Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1992
11/24/1992US5166754 Alignment system
11/24/1992US5166608 Arrangement for high speed testing of field-effect transistors and memory cells employing the same
11/24/1992US5166603 Probe method
11/24/1992US5166601 Test device for electric circuits on boards
11/24/1992US5166556 Gate array cell
11/24/1992US5166555 Drive circuit comprising a subsidiary drive circuit
11/24/1992US5166547 Programmable DCVS logic circuits
11/24/1992US5166529 Electron beam lithography system
11/24/1992US5166525 Through the wafer optical transmission sensor
11/24/1992US5166365 Chemical intermediates for polyimides or polyesterimides for polymers used in semiconductors
11/24/1992US5166292 Tetracarboxylic acid and diamine curable to imide films for high strength and heat resistance
11/24/1992US5166101 Method for forming a boron phosphorus silicate glass composite layer on a semiconductor wafer
11/24/1992US5166099 Manufacturing method for semiconductor device
11/24/1992US5166098 Method of manufacturing an encapsulated semiconductor device with a can type housing
11/24/1992US5166097 Silicon wafers containing conductive feedthroughs
11/24/1992US5166096 Process for fabricating self-aligned contact studs for semiconductor structures
11/24/1992US5166095 Low contact resistance process
11/24/1992US5166094 Method of fabricating a base-coupled transistor logic
11/24/1992US5166093 Method to reduce the reflectivity of a semi-conductor metallic surface
11/24/1992US5166092 Method of growing compound semiconductor epitaxial layer by atomic layer epitaxy
11/24/1992US5166091 Fabrication method in vertical integration
11/24/1992US5166090 Method for manufacturing a semiconductor random access memory cell
11/24/1992US5166088 Method of manufacturing semiconductor device contact vias in layers comprising silicon nitride and glass
11/24/1992US5166087 Method of fabricating semiconductor element having lightly doped drain (ldd) without using sidewalls
11/24/1992US5166084 Process for fabricating a silicon on insulator field effect transistor
11/24/1992US5166083 Method of integrating heterojunction bipolar transistors with heterojunction FETs and PIN diodes
11/24/1992US5166082 BIMOS transistor devices having bipolar and MOS transistors formed in substrate thereof and process for the fabrication of the same
11/24/1992US5166081 Method of producing a bipolar transistor
11/24/1992US5166080 Techniques for measuring the thickness of a film formed on a substrate
11/24/1992US5166038 Multilayer light sensitive elements with silicon coupling agent and crosslinking
11/24/1992US5166033 Semiconductors or images
11/24/1992US5165984 Stepped multilayer interconnection apparatus and method of making the same
11/24/1992US5165973 Ink jet recording sheet
11/24/1992US5165957 Process for producing multilayer wiring structure
11/24/1992US5165955 From vaporized hydrogen silsesquioxane resin
11/24/1992US5165590 Process for manufacturing integrated device with improved connections between the pins and the semiconductor material chip
11/24/1992US5165521 Die eject system for die bonder
11/24/1992CA1310763C Integrated circuit containing bi-polar and complementary mos transistors on a common substrate and method for the manufacture thereof
11/22/1992WO1992021136A1 Cluster tool soft etch module and ecr plasma generator therefor
11/22/1992CA2102201A1 Cluster tool soft etch module and ecr plasma generator therefor
11/19/1992EP0514297A2 Process for making a contact to a semiconductor device
11/19/1992EP0514213A2 Process for making a package for accommodating electronic elements
11/19/1992EP0514149A1 Thin film capacitor
11/19/1992EP0514103A1 Barrier metal process for sub-micron contacts
11/19/1992EP0514100A2 Fabrication of semiconductor devices in compound semiconductor layers
11/19/1992EP0514095A2 Integrated circuit using SRAM cells
11/19/1992EP0514094A2 Method of fabricating an integrated circuit
11/19/1992EP0514079A2 High electron mobility transistor and method of manufacture
11/19/1992EP0514060A2 DMOS transistor structure & method
11/19/1992EP0514046A1 System for controlling and executing the etching of a wafer
11/19/1992EP0514018A2 Method for making low defect density semiconductor heterostructure and devices made thereby
11/19/1992EP0514013A2 Method for etching polysilicon film
11/19/1992EP0513988A1 Method of producing capacitive element for dram
11/19/1992EP0513968A2 Dynamic random access memory allowing determination of a read/write control type at the final step of manufacturing process
11/19/1992EP0513967A2 Automated wet chemical processing system
11/19/1992EP0513965A1 Exposure apparatus for forming pattern on printed-wiring board
11/19/1992EP0513940A2 Etching method
11/19/1992EP0513923A2 Protected programmable transistor with reduced parasitic capacitances and method of fabrication
11/19/1992EP0513894A2 Method of manufacturing a semiconductor device comprising a capacitor with a ferroelectric dielectric, and semiconductor device comprising such a capacitor
11/19/1992EP0513834A1 Method and apparatus for cooling wafers
11/19/1992EP0513764A2 Semiconductor device and method of increasing device breakdown voltage of semiconductor device
11/19/1992EP0513715A1 Wiring arrangement for high integrated circuits
11/19/1992EP0513684A2 Method of improving the manufaturing of SOI devices by forming position alignment marks
11/19/1992EP0513666A1 CCD shift register
11/19/1992EP0513651A1 Apparatus for applying and removing protective adhesive tape to/from semiconductor wafer surfaces
11/19/1992EP0513644A2 Field effect thin film transistor and method of manufacturing the same
11/19/1992EP0513643A1 Electronic package using closed pore composites
11/19/1992EP0513639A2 Semiconductor field effect transistor device and fabrication thereof
11/19/1992EP0513615A2 A method for anodizing a polysilicon layer lower capacitor plate of a dram to increase capacitance
11/19/1992EP0513591A2 Lead Frame-chip package
11/19/1992EP0513590A2 Thin-film transistor and method for manufacturing it
11/19/1992EP0513555A1 Device for baking printed substrates
11/19/1992EP0513532A1 Trench dram cell with substrate plate
11/19/1992EP0513521A2 Planarized thin film surface covered wire bonded semiconductor package
11/19/1992EP0513415A1 Insulated gate FET having double-layered wells of low and high impurity concentrations and method of manufacturing the same
11/19/1992EP0513410A1 Semiconductor power module and method of making such a module
11/19/1992EP0513273A1 Direct thermocompression bonding for thin electronic power chips.
11/19/1992EP0513261A1 Thin film transistor having an improved gate structure and gate coverage by the gate dielectric
11/19/1992EP0513185A1 Mosfet structure having reduced gate capacitance and method of forming same.
11/19/1992EP0513180A1 Electronic component carrier.
11/19/1992EP0513100A1 Semiconductor device and method for its manufacture
11/19/1992DE4215708A1 SRAM with high integration density - comprising diffusion section on substrate, electrodes and insulating sections
11/19/1992DE4215489A1 Optical phase shift mask for submicron features - has pattern edges defined by etched chromium@ features and super imposed optical phase shift layer giving edge and cut-off effect stress
11/19/1992DE4215487A1 Semiconductor device heating unit esp. for high temp. testing - has heater surrounding holder channels rotated by motor about set angle and sensor registering entry and withdrawal of semiconductor arrangement
11/19/1992DE4212829A1 Mfg. metal-oxide semiconductor MOSFET - depositing insulating film on substrate of first conductivity type and etching both film part and substrate to preset thickness
11/19/1992DE4208537A1 MOSFET structure with gate oxide film - has gate on substrate of first conductivity type and ion implantation layer under gate
11/19/1992DE4201811A1 Liq. delivery and mixing appts. for accurate diluting hydrofluoric acid for wafer etching - has liq. height sensor in container, delivery means to chemical bath, and automatic liq. feed system for filling container from tank
11/19/1992DE4116392A1 Holding device for wet etching one side of semiconductor wafer - having circular support body with central window pressure contact wafer and bayonet locking disc
11/19/1992DE4115998A1 High-strength, flexible copper@ alloy for connectors and lead-frames - mfd. by casting, hot- and cold-rolling, quenching, annealing and hardening
11/18/1992WO1992021147A1 Pyrometer temperature measurement of plural wafers stacked in a processing chamber
11/18/1992WO1992021144A1 Wafer processing cluster tool batch preheating and degassing method and apparatus
11/18/1992WO1992021143A1 Semiconductor wafer processing module
11/18/1992CA2102795A1 Pyrometer temperature measurement of plural wafers stacked in a processing chamber
11/18/1992CA2102202A1 Semiconductor wafer processing module
11/18/1992CA2102197A1 Wafer processing cluster tool batch preheating and degassing method and apparatus
11/17/1992US5165094 Partially constrained minimum energy state controller
11/17/1992US5165075 Electro-optic device having pairs of complementary transistors
11/17/1992US5165066 Contact chain structure for troubleshooting eprom memory circuits
11/17/1992US5165034 Logic circuit including input and output registers with data bypass and computation circuit with data pass
11/17/1992US5164917 Vertical one-transistor DRAM with enhanced capacitance and process for fabricating