Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2004
09/09/2004US20040173853 System and method to reduce noise in a substrate
09/09/2004US20040173852 System and method to reduce noise in a substrate
09/09/2004US20040173851 Semiconductor device and method of manufacturing the same
09/09/2004US20040173850 Isolation for SOI chip with multiple silicon film thicknesses
09/09/2004US20040173849 Hybrid circuit and electronic device using same
09/09/2004US20040173848 Thin film transistor and method of forming thin film transistor
09/09/2004US20040173847 Method of controlling floating body effects in an asymmetrical SOI device
09/09/2004US20040173845 Semiconductor device having trench gate structure and method for manufacturing the same
09/09/2004US20040173844 Trench power MOSFET with planarized gate bus
09/09/2004US20040173843 Semiconductor device and fabrication method therefor
09/09/2004US20040173842 Nonvolatile semiconductor memory device and method for manufacturing the same
09/09/2004US20040173841 Static random access memory cells
09/09/2004US20040173840 Method of making floating gate non-volatile memory cell with low erasing voltage having double layer gate dielectric
09/09/2004US20040173839 Nonvolatile memory cell
09/09/2004US20040173838 Semiconductor integrated circuit device and the method of producing the same
09/09/2004US20040173837 Multilayer electrode for a ferroelectric capacitor
09/09/2004US20040173836 Semiconductor device and method of manufacturing the same
09/09/2004US20040173834 Fabricating an sram cell
09/09/2004US20040173833 Methods for manufacturing semiconductor devices and semiconductor devices
09/09/2004US20040173832 Semiconductor storage device and method for fabricating the same
09/09/2004US20040173831 Semiconductor memory device and method for manufacturing the same
09/09/2004US20040173830 Nonvolatile semiconductor memory device with stable ferroelectric capacitor
09/09/2004US20040173829 Ferroelectric memory devices and methods for fabricating the same
09/09/2004US20040173828 Magnetic memory device and method of manufacturing the same
09/09/2004US20040173827 Memory cell array including ferroelectric capacitors, method for making the same, and ferroelectric memory device
09/09/2004US20040173826 Ferroelectric memory device and method for manufacturing the same
09/09/2004US20040173825 Semiconductor devices and methods of forming the same
09/09/2004US20040173824 Solid-state imaging device, method for manufacturing the same and interline transfer CCD image sensor
09/09/2004US20040173823 Method for manufacturing ferroelectric thin film device, ink jet recording head and ink jet printer
09/09/2004US20040173821 Semiconductor integrated circuit device and standard cell placement design method
09/09/2004US20040173820 High withstand voltage semiconductor device
09/09/2004US20040173819 Color display device
09/09/2004US20040173818 Binder diffusion transfer patterning of a thick film paste layer
09/09/2004US20040173817 Integrated photodetector and heterojunction bipolar transistors
09/09/2004US20040173815 Strained-channel transistor structure with lattice-mismatched zone
09/09/2004US20040173812 Shallow trench isolation process
09/09/2004US20040173800 Polycrystalline silicon thin film, fabrication method thereof, and thin film transistor without directional dependency on active channels fabricated using the same
09/09/2004US20040173799 CMOS imager with enhanced transfer of charge and low voltage operation and method of formation
09/09/2004US20040173798 Micro-mechanically strained semiconductor film
09/09/2004US20040173797 Thin film transistor array panel for liquid crystal display
09/09/2004US20040173796 Complementary thin film transistor circuit, electro-optical device, and electronic apparatus
09/09/2004US20040173795 Amorphous-silicon thin film transistor and shift resister having the same
09/09/2004US20040173794 Wafer level testing and bumping process
09/09/2004US20040173791 Semiconductor substrate structure
09/09/2004US20040173790 Method of forming strained silicon on insulator substrate
09/09/2004US20040173762 Tdi detecting device, a feed-through equipment and electron beam apparatus using these devices
09/09/2004US20040173759 Device, set and method for carrying a gas or a liquid to a surface through a tube
09/09/2004US20040173755 Electron-beam focusing apparatus and electron-beam projection lithography system employing the same
09/09/2004US20040173748 Method of measuring the performance of a scanning electron microscope
09/09/2004US20040173666 Improved dispersion stability; chemisorption
09/09/2004US20040173665 Method of electrically and mechanically connecting electronic devices to one another
09/09/2004US20040173660 Method of soldering
09/09/2004US20040173599 Multi-parameter process and control method
09/09/2004US20040173598 Ceramic heater
09/09/2004US20040173581 Plasma processing method and plasma processing apparatus
09/09/2004US20040173580 Apparatus for non-contact cleaning of a surface
09/09/2004US20040173579 Apparatus and method for non-contact cleaning of a surface
09/09/2004US20040173575 Method of releasing devices from a substrate
09/09/2004US20040173574 CMP composition containing organic nitro compounds
09/09/2004US20040173573 etching gas contains C4F6 gas and O2 gas, and the ratio C4F6/O2 of the C4F6 gas to the O2 gas falls within a range of 0.7 and 1.5
09/09/2004US20040173572 Method of plasma etching of high-K dielectric materials with high selectivity to underlying layers
09/09/2004US20040173571 Method for etching structures in an etching body by means of a plasma
09/09/2004US20040173570 Method of etching magnetic and ferroelectric materials using a pulsed bias source
09/09/2004US20040173569 Cleaning gas and etching gas
09/09/2004US20040173567 Method of forming a lamination film pattern and improved lamination film pattern
09/09/2004US20040173566 Method for polymer removal after an etching process
09/09/2004US20040173499 Wafer box with a handle device
09/09/2004US20040173469 surface for chucking the wafer of the electrostatic chuck comprises an alumite film formed by anodizing aluminum, and the surface for chucking the wafer is electrostatically bipolar
09/09/2004US20040173464 Method and apparatus for providing intra-tool monitoring and control
09/09/2004US20040173461 Method and apparatus for local polishing control
09/09/2004US20040173454 Apparatus and method for electro chemical plating using backsid electrical contacte
09/09/2004US20040173452 Acoustic streaming of condensate during sputtered metal vapor deposition
09/09/2004US20040173375 Package substrate manufactured using electrolytic leadless plating process, and method for manufacturing the same
09/09/2004US20040173372 Electronic component for adhesion of a plurality of electrodes and method of mounting the same
09/09/2004US20040173322 Apparatus for removing an adhesive film on a chip
09/09/2004US20040173319 Quartz component for plasma processing apparatus and restoring method thereof
09/09/2004US20040173318 Apparatus for supporting wafer in semiconductor process
09/09/2004US20040173317 Resist stripper system
09/09/2004US20040173316 Apparatus and method using a microwave source for reactive atom plasma processing
09/09/2004US20040173315 Apparatus and method for reducing impurities in a semiconductor material
09/09/2004US20040173314 Plasma processing apparatus and method
09/09/2004US20040173311 Plasma processing apparatus and method
09/09/2004US20040173309 Plasma processing apparatus and plasma processing method
09/09/2004US20040173308 Semiconductor wafer handler
09/09/2004US20040173307 Apparatus and method for supplying chemicals in chemical mechanical polishing systems
09/09/2004US20040173248 Ultrasonic vibrator, wet-treatment nozzle, and wet-treatment apparatus
09/09/2004US20040173237 System for cleaning substrates of flat panel display devices and method of cleaning using the same
09/09/2004US20040173236 Chamber with support and wafer on rotating chucks, fixing the nozzles for spraying cleaning solutions, heating and cooling
09/09/2004US20040173161 Wafer handling apparatus and method of manufacturing thereof
09/09/2004US20040173159 Semiconductor process chamber electrode
09/09/2004US20040173157 Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same
09/09/2004US20040173155 Method and apparatus for an improved optical window deposition shield in a plasma processing system
09/09/2004US20040173154 Manufacturing apparatus for buried insulating layer-type semiconductor silicon carbide substrate
09/09/2004US20040173153 Process liquid supply nozzle, process liquid supply device and nozzle cleaning method
09/09/2004US20040173152 Method and apparatus for forming a thin film
09/09/2004US20040173148 Discharging unit for discharging a photosensitive material, coater having the discharging unit, and apparatus for coating a photosensitive material having the coater
09/09/2004US20040172886 CMP composition based on cupric oxidizing compounds
09/09/2004US20040172819 Wiring board, method of manufacturing the same, semiconductor device, electronic module, and electronic apparatus
09/09/2004US20040172815 Semiconductor chip mounting apparatus and method of mounting semiconductor chips using the same
09/09/2004US20040172814 Method for manufacturing printed circuit boards