| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/14/2004 | US6790757 Wire bonding method for copper interconnects in semiconductor devices |
| 09/14/2004 | US6790756 Self aligned channel implant, elevated S/D process by gate electrode damascene |
| 09/14/2004 | US6790755 Preparation of stack high-K gate dielectrics with nitrided layer |
| 09/14/2004 | US6790754 Methods for manufacturing a semiconductor device |
| 09/14/2004 | US6790752 Methods of controlling VSS implants on memory devices, and system for performing same |
| 09/14/2004 | US6790751 Semiconductor substrate for a one-chip electronic device and related manufacturing method |
| 09/14/2004 | US6790750 Semiconductor-on-insulator body-source contact and method |
| 09/14/2004 | US6790749 Method of manufacturing a semiconductor device |
| 09/14/2004 | US6790748 Thinning techniques for wafer-to-wafer vertical stacks |
| 09/14/2004 | US6790747 Method and device for controlled cleaving process |
| 09/14/2004 | US6790746 Method for improvement of edge breakdown caused by edge electrical field at a tunnel oxide of a high-density flash memory by a shielded bird's beak |
| 09/14/2004 | US6790745 Fabrication of dielectrically isolated regions of silicon in a substrate |
| 09/14/2004 | US6790743 [Method to relax alignment accuracy requirement in fabrication for integrated circuit] |
| 09/14/2004 | US6790742 Chemical mechanical polishing in forming semiconductor device |
| 09/14/2004 | US6790741 Process for producing a semiconductor device |
| 09/14/2004 | US6790740 Process for filling polysilicon seam |
| 09/14/2004 | US6790739 Structure and methods for process integration in vertical DRAM cell fabrication |
| 09/14/2004 | US6790738 Buried digit spacer separated capacitor array |
| 09/14/2004 | US6790737 Method for fabricating thin metal layers from the liquid phase |
| 09/14/2004 | US6790736 Method for manufacturing and structure of semiconductor device with polysilicon definition structure |
| 09/14/2004 | US6790735 Method of forming source/drain regions in semiconductor devices |
| 09/14/2004 | US6790734 Manufacturing method of semiconductor device |
| 09/14/2004 | US6790733 Preserving TEOS hard mask using COR for raised source-drain including removable/disposable spacer |
| 09/14/2004 | US6790732 Self-aligned dual-gate transistor device and method of forming self-aligned dual-gate transistor device |
| 09/14/2004 | US6790731 Method for tuning a work function for MOSFET gate electrodes |
| 09/14/2004 | US6790730 Fabrication method for mask read only memory device |
| 09/14/2004 | US6790729 Method of manufacturing NAND flash memory device |
| 09/14/2004 | US6790728 Method of manufacturing a flash memory |
| 09/14/2004 | US6790727 Integration of two memory types on the same integrated circuit |
| 09/14/2004 | US6790726 Method for producing an integrated semiconductor memory configuration |
| 09/14/2004 | US6790725 Double-sided capacitor structure for a semiconductor device and a method for forming the structure |
| 09/14/2004 | US6790724 Low leakage one transistor static random access memory |
| 09/14/2004 | US6790723 Semiconductor device and method of manufacturing the same |
| 09/14/2004 | US6790722 Logic SOI structure, process and application for vertical bipolar transistor |
| 09/14/2004 | US6790721 Metal local interconnect self-aligned source flash cell |
| 09/14/2004 | US6790720 Method for fabricating a MOSFET and reducing line width of gate structure |
| 09/14/2004 | US6790719 Process for forming dual metal gate structures |
| 09/14/2004 | US6790718 Method of manufacturing semiconductor memory device including one step of forming exposing the surface of the select transistors while not exposing the surface cell transistors |
| 09/14/2004 | US6790717 Method for producing a semiconductor component comprising a t-shaped contact electrode |
| 09/14/2004 | US6790716 Method for manufacturing a thin film transistor array panel |
| 09/14/2004 | US6790715 Manufacturing method of CMOS thin film transistor |
| 09/14/2004 | US6790714 Semiconductor device, display device and method of fabricating the same |
| 09/14/2004 | US6790713 Method for making an inlayed thyristor-based device |
| 09/14/2004 | US6790712 Semiconductor device and method for fabricating the same |
| 09/14/2004 | US6790711 Method of making semiconductor device |
| 09/14/2004 | US6790710 Method of manufacturing an integrated circuit package |
| 09/14/2004 | US6790709 Backside metallization on microelectronic dice having beveled sides for effective thermal contact with heat dissipation devices |
| 09/14/2004 | US6790708 Encapsulation process using a partial slot cover and a package formed by the process |
| 09/14/2004 | US6790706 Apparatus and method for leadless packaging of semiconductor devices |
| 09/14/2004 | US6790705 Manufacturing method for semiconductor apparatus |
| 09/14/2004 | US6790703 Apparatus for aligning die to interconnect metal on flex substrate |
| 09/14/2004 | US6790696 Providing an organic vertical cavity laser array device with etched region in dielectric stack |
| 09/14/2004 | US6790695 Semiconductor device and method of manufacturing the same |
| 09/14/2004 | US6790692 Method for fabricating semiconductor device |
| 09/14/2004 | US6790690 Method of manufacturing a display device |
| 09/14/2004 | US6790688 Method of high pass filtering a data set |
| 09/14/2004 | US6790687 Substrate processing apparatus and semiconductor device producing method |
| 09/14/2004 | US6790686 Method and apparatus for integrating dispatch and process control actions |
| 09/14/2004 | US6790685 Method of forming a test pattern, method of measuring an etching characteristic using the same and a circuit for measuring the etching characteristic |
| 09/14/2004 | US6790684 Wafer on wafer packaging and method of fabrication for full-wafer burn-in and testing |
| 09/14/2004 | US6790683 Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same |
| 09/14/2004 | US6790682 Die bonder for die-bonding a semiconductor chip to lead frame and method of producing a semiconductor device using the die bonder |
| 09/14/2004 | US6790681 Substrate processing apparatus and substrate processing method |
| 09/14/2004 | US6790680 Determining a possible cause of a fault in a semiconductor fabrication process |
| 09/14/2004 | US6790679 Ferroelectric transistor with enhanced data retention |
| 09/14/2004 | US6790678 Method for forming capacitor of ferroelectric random access memory |
| 09/14/2004 | US6790677 Method of forming a ferroelectric film and fabrication process of a semiconductor device having a ferroelectric film |
| 09/14/2004 | US6790676 Method for producing a ferroelectric layer |
| 09/14/2004 | US6790663 Methods of contacting lines and methods of forming an electrical contact in a semiconductor device |
| 09/14/2004 | US6790581 Hybrid compound, resist, and patterning process |
| 09/14/2004 | US6790580 Etching resistance |
| 09/14/2004 | US6790579 Photoacid initiator generates acid effecting polarity change rendering polymer water soluble in areas exposed to imaging source; integrated circuits, semiconductors |
| 09/14/2004 | US6790564 Photomask and manufacturing method of an electronic device therewith |
| 09/14/2004 | US6790515 Greensheet carriers and processing thereof |
| 09/14/2004 | US6790475 Source gas delivery |
| 09/14/2004 | US6790421 Method for treating exhaust gas containing fluorine-containing compound |
| 09/14/2004 | US6790377 Method for electrochemical fabrication |
| 09/14/2004 | US6790376 Process control based upon weight or mass measurements, and systems for accomplishing same |
| 09/14/2004 | US6790375 Dechucking method and apparatus for workpieces in vacuum processors |
| 09/14/2004 | US6790374 Plasma etch method for forming plasma etched silicon layer |
| 09/14/2004 | US6790340 Method and apparatus for radiation assisted electrochemical etching and etched product |
| 09/14/2004 | US6790336 Providing strength to the low k dielectric layer by using a sacrificial conductive metal layer over it during the chemical mechanical polishing and planarization of the above barrier and copper layers; semiconductors; integrated circuits |
| 09/14/2004 | US6790311 Plasma reactor having RF power applicator and a dual-purpose window |
| 09/14/2004 | US6790305 Method and structure for small pitch z-axis electrical interconnections |
| 09/14/2004 | US6790291 Rinsing a substrate in pure water stored in a processing bath within a processing chamber with pure water by immersion, exposing the rinsed substrate, supplying isopropyl alcohol solvent vapor under pressure to dry the substrate |
| 09/14/2004 | US6790289 Cleaning a deposit by processing with fluorine; chemical cleaning; physical cleaning by blasting with a cleaning media |
| 09/14/2004 | US6790287 Substrate processing apparatus, substrate inspection method and substrate processing system |
| 09/14/2004 | US6790286 Substrate processing apparatus |
| 09/14/2004 | US6790283 Coating apparatus |
| 09/14/2004 | US6790279 Method for manufacturing group III nitride compound semiconductor and a light-emitting device using group III nitride compound semiconductor |
| 09/14/2004 | US6790278 Method for preparing low-resistant p-type SrTiO3 |
| 09/14/2004 | US6790258 To control the build-up in vacuum pump lines, with first and second trapping media positioned to take advantage of differences in heat exchange efficiencies between the media and solid aluminum chloride build-up on the trapping media |
| 09/14/2004 | US6790242 Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof |
| 09/14/2004 | US6790130 Semiconductor processing methods of removing conductive material |
| 09/14/2004 | US6790127 Apparatus and method for feeding slurry |
| 09/14/2004 | US6790123 Method for processing a work piece in a multi-zonal processing apparatus |
| 09/14/2004 | US6789583 Gas supply apparatus and gas supply method |
| 09/14/2004 | US6789499 Apparatus to sputter silicon films |
| 09/14/2004 | US6789436 Method and arrangement for transporting and inspecting semiconductor substrates |
| 09/14/2004 | US6789328 Semiconductor load port alignment device |