Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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11/24/1992 | US5166754 Alignment system |
11/24/1992 | US5166608 Arrangement for high speed testing of field-effect transistors and memory cells employing the same |
11/24/1992 | US5166603 Probe method |
11/24/1992 | US5166601 Test device for electric circuits on boards |
11/24/1992 | US5166556 Gate array cell |
11/24/1992 | US5166555 Drive circuit comprising a subsidiary drive circuit |
11/24/1992 | US5166547 Programmable DCVS logic circuits |
11/24/1992 | US5166529 Electron beam lithography system |
11/24/1992 | US5166525 Through the wafer optical transmission sensor |
11/24/1992 | US5166365 Chemical intermediates for polyimides or polyesterimides for polymers used in semiconductors |
11/24/1992 | US5166292 Tetracarboxylic acid and diamine curable to imide films for high strength and heat resistance |
11/24/1992 | US5166101 Method for forming a boron phosphorus silicate glass composite layer on a semiconductor wafer |
11/24/1992 | US5166099 Manufacturing method for semiconductor device |
11/24/1992 | US5166098 Method of manufacturing an encapsulated semiconductor device with a can type housing |
11/24/1992 | US5166097 Silicon wafers containing conductive feedthroughs |
11/24/1992 | US5166096 Process for fabricating self-aligned contact studs for semiconductor structures |
11/24/1992 | US5166095 Low contact resistance process |
11/24/1992 | US5166094 Method of fabricating a base-coupled transistor logic |
11/24/1992 | US5166093 Method to reduce the reflectivity of a semi-conductor metallic surface |
11/24/1992 | US5166092 Method of growing compound semiconductor epitaxial layer by atomic layer epitaxy |
11/24/1992 | US5166091 Fabrication method in vertical integration |
11/24/1992 | US5166090 Method for manufacturing a semiconductor random access memory cell |
11/24/1992 | US5166088 Method of manufacturing semiconductor device contact vias in layers comprising silicon nitride and glass |
11/24/1992 | US5166087 Method of fabricating semiconductor element having lightly doped drain (ldd) without using sidewalls |
11/24/1992 | US5166084 Process for fabricating a silicon on insulator field effect transistor |
11/24/1992 | US5166083 Method of integrating heterojunction bipolar transistors with heterojunction FETs and PIN diodes |
11/24/1992 | US5166082 BIMOS transistor devices having bipolar and MOS transistors formed in substrate thereof and process for the fabrication of the same |
11/24/1992 | US5166081 Method of producing a bipolar transistor |
11/24/1992 | US5166080 Techniques for measuring the thickness of a film formed on a substrate |
11/24/1992 | US5166038 Multilayer light sensitive elements with silicon coupling agent and crosslinking |
11/24/1992 | US5166033 Semiconductors or images |
11/24/1992 | US5165984 Stepped multilayer interconnection apparatus and method of making the same |
11/24/1992 | US5165973 Ink jet recording sheet |
11/24/1992 | US5165957 Process for producing multilayer wiring structure |
11/24/1992 | US5165955 From vaporized hydrogen silsesquioxane resin |
11/24/1992 | US5165590 Process for manufacturing integrated device with improved connections between the pins and the semiconductor material chip |
11/24/1992 | US5165521 Die eject system for die bonder |
11/24/1992 | CA1310763C Integrated circuit containing bi-polar and complementary mos transistors on a common substrate and method for the manufacture thereof |
11/22/1992 | WO1992021136A1 Cluster tool soft etch module and ecr plasma generator therefor |
11/22/1992 | CA2102201A1 Cluster tool soft etch module and ecr plasma generator therefor |
11/19/1992 | EP0514297A2 Process for making a contact to a semiconductor device |
11/19/1992 | EP0514213A2 Process for making a package for accommodating electronic elements |
11/19/1992 | EP0514149A1 Thin film capacitor |
11/19/1992 | EP0514103A1 Barrier metal process for sub-micron contacts |
11/19/1992 | EP0514100A2 Fabrication of semiconductor devices in compound semiconductor layers |
11/19/1992 | EP0514095A2 Integrated circuit using SRAM cells |
11/19/1992 | EP0514094A2 Method of fabricating an integrated circuit |
11/19/1992 | EP0514079A2 High electron mobility transistor and method of manufacture |
11/19/1992 | EP0514060A2 DMOS transistor structure & method |
11/19/1992 | EP0514046A1 System for controlling and executing the etching of a wafer |
11/19/1992 | EP0514018A2 Method for making low defect density semiconductor heterostructure and devices made thereby |
11/19/1992 | EP0514013A2 Method for etching polysilicon film |
11/19/1992 | EP0513988A1 Method of producing capacitive element for dram |
11/19/1992 | EP0513968A2 Dynamic random access memory allowing determination of a read/write control type at the final step of manufacturing process |
11/19/1992 | EP0513967A2 Automated wet chemical processing system |
11/19/1992 | EP0513965A1 Exposure apparatus for forming pattern on printed-wiring board |
11/19/1992 | EP0513940A2 Etching method |
11/19/1992 | EP0513923A2 Protected programmable transistor with reduced parasitic capacitances and method of fabrication |
11/19/1992 | EP0513894A2 Method of manufacturing a semiconductor device comprising a capacitor with a ferroelectric dielectric, and semiconductor device comprising such a capacitor |
11/19/1992 | EP0513834A1 Method and apparatus for cooling wafers |
11/19/1992 | EP0513764A2 Semiconductor device and method of increasing device breakdown voltage of semiconductor device |
11/19/1992 | EP0513715A1 Wiring arrangement for high integrated circuits |
11/19/1992 | EP0513684A2 Method of improving the manufaturing of SOI devices by forming position alignment marks |
11/19/1992 | EP0513666A1 CCD shift register |
11/19/1992 | EP0513651A1 Apparatus for applying and removing protective adhesive tape to/from semiconductor wafer surfaces |
11/19/1992 | EP0513644A2 Field effect thin film transistor and method of manufacturing the same |
11/19/1992 | EP0513643A1 Electronic package using closed pore composites |
11/19/1992 | EP0513639A2 Semiconductor field effect transistor device and fabrication thereof |
11/19/1992 | EP0513615A2 A method for anodizing a polysilicon layer lower capacitor plate of a dram to increase capacitance |
11/19/1992 | EP0513591A2 Lead Frame-chip package |
11/19/1992 | EP0513590A2 Thin-film transistor and method for manufacturing it |
11/19/1992 | EP0513555A1 Device for baking printed substrates |
11/19/1992 | EP0513532A1 Trench dram cell with substrate plate |
11/19/1992 | EP0513521A2 Planarized thin film surface covered wire bonded semiconductor package |
11/19/1992 | EP0513415A1 Insulated gate FET having double-layered wells of low and high impurity concentrations and method of manufacturing the same |
11/19/1992 | EP0513410A1 Semiconductor power module and method of making such a module |
11/19/1992 | EP0513273A1 Direct thermocompression bonding for thin electronic power chips. |
11/19/1992 | EP0513261A1 Thin film transistor having an improved gate structure and gate coverage by the gate dielectric |
11/19/1992 | EP0513185A1 Mosfet structure having reduced gate capacitance and method of forming same. |
11/19/1992 | EP0513180A1 Electronic component carrier. |
11/19/1992 | EP0513100A1 Semiconductor device and method for its manufacture |
11/19/1992 | DE4215708A1 SRAM with high integration density - comprising diffusion section on substrate, electrodes and insulating sections |
11/19/1992 | DE4215489A1 Optical phase shift mask for submicron features - has pattern edges defined by etched chromium@ features and super imposed optical phase shift layer giving edge and cut-off effect stress |
11/19/1992 | DE4215487A1 Semiconductor device heating unit esp. for high temp. testing - has heater surrounding holder channels rotated by motor about set angle and sensor registering entry and withdrawal of semiconductor arrangement |
11/19/1992 | DE4212829A1 Mfg. metal-oxide semiconductor MOSFET - depositing insulating film on substrate of first conductivity type and etching both film part and substrate to preset thickness |
11/19/1992 | DE4208537A1 MOSFET structure with gate oxide film - has gate on substrate of first conductivity type and ion implantation layer under gate |
11/19/1992 | DE4201811A1 Liq. delivery and mixing appts. for accurate diluting hydrofluoric acid for wafer etching - has liq. height sensor in container, delivery means to chemical bath, and automatic liq. feed system for filling container from tank |
11/19/1992 | DE4116392A1 Holding device for wet etching one side of semiconductor wafer - having circular support body with central window pressure contact wafer and bayonet locking disc |
11/19/1992 | DE4115998A1 High-strength, flexible copper@ alloy for connectors and lead-frames - mfd. by casting, hot- and cold-rolling, quenching, annealing and hardening |
11/18/1992 | WO1992021147A1 Pyrometer temperature measurement of plural wafers stacked in a processing chamber |
11/18/1992 | WO1992021144A1 Wafer processing cluster tool batch preheating and degassing method and apparatus |
11/18/1992 | WO1992021143A1 Semiconductor wafer processing module |
11/18/1992 | CA2102795A1 Pyrometer temperature measurement of plural wafers stacked in a processing chamber |
11/18/1992 | CA2102202A1 Semiconductor wafer processing module |
11/18/1992 | CA2102197A1 Wafer processing cluster tool batch preheating and degassing method and apparatus |
11/17/1992 | US5165094 Partially constrained minimum energy state controller |
11/17/1992 | US5165075 Electro-optic device having pairs of complementary transistors |
11/17/1992 | US5165066 Contact chain structure for troubleshooting eprom memory circuits |
11/17/1992 | US5165034 Logic circuit including input and output registers with data bypass and computation circuit with data pass |
11/17/1992 | US5164917 Vertical one-transistor DRAM with enhanced capacitance and process for fabricating |