| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/04/2013 | WO2013045355A1 Method for fabricating an optoelectronic nitride compound semiconductor component |
| 04/04/2013 | WO2013045348A1 Method for producing a solder joint |
| 04/04/2013 | WO2013045345A2 Layer composite for connecting electronic components comprising a compensation layer, linking layers and connection layers |
| 04/04/2013 | WO2013045190A1 Method for producing an opto-electronic semiconductor chip and corresponding opto-electronic semiconductor chip |
| 04/04/2013 | WO2013045181A1 Method for producing an optoelectronic semiconductor chip and optoelectronic semiconductor chip |
| 04/04/2013 | WO2013044836A1 Array substrate and manufacturing method thereof and display device |
| 04/04/2013 | WO2013044796A1 Array substrate and method for manufacturing same |
| 04/04/2013 | WO2013044783A1 Array substrate and method for manufacturing same and display device |
| 04/04/2013 | WO2013044760A1 Tft array substrate, preparation method thereof and display device |
| 04/04/2013 | WO2013044679A1 Read-only memory and its manufacturing method |
| 04/04/2013 | WO2013044582A1 Semiconductor structure and manufacturing method thereof |
| 04/04/2013 | WO2013044581A1 Semiconductor structure and manufacturing method thereof |
| 04/04/2013 | WO2013044566A1 Chip encapsulation method and encapsulation structure thereof |
| 04/04/2013 | WO2013044430A1 Method for manufacturing a fin field effect transistor and the semiconductor structure formed thereby |
| 04/04/2013 | WO2013044427A1 Semiconductor device and method for fabricating same |
| 04/04/2013 | WO2013023092A3 Robot systems, apparatus, and methods adapted to process substrates in multiple tiers |
| 04/04/2013 | WO2013022306A3 Apparatus for plasma generation, method for manufacturing rotating electrodes for plasma generation apparatus, method for plasma treatment of substrate, and method for forming thin film of mixed structure using plasma |
| 04/04/2013 | WO2013021024A3 Carrier film for a silicon element and method for producing a carrier film for a silicon element |
| 04/04/2013 | WO2013019565A3 Inductive plasma sources for wafer processing and chamber cleaning |
| 04/04/2013 | WO2013019450A3 N-channel and p-channel finfet cell architecture with inter-block insulator |
| 04/04/2013 | WO2013019063A3 Equipment for manufacturing semiconductor for epitaxial process |
| 04/04/2013 | WO2013019061A3 Equipment for manufacturing semiconductor for epitaxial process |
| 04/04/2013 | WO2013017993A9 Method and apparatus for estimating the efficiency of a solar cell |
| 04/04/2013 | WO2013016140A3 Integrated circuit devices having features with reduced edge curvature and methods for manufacturing the same |
| 04/04/2013 | WO2013015894A3 Nucleation of aluminum nitride on a silicon substrate using an ammonia preflow |
| 04/04/2013 | WO2013012682A3 Copper interconnects separated by air gaps and method of making thereof |
| 04/04/2013 | WO2013012562A3 Methods and apparatus for controlling power distribution in substrate processing systems |
| 04/04/2013 | WO2013006865A3 Methods of transferring device wafers or layers between carrier substrates and other surfaces |
| 04/04/2013 | WO2012178059A3 Etching a laser-cut semiconductor before dicing a die attach film (daf) or other material layer |
| 04/04/2013 | WO2012178037A3 Method and system for pre-heating of semiconductor material for laser annealing and gas immersion laser doping |
| 04/04/2013 | WO2012177743A3 Novel thermal processing apparatus |
| 04/04/2013 | WO2012177716A3 N-metal film deposition with initiation layer |
| 04/04/2013 | WO2012177099A3 Apparatus and method for deposition |
| 04/04/2013 | WO2012177065A3 Apparatus and method for deposition |
| 04/04/2013 | WO2012177048A3 Apparatus for fabricating ingot and method for fabricating ingot |
| 04/04/2013 | WO2012177019A3 Method for forming a substrate, and substrate formed thereby |
| 04/04/2013 | WO2012177014A3 Semiconductor device and method for growing semiconductor crystal |
| 04/04/2013 | WO2012177013A3 Apparatus and method for removing defect |
| 04/04/2013 | WO2012177012A3 Apparatus for fabricating ingot |
| 04/04/2013 | WO2012176996A3 Injection member used in the manufacture of a semiconductor, and substrate treatment apparatus having same |
| 04/04/2013 | WO2012173792A3 Laser and plasma etch wafer dicing using physically-removable mask |
| 04/04/2013 | WO2012173758A3 Multi-layer mask for substrate dicing by laser by laser and plasma etch |
| 04/04/2013 | WO2012173438A3 Apparatus for fabricating ingot |
| 04/04/2013 | WO2012173409A3 Apparatus for fabricating ingot |
| 04/04/2013 | WO2012170150A3 Selective deposition of polymer films on bare silicon instead of oxide surface |
| 04/04/2013 | WO2012169858A3 Buffer sheet used in vacuum chuck that adsorbs object to be processed |
| 04/04/2013 | WO2012169850A3 3-dimensional non-volatile memory device and method of manufacturing same |
| 04/04/2013 | WO2012169828A3 Apparatus for fabricating ingot |
| 04/04/2013 | WO2012169801A3 Apparatus for fabricating ingot |
| 04/04/2013 | WO2012169789A3 Apparatus for fabricating ingot and method for fabricating ingot |
| 04/04/2013 | WO2012169754A3 Substrate treating apparatus |
| 04/04/2013 | WO2012169742A3 Coring device for material of high strength and high hardness |
| 04/04/2013 | WO2012165861A3 Substrate processing system and substrate processing method using the same |
| 04/04/2013 | WO2012162197A3 Methods for improved growth of group iii nitride semiconductors |
| 04/04/2013 | WO2012125317A9 Methods and apparatus for conformal doping |
| 04/04/2013 | WO2012123226A3 Component, in particular as a constituent part of a switchgear or control device |
| 04/04/2013 | WO2012118700A9 Wafer bonding system and method for bonding and debonding thereof |
| 04/04/2013 | WO2012087485A3 Rectangular capacitors for dynamic random access memory (dram) and dual-pass lithography methods to form the same |
| 04/04/2013 | WO2012082223A3 Non-volatile storage system with shared bit lines connected to single selection device |
| 04/04/2013 | WO2012042664A9 Soaking apparatus |
| 04/04/2013 | US20130085595 Wafer center finding with kalman filter |
| 04/04/2013 | US20130084715 Method of Fabricating Al2O3 Thin Film Layer |
| 04/04/2013 | US20130084714 Method for Forming Single-Phase Multi-Element Film by PEALD |
| 04/04/2013 | US20130084713 Dielectric layer for semiconductor device and method of manufacturing the same |
| 04/04/2013 | US20130084712 Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer readable recording medium |
| 04/04/2013 | US20130084711 Remote plasma burn-in |
| 04/04/2013 | US20130084710 Substrate processing apparatus and substrate processing method |
| 04/04/2013 | US20130084709 Substrate processing apparatus and substrate processing method |
| 04/04/2013 | US20130084708 Etch with pulsed bias |
| 04/04/2013 | US20130084707 Dry cleaning method for recovering etch process condition |
| 04/04/2013 | US20130084706 Plasma-Tuning Rods in Surface Wave Antenna (SWA) Sources |
| 04/04/2013 | US20130084705 Method for forming pattern, and composition for forming resist underlayer film |
| 04/04/2013 | US20130084704 Method for manufacturing microstructure |
| 04/04/2013 | US20130084703 Restricted stress regions formed in the contact level of a semiconductor device |
| 04/04/2013 | US20130084702 Acrylate polyurethane chemical mechanical polishing layer |
| 04/04/2013 | US20130084701 Treatment method for reducing particles in dual damascene silicon nitride process |
| 04/04/2013 | US20130084700 Method for Selectively Depositing Noble Metals on Metal/Metal Nitride Substrates |
| 04/04/2013 | US20130084699 Selective Metal Deposition Over Dielectric Layers |
| 04/04/2013 | US20130084697 Split gate memory device with gap spacer |
| 04/04/2013 | US20130084696 Method of manufacturing semiconductor device |
| 04/04/2013 | US20130084695 Methods of Forming Diodes |
| 04/04/2013 | US20130084694 Junction avoidance on edges of workpieces |
| 04/04/2013 | US20130084693 Thin film forming method and film forming apparatus |
| 04/04/2013 | US20130084692 Producing vertical transistor having reduced parasitic capacitance |
| 04/04/2013 | US20130084691 Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device |
| 04/04/2013 | US20130084690 Manufacturing apparatus and method for semiconductor device |
| 04/04/2013 | US20130084689 Trap Rich Layer Formation Techniques for Semiconductor Devices |
| 04/04/2013 | US20130084688 Multi-layer pattern for alternate ald processes |
| 04/04/2013 | US20130084687 Method for formation of an electrically conducting through via |
| 04/04/2013 | US20130084686 Discontinuous thin semiconductor wafer surface features |
| 04/04/2013 | US20130084685 Methods for Ion Implantation |
| 04/04/2013 | US20130084684 Manufacturing method of semiconductor device |
| 04/04/2013 | US20130084683 Liquid crystal display device with shield lines on data lines and thin film transistor components |
| 04/04/2013 | US20130084682 Semiconductor device and fabrication method thereof |
| 04/04/2013 | US20130084681 Producing a vertical transistor including reentrant profile |
| 04/04/2013 | US20130084679 Method for producing a power semiconductor arrangement |
| 04/04/2013 | US20130084678 Method Of Manufacturing Package-On-Package (Pop) |
| 04/04/2013 | US20130084677 Method of fabricating a memory card using sip/smt hybrid technology |
| 04/04/2013 | US20130084662 Methods for fabricating planar heater structures for ejection devices |
| 04/04/2013 | US20130084661 Method for manufacturing optical deflector for forming dicing street with double etching |