| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 09/07/2004 | US6787913 Ohmic contact plug having an improved crack free TiN barrier metal in a contact hole and method of forming the same |
| 09/07/2004 | US6787912 Barrier material for copper structures |
| 09/07/2004 | US6787911 Interconnect with low dielectric constant insulators for semiconductor integrated circuit manufacturing |
| 09/07/2004 | US6787910 Lower electric resistance and superior heat conductivity |
| 09/07/2004 | US6787909 High frequency semiconductor device |
| 09/07/2004 | US6787908 Pad metallization over active circuitry |
| 09/07/2004 | US6787907 Semiconductor device with dual damascene wiring |
| 09/07/2004 | US6787906 Bit line pad and borderless contact on bit line stud with localized etch stop layer formed in an undermined region |
| 09/07/2004 | US6787905 Electric semiconductor element with a contact hole |
| 09/07/2004 | US6787904 Semiconductor integrated circuit device |
| 09/07/2004 | US6787903 Semiconductor device with under bump metallurgy and method for fabricating the same |
| 09/07/2004 | US6787897 Wafer-level package with silicon gasket |
| 09/07/2004 | US6787895 Leadless chip carrier for reduced thermal resistance |
| 09/07/2004 | US6787894 Apparatus and method for leadless packaging of semiconductor devices |
| 09/07/2004 | US6787892 Semiconductor device and semiconductor device manufacturing method |
| 09/07/2004 | US6787891 Freeform substrates and devices |
| 09/07/2004 | US6787887 Semiconductor device |
| 09/07/2004 | US6787886 Semiconductor device and methods of fabricating the same |
| 09/07/2004 | US6787885 Low temperature hydrophobic direct wafer bonding |
| 09/07/2004 | US6787883 Silicon-germanium devices for CMOS formed by ion implantation and solid phase epitaxial regrowth |
| 09/07/2004 | US6787880 ESD parasitic bipolar transistors with high resistivity regions in the collector |
| 09/07/2004 | US6787879 Interfacial oxide in a transistor |
| 09/07/2004 | US6787878 Semiconductor device having a potential fuse, and method of manufacturing the same |
| 09/07/2004 | US6787877 Method for filling structural gaps and integrated circuitry |
| 09/07/2004 | US6787876 Semiconductor device |
| 09/07/2004 | US6787875 Self-aligned vias in an integrated circuit structure |
| 09/07/2004 | US6787874 Semiconductor device |
| 09/07/2004 | US6787873 Semiconductor device for providing a noise shield |
| 09/07/2004 | US6787871 Integrated schottky barrier diode and manufacturing method thereof |
| 09/07/2004 | US6787866 Semiconductor device having a moveable member therein and a protective member disposed thereon |
| 09/07/2004 | US6787864 Mosfets incorporating nickel germanosilicided gate and methods for their formation |
| 09/07/2004 | US6787863 Mos field effect transistor and mos capacitor |
| 09/07/2004 | US6787862 Gas insulated gate field effect transistor |
| 09/07/2004 | US6787861 Non-crystalline oxides for use in microelectronic, optical, and other applications |
| 09/07/2004 | US6787860 Apparatus and method for inhibiting dummy cell over erase |
| 09/07/2004 | US6787858 Carrier injection protection structure |
| 09/07/2004 | US6787857 Contact structure a semiconductor device and manufacturing method thereof |
| 09/07/2004 | US6787855 Semiconductor device and method of manufacturing same |
| 09/07/2004 | US6787854 Method for forming a fin in a finFET device |
| 09/07/2004 | US6787853 Semiconductor device using an SOI substrate |
| 09/07/2004 | US6787852 Semiconductor-on-insulator (SOI) device having source/drain silicon-germanium regions |
| 09/07/2004 | US6787850 Dynamic threshold voltage MOS transistor fitted with a current limiter |
| 09/07/2004 | US6787849 Semiconductor devices and methods of manufacturing the same |
| 09/07/2004 | US6787847 High-voltage vertical transistor with a multi-layered extended drain structure |
| 09/07/2004 | US6787846 Transistor |
| 09/07/2004 | US6787845 Metal source and drain mos transistor |
| 09/07/2004 | US6787844 Semiconductor device including transistor with composite gate structure and transistor with single gate structure, and method for manufacturing the same |
| 09/07/2004 | US6787843 Nonvolatile semiconductor memory cell and associated semiconductor circuit configuration and method for the fabrication of the circuit configuration |
| 09/07/2004 | US6787842 Method for operating a stacked gate field effect transistor (FET) device |
| 09/07/2004 | US6787841 Semiconductor element and semiconductor memory device using the same |
| 09/07/2004 | US6787840 Nitridated tunnel oxide barriers for flash memory technology circuitry |
| 09/07/2004 | US6787839 Capacitor structure |
| 09/07/2004 | US6787838 Trench capacitor DRAM cell using buried oxide as array top oxide |
| 09/07/2004 | US6787837 Semiconductor memory with trench capacitor and method of manufacturing the same |
| 09/07/2004 | US6787836 Integrated metal-insulator-metal capacitor and metal gate transistor |
| 09/07/2004 | US6787835 Semiconductor memories |
| 09/07/2004 | US6787834 Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth |
| 09/07/2004 | US6787833 Integrated circuit having a barrier structure |
| 09/07/2004 | US6787832 Semiconductor memory cell and semiconductor memory device |
| 09/07/2004 | US6787831 Barrier stack with improved barrier properties |
| 09/07/2004 | US6787830 Semiconductor device and method for fabricating the same |
| 09/07/2004 | US6787827 Semiconductor device and method for manufacturing the same |
| 09/07/2004 | US6787826 Heterostructure field effect transistor |
| 09/07/2004 | US6787825 Data storage and processing apparatus, and method for fabricating the same |
| 09/07/2004 | US6787823 Semiconductor device having cell-based basic element aggregate having protruding part in active region |
| 09/07/2004 | US6787822 Heterojunction III-V transistor, in particular HEMT field effect transistor or heterojunction bipolar transistor |
| 09/07/2004 | US6787821 Compound semiconductor device having a mesfet that raises the maximum mutual conductance and changes the mutual conductance |
| 09/07/2004 | US6787820 Hetero-junction field effect transistor having an InGaAIN cap film |
| 09/07/2004 | US6787819 Retrograde well structure for a CMOS imager |
| 09/07/2004 | US6787817 Compound semiconductor having a doped layer between the gate and an ohmic contact of an active region |
| 09/07/2004 | US6787816 Thyristor having one or more doped layers |
| 09/07/2004 | US6787809 Thin film transistor array panel |
| 09/07/2004 | US6787807 Semiconductor device |
| 09/07/2004 | US6787806 Semiconductor thin film and method of manufacturing the same and semiconductor device and method of manufacturing the same |
| 09/07/2004 | US6787805 Semiconductor device and manufacturing method |
| 09/07/2004 | US6787802 Semiconductor device including evaluation elements |
| 09/07/2004 | US6787797 Semiconductor wafer and device for semiconductor device manufacturing process |
| 09/07/2004 | US6787795 Logic apparatus and logic circuit |
| 09/07/2004 | US6787793 Strained Si device with first SiGe layer with higher Ge concentration being relaxed to have substantially same lattice constant as second SiGe layer with lower Ge concentration |
| 09/07/2004 | US6787789 Method of measuring aberration of a projection system of a lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 09/07/2004 | US6787787 Ultraviolet radiation producing apparatus |
| 09/07/2004 | US6787785 Able to prevent a drop in pattern alignment accuracy due to the internal stress of the membrane and able to align patterns including complementary patterns at a high accuracy |
| 09/07/2004 | US6787784 Charged-particle beam drawing data creation method, and charged-particle beam drawing apparatus using the same |
| 09/07/2004 | US6787781 Arc chamber filament for ion implanter |
| 09/07/2004 | US6787773 Film thickness measurement using electron-beam induced x-ray microanalysis |
| 09/07/2004 | US6787770 Method of inspecting holes using charged-particle beam |
| 09/07/2004 | US6787755 Laser illumination apparatus |
| 09/07/2004 | US6787754 Solid-state image pickup device having improved flatness and method for fabricating the same |
| 09/07/2004 | US6787739 Apparatus for processing a substrate including a heating apparatus |
| 09/07/2004 | US6787705 Interconnection structure of semiconductor element |
| 09/07/2004 | US6787485 Appliance and method for tempering a plurality of process items by absorption of electromagnetic radiation generated by plural sources of the radiation |
| 09/07/2004 | US6787484 Method of reducing visible light induced arcing in a semiconductor wafer manufacturing process |
| 09/07/2004 | US6787483 Gap fill for high aspect ratio structures |
| 09/07/2004 | US6787482 Method to form a DRAM capacitor using low temperature reoxidation |
| 09/07/2004 | US6787481 Method for manufacturing semiconductor device |
| 09/07/2004 | US6787480 Manufacturing method of semicondcutor device |
| 09/07/2004 | US6787479 Method for producing water for use in manufacturing semiconductors |
| 09/07/2004 | US6787477 Methods of forming dielectric layers and methods of forming capacitors |
| 09/07/2004 | US6787476 Etch stop layer for etching FinFET gate over a large topography |
| 09/07/2004 | US6787475 Flash step preparatory to dielectric etch |