Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2013
03/28/2013WO2013040810A1 Method for manufacturing dual-step structure gate electrode and corresponding thin film field effect transistor
03/28/2013WO2013040802A1 Thin film field effect transistor and manufacturing method for same
03/28/2013WO2013040800A1 Exhaust pipe of vacuum pump for chemical vapor deposition machine station and corresponding vacuum pump
03/28/2013WO2013040778A1 Methods and apparatus for cleaning flip chip assemblies
03/28/2013WO2013040751A1 Method for forming air gap interconnect structure
03/28/2013WO2013040714A1 Memory device by complementary bipolar resistance switching in single metal insulator metal cells and method of fabrication thereof
03/28/2013WO2013022622A3 Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
03/28/2013WO2013019499A3 Dicing before grinding after coating
03/28/2013WO2013017466A9 Optoelectronic component and method for producing an optoelectronic component
03/28/2013WO2013017129A3 Structural device comprising a structural element, apparatus for applying the structural element, method for producing the structural device and method for applying the structural element
03/28/2013WO2013016208A3 Reactant delivery system for ald/cvd processes
03/28/2013WO2013001482A9 Semiconductor stocker systems and methods.
03/28/2013WO2012176060A9 Semiconductor cleaner systems and methods
03/28/2013WO2012169747A3 Plasma-generating source comprising a belt-type magnet, and thin-film deposition system using same
03/28/2013WO2012166850A3 Methods for repairing low-k dielectrics using carbon plasma immersion
03/28/2013WO2012165898A3 Apparatus and method for manufacturing ingot
03/28/2013WO2012165853A3 Etching treatment apparatus
03/28/2013WO2012162430A3 Cmp pad dresser having leveled tips and associated methods
03/28/2013WO2012162271A3 Method and system for manufacture of a electronic devices based on localized deposition of precursor gases
03/28/2013WO2012159078A3 Voltage-controlled magnetic anisotropy (vcma) switch and magneto-electric memory (meram)
03/28/2013WO2012149331A3 Optical endpoint detection system
03/28/2013WO2012135236A3 Plasma spraying with mixed feedstock
03/28/2013WO2012107482A3 Power semiconductor module
03/28/2013US20130078915 Interposer Package Structure for Wireless Communication Element, Thermal Enhancement, and EMI Shielding
03/28/2013US20130078823 Method of manufacturing semiconductor device and substrate processing apparatus
03/28/2013US20130078822 Heat treatment method for heating substrate by irradiating substrate with flash of light
03/28/2013US20130078821 Imprint method, imprint apparatus, and manufacturing method of semiconductor device
03/28/2013US20130078820 Imprint method, imprint apparatus, and method of manufacturing semiconductor device
03/28/2013US20130078819 Method for cleaning & passivating gallium arsenide surface autologous oxide and depositing al2o3 dielectric
03/28/2013US20130078818 Semiconductor process
03/28/2013US20130078817 Method of forming film, method of forming pattern, and method of manufacturing semiconductor device
03/28/2013US20130078816 Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
03/28/2013US20130078815 Method for forming semiconductor structure with reduced line edge roughness
03/28/2013US20130078814 Resist underlayer film forming composition containing silicon having anion group
03/28/2013US20130078813 Pattern forming method
03/28/2013US20130078812 Wafer Carrier with Flexible Pressure Plate
03/28/2013US20130078811 Slurry for chemical-mechanical polishing of metals and use thereof
03/28/2013US20130078810 Method and apparatus for performing a polishing process in semiconductor fabrication
03/28/2013US20130078809 Silicon nitride etching in a single wafer apparatus
03/28/2013US20130078808 Electroless deposition solutions and process control
03/28/2013US20130078807 Wafer level chip scale package having an enhanced heat exchange efficiency with an emf shield and a method for fabricating the same
03/28/2013US20130078806 Method for Fabricating Copper Interconnections in an Ultra Low Dielectric Constant Film
03/28/2013US20130078805 Semiconductor device manufacturing method
03/28/2013US20130078804 Method for fabricating integrated devices with reducted plasma damage
03/28/2013US20130078803 Semiconductor device including a circuit area and a monitor area having a plurality of monitor layers and method for manufacturing the same
03/28/2013US20130078802 Heat treatment method for growing silicide
03/28/2013US20130078801 Manufacture methods of double layer gate electrode and relevant thin film transistor
03/28/2013US20130078800 Method for fabricating mos transistor
03/28/2013US20130078799 Method of forming metal carbide barrier layers for fluorocarbon films
03/28/2013US20130078798 Method for improving the electromigration resistance in the copper interconnection process
03/28/2013US20130078797 Method for manufacturing a copper-diffusion barrier layer used in nano integrated circuit
03/28/2013US20130078796 Process for making a patterned metal oxide structure
03/28/2013US20130078795 Etch stop layer for memory cell reliability improvement
03/28/2013US20130078793 Method for depositing a gate oxide and a gate electrode selectively
03/28/2013US20130078792 Semiconductor process
03/28/2013US20130078791 Semiconductor device fabrication methods with enhanced control in recessing processes
03/28/2013US20130078790 Carbon materials for carbon implantation
03/28/2013US20130078789 Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
03/28/2013US20130078788 Producing method of semiconductor device and production device used therefor
03/28/2013US20130078787 Method for manufacturing semiconductor device
03/28/2013US20130078786 Heat treatment method for promoting crystallization of high dielectric constant film
03/28/2013US20130078785 Method for trimming a structure obtained by the assembly of two plates
03/28/2013US20130078784 Cmp slurry and method for manufacturing semiconductor device
03/28/2013US20130078783 Forming a protective film on a back side of a silicon wafer in a iii-v family fabrication process
03/28/2013US20130078782 Method for manufacturing semiconductor device
03/28/2013US20130078780 Semiconductor process
03/28/2013US20130078779 Metal gate device with low temperature oxygen scavenging
03/28/2013US20130078778 Semiconductor process
03/28/2013US20130078777 Method for fabricating junctionless transistor
03/28/2013US20130078776 Methods of Manufacturing a Three-Dimensional Semiconductor Device
03/28/2013US20130078775 Method of fabricating memory
03/28/2013US20130078774 Method for forming dope regions with rapid thermal process
03/28/2013US20130078773 Method for manufacturing CMOS FET
03/28/2013US20130078772 Tilt Implantation for Forming FinFETs
03/28/2013US20130078771 Method for manufacturing silicon carbide semiconductor device
03/28/2013US20130078770 Method for producing semiconductor device
03/28/2013US20130078769 Method for producing semiconductor device
03/28/2013US20130078768 Nest mechanism with recessed wall segments
03/28/2013US20130078767 Methods for fabricating integrated circuit systems including high reliability die under-fill
03/28/2013US20130078766 Method for manufacturing semiconductor apparatus
03/28/2013US20130078765 On-Chip Heat Spreader
03/28/2013US20130078764 Semiconductor device
03/28/2013US20130078763 Multi-chip semiconductor package and method of fabricating the same
03/28/2013US20130078761 Method for manufacturing a flexible transparent 1t1r storage unit based on a completely low-temperature process
03/28/2013US20130078760 Thin film transistor fabricating method
03/28/2013US20130078759 Composition for forming n-type diffusion layer, method of forming n-type diffusion layer, and method of producing photovoltaic cell
03/28/2013US20130078756 Aqueous alkaline etching and cleaning composition and method for treating the surface of silicon substrates
03/28/2013US20130078753 Capped device interconnect in a semiconductor package
03/28/2013US20130078747 Substrate etching method and substrate etching apparatus
03/28/2013US20130078746 Reticle defect correction by second exposure
03/28/2013US20130078745 Production Flow and Reusable Testing Method
03/28/2013US20130078744 Heat treatment method and heat treatment apparatus of thin film
03/28/2013US20130078743 Method and Apparatus For Depositing A Layer On A Semiconductor Wafer by Vapor Deposition In A Process Chamber
03/28/2013US20130078061 Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium
03/28/2013US20130078060 Transfer robot and substrate processing apparatus
03/28/2013US20130078057 Load lock fast pump vent
03/28/2013US20130077381 Highly integrated programmable non-volatile memory and manufacturing method thereof
03/28/2013US20130077379 Semiconductor memory device, semiconductor device and method of manufacturing semiconductor memory device
03/28/2013US20130077095 Faraday shield integrated into sensor bandage
03/28/2013US20130076834 Inkjet head and method for producing the same
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