Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2013
05/01/2013CN103077892A Method for integrating high electron mobility transistor (HEMT) device on silicon
05/01/2013CN103077891A Super-junction-based gallium nitride HEMT (High Electron Mobility Transistor) device and preparation method thereof
05/01/2013CN103077890A Semiconductor device and fabrication method
05/01/2013CN103077889A Method for thinning back surface of wafer
05/01/2013CN103077888A Method for preparing electrode on single nano wire
05/01/2013CN103077887A Semiconductor device and fabrication method thereof
05/01/2013CN103077886A Growing method of InP (indium phosphide)-based InAs (indium arsenide) quantum well material using antinomy as surface active agent
05/01/2013CN103077885A 受控减薄方法以及半导体衬底 Thinning the semiconductor substrate and a method of controlled
05/01/2013CN103077884A Solution to stripping of thin film
05/01/2013CN103077883A Method for repairing surface defect of wafer
05/01/2013CN103077882A Process control method and system for improving wafer yield
05/01/2013CN103077881A Method for non-epitaxially growing semiconductor
05/01/2013CN103077880A Process method for processing titanium nitride residues on aluminum welding pad
05/01/2013CN103077878A Device for processing a carrier and a method for processing a carrier
05/01/2013CN103076718A Photosensitive resin composition, photosensitive resin laminate, method for forming resist pattern and process for producing printed circuit board, lead frame, semiconductor package and concavoconvex board
05/01/2013CN103076704A Thin film transistor array substrate, manufacturing method thereof and display device
05/01/2013CN103076703A Liquid crystal display panel and manufacturing method thereof
05/01/2013CN103076099A Single-chip integrated infrared focal plane detector
05/01/2013CN103074677A Preparation method for zinc telluride homoepitaxy layer
05/01/2013CN103074676A Edge protection method for achieving growth of semiconductor material having self-peeling function
05/01/2013CN103072073A Polishing process capable of maintaining long service life of silicon wafer polished section minority carrier
05/01/2013CN103071738A Diode lead-out line straightening machine
05/01/2013CN103071650A Wafer brushing device and wafer brushing method
05/01/2013CN102427048B High voltage diode assembly tool and operation method thereof
05/01/2013CN102347311B Semiconductor device and a manufacturing method thereof
05/01/2013CN102315134B Method for flipping chip by quickly raising and reducing temperature
05/01/2013CN102315123B Method for improving etching repeatability of gallium nitride (GaN) high electron mobility transistor (HEMT) grid trench
05/01/2013CN102280374B Manufacturing method of silicon gate structure of 50nm and below
05/01/2013CN102263131B Semiconductor device and formation method thereof
05/01/2013CN102263062B Method for forming side walls of multiple-unit semiconductor device
05/01/2013CN102263050B Device for moving semiconductor crystalline grains on graphite boat
05/01/2013CN102263045B Crosswise thrusting mechanism
05/01/2013CN102263017B Method for manufacturing grid electrode of semiconductor device
05/01/2013CN102254823B Lateral double diffusion metal oxide silicon (LDMOS) transistor and method for making same
05/01/2013CN102254818B Semiconductor junction diode device and method for manufacturing same
05/01/2013CN102254803B Method for manufacturing resistive type memory
05/01/2013CN102244021B Low-k chip encapsulating method
05/01/2013CN102231381B Complementary metal oxide semiconductor (CMOS) image sensor and forming method
05/01/2013CN102214573B Manufacturing method of nano-wire resonance piezoelectric field-effect transistor
05/01/2013CN102194709B Light emitting diode packaging element and manufacture method thereof
05/01/2013CN102194668B Method for forming opening structure in semiconductor device
05/01/2013CN102177574B Substrate conveying apparatus, and substrate conveying method
05/01/2013CN102169837B Preparation method of single electron transistor at room temperature
05/01/2013CN102157564B Preparation method of top gate metal oxide thin film transistor (TFT)
05/01/2013CN102157438B Method for manufacturing wafer-level patch panel
05/01/2013CN102154650B Thick aluminum etching method during producing bipolar integrated circuit
05/01/2013CN102148195B TFT-LCD (thin film transistor-liquid crystal display) array substrate and manufacturing method thereof
05/01/2013CN102148186B Method for manufacturing semiconductor device
05/01/2013CN102148185B Method for forming interconnection structure
05/01/2013CN102136413B Process for removing the edge of a beveled substrate
05/01/2013CN102130057B Method for making complementary metal oxide semiconductor device, and structure of complementary metal oxide semiconductor device
05/01/2013CN102130054B Method for improving divergence of cut-off leakage current of semiconductor device
05/01/2013CN102129955B Method and apparatus for separating adhesive tape
05/01/2013CN102113104B Lithographic process using nanowire mask, and nanoscale devices fabricated using process
05/01/2013CN102110652B Method for manufacturing embedded type semiconductor devices
05/01/2013CN102110648B Method for preparing bulk silicon gate-all-around metal oxide semiconductor field effect transistors
05/01/2013CN102099903B Method for judging pass/fail of bonding, apparatus for judging pass/fail of bonding, and bonding apparatus
05/01/2013CN102097376B Method for manufacturing semiconductor device
05/01/2013CN102096314B Methods of fabricating an imprint mold and of forming a pattern using the imprint mold
05/01/2013CN102084469B 等离子体处理装置 Plasma processing apparatus
05/01/2013CN102077346B Method for fabricating high density pillar structures by double patterning using positive photoresist
05/01/2013CN102077334B Bonding device
05/01/2013CN102054768B Manufacturing method of pixel structure and manufacturing method of contact window opening
05/01/2013CN102054743B Method for forming contact hole in semiconductor device
05/01/2013CN102044515B Package carrier, package structure, and process for fabricating same
05/01/2013CN102033420B Photomask, photomask manufacturing method, pattern transfer method and method for manufacturing liquid crystal display device
05/01/2013CN102023257B Semiconductor apparatus and method for detecting working condition of plasma flood gun (PFG)
05/01/2013CN102005416B Method for separating sapphire substrate by unit on basis of stress action
05/01/2013CN101996843B Plasma processing device and focusing ring
05/01/2013CN101983131B Stencils with removable backings for forming micron-sized features on surfaces and methods of making and using the same
05/01/2013CN101980357B Semiconductor device and mold for resin-molding semiconductor device
05/01/2013CN101971303B Method for Sr-Ti-o-based film formation and storage medium
05/01/2013CN101970595B A chemical mechanical polishing liquid
05/01/2013CN101960631B Process for producing magnetoresistive element and apparatus for producing magnetoresistive element
05/01/2013CN101944528B MOS (Metal Oxide Semiconductor) grid base electrode switching tetrode
05/01/2013CN101937909B An electrical module
05/01/2013CN101923065B Field effect transistor chiral sensor and manufacture method thereof
05/01/2013CN101913046B Welding device for welding diode
05/01/2013CN101911269B Flexible semiconductor device and method for manufacturing same
05/01/2013CN101894779B A method and apparatus for semiconductor processing
05/01/2013CN101889336B Method and apparatus for mounting electric component
05/01/2013CN101884100B Improved substrate compositions and methods for forming semiconductor on insulator devices
05/01/2013CN101882567B Plasma processing apparatus and high frequency short-circuit apparatus
05/01/2013CN101878565B Systems and methods for link processing with ultrafast and nanosecond laser pulses
05/01/2013CN101866981B Thin film deposition process module for manufacturing solar cell, thin film deposition process system for manufacturing solar cell, and cleaning method for thin film deposition process module
05/01/2013CN101859763B Integrated circuit including ESD device
05/01/2013CN101842524B Method for growing aluminum nitride crystal, process for producing aluminum nitride crystal, and aluminum nitride crystal
05/01/2013CN101826545B Integrated circuit self aligned 3d memory array and manufacturing method
05/01/2013CN101809728B Apparatus and method for inspecting semiconductor, and semiconductor device to be inspected
05/01/2013CN101808808B Method and device for manufacturing sheet having fine shape transferred thereon
05/01/2013CN101807553B Preparation method of TFT ARRAY plate having OC material
05/01/2013CN101800191B Method for preparing medium bridge by using polyimide
05/01/2013CN101800189B Method for manufacturing medium bridge by utilizing benzocyclobutene
05/01/2013CN101795961B Tool for making microstructured articles
05/01/2013CN101792655B Abrasive powder for chemical mechanical polishing and method for polishing substrate
05/01/2013CN101777561B Split-gate type nonvolatile storage and production method thereof
05/01/2013CN101764090B Organic light emitting display device and method for manufacturing the same
05/01/2013CN101740499B Array substrate including thin film transistor and method of fabricating the same
05/01/2013CN101687228B Cleaning process and apparatus
05/01/2013CN101666977B Resist composition for immersion exposure and method for manufacturing a semiconductor device using the same