Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2013
04/02/2013US8409910 Optical sensor and method for making the same
04/02/2013US8409909 Range modulated implants for image sensors
04/02/2013US8409908 Apparatus for reducing photodiode thermal gain coefficient and method of making same
04/02/2013US8409906 Non-vacuum method for fabrication of a photovoltaic absorber layer
04/02/2013US8409905 Method of forming display device that includes removing mask to form opening in insulating film
04/02/2013US8409904 Methods for forming anti-reflection structures for CMOS image sensors
04/02/2013US8409903 Image sensor with improved color crosstalk
04/02/2013US8409902 Ablation of film stacks in solar cell fabrication processes
04/02/2013US8409901 Low temperature wafer level processing for MEMS devices
04/02/2013US8409900 Fabricating MEMS composite transducer including compliant membrane
04/02/2013US8409898 Assembly system for photovoltaic packages
04/02/2013US8409896 Method of manufacturing semiconductor light emitting device
04/02/2013US8409894 Solid state light emitting semiconductor structure and epitaxy growth method thereof
04/02/2013US8409893 Semiconductor light-emitting element, fabrication method thereof, convex part formed on backing, and convex part formation method for backing
04/02/2013US8409892 Method of selective photo-enhanced wet oxidation for nitride layer regrowth on substrates
04/02/2013US8409891 Display device and manufacturing method thereof
04/02/2013US8409890 Semiconductor device and manufacturing method thereof
04/02/2013US8409889 Method for producing semiconductor optical device
04/02/2013US8409888 Highly integrable edge emitting active optical device and a process for manufacture of the same
04/02/2013US8409887 Organic light emitting diode display device and method of fabricating the same
04/02/2013US8409886 Method of producing image display unit
04/02/2013US8409885 Method for packaging light emitting diode
04/02/2013US8409883 Method for fabricating a phase change memory
04/02/2013US8409882 Differential FET structures for electrical monitoring of overlay
04/02/2013US8409881 Multi-project wafer and method of making same
04/02/2013US8409880 Method for use in making electronic devices having thin-film magnetic components
04/02/2013US8409879 Method of using a buffered electric pulse induced resistance device
04/02/2013US8409787 Method of forming a pattern in a semiconductor device and method of forming a gate using the same
04/02/2013US8409694 Coated glass and method for making the same
04/02/2013US8409467 Polishing liquid for semiconductor integrated circuit
04/02/2013US8409459 Hollow cathode device and method for using the device to control the uniformity of a plasma process
04/02/2013US8409449 Registered structure formation via the application of directed thermal energy to diblock copolymer films
04/02/2013US8409400 Inductive plasma chamber having multi discharge tube bridge
04/02/2013US8409399 Reduced maintenance chemical oxide removal (COR) processing system
04/02/2013US8409398 Control of ion angular distribution function at wafer surface
04/02/2013US8409366 Separation method of nitride semiconductor layer, semiconductor device, manufacturing method thereof, semiconductor wafer, and manufacturing method thereof
04/02/2013US8409355 Low profile process kit
04/02/2013US8409349 Film thickness measurement method, epitaxial wafer production process and epitaxial wafer
04/02/2013US8409308 Process for manufacturing polishing pad
04/02/2013US8408858 Substrate processing system having improved substrate transport system
04/02/2013US8408797 Method of manufacturing bearing device component coated with photoluminescence material, bearing device component and processing device with an indicator displaying information for a signal including information in accordance with light emission of a photoluminescence material applied on bearing device
03/2013
03/28/2013WO2013044201A1 Wafer carrier with flexible pressure plate
03/28/2013WO2013043831A2 Process aware metrology
03/28/2013WO2013043730A2 Electrical contacts to nanostructured areas
03/28/2013WO2013043712A1 Method and system for diffusion and implantation in gallium nitride based devices
03/28/2013WO2013043605A1 Surface stabilization process to reduce dopant diffusion
03/28/2013WO2013043561A1 Atomic layer deposition of hafnium and zirconium oxides for memory applications
03/28/2013WO2013043512A1 Method of forming metal carbide barrier layers for fluorocarbon films
03/28/2013WO2013043507A1 Metal-aluminum alloy films from metal pcai precursors and aluminum precursors
03/28/2013WO2013043501A1 Metal-aluminum alloy films from metal amidinate precursors and aluminum precursors
03/28/2013WO2013043407A1 Structure and method for reducing vertical crack propagation
03/28/2013WO2013043406A1 Method and system for optimization of an image on a substrate to be manufactured using optical lithography
03/28/2013WO2013043402A1 High throughput epitaxial lift off for flexible electronics
03/28/2013WO2013043400A1 Composition and method for polishing aluminum semiconductor substrates
03/28/2013WO2013043330A1 Plasma activated conformal dielectric film deposition
03/28/2013WO2013043184A1 Use of etch process post wordline definition to improve data retention in a flash memory device
03/28/2013WO2013043182A1 Nand memory array with mismatched cell and bitline pitch
03/28/2013WO2013043173A1 Systems and processes that singulate materials
03/28/2013WO2013042959A2 Vacuum drying apparatus
03/28/2013WO2013042919A1 Socket device for an ic test
03/28/2013WO2013042755A1 Organic semiconductor element
03/28/2013WO2013042726A1 Substrate treatment device, substrate treatment method and computer-readable storage medium which stores substrate treatment program
03/28/2013WO2013042724A1 Adhesive composition, adhesive film, adhesive sheet, circuitry connector, method for connecting circuitry member, use of adhesive composition, use of adhesive film, and use of adhesive sheet
03/28/2013WO2013042710A1 Led light source apparatus and exposure apparatus
03/28/2013WO2013042696A1 Semiconductor device
03/28/2013WO2013042679A1 Illuminating optical device, optical system unit, illumination method, and light exposure method and device
03/28/2013WO2013042633A1 Circuitry connecting material and connecting method and connecting structure using same
03/28/2013WO2013042632A1 Circuit connection material, connection method using same, and connection structure
03/28/2013WO2013042629A1 Metal filling device
03/28/2013WO2013042608A1 Semiconductor device and method for manufacturing same
03/28/2013WO2013042562A1 Semiconductor device
03/28/2013WO2013042507A1 Polishing pad
03/28/2013WO2013042504A1 Substrate having buffer layer structure for growing nitride semiconductor layer
03/28/2013WO2013042497A1 Plasma etching method
03/28/2013WO2013042491A1 Semiconductor device manufacturing method
03/28/2013WO2013042489A1 Device for changing pitch of stacked objects
03/28/2013WO2013042467A1 Probe apparatus
03/28/2013WO2013042439A1 Semiconductor device
03/28/2013WO2013042406A1 Electric power semiconductor device
03/28/2013WO2013042382A1 Method for manufacturing composite substrate
03/28/2013WO2013042381A1 Compound substrate manufacturing method and compound substrate
03/28/2013WO2013042350A1 Imprint apparatus and article manufacturing method using same
03/28/2013WO2013042333A1 Silicon carbide semiconductor element and method for manufacturing same
03/28/2013WO2013042327A1 Silicon carbide semiconductor device fabrication method
03/28/2013WO2013042297A1 Gallium nitride compound semiconductor light emitting element and light source device using same
03/28/2013WO2013042225A1 Silicon carbide semiconductor device and method for manufacturing same
03/28/2013WO2013042203A1 Adhesive composition, film adhesive, adhesive sheet, circuit connector and circuit member connection method
03/28/2013WO2013042027A2 Thermal plate with planar thermal zones for semiconductor processing
03/28/2013WO2013041926A1 Method for fabricating a composite structure to be separated by exfoliation
03/28/2013WO2013041424A1 Method for producing an optoelectronic component
03/28/2013WO2013041214A2 Process for the continual and/or sequential deposition of a dielectric layer from the gas phase onto a substrate
03/28/2013WO2013041144A1 Device and method for treating substrate surfaces
03/28/2013WO2013041129A1 Device and method for coating a carrier wafer
03/28/2013WO2013041044A1 Field effect transistor and manufacturing method thereof
03/28/2013WO2013041019A1 Sige heterojunction tunneling field effect transistor and manufacturing method thereof
03/28/2013WO2013040845A1 Semiconductor structure and method for manufacturing same
03/28/2013WO2013040836A1 Controlled lateral etching method
03/28/2013WO2013040833A1 Sram unit and manufacturing method thereof
03/28/2013WO2013040827A1 Calibrating method and device for the on-line film thickness measuring system
03/28/2013WO2013040821A1 Thin film, pattern layer and manufacturing method thereof