| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/07/2013 | US8435810 Method of manufacturing organic light emitting display device |
| 05/07/2013 | US8435809 Vertical mirror in a silicon photonic circuit |
| 05/07/2013 | US8435808 Light emitting diode package and manufacturing method thereof |
| 05/07/2013 | US8435807 Method for manufacturing a solid state laser having a passive Q-switch |
| 05/07/2013 | US8435806 Method for the manufacture of an optoelectronic component and an optoelectronic component |
| 05/07/2013 | US8435805 Method of manufacturing a substrate for liquid ejection head |
| 05/07/2013 | US8435804 Method and apparatus for forming a thin lamina |
| 05/07/2013 | US8435803 Method for depositing microcrystalline silicon and monitor device of plasma enhanced deposition |
| 05/07/2013 | US8435802 Conductor layout technique to reduce stress-induced void formations |
| 05/07/2013 | US8435721 Resist underlayer film forming composition and forming method of resist pattern using the same |
| 05/07/2013 | US8435702 Manufacturing method of semiconductor device and manufacturing method of mask |
| 05/07/2013 | US8435596 Oxidizing method and oxidizing apparatus |
| 05/07/2013 | US8435416 Method for manufacturing porous structure and method for forming pattern |
| 05/07/2013 | US8435380 Substrate chucking member, substrate processing apparatus having the member, and method of processing substrate using the member |
| 05/07/2013 | US8435379 Substrate cleaning chamber and cleaning and conditioning methods |
| 05/07/2013 | US8435356 Device and method for wet treating disc-like substrates |
| 05/07/2013 | US8435350 Supply device |
| 05/07/2013 | US8435346 Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus |
| 05/07/2013 | US8434993 Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method |
| 05/07/2013 | US8434992 Arm mechanism, and vacuum robot provided with the same |
| 05/07/2013 | US8434937 Method and apparatus for detecting the substrate temperature in a laser anneal system |
| 05/07/2013 | US8434668 Magnetic attachment structure |
| 05/07/2013 | US8434341 Methods and systems for supporting a workpiece and for heat-treating the workpiece |
| 05/02/2013 | WO2013063617A1 Method for forming resistive switching memory elements with improved switching behavior |
| 05/02/2013 | WO2013063603A2 Debonding temporarily bonded semiconductor wafers |
| 05/02/2013 | WO2013063489A1 Heat removal from substrates in vacuum |
| 05/02/2013 | WO2013063360A1 Method for producing thin layers of crystalline or polycrystalline materials |
| 05/02/2013 | WO2013063260A1 High temperature tungsten metallization process |
| 05/02/2013 | WO2013063234A1 Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith |
| 05/02/2013 | WO2013063202A1 Optimization of uv curing |
| 05/02/2013 | WO2013063182A1 High selectivity nitride etch process |
| 05/02/2013 | WO2013062985A1 High fidelity patterning employing a fluorohydrocarbon-containing polymer |
| 05/02/2013 | WO2013062929A1 High efficiency triple-coil inductively coupled plasma source with phase control |
| 05/02/2013 | WO2013062870A1 Component temperature control using a combination of proportional control valves and pulsed valves |
| 05/02/2013 | WO2013062834A1 Plasma reactor with chamber wall temperature control |
| 05/02/2013 | WO2013062833A1 Electrostatic chuck |
| 05/02/2013 | WO2013062831A2 Process chamber for etching low k and other dielectric films |
| 05/02/2013 | WO2013062828A1 Temperature control with stacked proportioning valve |
| 05/02/2013 | WO2013062825A1 Back-contact for thin film solar cells optimized for light trapping for ultrathin absorbers |
| 05/02/2013 | WO2013062819A1 Controllable undercut etching of tin metal gate using dsp+ |
| 05/02/2013 | WO2013062818A1 Quantum cascade structures on metamorphic buffer layer structures |
| 05/02/2013 | WO2013062804A1 Thermal management of edge ring in semiconductor processing |
| 05/02/2013 | WO2013062788A1 Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions |
| 05/02/2013 | WO2013062778A1 Novel method for balancing gas flow among multiple cvd reactors |
| 05/02/2013 | WO2013062756A1 Treatments for decreasing etch rates after flowable deposition of silicon-carbon-and-nitrogen-containing layers |
| 05/02/2013 | WO2013062749A1 Apparatus for sublimating solid state precursors |
| 05/02/2013 | WO2013062748A1 Gas dispersion apparatus |
| 05/02/2013 | WO2013062727A1 Method and apparatus of removing a passivation film and improving contact resistance in rear point contact solar cells |
| 05/02/2013 | WO2013062687A1 Backside-thinned image sensor using a12o3 surface passivation |
| 05/02/2013 | WO2013062612A1 Non-volatile memory devices having vertical drain to gate capacitive coupling |
| 05/02/2013 | WO2013062593A1 3d interconnect structure comprising fine pitch single damascene backside metal redistribution lines combined with through-silicon vias |
| 05/02/2013 | WO2013062590A1 3d interconnect structure comprising through-silicon vias combined with fine pitch backside metal redistribution lines fabricated using a dual damascene type approach |
| 05/02/2013 | WO2013062584A1 Devices including a diamond layer |
| 05/02/2013 | WO2013062488A1 Methods of enriching different species of carbon nanotubes |
| 05/02/2013 | WO2013062414A1 Device for heating a substrate |
| 05/02/2013 | WO2013062381A1 Wafer and method of fabricating the same |
| 05/02/2013 | WO2013062380A1 Wafer and method of fabricating the same |
| 05/02/2013 | WO2013062317A1 Apparatus and method for fabricating epi wafer and epi wafer |
| 05/02/2013 | WO2013062187A1 Multi-gate transistor |
| 05/02/2013 | WO2013062104A1 Manufacturing method of reflective mask blank for euv lithography |
| 05/02/2013 | WO2013062095A1 Reflow film, solder bump formation method, solder joint formation method, and semiconductor device |
| 05/02/2013 | WO2013062068A1 Method of forming film |
| 05/02/2013 | WO2013062066A1 Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device |
| 05/02/2013 | WO2013061950A1 Liquid processing apparatus and liquid processing method |
| 05/02/2013 | WO2013061931A1 Dicing tape for processing semiconductor |
| 05/02/2013 | WO2013061925A1 Adhesive tape for processing semiconductor device |
| 05/02/2013 | WO2013061895A1 Semiconductor device and manufacturing method thereof |
| 05/02/2013 | WO2013061858A1 Illumination optical assembly, exposure apparatus, and device manufacturing method |
| 05/02/2013 | WO2013061831A1 Substrate processing apparatus and substrate processing method |
| 05/02/2013 | WO2013061788A1 Method for manufacturing silicon carbide substrate, and silicon carbide substrate |
| 05/02/2013 | WO2013061771A1 Composition for polishing purposes, polishing method using same, and method for producing substrate |
| 05/02/2013 | WO2013061735A1 Light-emitting diode, method for manufacturing light-emitting diode, light-emitting diode lamp and illumination device |
| 05/02/2013 | WO2013061702A1 Semiconductor device manufacturing method |
| 05/02/2013 | WO2013061695A1 Water-soluble cutting fluid for fixed abrasive grain wire saw, cutting method using same, and recycling method therefor |
| 05/02/2013 | WO2013061670A1 Semiconductor device |
| 05/02/2013 | WO2013061665A1 Test signal mediation substrate |
| 05/02/2013 | WO2013061660A1 Vapor deposition device |
| 05/02/2013 | WO2013061659A1 Vapor deposition device |
| 05/02/2013 | WO2013061656A1 Quantum cascade laser manufacturing method |
| 05/02/2013 | WO2013061649A1 Vapor deposition device |
| 05/02/2013 | WO2013061648A1 Method for etching silicon substrate, etching solution for silicon substrate, and method for producing solar cell |
| 05/02/2013 | WO2013061628A1 Room temperature bonding apparatus |
| 05/02/2013 | WO2013061603A1 Circuit device manufacturing method |
| 05/02/2013 | WO2013061601A1 Pattern-forming method |
| 05/02/2013 | WO2013061593A1 Method of manufacturing a semiconductor device |
| 05/02/2013 | WO2013061574A1 Thin film semiconductor device |
| 05/02/2013 | WO2013061572A1 Film formation method, vacuum treatment device, method for producing semiconductor light-emitting element, semiconductor light-emitting element, and illumination device |
| 05/02/2013 | WO2013061556A1 Liquid-crystal panel and manufacturing method thereof |
| 05/02/2013 | WO2013061553A1 Thin-film semiconductor device and method for manufacturing same |
| 05/02/2013 | WO2013061528A1 Thin film transistor, organic el light emitting element, and method for manufacturing thin film transistor |
| 05/02/2013 | WO2013061519A1 Slurry and slurry manufacturing method |
| 05/02/2013 | WO2013061506A1 Vacuum processing apparatus |
| 05/02/2013 | WO2013061478A1 Resin composition |
| 05/02/2013 | WO2013061476A1 Polysilicon crystal film inspection method and inspection device |
| 05/02/2013 | WO2013061383A1 Thin film semiconductor device and method for producing same |
| 05/02/2013 | WO2013061381A1 Thin film semiconductor device, and method for producing thin film semiconductor device |
| 05/02/2013 | WO2013061198A1 Method and apparatus for processing wafer-shaped articles |
| 05/02/2013 | WO2013061183A1 Molded electrically insulating housing for semiconductor components or assemblies and production method |
| 05/02/2013 | WO2013061047A2 Silicon carbide epitaxy |
| 05/02/2013 | WO2013060975A1 Flip-chip hybridization of microelectronic components by local heating of connecting elements |