Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2013
03/27/2013CN103000517A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
03/27/2013CN103000516A Method of forming a semiconductor structure
03/27/2013CN103000515A Semiconductor device and manufacturing method thereof
03/27/2013CN103000514A Method for detecting blockage of gasification valve of subatmospheric pressure chemical vapor deposition unit
03/27/2013CN103000513A Etching method for porous SiCOH thin film with low dielectric constant
03/27/2013CN103000512A Patterning method of hard mask layer for defining deep trench
03/27/2013CN103000511A Dry metal etching method
03/27/2013CN103000510A Polishing solution for crystalline silicon wafer wet etching
03/27/2013CN103000509A Method for manufacturing display device and etching solution composition
03/27/2013CN103000508A Air draft cover plate of polycrystalline silicon wet etching machine
03/27/2013CN103000507A Method for manufacturing middle-size and large-size chips with brightness and yield improved
03/27/2013CN103000506A Silicide formation and associated devices
03/27/2013CN103000505A Multi-gate device manufacturing method
03/27/2013CN103000504A Semiconductor device and manufacturing method thereof
03/27/2013CN103000503A U-MOS trench profile optimization and etch damage removal using microwaves
03/27/2013CN103000502A Method for implementing aluminum diffusion on silicon wafer
03/27/2013CN103000501A NMOS (N-channel metal oxide semiconductor) transistor forming method
03/27/2013CN103000500A Deep diffusion process for manufacturing diodes
03/27/2013CN103000499A Germanium-silicon-boron epitaxial layer growth method
03/27/2013CN103000498A Graphene nano-ribbon manufacturing method, MOSFET (metal-oxide -semiconductor field effect transistor) and manufacturing method thereof
03/27/2013CN103000497A Method of forming an etch mask
03/27/2013CN103000496A Rapid heating and cooling annealing furnace
03/27/2013CN103000495A Manufacture method of substrate
03/27/2013CN103000494A Methods of forming semiconductor devices having capacitor and via contacts
03/27/2013CN103000493A Method for manufacturing a semiconductor device
03/27/2013CN103000492A Method for fabricating stacked nitride-compound semiconductor structure and method for fabricating nitride-compound semiconductor light emitting device
03/27/2013CN103000491A Manufacturing method for flexible display apparatus
03/27/2013CN103000490A Wafer drying method and device
03/27/2013CN103000482A Etching method and apparatus
03/27/2013CN102998869A Thin film transistor array substrate and manufacturing method thereof as well as display device
03/27/2013CN102998867A Array substrate, display panel, manufacturing method and display device
03/27/2013CN102998866A Array substrate, display device and manufacturing method
03/27/2013CN102998865A Array substrate, as well as manufacture method and display device thereof
03/27/2013CN102998859A Array substrate, preparation method thereof and display device
03/27/2013CN102995021A Etching solution composition and etching method for copper and copper alloy
03/27/2013CN102994981A Substrate processing apparatus and film deposition apparatus
03/27/2013CN102994976A Multi-element substrate, graphene capable of continuously adjusting layer number based on multi-element substrate and preparation method
03/27/2013CN102994974A Manufacturing method of thick oxide film
03/27/2013CN102994966A Scanning mechanism, magnetic control source and magnetron sputtering device
03/27/2013CN102990229A LED (Light Emitting Diode) wafer cutting method
03/27/2013CN102989722A Semiconductor device cleaning method
03/27/2013CN102989705A Cleaning device capable of preventing liquid from splashing and cleaning system with same
03/27/2013CN102989238A Exhaust trap
03/27/2013CN102339860B 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
03/27/2013CN102339852B Semiconductor device and method for manufacturing same
03/27/2013CN102332411B Resin lift device
03/27/2013CN102324392B Preparation process for anti-oxidation copper-based bonding wires
03/27/2013CN102315111B Manufacturing method of double step structure gate electrode and corresponding thin film transistor
03/27/2013CN102314076B Composite mask and manufacturing method thereof
03/27/2013CN102314075B Composite mask and manufacturing method thereof
03/27/2013CN102306620B Laser annealing platform device
03/27/2013CN102299064B Method for oxidizing grid structure
03/27/2013CN102280486B Semiconductor and the manufacturing method thereof
03/27/2013CN102259083B Spin-coating method of thick film used in semiconductor packaging
03/27/2013CN102254799B Method for preparing AZO antireflective film of solar cell
03/27/2013CN102254764B Bearing device of component
03/27/2013CN102247955B Treating fluid supply and pipeline washing system
03/27/2013CN102236221B Display substrate and manufacturing method thereof and thin film transistor driving method
03/27/2013CN102222599B Method and device for optimizing technological process
03/27/2013CN102214600B Method for reducing electromigration of copper in copper interconnection structure and copper interconnection structure
03/27/2013CN102214599B Method for forming through holes
03/27/2013CN102214580B Methods for fabricating a field-effect transistor and a field-effect transistor
03/27/2013CN102211311B Chemical-mechanical polishing equipment
03/27/2013CN102208440B Semiconductor structure and forming method thereof
03/27/2013CN102208419B Method for manufacturing semiconductor device and method for manufacturing display device
03/27/2013CN102208354B Square plane pin-free semiconductor package component and manufacture method thereof
03/27/2013CN102201404B SOI (silicon on insulator)-based ESD (electro-static discharge) protection device and production method thereof
03/27/2013CN102201366B Trench type power semiconductor structure with Schottky diode and manufacturing method thereof
03/27/2013CN102194731B Position calibration system and plasma processing device
03/27/2013CN102194707B Method for manufacturing semiconductor structure
03/27/2013CN102194651B Loading cavity of semiconductor film-forming device
03/27/2013CN102187447B Method for inspecting electrostatic chuck, and electrostatic chuck apparatus
03/27/2013CN102184954B Ge channel device and forming method thereof
03/27/2013CN102184953B Stress GeOI structure and forming method thereof
03/27/2013CN102173345B Pneumatic linear driven chip picking and turning device
03/27/2013CN102169900B Tunnelling field effect transistor based on work function of heterogeneous gate and forming method of tunnelling field effect transistor
03/27/2013CN102169860B Semiconductor structure with passive component structure and manufacturing method thereof
03/27/2013CN102163563B Epoxy resin formulations for underfill applications
03/27/2013CN102157616B Wash solution for removing laser damage layers
03/27/2013CN102157390B Machine station and method for automatically removing defective semiconductor packaged products
03/27/2013CN102152966B Substrate-levitating device
03/27/2013CN102148172B Semiconductor process, semiconductor component and package structure with semiconductor component
03/27/2013CN102148167B Method for manufacturing stackable packaging structure
03/27/2013CN102148158B Body contact device structure and manufacturing method therefor
03/27/2013CN102142386B Device processor
03/27/2013CN102142356B Process monitor and apparatus for producing semiconductor
03/27/2013CN102136430B Semiconductor encapsulating structure and manufacturing method thereof
03/27/2013CN102117777B Method for etching oxide-nitride-oxide interpoly dielectric with wet method
03/27/2013CN102117776B Stacked capacitor structure of embedded type grid word line device and manufacturing method of capacitor
03/27/2013CN102116986B 电子纸显示装置及其制造方法 An electronic paper display device and manufacturing method thereof
03/27/2013CN102113088B Alignment device controller and alignment method
03/27/2013CN102097460B Semiconductor device and its manufacture method
03/27/2013CN102097359B Method for etching contact hole
03/27/2013CN102097356B Method for making shallow trench isolation structure
03/27/2013CN102096412B Information processing apparatus, semiconductor manufacturing system and information processing method
03/27/2013CN102089881B Methods for fabricating gated lateral thyristor-based random access memory (GLTRAM) cells
03/27/2013CN102089861B Vapor phase repair and pore sealing of low-k dielectric materials
03/27/2013CN102088000B Memory unit of electrically erasable programmable read-only memory (EEPROM) and manufacturing method thereof
03/27/2013CN102084300B Fine pattern mask, method for producing the same, and method for forming fine pattern using the mask
03/27/2013CN102082114B Forming method of dual damascene structure
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