| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/15/2004 | EP1457835A2 Exposure apparatus |
| 09/15/2004 | EP1457829A1 Lithographic projection assembly, handling apparatus for handling substrates and method of handling a substrate |
| 09/15/2004 | EP1457827A1 Lithographic apparatus, device manufacturing method and device manufactured thereby |
| 09/15/2004 | EP1457826A1 Lithographic apparatus and device manufacturing method |
| 09/15/2004 | EP1457825A1 Lithographic apparatus, device manufacturing method and device manufactured thereby |
| 09/15/2004 | EP1457822A2 Positive resist composition |
| 09/15/2004 | EP1457819A2 Positive resist composition and method of forming a resist pattern using the same |
| 09/15/2004 | EP1457806A2 Beam homogenizer, laser irradiation apparatus, and method of manufacturing a semiconductor device |
| 09/15/2004 | EP1457583A2 Mechanical enhancement of dense and porous organosilicate materials by UV exposure |
| 09/15/2004 | EP1457550A2 Composition for removing residues from the microstructure of an object |
| 09/15/2004 | EP1457269A2 Apparatus for cleaning a substrate having metal interconnects |
| 09/15/2004 | EP1457100A2 Chip-join process to reduce elongation mismatch between the adherents and semiconductor package made thereby |
| 09/15/2004 | EP1457099A1 System for the manufacture of electric and integrated circuits |
| 09/15/2004 | EP1457098A1 Ball grid array package |
| 09/15/2004 | EP1456891A2 Imaging device in a projection exposure facility |
| 09/15/2004 | EP1456890A1 Zener diode, zener diode circuit and method for production of a zener diode |
| 09/15/2004 | EP1456889A1 Strain balanced nitride heterojunction transistors and methods of fabricating strain balanced nitride heterojunction transistors |
| 09/15/2004 | EP1456888A1 Electrically programmed mos transistor source/drain series resistance |
| 09/15/2004 | EP1456887A1 Circuit fabrication method |
| 09/15/2004 | EP1456885A2 Monos device having buried metal silicide bit line |
| 09/15/2004 | EP1456884A2 Integrated circuit |
| 09/15/2004 | EP1456883A1 Method of forming ultra shallow junctions |
| 09/15/2004 | EP1456880A2 Electronic component and method for producing the same |
| 09/15/2004 | EP1456879A2 Electrical/optical integration scheme using direct copper bonding |
| 09/15/2004 | EP1456878A2 Method and device for encapsulating electronic components while exerting fluid pressure |
| 09/15/2004 | EP1456877A1 Composite spacer liner for improved transistor performance |
| 09/15/2004 | EP1456876A2 Memory cell with a trench transistor |
| 09/15/2004 | EP1456875A2 Ideal oxygen precipitating silicon wafers with nitrogen/carbon stabilized oxygen precipitate nucleation centers and process for making the same |
| 09/15/2004 | EP1456874A1 Nitride offset spacer to minimize silicon recess by using poly reoxidation layer as etch stop layer |
| 09/15/2004 | EP1456873A1 A method of improving surface planarity prior to mram bit material deposition |
| 09/15/2004 | EP1456872A1 Method for depositing iii-v semiconductor layers on a non iii-v substrate |
| 09/15/2004 | EP1456871A1 Susceptor for epitaxial growth and epitaxial growth method |
| 09/15/2004 | EP1456870A2 Resistless lithography method for producing fine structures |
| 09/15/2004 | EP1456869A2 Device for etching, rinsing and drying substrates in ultra-clean atmosphere |
| 09/15/2004 | EP1456868A2 Electrochemical process and system for cleaning edge and bevel of workpieces |
| 09/15/2004 | EP1456867A1 Heated vacuum support apparatus |
| 09/15/2004 | EP1456850A1 Folded memory layers |
| 09/15/2004 | EP1456784A1 Clock tree synthesis for mixed domain clocks |
| 09/15/2004 | EP1456705A2 Catadioptrical reduction lens |
| 09/15/2004 | EP1456434A1 A method of depositing dielectric materials in damascene applications |
| 09/15/2004 | EP1456415A2 Fabrication of a high resolution biological molecule detection device with aluminum electrical conductors |
| 09/15/2004 | EP1456116A1 Method and device for producing a component with a mobile structure |
| 09/15/2004 | EP1456115A2 Method of dividing a substrate into a plurality of individual chip parts |
| 09/15/2004 | EP1455988A1 Air platen for leading edge and trailing edge control |
| 09/15/2004 | EP1455961A1 EXTRUSION TOOL, METHOD FOR MANUFACTURING SHAPED ARTICLE WITH FINS, AND HEAT SINK |
| 09/15/2004 | EP1393378B1 Method for producing a stepped structure on a substrate |
| 09/15/2004 | EP1370910A4 Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose |
| 09/15/2004 | EP1240556B1 Photolithography method, photolithography mask blanks, and method of making |
| 09/15/2004 | EP1218926B1 Wafer atmospheric transport module having a controlled mini-environment |
| 09/15/2004 | EP1211912B1 Hot plate unit |
| 09/15/2004 | EP1203264A4 Apparatus and method of image enhancement through spatial filtering |
| 09/15/2004 | EP1196645B1 Seal means and its application in deposition reactor |
| 09/15/2004 | EP1154002B1 Pressure-sensitive adhesive sheet exfoliative with heat |
| 09/15/2004 | EP1097091A4 A wafer carrier having a low tolerance build-up |
| 09/15/2004 | EP1028905A4 Integrated intrabay buffer, delivery, and stocker system |
| 09/15/2004 | EP1027729A4 Semiconductor processing workpiece support with sensory subsystem for detection of wafers or other semiconductor workpieces |
| 09/15/2004 | EP0946976B1 Aqueous cleaning solution for a semiconductor substrate |
| 09/15/2004 | EP0789981B1 Thermal reactor optimization |
| 09/15/2004 | CN2641834Y Semiconductor rectifying chip using nano material as passivation film |
| 09/15/2004 | CN2641823Y Convex block transferring clamp |
| 09/15/2004 | CN2641822Y IC package assembly |
| 09/15/2004 | CN2641821Y Combined polycrystalline silicon equipment for producing low temp. polycrystalline silicon transistor |
| 09/15/2004 | CN1529994A Method and apparatus for controlling spatial temperature distribution across surface of workpiece support |
| 09/15/2004 | CN1529912A Trench Schottky barrier rectifier and method of making same |
| 09/15/2004 | CN1529911A Dynamic memory based on single electron stroage |
| 09/15/2004 | CN1529910A Magnetic memory and its drive method, and magnetic memory apparatus using same |
| 09/15/2004 | CN1529909A Integrated circuit having energy-absovbing structure |
| 09/15/2004 | CN1529908A Ceramic electrostatic chuck assembly and method of making |
| 09/15/2004 | CN1529907A Method for making shallow junction semiconductor devices |
| 09/15/2004 | CN1529906A Method for enhanced oxidation of MOS transistor gate corners |
| 09/15/2004 | CN1529905A Method for etching organic insulating film and dual damasene process |
| 09/15/2004 | CN1529904A Cutting device |
| 09/15/2004 | CN1529903A Plating system with remote secondary anode for semiconductor manufacturing |
| 09/15/2004 | CN1529902A Semiconductor device and method of making same |
| 09/15/2004 | CN1529900A Assembly comprising heat-distribution plate and edge support |
| 09/15/2004 | CN1529864A Method and japparatus for considering diagonal wiring in placement |
| 09/15/2004 | CN1529839A Valve control system for atomic layer deposition chamber |
| 09/15/2004 | CN1529835A Method and apparatus for controlling tool using baseline control script |
| 09/15/2004 | CN1529834A Resist compositions with polymers having pendant groups containing plural acid labile moieties |
| 09/15/2004 | CN1529827A Generation of library of periodic grating diffraction signals |
| 09/15/2004 | CN1529774A Electrolytic copper plating method phosphorous cooper anode for electrolytic copper plating method said semiconductor wafer having low particle adhension plated with said method and anode |
| 09/15/2004 | CN1529772A Electrochemical co-deposition of metals for electronic device manufacture |
| 09/15/2004 | CN1529769A Anode Assembly depositing planar metal through enhancing electrolyte mixing and process for supplying electrolyte |
| 09/15/2004 | CN1529647A Device and method for determining orintation of crystallographic plane in relation to crystal surface and device for cutting single crystal in cutting machine |
| 09/15/2004 | CN1529544A Circuit board for flip-chip connection and manufacturing method thereof |
| 09/15/2004 | CN1529366A MgIn2O4/MgAl2O4 composite substrate material and preparing method thereof |
| 09/15/2004 | CN1529362A Circuit for automatic regulating for radio-freguency label chip and outside antenna impedance matching piece |
| 09/15/2004 | CN1529361A Chip packaging structure and chip and subtrate electric connection structure |
| 09/15/2004 | CN1529357A Package device for placing semiconductor chip and producing method and semiconductor devices thereof |
| 09/15/2004 | CN1529356A Analogue circuit auto-modelling method based on wavelet approaching and multi-order expanding |
| 09/15/2004 | CN1529355A Analogue circuit auto-mo delling method based on wavelet approaching and automatic expanding |
| 09/15/2004 | CN1529354A Nonlinear circuit model order-reducing method combining two-side projection with single-side projection |
| 09/15/2004 | CN1529353A Equivalent verifying method of combining circuit in super large-scale integrated circuit |
| 09/15/2004 | CN1529352A Probe card for testing wafer having plurality of semiconductor devices and its manufacturing method |
| 09/15/2004 | CN1529350A Method for producing film field-effect transistor |
| 09/15/2004 | CN1529349A Method for maunufacturing nano transistor device with source-drain on autoregistered insulator |
| 09/15/2004 | CN1529347A Saphire base nitride chip scribing method |
| 09/15/2004 | CN1529346A 10 nano-level gap electrode preparing method |
| 09/15/2004 | CN1529345A Method and device for preparing high power semiconductor device by open-tube diffusion |
| 09/15/2004 | CN1529344A Method for producing film device |