Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2013
04/09/2013US8415256 Gap-filling with uniform properties
04/09/2013US8415255 Pore sealing and cleaning porous low dielectric constant structures
04/09/2013US8415254 Method for removing dummy poly in a gate last process
04/09/2013US8415253 Low-temperature in-situ removal of oxide from a silicon surface during CMOS epitaxial processing
04/09/2013US8415252 Selective copper encapsulation layer deposition
04/09/2013US8415251 Electric component and component and method for the production thereof
04/09/2013US8415249 Method of manufacturing semiconductor device
04/09/2013US8415248 Self-aligned dual damascene BEOL structures with patternable low-k material and methods of forming same
04/09/2013US8415247 Semiconductor device and method for manufacturing of same
04/09/2013US8415246 Method of forming a high density structure
04/09/2013US8415245 Method of manufacturing semiconductor device and semiconductor device
04/09/2013US8415243 Bumping process and structure thereof
04/09/2013US8415242 Nonvolatile semiconductor memory device and method of manufacturing the same
04/09/2013US8415241 Method of manufacturing silicon carbide semiconductor device
04/09/2013US8415240 Mesoscale pyramids, hole arrays and methods of preparation
04/09/2013US8415239 Method for manufacturing a power semiconductor device
04/09/2013US8415238 Three dimensional integration and methods of through silicon via creation
04/09/2013US8415237 Method of manufacturing semiconductor device and substrate processing apparatus
04/09/2013US8415236 Methods for reducing loading effects during film formation
04/09/2013US8415235 Adhesive, adhesive sheet, and process for producing electronic components
04/09/2013US8415234 Wafer dividing method
04/09/2013US8415233 Wafer processing
04/09/2013US8415232 Dividing method for wafer having die bonding film attached to the back side thereof
04/09/2013US8415231 Photovoltaic device and method for manufacturing the same
04/09/2013US8415230 Method for transferring functional regions, LED array, LED printer head, and LED printer
04/09/2013US8415228 Manufacturing method of SOI substrate and semiconductor device
04/09/2013US8415227 High performance dielectric stack for DRAM capacitor
04/09/2013US8415226 Phase change memory cells and fabrication thereof
04/09/2013US8415225 Methods of manufacturing semiconductor devices
04/09/2013US8415224 Method of fabricating a semiconductor device including forming trenches having particular structures
04/09/2013US8415223 Memory devices and methods of forming memory devices
04/09/2013US8415222 Semiconductor device and method for manufacturing the same
04/09/2013US8415221 Semiconductor devices having encapsulated stressor regions and related fabrication methods
04/09/2013US8415220 Constrained oxidation of suspended micro- and nano-structures
04/09/2013US8415219 Method of manufacturing a DMOS trench transistor
04/09/2013US8415218 Atomic layer deposition epitaxial silicon growth for TFT flash memory cell
04/09/2013US8415217 Patterning a gate stack of a non-volatile memory (NVM) with formation of a capacitor
04/09/2013US8415216 Multi-gate non-planar field effect transistor structure and method of forming the structure using a dopant implant process to tune device drive current
04/09/2013US8415215 Method of manufacturing semiconductor device with multiple implantation steps
04/09/2013US8415214 STI silicon nitride cap for flat FEOL topology
04/09/2013US8415213 Method of manufacturing semiconductor device with offset sidewall structure
04/09/2013US8415212 Method of enhancing photoresist adhesion to rare earth oxides
04/09/2013US8415211 Semiconductor device, method of fabricating the same, and patterning mask utilizied by the method
04/09/2013US8415210 Field effect transistor and method for manufacturing the same
04/09/2013US8415209 Method of manufacturing a complementary nanowire tunnel field effect transistor semiconductor device
04/09/2013US8415208 Semiconductor device and peeling off method and method of manufacturing semiconductor device
04/09/2013US8415207 Module including a sintered joint bonding a semiconductor chip to a copper surface
04/09/2013US8415206 Integrated circuit packaging system with lead frame etching and method of manufacture thereof
04/09/2013US8415205 Integrated circuit packaging system with lead interlocking mechanisms and method of manufacture thereof
04/09/2013US8415204 Integrated circuit packaging system with heat spreader and method of manufacture thereof
04/09/2013US8415203 Method of forming a semiconductor package including two devices
04/09/2013US8415202 Method of manufacturing semiconductor device
04/09/2013US8415201 Dicing tape-integrated film for semiconductor back surface
04/09/2013US8415199 Manufacturing method of semiconductor device
04/09/2013US8415198 Production method of thin film transistor using amorphous oxide semiconductor film
04/09/2013US8415197 Phase change memory device having an improved word line resistance, and methods of making same
04/09/2013US8415195 Method for manufacturing solar cell module
04/09/2013US8415194 Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same
04/09/2013US8415193 Method for manufacturing solid state image forming device, and solid state image forming device
04/09/2013US8415192 Colloidal nanoparticle materials for photodetectors and photovoltaics
04/09/2013US8415189 Methods of fabricating image sensors including impurity layer isolation regions
04/09/2013US8415187 Large-grain crystalline thin-film structures and devices and methods for forming the same
04/09/2013US8415186 Method of super flat chemical mechanical polishing technology and semiconductor elements produced thereof
04/09/2013US8415185 Process for making a slot-type optical waveguide on silicon
04/09/2013US8415183 Wafer level conformal coating for LED devices
04/09/2013US8415181 Light emitting element with improved light extraction efficiency, light emitting device comprising the same, and fabricating method of the light emitting element and the light emitting device
04/09/2013US8415180 Method for fabricating wafer product and method for fabricating gallium nitride based semiconductor optical device
04/09/2013US8415179 Method for manufacturing light emitting diode
04/09/2013US8415178 Process of producing liquid discharge head base material
04/09/2013US8415177 Two-transistor pixel array
04/09/2013US8415176 One-transistor pixel array
04/09/2013US8415175 Identification of dies on a semiconductor wafer
04/09/2013US8415174 Inspection method and manufacturing method of light-emitting device
04/09/2013US8415092 Substrate developing method, substrate processing method and developing solution supply nozzle
04/09/2013US8415000 Patterned inorganic layers, radiation based patterning compositions and corresponding methods
04/09/2013US8414976 Method for disposing a component
04/09/2013US8414968 In-line film forming apparatus and manufacturing method of magnetic recording medium
04/09/2013US8414787 Electron beam processing device and method using carbon nanotube emitter
04/09/2013US8414736 Plasma reactor with tiltable overhead RF inductive source
04/09/2013US8414735 Ring-shaped component for use in a plasma processing, plasma processing apparatus and outer ring-shaped member
04/09/2013US8414734 Versatile system for self-aligning deposition equipment
04/09/2013US8414719 Clamped monolithic showerhead electrode
04/09/2013US8414704 Bonding structure and semiconductor device manufacturing apparatus
04/09/2013US8414702 Plasma processing apparatus
04/09/2013US8414345 3-dimensional display and method of manufacture
04/09/2013US8414242 Processing apparatus and processing method
04/09/2013US8413815 Wafer container with at least one purgeable supporting module having a long slot
04/09/2013US8413814 Front opening unified pod disposed with purgeable supporting module
04/09/2013US8413604 Slotted electrostatic shield modification for improved etch and CVD process uniformity
04/04/2013WO2013049589A1 Electrostatic chuck with temperature control
04/04/2013WO2013049586A1 Electrostatic chuck
04/04/2013WO2013049577A1 Calibration and normalization systems and methods for radiopharmaceutical synthesizers
04/04/2013WO2013049476A1 Controlled surface roughness in vacuum retention
04/04/2013WO2013049367A2 Plasmonic lithography using phase mask
04/04/2013WO2013049354A1 Double spacer quadruple patterning with self-connected hook-up
04/04/2013WO2013049115A1 Epitaxial liftoff for releasing multiple semiconductor device layers
04/04/2013WO2013048872A1 Pretreatment and improved dielectric coverage
04/04/2013WO2013048834A1 Methods of continuously wet etching a patterned substrate
04/04/2013WO2013048769A1 Multi-layer pattern from alternate ald processes
04/04/2013WO2013048767A1 Combined silicon oxide etch and contamination removal process