Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2013
04/03/2013CN103021868A Method for manufacturing stacked gate type flash memory
04/03/2013CN103021867A Trench metal-oxide-semiconductor barrier Schottky forming method
04/03/2013CN103021866A Preparation technology of single mask self assembly indium tin oxide (ITO) thin film transistor of bottom grid structure
04/03/2013CN103021865A Method for manufacturing metal silicide thin film and ultra-shallow junction and semiconductor device
04/03/2013CN103021864A Silicon On Insulator (SOI) Reduced Surface Field (RESURF) superjunction device structure and production method thereof
04/03/2013CN103021863A Manufacturing methods for accurately aligned and self-balanced superjunction devices
04/03/2013CN103021862A Metal gate device with low temperature oxygen scavenging
04/03/2013CN103021861A Method for forming semiconductor device
04/03/2013CN103021860A Trench transistor
04/03/2013CN103021859A Fabricating method of transistor
04/03/2013CN103021858A Power MOS (Metal Oxide Semiconductor) transistor device with low on resistance and preparation method thereof
04/03/2013CN103021857A Manufacturing method of multi-grid field effect transistor
04/03/2013CN103021856A Method for forming semiconductor structure with super junctions and semiconductor structure
04/03/2013CN103021855A Separate gate flash memory active region manufacturing method
04/03/2013CN103021854A Method for manufacturing fin type field effect transistor and semiconductor structure formed by fin type field effect transistor
04/03/2013CN103021853A Method for processing semiconductor device and semiconductor device
04/03/2013CN103021852A Method for manufacturing high-voltage P type LDMOS
04/03/2013CN103021851A Preparation method of multi-grid-electrode field effect transistor
04/03/2013CN103021850A Semiconductor structure and manufacturing method thereof
04/03/2013CN103021849A N-channel metal oxide semiconductor (NMOS) component manufacturing method using stress memorization technology
04/03/2013CN103021848A Germanium silicon heterojunction tunneling field-effect transistor field-effect transistor and preparation method thereof
04/03/2013CN103021847A Method for realizing gallium-arsenic-antimony double-heterojunction bipolar transistor base electrode metallization
04/03/2013CN103021846A Manufacturing method for triode opening
04/03/2013CN103021845A Microwave processing apparatus and method for processing object to be processed
04/03/2013CN103021844A Epitaxial wafer annealing method
04/03/2013CN103021843A Improved method of bipolar integrated circuit amplification coefficient process
04/03/2013CN103021842A Back seal process for achieving high-speed SiO2 film sedimentation on monocrystalline silicon wafer
04/03/2013CN103021841A Treatment method for removing SixNy residue
04/03/2013CN103021840A Method for preventing over etching of passivation layers
04/03/2013CN103021839A Method for improving adhesive force of nitrogen-free medium antireflection coating film and photoresist
04/03/2013CN103021838A Amorphous carbon processing method and etching method by adopting amorphous carbon as hard mask
04/03/2013CN103021837A Method of processing and forming amorphous carbon layer and production method of semiconductor device
04/03/2013CN103021836A Method for fabricating integrated circuit with reducted plasma damage
04/03/2013CN103021835A Method for forming inclined sidewall by dry etching of GaN-based material
04/03/2013CN103021834A Etching method, etching apparatus, and storage medium
04/03/2013CN103021833A Method for reducing concentration of residual impurities on surface of substrate
04/03/2013CN103021832A Processing technology of appearance improvement of silicon wafer corroded surface through alkali corrosion
04/03/2013CN103021831A Processing method of monocrystalline silicon corrosion piece with long minority carrier service life
04/03/2013CN103021830A 晶片加工方法 Wafer processing method
04/03/2013CN103021829A Silicon nitride etching in a single wafer apparatus
04/03/2013CN103021828A Method for producing an electrode structure
04/03/2013CN103021827A Method for forming finned field effect transistor and complementary metal oxide semiconductor (CMOS) finned field effect transistor
04/03/2013CN103021826A 激光退火装置及激光退火方法 Laser annealing apparatus and a laser annealing method
04/03/2013CN103021825A Manufacturing method of thin film transistor
04/03/2013CN103021824A Method for injecting polysilicon gate in CMOS (complementary metal-oxide-semiconductor transistor) source leak doping
04/03/2013CN103021823A Non-vacuum stepping pass-type rapid selenizing device and selenizing method implemented by same
04/03/2013CN103021822A Method for preparing multilayer film by using aluminum zinc oxide target material
04/03/2013CN103021821A Metal or semiconductor structure on flexible substrate and annealing method of metal or semiconductor
04/03/2013CN103021820A Method of fabricating a thin film transistor and method of fabricating an organic light-emitting display device
04/03/2013CN103021819A Method for forming semiconductor structure with reduced line edge roughness
04/03/2013CN103021818A Conformal microstructure transfer method
04/03/2013CN103021817A Method of cleaning after wet etching
04/03/2013CN103021816A Polyresistor structure, method for manufacturing same and polyresistor
04/03/2013CN103021815A Hybrid coplanar substrate structure and preparation method thereof
04/03/2013CN103021814A Method for preparing epitaxial composite substrate of gallium nitride based semiconducting material
04/03/2013CN103021813A MIM (metal-insulator-metal) capacitor and manufacturing method thereof
04/03/2013CN103021812A Method for preparing III-VOI structure
04/03/2013CN103021811A Wet etching process
04/03/2013CN103021810A Method for cleaning substrate
04/03/2013CN103021809A Drop type method for removing silicon dioxide on edge of silicon wafer
04/03/2013CN103021808A Method for preparing graphene image with specific edge
04/03/2013CN103021807A 晶片粘合方法 Wafer bonding method
04/03/2013CN103021806A Method for preparing silicon nanowire on monocrystalline silicon substrate
04/03/2013CN103021805A Method and system for forming chalcogenide semiconductor materials using sputtering and evaporation functions
04/03/2013CN103021804A Forming a protective film on a back side of a silicon wafer in a III-V family fabrication process
04/03/2013CN103021803A Method for protecting thick metal layer photoetching alignment mark
04/03/2013CN103021802A Production method for detection sample of semiconductor device, and detection sample
04/03/2013CN103021801A Oxygen-doped semi-insulating polycrystalline silicon membrane and manufacturing method thereof
04/03/2013CN103021800A Controlled transverse etching method
04/03/2013CN103021783A Etching method of semiconductor structure
04/03/2013CN103021778A Airflow balancing plate, chamber device and substrate processing device
04/03/2013CN103021777A Ion implantation method and device
04/03/2013CN103021609A Method for designing large-scale thick-film resistor network
04/03/2013CN103019049A Stripping agent containing alkylamide mixture
04/03/2013CN103019045A Silicon wafer platform with anti-collision function
04/03/2013CN103019039A Reticle for exposure, exposure method and production method of semiconductor wafer
04/03/2013CN103018991A Array substrate, manufacturing method thereof and display device
04/03/2013CN103018990A Array substrate, preparation method of array substrate and liquid crystal display device
04/03/2013CN103018989A Array base plate, manufacturing method thereof and liquid crystal display device
04/03/2013CN103018988A TFT-LCD (thin film transistor-liquid crystal display) array substrate, manufacturing method thereof and display device
04/03/2013CN103018986A Array baseplate and preparation and driving methods thereof, and liquid crystal display panel
04/03/2013CN103018977A Array substrate and manufacture method thereof
04/03/2013CN103018974A Liquid crystal display device, polysilicon array substrate and manufacturing method
04/03/2013CN103014866A Group III nitride substrate, epitaxial layer-provided substrate, methods of manufacturing the same, and method of manufacturing semiconductor device
04/03/2013CN103014656A Nickel silicide layer forming method and semiconductor device forming method
04/03/2013CN103013523A Etching agent as well as preparation method and application thereof
04/03/2013CN103013365A Belt for wafer processing
04/03/2013CN103012457A Halogenated organoaminosilane precursors and methods for depositing films comprising same
04/03/2013CN103009385A Robot hand and robot
04/03/2013CN103009382A Transfer robot and substrate processing apparatus
04/03/2013CN103009222A Wax-free polishing process of heavily-doped polished silicon wafer with high local flatness
04/03/2013CN103009206A Manufacturing method for ultrathin and ultrasmall high-precision glass substrate
04/03/2013CN103008298A In-situ backside cleaning of semiconductor substrate
04/03/2013CN103008281A Cleaning tank used for cleaning semiconductor wafers
04/03/2013CN103008175A Coating apparatus and coating method
04/03/2013CN102437196B Low-temperature polycrystalline silicon thin-film transistor and manufacturing method thereof
04/03/2013CN102437113B Repairing method of signal disconnection of active matrix organic light-emitting display array substrate
04/03/2013CN102437112B Method for repairing pixel circuit of active matrix organic light emitting display substrate
04/03/2013CN102403209B Preparation method for ohmic contact electrode based on diamond film field effect transistor
04/03/2013CN102376613B Thimble module of integrated circuit die bonder