process for its production, borazine-based resin composition, insulating film and method for its formation
01/29/2013US8361910 Pretreatment processes within a batch ALD reactor
01/29/2013US8361909 Method for manufacturing memory element
01/29/2013US8361908 Modified surface material, method for preparing same and uses thereof
01/29/2013US8361906 Ultra high selectivity ashable hard mask film
01/29/2013US8361905 Methods of forming patterns for semiconductor devices
01/29/2013US8361904 Semiconductor device having fine pattern wiring lines integrally formed with contact plug and method of manufacturing same
01/29/2013US8361903 Method and apparatus for ultra thin wafer backside processing
01/29/2013US8361902 Substrate processing apparatus capable of cleaning inside thereof and cleaning control apparatus for controlling cleaning process of substrate processing apparatus
01/29/2013US8361901 Die bonding utilizing a patterned adhesion layer
01/29/2013US8361900 Barrier layer for copper interconnect
01/29/2013US8361899 Microelectronic flip chip packages with solder wetting pads and associated methods of manufacturing
01/29/2013US8361898 Bonding pad structure for back illuminated optoelectronic device and fabricating method thereof
01/29/2013US8361895 Ultra-shallow junctions using atomic-layer doping
01/29/2013US8361894 Methods of forming FinFET semiconductor devices with different fin heights
01/29/2013US8361893 Semiconductor device and substrate with chalcogen doped region
01/29/2013US8361892 Multiple precursor showerhead with by-pass ports
01/29/2013US8361891 Processes for forming channels in thin-film transistors
01/29/2013US8361890 Systems, methods and materials including crystallization of substrates via sub-melt laser anneal, as well as products produced by such processes
01/29/2013US8361889 Strained semiconductor-on-insulator by addition and removal of atoms in a semiconductor-on-insulator
01/29/2013US8361888 Method for manufacturing SOI wafer
01/29/2013US8361887 Method of programming electrical antifuse
01/29/2013US8361886 Method for programming an anti-fuse element, and semiconductor device
01/29/2013US8361885 Group-III nitride semiconductor laser device, method of fabricating group-III nitride semiconductor laser device, and method of estimating damage from formation of scribe groove
01/29/2013US8361884 Plasma dicing and semiconductor devices formed thereof
01/29/2013US8361883 Laser processing method
01/29/2013US8361882 Semiconductor device and method for manufacturing same
01/29/2013US8361881 Method for alternately contacting two wafers
01/29/2013US8361880 Semiconductor light-emitting device with metal support substrate
01/29/2013US8361879 Stress-inducing structures, methods, and materials
01/29/2013US8361878 Method for preparing cerium oxide, cerium oxide prepared therefrom and CMP slurry comprising the same
01/29/2013US8361877 Manufacturing method of semiconductor device, semiconductor device, and method of printing on semiconductor wafer
01/29/2013US8361876 Manufacturing method of semiconductor device
01/29/2013US8361875 Deep trench capacitor on backside of a semiconductor substrate
01/29/2013US8361874 Method of manufacturing semiconductor device
01/29/2013US8361873 Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device
01/29/2013US8361872 High performance low power bulk FET device and method of manufacture
01/29/2013US8361871 Trigate static random-access memory with independent source and drain engineering, and devices made therefrom