Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1994
03/29/1994US5298450 Process for simultaneously fabricating isolation structures for bipolar and CMOS circuits
03/29/1994US5298449 Semiconductor substrate having a silicon-on-insulator structure and method of fabricating the same
03/29/1994US5298448 Method of making two-phase buried channel planar gate CCD
03/29/1994US5298447 Method of fabricating a flash memory cell
03/29/1994US5298446 Oxidation, nitriding to form nitride and oxide film of silicon injecting ions, removing sidewall, heat treating the substrate
03/29/1994US5298445 Forming ohmic electrode on second semiconductor layer
03/29/1994US5298444 Method for manufacturing a field effect transistor
03/29/1994US5298443 Process for forming a MOSFET
03/29/1994US5298442 Providing first and third regions of first conductivity type and second region of second conductivity type in middle
03/29/1994US5298440 Forming silicide layer on first and second polysilicon region and maintaining third polysilicon region is silicide-free
03/29/1994US5298439 Forming three layers, and a contact on emitter layer, forming mesa region on emitter, protective covering of mesa region
03/29/1994US5298438 Forming multi-dopant and contact layers, selective etching
03/29/1994US5298437 Fabrication process for Schottky barrier diodes on a single poly bipolar process
03/29/1994US5298436 Changing at least one of the factor selected from flow rate and partial pressure of deposition gas
03/29/1994US5298435 Application of electronic properties of germanium to inhibit n-type or p-type diffusion in silicon
03/29/1994US5298434 Selective recrystallization to reduce P-channel transistor leakage in silicon-on-sapphire CMOS radiation hardened integrated circuits
03/29/1994US5298433 Method for testing semiconductor devices
03/29/1994US5298365 Size-reducing projection exposure optical system
03/29/1994US5298364 Negative photoresists, acid crosslinking
03/29/1994US5298363 Photolithographically patterned fluorescent coating
03/29/1994US5298351 Patterned multilayer structure
03/29/1994US5298328 Packing material and method of making same
03/29/1994US5298288 Coating a heat curable liquid dielectric on a substrate
03/29/1994US5298279 Method for connecting terminals of heat seal film substrate
03/29/1994US5298278 Chemical vapor phase growth method and chemical vapor phase growth apparatus
03/29/1994US5298137 Used for producing a thin film on surface of an object
03/29/1994US5298117 Metallic electrical interconnectors of multilayer elements using hydrogen fluoride, cupric chloride and chloride salt as etchant
03/29/1994US5298112 Method for removing composite attached to material by dry etching
03/29/1994US5298111 Automatic wafer transfer apparatus and a method for transferring wafers and an etching drum
03/29/1994US5298110 Trench planarization techniques
03/29/1994US5298107 Processing method for growing thick films
03/29/1994US5298106 Method of doping single crystal diamond for electronic devices
03/29/1994US5298103 Electrode assembly useful in confined plasma assisted chemical etching
03/29/1994US5298075 Furnace tube cleaning process
03/29/1994US5297969 Electrically connectable module with embedded electrical connectors electrically connected to conductive traces
03/29/1994US5297956 Method and apparatus for heat treating
03/29/1994US5297910 Transportation-transfer device for an object of treatment
03/29/1994US5297897 Single-strip molding apparatus
03/29/1994US5297722 Wire bonding method and apparatus
03/29/1994US5297712 System for feeding and positioning articles being processed
03/29/1994US5297333 Packaging method for flip-chip type semiconductor device
03/29/1994CA2051112C Semiconductor device
03/29/1994CA2023510C Single wavelength oscillating semiconductor laser device and method for manufacturing diffraction grating
03/25/1994CA2104247A1 Photoresist composition
03/24/1994DE4332890A1 Raw material for vaporising dielectric thin layers - comprises organic metal cpd. dissolved in THF
03/24/1994DE4331894A1 Semiconductor substrate with getter effect - comprises substrate having polycrystalline silicon layer and silicon nitride layer
03/24/1994DE4331727A1 Grinding of rim of indented circular semiconductor wafer - using abrasive wheel having annular peripheral groove of trapezoidal cross-section with rounded edges at base
03/24/1994DE4331519A1 Fine pattern prodn with high resolution using simplified efficient method - by applying first photoresist, silylating and glassifying surface, making mask with second resist layer and etching down to substrate
03/24/1994DE4321638A1 Semiconductor element of high integration esp DRAM elements - comprises capacitor consisting of dielectric layer covering first electrode, an second electrode formed on dielectric layer
03/24/1994DE4231392A1 Verfahren zur Bestimmung der elektronischen Eigenschaften von Halbleiterschichtstrukturen A method for determining the electronic properties of semiconductor layer structures
03/24/1994DE4231312A1 Antireflexschicht und Verfahren zur lithografischen Strukturierung einer Schicht Anti-reflective coating and method for lithographic patterning a layer
03/24/1994CA2106694A1 Hermetic protection of integrated circuits
03/23/1994EP0588747A2 Method for planarizing semiconductor structure
03/23/1994EP0588721A1 Support with network of resistive elements in conductive polymer and method of making it
03/23/1994EP0588681A1 Method for cutting a wafer hard to cut
03/23/1994EP0588675A1 Method of hybridization and positioning of an optoelectronic component in relation to an integral optical waveguide
03/23/1994EP0588661A2 Semiconductor read only memory
03/23/1994EP0588609A1 Ball contact for flip-chip devices
03/23/1994EP0588603A2 Hermetically sealed packaged electronic system and method of fabrication
03/23/1994EP0588577A2 Hermetically sealed integrated circuits
03/23/1994EP0588565A2 Semiconductor device and element separation method
03/23/1994EP0588503A2 Integrated circuit magnetic memory element and method of making same
03/23/1994EP0588501A1 Technique for enhancing adhesion capability of heat spreaders in molded packages
03/23/1994EP0588492A1 High aspect ratio, flexible thick film positive photoresist
03/23/1994EP0588487A2 Method of making thin film transistors
03/23/1994EP0588481A1 Bond pad layouts for integrated circuit semiconductor dies and forming methods
03/23/1994EP0588402A2 A semiconductor memory device
03/23/1994EP0588371A2 Semiconductor dynamic sensor having a thin thickness structure and its production method
03/23/1994EP0588370A2 Manufacturing method of thin film transistor and semiconductor device utilized for liquid crystal display
03/23/1994EP0588320A2 Semiconductor device having planar junction
03/23/1994EP0588300A2 Semiconductor transistor
03/23/1994EP0588296A1 Method of production of a porous silicon device
03/23/1994EP0588260A2 Diamond semiconductor device
03/23/1994EP0588180A1 Use of a self-adhesive tape for temporarily fixing wafers (dicing tape)
03/23/1994EP0588093A1 Method of treating surface of wiring on circuit board
03/23/1994EP0588092A2 Negtive photoresist composition
03/23/1994EP0588087A2 Method of determining optimum optical conditions for an anti-reflective layer used in a method of forming a resist pattern
03/23/1994EP0588080A1 Selective, low-temperature chemical vapor deposition of gold
03/23/1994EP0588067A2 High withstand voltage M I S field effect transistor and semiconductor integrated circuit
03/23/1994EP0588055A2 Method for manufacturing wafer
03/23/1994EP0588040A2 Light source and technique for mounting light emitting diodes
03/23/1994EP0588032A2 Process for forming implanted regions with lowered channeling risk on semiconductors
03/23/1994EP0588026A2 Turn-off high-power semiconductor device
03/23/1994EP0588009A2 Method of forming borderless contacts using a removable mandrel
03/23/1994EP0587996A2 Conductive diffusion barrier
03/23/1994EP0587990A2 Method for fabricating a semiconductive device having a conductive metal oxide
03/23/1994EP0587889A1 Method for cleaning and apparatus thereof
03/23/1994EP0587739A1 Anti-fuse structures and methods for making same
03/23/1994EP0581902A4 Method and apparatus for linear magnetron sputtering.
03/23/1994EP0462108B1 Overvoltage protection circuit for mos components
03/23/1994EP0441810B1 Process for placing modules on a support
03/23/1994EP0436588B1 Low stress polysilicon microstructures
03/23/1994EP0401387B1 Process for producing single crystal
03/23/1994EP0333838B1 GaAs ELECTRICAL CIRCUIT DEVICES WITH LANGMUIR-BLODGETT INSULATOR LAYER
03/23/1994CN1084317A Silicon power triode core
03/23/1994CN1084316A Semi conductor diffusion zone structure and its mfg. method
03/22/1994US5297260 Processor having a plurality of CPUS with one CPU being normally connected to common bus
03/22/1994US5297148 Memory card connectable to a computer system
03/22/1994US5297104 Word line drive circuit of semiconductor memory device
03/22/1994US5297102 Semiconductor memory device storing data and parity bit