Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2004
08/19/2004US20040161937 Polishing composition and polishing method using same
08/19/2004US20040161936 Method for fabricating semiconductor device
08/19/2004US20040161935 Method of fabricating a semiconductor device
08/19/2004US20040161934 Method for manufacturing semiconductor device
08/19/2004US20040161933 Cleaning solution for semiconductor substrate
08/19/2004US20040161932 Slurry for cmp, and method of manufacturing semiconductor device
08/19/2004US20040161931 Method of manufacturing a semiconductor component
08/19/2004US20040161930 In-situ discharge to avoid arcing during plasma etch processes
08/19/2004US20040161929 Selective etching of a protective layer for the formation of catalyst layer suitable for electron-emitting device, and associated fabrication method
08/19/2004US20040161928 Method of manufacturing semiconductor device having damascene interconnection
08/19/2004US20040161927 Method of preventing resist poisoning in dual damascene structures
08/19/2004US20040161926 Method for manufacturing semiconductor device, and method for manufacturing semiconductor module
08/19/2004US20040161925 Method of manufacturing master disc
08/19/2004US20040161924 Damascene interconnect with bilayer capping film
08/19/2004US20040161923 Method for forming wire line by damascene process using hard mask formed from contacts
08/19/2004US20040161922 Electronic device manufacture
08/19/2004US20040161921 Method for forming conductive wires of semiconductor device
08/19/2004US20040161920 Semiconductor device manufacturing method
08/19/2004US20040161919 Methods of forming integrated circuit devices including insulation layers
08/19/2004US20040161918 Semiconductor device and method for forming same using multi-layered hard mask
08/19/2004US20040161917 Method for fabricating a semiconductor device having a metallic silicide layer
08/19/2004US20040161915 Method of reducing contamination-induced process variations during ion implantation
08/19/2004US20040161914 Manufacturing of a low-noise mos device
08/19/2004US20040161913 Laser irradiation method and method of manufacturing a semiconductor device
08/19/2004US20040161912 Method to fabricate an intrinsic polycrystalline silicon film
08/19/2004US20040161910 Semiconductor apparatus and semiconductor apparatus manufacturing method
08/19/2004US20040161908 Method for fabricating a semiconductor device having a heat radiation layer
08/19/2004US20040161907 Method for subdividing wafers into chips
08/19/2004US20040161906 Method of curing an anisotropic conductive compound
08/19/2004US20040161905 Integrated circuit having a device wafer with a diffused doped backside layer
08/19/2004US20040161904 Two-stage annealing method for manufacturing semiconductor substrates
08/19/2004US20040161902 Method for fabricating transistor of semiconductor device
08/19/2004US20040161901 Method for fabricating transistor of semiconductor device
08/19/2004US20040161900 [method for fabricating read only memory]
08/19/2004US20040161899 Radical oxidation and/or nitridation during metal oxide layer deposition process
08/19/2004US20040161898 Dual double gate transistor and method for forming
08/19/2004US20040161897 Semiconductor device having multiple gate oxide layers and method of manufacturing thereof
08/19/2004US20040161896 [structure of a memory device and fabrication method thereof]
08/19/2004US20040161893 Methods for enhancing capacitors having roughened features to increase charge-storage capacity
08/19/2004US20040161892 Methods of forming metal-comprising materials and capacitor electrodes; and capacitor constructions
08/19/2004US20040161891 Semiconductor integrated circuit device and method of manufacturing the same
08/19/2004US20040161890 Method for manufacturing a capacitor of a semiconductor device
08/19/2004US20040161889 Methods of forming capacitors and methods of forming capacitor dielectric layers
08/19/2004US20040161887 Ferroelectric memory device
08/19/2004US20040161886 Vertical sub-micron CMOS transistors on (110), (111), (311), (511), and higher order surfaces of bulk. SOI and thin film structures and method of forming same
08/19/2004US20040161885 Semiconductor device having junction diode and fabricating method therefor
08/19/2004US20040161884 Semiconductor device having contact pads and method for manufacturing the same
08/19/2004US20040161883 High temperature interface layer growth for high-k gate dielectric
08/19/2004US20040161882 Method of Manufacturing a Semiconductor Device and a Method for Fixing the Semiconductor Device Using Substrate Jig
08/19/2004US20040161881 Semiconductor device and method of manufacturing the same
08/19/2004US20040161880 Methods and apparatus for addition of electrical conductors to previously fabricated device
08/19/2004US20040161878 Method for fabrication of semiconductor device
08/19/2004US20040161877 Wafer cutting using laser marking
08/19/2004US20040161876 Methods for marking a bare semiconductor die
08/19/2004US20040161874 Method of forming a non-volatile resistance variable device, and non-volatile resistance variable device
08/19/2004US20040161872 Surface modification of silicon nitride for thick film silver metallization of solar cell
08/19/2004US20040161871 Semiconductor device, method of manufacturing the same, circuit substrate and electronic equipment
08/19/2004US20040161867 Method of manufacturing field emission device
08/19/2004US20040161866 Method for inspecting a wafer and apparatus for inspecting a wafer
08/19/2004US20040161865 Wafer level testing and bumping process
08/19/2004US20040161864 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern
08/19/2004US20040161721 Rolling process cover
08/19/2004US20040161710 Pattern formation method
08/19/2004US20040161708 Method of manufacturing nano-gap electrode
08/19/2004US20040161707 Photomask and pattern forming method employing the same
08/19/2004US20040161706 Flash memory with reduced source resistance and fabrication method thereof
08/19/2004US20040161698 Provide contrast upon exposure to photogenerated acid; photoimageable
08/19/2004US20040161678 For forming a fine pattern in fabrication of semiconductor integrated circuit devices
08/19/2004US20040161677 Phase shift mask, method for forming pattern using phase shift mask and manufacturing method for electronic device
08/19/2004US20040161676 For lateral growth from a crystal nucleus and produce a crystallized semiconductor film with a large particle size
08/19/2004US20040161674 Graytone mask and method thereof
08/19/2004US20040161626 Tape substrate and method for fabricating the same
08/19/2004US20040161617 Process for depositing low dielectric constant materials
08/19/2004US20040161548 Heating coating overcoated on substrate; radiation with ultraviolet radiation; low temperature
08/19/2004US20040161539 Method and apparatus for forming porous insulating layer and electronic device manufactured using the method
08/19/2004US20040161536 Vapor deposition using high pressure gas ; supplying trimethylsilane and oxygen
08/19/2004US20040161535 Method of forming silicon carbide films
08/19/2004US20040161534 Generating discharging high pressure plasma; applying pulsed voltage
08/19/2004US20040161533 Vapor deposition of molybdenum, tungsten rhenium, or alloy thereof; controlling exhaust electroconductivity
08/19/2004US20040161532 Using metal oxide; applying energy
08/19/2004US20040161529 Electroless plating apparatus and method
08/19/2004US20040161179 Fluid bearings and vacuum chucks and methods for producing same
08/19/2004US20040160828 Semiconductor memory device, display device, and portable electronic apparatus
08/19/2004US20040160824 Method of operating a semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor
08/19/2004US20040160822 Thin film magnetic memory device for writing data of a plurality of bits in parallel
08/19/2004US20040160816 Memory device comprising single transistor having functions of RAM and ROM and methods for operating and manufacturing the same
08/19/2004US20040160812 2-Terminal trapped charge memory device with voltage switchable multi-level resistance
08/19/2004US20040160804 Memory array of a non-volatile ram
08/19/2004US20040160803 Semiconductor memory device
08/19/2004US20040160802 Read only memory devices including thermally oxidized transistor sidewalls
08/19/2004US20040160795 Integrated circuits with contemporaneously formed array electrodes and logic interconnects
08/19/2004US20040160777 Illumination device, and coordinate measuring instrument having an illumination device
08/19/2004US20040160751 Printed circuit board and method of manufacturing printed circuit board
08/19/2004US20040160750 Method of fabricating electronic parts packaged with resin and baseboard used for the method
08/19/2004US20040160677 Catadioptric reduction lens
08/19/2004US20040160666 Catadioptric projection system for 157 nm lithography
08/19/2004US20040160609 Surface inspecting apparatus
08/19/2004US20040160599 Method for inspecting defect and apparatus for inspecting defect
08/19/2004US20040160592 Scanning exposure apparatus
08/19/2004US20040160588 Method of determining stray radiation lithographic projection apparatus