| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/29/1997 | US5652167 Method of liquid treatment of micro-structures comprising structural members liable to be bent |
| 07/29/1997 | US5652166 Process for fabricating dual-gate CMOS having in-situ nitrogen-doped polysilicon by rapid thermal chemical vapor deposition |
| 07/29/1997 | US5652165 Method of forming a stacked capacitor with a double wall crown shape |
| 07/29/1997 | US5652164 Semiconductor processing methods of forming stacked capacitors |
| 07/29/1997 | US5652162 Method for fabricating flat ROM devices using memory array cells with concave channels |
| 07/29/1997 | US5652161 Method of making split gate flash EEPROM cell |
| 07/29/1997 | US5652160 Method of fabricating a buried contact structure with WSix sidewall spacers |
| 07/29/1997 | US5652159 Thin film transistor having improved switching characteristic |
| 07/29/1997 | US5652158 Method for making thin film transistors for a liquid crystal display |
| 07/29/1997 | US5652157 Deep, narrow conductor having a depth larger than width to minimize signal interference effects in an integrated circuit of a three-dimensional architecture |
| 07/29/1997 | US5652156 Mismatched silicon grain boundaries to prevent diffusion |
| 07/29/1997 | US5652154 Method for manufacturing BiMOS device |
| 07/29/1997 | US5652153 Method of making JFET structures for semiconductor devices with complementary bipolar transistors |
| 07/29/1997 | US5652152 Process having high tolerance to buried contact mask misalignment by using a PSG spacer |
| 07/29/1997 | US5652151 Forming a plurality of electrodes on surface of diffused region; etching; measuring sheet and/or hall resistance; converting measured values |
| 07/29/1997 | US5652061 Devices comprising films of β-C3 N4 |
| 07/29/1997 | US5651873 Electroplating solution for forming Pb-Sn alloy bump electrodes on semiconductor wafer surface |
| 07/29/1997 | US5651860 After hydrogenation by immersion into pressurized boiling water |
| 07/29/1997 | US5651859 Method for manufacturing a semiconductor memory cell with a floating gate |
| 07/29/1997 | US5651858 Etching with plasma generated nitrogen trifluoride and hydrogen bromide |
| 07/29/1997 | US5651857 Semiconductors, high density integration, photoresists |
| 07/29/1997 | US5651856 Selective etch process |
| 07/29/1997 | US5651855 Method of making self aligned contacts to silicon substrates during the manufacture of integrated circuits |
| 07/29/1997 | US5651839 Process for engineering coherent twin and coincident site lattice grain boundaries in polycrystalline materials |
| 07/29/1997 | US5651836 Method for rinsing wafers adhered with chemical liquid by use of purified water |
| 07/29/1997 | US5651827 Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same |
| 07/29/1997 | US5651825 Plasma generating apparatus and plasma processing apparatus |
| 07/29/1997 | US5651823 Clustered photolithography system |
| 07/29/1997 | US5651798 Workpiece monitoring process using a workpiece carrier having an identification code |
| 07/29/1997 | US5651797 Apparatus and method for the immersion cleaning and transport of semiconductor components |
| 07/29/1997 | US5651725 Apparatus and method for polishing workpiece |
| 07/29/1997 | US5651723 Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings |
| 07/29/1997 | US5651713 Photomask alignment |
| 07/29/1997 | US5651670 Heat treatment method and apparatus thereof |
| 07/29/1997 | US5651494 Method of ultrasonic welding of different metals |
| 07/29/1997 | US5651493 Applying dye solution and allowing it to penetrate any interstices to identify any structural failure by visual analysis |
| 07/29/1997 | US5651492 Heating device for a bonding apparatus |
| 07/29/1997 | US5651379 Method and apparatus for delivering ultra-low particle counts in semiconductor manufacturing |
| 07/29/1997 | US5651180 Method of making a filled via in a dielectric substrate |
| 07/29/1997 | US5651179 Conductive adhesive |
| 07/29/1997 | US5651160 Cleaning apparatus for cleaning substrates |
| 07/24/1997 | WO1997026679A1 Antireflective coating and wiring line stack |
| 07/24/1997 | WO1997026678A2 A SEMICONDUCTOR DEVICE WITH A LOW RESISTANCE OHMIC CONTACT BETWEEN A METAL LAYER AND A SiC-LAYER |
| 07/24/1997 | WO1997026676A1 Semiconductor devices, and methods for same |
| 07/24/1997 | WO1997026675A1 Vacuum compatible water vapor and rinse process module |
| 07/24/1997 | WO1997026393A1 Silicon single crystal with no crystal defect in peripheral part of wafer and process for producing the same |
| 07/24/1997 | WO1997026392A1 Process for producing silicon single crystal reduced in crystal defect and silicon single crystal produced by the process |
| 07/24/1997 | WO1997026117A1 Substrate transport apparatus with double substrate holders |
| 07/24/1997 | WO1997026114A1 A polishing pad and a method for making a polishing pad with covalently bonded particles |
| 07/24/1997 | DE19702110A1 Silicon carbide semiconductor device especially power MOSFET |
| 07/24/1997 | DE19638431A1 Semiconductor device with memory and peripheral circuit regions |
| 07/24/1997 | DE19620833A1 Production of capacitor for semiconductor device |
| 07/24/1997 | DE19620185A1 Production of capacitor for semiconductor device, e.g. 256M DRAM |
| 07/24/1997 | DE19610322A1 Passivation treatment of piping system for high-purity gas |
| 07/24/1997 | CA2243170A1 Semiconductor devices, and methods for same |
| 07/23/1997 | EP0785630A2 Time multiplexing in field programmable gate arrays |
| 07/23/1997 | EP0785603A2 A semiconductor laser device and a method of producing the same |
| 07/23/1997 | EP0785580A2 LED display packaging with substrate removal and method of fabrication |
| 07/23/1997 | EP0785579A1 Dielectric capacitor and process for preparing the same |
| 07/23/1997 | EP0785578A2 Circuit comprising complementary thin film transistors |
| 07/23/1997 | EP0785577A1 Telephone line interface protection component |
| 07/23/1997 | EP0785574A2 Method of forming tungsten-silicide |
| 07/23/1997 | EP0785573A2 Method of forming raised source/drain regions in an integrated circuit |
| 07/23/1997 | EP0785572A2 Dry etching method for aluminium alloy and etching gas therefor |
| 07/23/1997 | EP0785570A1 Fabrication of natural transistors in a nonvolatile memory process |
| 07/23/1997 | EP0785568A2 Method and apparatus for ion beam transport |
| 07/23/1997 | EP0785567A2 Charged particle beam slit assembly |
| 07/23/1997 | EP0785473A2 Reduction in damage to optical elements used in optical lithography for device fabrication |
| 07/23/1997 | EP0785470A2 Method of providing resist pattern |
| 07/23/1997 | EP0785469A2 A Process for making an x-ray mask |
| 07/23/1997 | EP0785441A2 Method of producing clear potential contrast image through scanning with electron beam for diagnosis of semiconductor device and electron beam testing system used therein |
| 07/23/1997 | EP0785298A1 Rapid cooling of cz silicon crystal growth system |
| 07/23/1997 | EP0784868A1 Ccd charge splitter |
| 07/23/1997 | EP0784867A1 Three-dimensional non-volatile memory |
| 07/23/1997 | EP0784866A1 Fixed value storage cell arrangement and method of producing the same |
| 07/23/1997 | EP0784865A1 Field-enhanced diffusion using optical activation |
| 07/23/1997 | EP0784861A1 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber |
| 07/23/1997 | EP0784713A1 Conformal titanium-based films and method for their preparation |
| 07/23/1997 | EP0784543A1 Lithographic surface or thin layer modification |
| 07/23/1997 | EP0784542A1 Stamp for a lithographic process |
| 07/23/1997 | EP0784517A1 Process and device for thoroughly cleaning surfaces |
| 07/23/1997 | EP0616728B1 Scr protection structure and circuit with reduced trigger voltage |
| 07/23/1997 | EP0504420B1 Steam supplier |
| 07/23/1997 | EP0396768B1 Pattern correction method |
| 07/23/1997 | CN1155353A Preparation of semiconductor substrates |
| 07/23/1997 | CN1155228A Method for triggering-igniting CVD-plasma, and apparatus thereof |
| 07/23/1997 | CN1155187A Semiconductor integral circuit with reduced current leakage and high speed |
| 07/23/1997 | CN1155164A Multi-layer interlined structure for integrated circuit and mfg. method thereof |
| 07/23/1997 | CN1155162A Mfg. method for semiconductor packed according to chip size |
| 07/23/1997 | CN1155161A Hand connect/disconnect machine |
| 07/23/1997 | CN1155160A Method for making of self alignment silicide structural semiconductor device |
| 07/23/1997 | CN1155159A Gate electrode and forming method thereof |
| 07/23/1997 | CN1155158A Multi-layer circuit substrate and mfg. method thereof |
| 07/23/1997 | CN1155097A Camara with internal supporting structure for preventing |
| 07/22/1997 | US5650975 Semiconductor memory device having improved hierarchical I/O line pair structure |
| 07/22/1997 | US5650962 Semiconductor nonvolatile memory device |
| 07/22/1997 | US5650961 Cell characteristic measuring circuit for a nonvolatile semiconductor memory device and cell characteristic measuring method |
| 07/22/1997 | US5650960 Polysilicon programming memory cell |
| 07/22/1997 | US5650958 Magnetic tunnel junctions with controlled magnetic response |
| 07/22/1997 | US5650957 Semiconductor memory cell and process for formation thereof |