Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1993
08/31/1993US5241499 Non-volatile split gate eprom memory cell and self-aligned field insulation process for obtaining the above cell
08/31/1993US5241498 Non-volatile semiconductor memory device
08/31/1993US5241497 VLSI memory with increased memory access speed, increased memory cell density and decreased parasitic capacitance
08/31/1993US5241455 L-shaped channel wiring method
08/31/1993US5241377 Compact imager including a plurality of photodiode arrays
08/31/1993US5241361 Pattern shift measuring method
08/31/1993US5241245 Optimized helical resonator for plasma processing
08/31/1993US5241216 Ceramic-to-conducting-lead hermetic seal
08/31/1993US5241214 Oxides and nitrides of metastabale group iv alloys and nitrides of group iv elements and semiconductor devices formed thereof
08/31/1993US5241212 Semiconductor device having a redundant circuit portion and a manufacturing method of the same
08/31/1993US5241210 High breakdown voltage semiconductor device
08/31/1993US5241208 Semiconductor device comprising an analogue element and a digital element
08/31/1993US5241207 Semiconductor device having an interconnected film with tapered edge
08/31/1993US5241206 Self-aligned vertical intrinsic resistance
08/31/1993US5241203 Inverse T-gate FET transistor with lightly doped source and drain region
08/31/1993US5241200 Semiconductor memory and method of fabricating the same
08/31/1993US5241193 Semiconductor device having a thin-film transistor and process
08/31/1993US5241192 Fabrication method for a self-aligned thin film transistor having reduced end leakage and device formed thereby
08/31/1993US5241186 Surface treatment method and apparatus therefor
08/31/1993US5241185 Proximity correction method for e-beam lithography
08/31/1993US5241183 Vertical xy stage
08/31/1993US5241176 Scanning electron beam microscope with high resolution at low accelerating voltage
08/31/1993US5241133 Leadless pad array chip carrier
08/31/1993US5241040 Microwave processing
08/31/1993US5240883 Bonding two silicon wafers through silicon oxide layer, inducing fixed positive charge, etching while applying positive voltage to create etch-stop
08/31/1993US5240882 Process and apparatus for making discrete type substrates by re-slicing a wafer
08/31/1993US5240881 Soldering conductive clip
08/31/1993US5240880 Aluminum, titanium and titanium nitride layers can be etched together; titanium reacts with silicon to form a silicide layer on heating
08/31/1993US5240879 Selectively etching active layer to remove from sidewall of hole before depositing electrocondutive material
08/31/1993US5240878 Method for forming patterned films on a substrate
08/31/1993US5240877 Process for manufacturing an ohmic electrode for n-type cubic boron nitride
08/31/1993US5240876 Method of fabricating SOI wafer with SiGe as an etchback film in a BESOI process
08/31/1993US5240875 Individual oxidation of each sidewall to different thicknesses
08/31/1993US5240874 Semiconductor wafer processing method of forming channel stops and method of forming SRAM circuitry
08/31/1993US5240873 Method of making charge transfer device
08/31/1993US5240872 Method of manufacturing semiconductor device having interconnection layer contacting source/drain regions
08/31/1993US5240871 Corrugated storage contact capacitor and method for forming a corrugated storage contact capacitor
08/31/1993US5240870 Stacked gate process flow for cross-point EPROM with internal access transistor
08/31/1993US5240869 Forming a T-shaped gate electrode in a stepped recess
08/31/1993US5240868 Flattening by anodic oxidation
08/31/1993US5240866 Method for characterizing failed circuits on semiconductor wafers
08/31/1993US5240762 Organic thin film element
08/31/1993US5240753 Thermoplastic resin reinforced with whiskers; transport baskets, storage cases, carriers for use in handling wafers and glass plates for liquid crystal televisions; free of contamination
08/31/1993US5240739 Injecting gaseous titanium tetrachloride and silane compound with carrier gas into reactor, heating at low pressure
08/31/1993US5240671 Method of forming recessed patterns in insulating substrates
08/31/1993US5240670 Applying force to heated crystalline material to cause deformation without degradation; moves dislocations along slip line; reduces cracking
08/31/1993US5240588 Method for electroplating the lead pins of a semiconductor device pin grid array package
08/31/1993US5240583 Apparatus to deposit multilayer films
08/31/1993US5240559 Dry etching method of copper or copper alloy interconnection layer employing plasma of an iodine compound
08/31/1993US5240558 Covering substrate with an electrode layer, sputtering non-coalescing islands on electrode layer to define a trench, etching trench using islands to mask and removing islands
08/31/1993US5240557 Semiconductor wafer stacking apparatus and method
08/31/1993US5240556 Surface-heating apparatus and surface-treating method
08/31/1993US5240555 Method and apparatus for cleaning semiconductor etching machines
08/31/1993US5240554 Method of manufacturing semiconductor device
08/31/1993US5240552 Chemical mechanical planarization (CMP) of a semiconductor wafer using acoustical waves for in-situ end point detection
08/31/1993US5240550 Method of forming at least one groove in a substrate layer
08/31/1993US5240549 Fixture and method for attaching components
08/31/1993US5240546 Apparatus for peeling semiconductor substrate
08/31/1993US5240512 Method and structure for forming a trench within a semiconductor layer of material
08/31/1993US5240511 Lightly doped polycrystalline silicon resistor having a non-negative temperature coefficient
08/31/1993US5240505 Method of an apparatus for forming thin film for semiconductor device
08/31/1993US5240497 Alkaline free electroless deposition
08/31/1993US5240166 Device for thermally enhanced ultrasonic bonding with localized heat pulses
08/31/1993US5239863 Cantilever stylus for use in an atomic force microscope and method of making same
08/31/1993US5239806 Thermoplastic semiconductor package and method of producing it
08/31/1993US5239747 Method of forming integrated circuit devices
08/31/1993US5239746 Method of fabricating electronic circuits
08/31/1993CA1321834C Two square memory cells having highly conductive word lines
08/31/1993CA1321772C Apparatus for the application of thin layers to a substrate by means of cathode sputtering
08/28/1993CA2090265A1 Cmos integrated circuit
08/26/1993DE4304849A1 Semiconductor device having reinforced getter effect - comprises substrate having main surface and lower oxide layer surface with layer of getter material on oxide layer
08/26/1993DE4240738A1 Bipolar transistor prodn. for long service life - by forming base in surface of substrate, short term temp. adjusting, and forming emitter
08/26/1993CA2089722A1 Deep uv sensitive photoresist resistant to latent image decay
08/26/1993CA2089110A1 Positive type resist composition
08/25/1993EP0557253A2 VDMOS transistor with improved breakdown characteristics
08/25/1993EP0557220A1 Capacitive micro-sensor with lateral protection and method of manufacturing the same
08/25/1993EP0557152A1 Process for manufacturing active structures and semi-conductor devices thus obtained
08/25/1993EP0557079A2 Discretionary lithography for integrated circuits
08/25/1993EP0557067A1 Broad beam flux density control
08/25/1993EP0557010A1 Apparatus and method for damping vibrations during the manufacture of semiconductors
08/25/1993EP0556912A2 Rapid plasma hydrogenation process for polysilicon MOSFET's
08/25/1993EP0556904A1 Methods of fabricating thin film structures and structures and display devices produced thereby
08/25/1993EP0556888A2 Large ceramic article and method of manufacturing
08/25/1993EP0556865A1 Wafer transfer system
08/25/1993EP0556832A1 Semiconductor for integrated device including a power supply voltage conversion circuit and protection means
08/25/1993EP0556822A2 Reflective type liquid crystal display
08/25/1993EP0556820A1 Process for producing a solid state radiation detector
08/25/1993EP0556795A2 Method of manufacturing substrate having semiconductor on insulator
08/25/1993EP0556784A1 Film forming method in producing of semiconductor device
08/25/1993EP0556669A1 Proximity mask alignment using a stored video image
08/25/1993EP0556341A1 Nickel-cobalt-boron alloy, implement, plating solution and method for making
08/25/1993EP0556317A1 Selective-emitting lasers
08/25/1993EP0556193A1 Method and apparatus for transferring articles between two controlled environments.
08/25/1993EP0556177A1 Top coat for acid catalyzed resists
08/25/1993EP0478612B1 Circuit network
08/25/1993CN1075555A Reflective type liquid crystal display
08/25/1993CN1021943C Schottky junction semi-conductor element
08/24/1993US5239685 Process for fabricating a MMIC hybrid device and a transceiver fabricated thereby
08/24/1993US5239614 Substrate heating method utilizing heating element control to achieve horizontal temperature gradient
08/24/1993US5239507 Semiconductor memory device with readout data buses connecting local and main sense amplifiers
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