H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1987
12/23/1987	EP0249968A2 Electron emitting apparatus
12/23/1987	EP0249834A2 Production of fine structures for the establishment of contacts on semi-conductors
12/23/1987	EP0249780A1 Semiconductor device with a wiring layer having a good step coverage at contact holes
12/23/1987	EP0249777A2 Method of making a metal to higher band gap compound semiconductor and contact obtainable by such a method
12/23/1987	EP0249769A2 Patterned image and process for forming a patterned image
12/23/1987	EP0249768A2 Compound semiconductor interface control
12/23/1987	EP0249767A2 Etch solution and method for etching silicon
12/23/1987	EP0249762A1 Identifying semiconductor wafers with bar code patterns thereon
12/23/1987	EP0249755A2 Hybrid integrated circuit apparatus
12/23/1987	EP0249658A2 Ion source device
12/23/1987	EP0249625A1 Ink jet barrier layer and orifice plate printhead and fabrication method.
12/23/1987	EP0077481B1 Planar semiconductor device
12/23/1987	DE3711212A1 Apparatus and method for fabricating integrated circuits or the like from Si or GaAs wafers or the like
12/22/1987	US4714951 Integrated circuit device which includes a continous layer which consists of conducting portions which are of a silicide of a refractory metal and insulating portions which are of an oxide of the metal
12/22/1987	US4714948 HEMT with epitaxial narrow bandgap source/drain contacts isolated from wide bandgap layer
12/22/1987	US4714876 Circuit for initiating test modes
12/22/1987	US4714843 Semiconductor chip power supply monitor circuit arrangement
12/22/1987	US4714842 Integrated injection logic circuits
12/22/1987	US4714810 Means and methods for heating semiconductor ribbons and wafers with microwvaes
12/22/1987	US4714726 Bismaleimide, silver powder, electron donor solvent
12/22/1987	US4714686 Method of forming contact plugs for planarized integrated circuits
12/22/1987	US4714685 Method of fabricating self-aligned silicon-on-insulator like devices
12/22/1987	US4714684 Reflectivity and temperature gradients by forming silicon nitride layer of varying thickness
12/22/1987	US4714668 Silica, alumina films; radiation, selective etching, masking
12/22/1987	US4714594 Unidirectional gas flow
12/22/1987	US4714570 Conductor paste and method of manufacturing a multilayered ceramic body using the paste
12/22/1987	US4714520 Partially filling with etchable material, etching, removing material near top faster than that at bottom filling remainder
12/22/1987	US4714519 Voltage variations
12/22/1987	US4714518 Silicon nitride over silicon
12/22/1987	US4714517 Copper cleaning and passivating for tape automated bonding
12/22/1987	US4714516 Method to produce via holes in polymer dielectrics for multiple electronic circuit chip packaging
12/22/1987	US4714511 Method and apparatus for adhering a tape or sheet to a semiconductor wafer
12/22/1987	US4714504 Advancing through nip of heated application rolls
12/22/1987	US4714086 Apparatus for washing and drying substrates
12/17/1987	WO1987007765A1 Method of making a self-aligned mesfet using a substitutional gate with sidewalls and lift-off
12/17/1987	WO1987007764A1 Samarium-promoted oxidation of silicon and gallium arsenide surfaces
12/17/1987	WO1987007763A1 Method for fabricating devices using chemical vapour deposition, and devices formed thereby
12/17/1987	WO1987007731A1 Electron-beam probing of photodiodes
12/17/1987	WO1987007651A1 Semiconductor manufacturing apparatus
12/17/1987	WO1987007077A3 Method and apparatus for cleaning semiconductor wafers
12/17/1987	WO1987006725A3 Method and apparatus for spreading resin by centrifugation
12/17/1987	DE3719522A1 Integrated circuit card for storing cellular information
12/17/1987	DE3619636A1 Housing for integrated circuits
12/16/1987	EP0249516A1 Cell for epitaxial growth by molecular jets, and associated process
12/16/1987	EP0249455A1 Compound semiconductor structure having graded mole fraction and process for preparation thereof
12/16/1987	EP0249371A2 Semiconductor device including two compound semiconductors, and method of manufacturing such a device
12/16/1987	EP0249325A1 Integrated circuit with channel length indicator
12/16/1987	EP0249256A2 A semiconductor device with an aluminium interconnect layer containing a small percentage of vanadium
12/16/1987	EP0249254A1 Semiconductor device for generating an electron current
12/16/1987	EP0249211A2 Method of manufacturing a thin film transistor
12/16/1987	EP0249173A1 A planarization process for double metal mos using spin-on glass as a sacrificial layer
12/16/1987	EP0249139A2 Resist compositions and use
12/16/1987	EP0249088A1 A semiconductor device
12/16/1987	EP0248993A1 High density vertically structured dynamic memory
12/16/1987	EP0248988A1 Method of producing highly integrated complementary MOS field-effect transistor circuits
12/16/1987	EP0248883A1 Selective deposition process.
12/16/1987	EP0248881A1 Structure and method of fabricating a trapping-mode photodetector
12/16/1987	EP0248841A1 Mesfet device having a semiconductor surface barrier layer
12/16/1987	CN87104657A Method and system for manufacturing semiconductor device
12/16/1987	CN87104656A Process and system for manufacture of semiconductor device
12/15/1987	US4713792 Programmable macrocell using eprom or eeprom transistors for architecture control in programmable logic circuits
12/15/1987	US4713680 Series resistive network
12/15/1987	US4713678 dRAM cell and method
12/15/1987	US4713551 System for measuring the position of a wafer in a cassette
12/15/1987	US4713518 Electronic device manufacturing methods
12/15/1987	US4713358 Method of fabricating recessed gate static induction transistors
12/15/1987	US4713357 Method of making a capacitor with reduced dielectric breakdown
12/15/1987	US4713356 Manufacturing MOS semiconductor device with planarized conductive layer
12/15/1987	US4713355 Forming a thin dielectric wall on edges of emitter area to separate from base contacts
12/15/1987	US4713354 Heat treatment in a gas atmosphere then doping
12/15/1987	US4713329 Doping same region with first and second dopant without additional masking
12/15/1987	US4713260 Method of ensuring adhesion of chemically vapor deposited oxide to gold integrated circuit interconnect lines
12/15/1987	US4713258 Method of forming ultrafine patterns
12/15/1987	US4713145 Immersion in a gel-like precipitated form of phosphoric acid
12/15/1987	US4713142 Method for fabricating EPROM array
12/15/1987	US4713141 Anisotropic plasma etching of tungsten
12/15/1987	US4713140 Laser luminescence monitor for material thickness
12/15/1987	US4712910 Exposure method and apparatus for semiconductor fabrication equipment
12/15/1987	US4712674 Corrugated board containing carbon particles
12/15/1987	US4712291 Process of fabricating TiW/Si self-aligned gate for GaAs MESFETs
12/15/1987	CA1230444A1 Polysilane positive photoresist materials and methods for their use
12/15/1987	CA1230431A1 Technique for doping from a polysilicon transfer layer
12/15/1987	CA1230430A1 Semiconductor device contacts to narrow and closely spaced electrodes
12/15/1987	CA1230429A1 Conductivity-enhanced combined lateral mos/bipolar transistor
12/15/1987	CA1230428A1 Method of manufacturing a semiconductor device comprising a silicon body, in which a sunken oxide layer is locally provided
12/15/1987	CA1230285A1 Method of etching cavities and apertures in substrates and device for carrying out said method
12/10/1987	DE3718769A1 Ttl-kompatible cmos-logik mit geringem leistungsverlust in der eingangsstufe TTL compatible CMOS logic with little loss of power in the input stage
12/10/1987	DE3714144A1 Method of dry etching a silicon nitride film and apparatus for carrying out the method
12/09/1987	EP0248705A1 Apparatus for irradiating electronic circuits
12/09/1987	EP0248668A2 Process for fabricating multilevel metal integrated circuits and structures produced thereby
12/09/1987	EP0248608A1 Output buffer circuits
12/09/1987	EP0248606A2 Submicron bipolar transistor with buried silicide region
12/09/1987	EP0248588A2 Electron beam exposure system
12/09/1987	EP0248566A2 Process for controlling solder joint geometry when surface mounting a leadless integrated circuit package on a substrate
12/09/1987	EP0248445A2 Semiconductor device having a diffusion barrier and process for its production
12/09/1987	EP0248439A1 Field-effect transistor having a delta-doped ohmic contact
12/09/1987	EP0248381A1 Power voltage regulator circuit
12/09/1987	EP0248338A1 Highly pure titanium and process for producing the same
12/09/1987	EP0248314A2 Soldering of electronic components
12/09/1987	EP0248292A2 Semiconductor device having a high breakdown voltage

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