| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/12/2004 | US20040155288 Semiconductor device and method for fabricating the same |
| 08/12/2004 | US20040155287 Power semiconductor switching element |
| 08/12/2004 | US20040155285 drift zones of first conductor type in strip or column form are embedded in the drift zone of second conductor type, which are connected to the cathode metal, so that its potential does not float |
| 08/12/2004 | US20040155284 Non-volatile SONOS memory device and method for manufacturing the same |
| 08/12/2004 | US20040155283 Memory device comprising single transistor having functions of RAM and ROM and methods for operating and manufacturing the same |
| 08/12/2004 | US20040155282 Semiconductor device having self-aligned contact hole and method of fabricating the same |
| 08/12/2004 | US20040155281 Semiconductor device formed on a SOI substrate |
| 08/12/2004 | US20040155280 Memory cell and method for fabricating same |
| 08/12/2004 | US20040155279 Semiconductor device and method and system for fabricating the same |
| 08/12/2004 | US20040155278 Semiconductor device, apparatus and method for manufacturing the same |
| 08/12/2004 | US20040155277 Method for manufacturing a semiconductor device including a PIP capacitor and a MOS transistor |
| 08/12/2004 | US20040155276 gate insulating film made by forming a titanium silicate film on surface of silicon substrate, forming thereon a titanium oxide film; diffusion of oxygen atoms from titanium oxide film to the silicon substrate can be prevented |
| 08/12/2004 | US20040155275 TTO nitride liner for improved collar protection and TTO reliability |
| 08/12/2004 | US20040155274 Capacitor structures with recessed hemispherical grain silicon |
| 08/12/2004 | US20040155273 Semiconductor device having capacitor and method of manufacturing the same |
| 08/12/2004 | US20040155272 Ferroelectric capacitor and method for manufacturing the same |
| 08/12/2004 | US20040155271 Reliable semiconductor device and method of manufacturing the same |
| 08/12/2004 | US20040155270 for driving display devices known as "heads-up" displays and "augmented reality" displays which allow a user to view a real environment beyond the screen of the display |
| 08/12/2004 | US20040155269 Method of manufacturing semiconductor local interconnect and contact |
| 08/12/2004 | US20040155268 gate stack including: a layer of polysilicon; a layer of tungsten nitride on the layer of polysilicon, wherein the ratio of nitrogen to tungsten is below about 0.7 at; layer of tungsten on layer of tungsten nitride; anda layer of nitride |
| 08/12/2004 | US20040155266 Method of manufacturing a semiconductor device and a device manufactured by the method |
| 08/12/2004 | US20040155265 Semiconductor device including p-channel type transistor, and production method for manufacturing such semiconductor device |
| 08/12/2004 | US20040155264 Vertical replacement-gate silicon-on-insulator transistor |
| 08/12/2004 | US20040155262 Self-aligned bipolar transistor |
| 08/12/2004 | US20040155261 Schottky electrode that is formed on Schottky layer (In and P compounds) with a Schottky contact (with La and B material on electrode); |
| 08/12/2004 | US20040155259 Field-effect semiconductor device and method for making the same |
| 08/12/2004 | US20040155257 Semiconductor device |
| 08/12/2004 | US20040155256 Field effect transistor |
| 08/12/2004 | US20040155253 Single electron transistor having memory function and method of manufacturing the same |
| 08/12/2004 | US20040155250 Nitride compound semiconductor element |
| 08/12/2004 | US20040155248 Nitride semiconductor device |
| 08/12/2004 | US20040155246 Semiconductor film and method of forming the same, and semiconductor device and display apparatus using the semiconductor film |
| 08/12/2004 | US20040155245 Thin film transistor and method for manufacturing the same |
| 08/12/2004 | US20040155244 Transistor and method of manufacturing the same, electro-optical device, semiconductor device, and electronic apparatus |
| 08/12/2004 | US20040155242 Semiconductor device and its manufacturing method |
| 08/12/2004 | US20040155240 Apparatus and method for measuring semiconductor wafer electrical properties |
| 08/12/2004 | US20040155234 Nonvolatile semiconductor memory device |
| 08/12/2004 | US20040155208 Method of selecting pattern to be measured, pattern inspection method, manufacturing method of semiconductor device, program, and pattern inspection apparatus |
| 08/12/2004 | US20040155205 System for recycling gases used in a lithography tool |
| 08/12/2004 | US20040155204 Mask and method for producing thereof and a semiconductor device using the same |
| 08/12/2004 | US20040155200 Optical particle corrector |
| 08/12/2004 | US20040155194 Method for evaluating piezoelectric fields |
| 08/12/2004 | US20040155185 Method of preventing charging, and apparatus for charged particle beam using the same |
| 08/12/2004 | US20040155089 Recognition device, bonding device, and method of manufacturing a circuit device |
| 08/12/2004 | US20040155057 Chemical delivery systems and methods of delivery |
| 08/12/2004 | US20040155026 Integrally formed bake plate unit for use in wafer fabrication system |
| 08/12/2004 | US20040155025 Ceramic heater |
| 08/12/2004 | US20040155019 small footprint; focus position of a linear shape beam is adjusted by providing cylindrical shape curvature to a substrate annealed by a linear shape beam allowing an extremely uniform energy distribution |
| 08/12/2004 | US20040155018 Method and apparatus for cutting electrical wiring line on a substrate, and method and apparatus for manufacturing electronic device |
| 08/12/2004 | US20040155015 Plasma ignition method and apparatus |
| 08/12/2004 | US20040155013 Method and apparatus for polishing a substrate |
| 08/12/2004 | US20040155012 Methods of reducing photoresist distortion while etching in a plasma processing system |
| 08/12/2004 | US20040155011 Method of forming sub-micron-size structures over a substrate |
| 08/12/2004 | US20040155010 Method for producing optically transparent regions in a silicon substrate |
| 08/12/2004 | US20040154956 Stacked die module and techniques for forming a stacked die module |
| 08/12/2004 | US20040154931 Polishing liquid, polishing method and polishing apparatus |
| 08/12/2004 | US20040154917 Cup-shaped plating apparatus |
| 08/12/2004 | US20040154915 Contact plating apparatus |
| 08/12/2004 | US20040154914 Conductor; variations in thickness between center and edges ; scanning type; movable cathode magnet; liquid crystal display substrates |
| 08/12/2004 | US20040154746 Apparatus and method for producing a semiconductor device including a byproduct control system |
| 08/12/2004 | US20040154745 Method of processing PFC and apparatus for processing PFC |
| 08/12/2004 | US20040154744 Method and system for surface or cross-sectional processing and observation |
| 08/12/2004 | US20040154743 Apparatus and method for low temperature stripping of photoresist and residues |
| 08/12/2004 | US20040154742 Recognition device, bonding device, and method of manufacturing a circuit device |
| 08/12/2004 | US20040154733 Chip transfer method and apparatus |
| 08/12/2004 | US20040154722 Stacked die module and techniques for forming a stacked die module |
| 08/12/2004 | US20040154651 Processing liquid tank and processing system |
| 08/12/2004 | US20040154647 Vacuum chuck; conformation contact; smoothness surfaces; determination thickness |
| 08/12/2004 | US20040154641 Substrate processing apparatus and method |
| 08/12/2004 | US20040154639 Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning |
| 08/12/2004 | US20040154638 Method to use a laser to perform the edge clean operation on a semiconductor wafer |
| 08/12/2004 | US20040154637 Transducer and substrate; dynamic adjustment; radio frequency generator coupling to transducer; applying signals |
| 08/12/2004 | US20040154544 Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon |
| 08/12/2004 | US20040154543 Wafer holder for semiconductor manufacturing device and semiconductor manufacturing device in which it is installed |
| 08/12/2004 | US20040154540 Plasma processing unit and high-frequency electric power supplying unit |
| 08/12/2004 | US20040154537 Diffusion furnace used for manufacturing integrated circuits and method for cooling the diffusion furnace |
| 08/12/2004 | US20040154535 Modular electrochemical processing system |
| 08/12/2004 | US20040154530 Configuration and a method for reducing contamination with particles on a substrate in a process tool |
| 08/12/2004 | US20040154452 Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same |
| 08/12/2004 | US20040154451 Integrated circuit package separators |
| 08/12/2004 | US20040154426 Transporting apparatus |
| 08/12/2004 | US20040154417 Integrated process condition sensing wafer and data analysis system |
| 08/12/2004 | US20040154231 Mixture of abrasive, deionizing water, pH controller and polyethylenimine; removal silica, silicon nitride; process control |
| 08/12/2004 | US20040154229 Cerium oxide overcoated with silicon compound and aluminum compound |
| 08/12/2004 | US20040154186 Method for etching a metal layer in a semiconductor device |
| 08/12/2004 | US20040154185 Positioning substrate within an enclosure; heat exchanging |
| 08/12/2004 | US20040154165 Method for manufacturing a probe pin and a probe card |
| 08/12/2004 | US20040154163 Method of forming a connecting conductor and wirings of a semiconductor chip |
| 08/12/2004 | US20040154161 Random-period chip transfer apparatus |
| 08/12/2004 | DE4426311B4 Leiterbahnstruktur eines Halbleiterbauelementes und Verfahren zu ihrer Herstellung Interconnect structure of a semiconductor device and process for their preparation |
| 08/12/2004 | DE19939589B4 Verfahren zur Herstellung eines Grabens mit vergrabener Platte A process for producing a trench with a buried plate |
| 08/12/2004 | DE19852453B4 Verfahren zum Schützen von Chips für gemischte (digitale und analoge) Signale vor einer elektrostatischen Entladung A method for protecting chips for mixed (analog and digital) signals from electrostatic discharge |
| 08/12/2004 | DE19827686B4 Verfahren zum Herstellen einer Halbleiterstruktur mit einem oder mehreren Vorsprüngen A method of fabricating a semiconductor structure having one or more protrusions |
| 08/12/2004 | DE19826735B4 Stromversorgungsschaltung Power supply circuit |
| 08/12/2004 | DE19727911B4 Verfahren zum Abtragen einer Oberfläche eines Körpers A method for ablating a surface of a body |
| 08/12/2004 | DE10316710B3 Making semiconductor layer with compensation structure for MOS transistor manufacture employs thermal oxidation conversion reaction influencing local dopant concentrations |
| 08/12/2004 | DE10313047B3 Semiconductor chip stack manufacturing method incorporates bridging of conductor paths of one semiconductor chip for design modification |
| 08/12/2004 | DE10303096B3 Resin mask manufacturing method for semiconductor technology uses auxiliary layer formed with trough for provision of step in mask layer for obtaining edge region of greater height than central region |
| 08/12/2004 | DE102004003321A1 Aluminiumlegierungsbauteil mit besserer Korrosions- und Plasmabeständigkeit Aluminum alloy component with better corrosion resistance and plasma |
| 08/12/2004 | DE102004003315A1 Halbleitervorrichtung und Verfahren zur Herstellung derselben A semiconductor device and method of manufacturing the same |