Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2004
09/16/2004US20040180537 Semiconductor processing methods of forming and utilizing antireflective material layers, and methods of forming transistor gate stacks
09/16/2004US20040180536 Method for manufature of semiconductor intergrated circuit device
09/16/2004US20040180535 Contact integration method
09/16/2004US20040180534 Semiconductor integrated circuit device and fabrication method for semiconductor integrated circuit device
09/16/2004US20040180533 Method for filling via with metal
09/16/2004US20040180532 Method for forming a self-passivated copper interconnect structure
09/16/2004US20040180531 Method for manufacturing a magnetic memory device, and a magnetic memory device
09/16/2004US20040180530 Method for filling via with metal
09/16/2004US20040180529 Semiconductor device and manufacturing method therefor
09/16/2004US20040180528 Method of forming a dual-layer resist and application thereof
09/16/2004US20040180527 Method of manufacturing semiconductor device
09/16/2004US20040180526 Solder on a sloped surface
09/16/2004US20040180523 Method for making a semiconductor device having a high-k gate dielectric
09/16/2004US20040180522 Manufacturing method for a semiconductor device
09/16/2004US20040180521 Transistor and method for making a transistor on a sige/soi substrate
09/16/2004US20040180520 Method of forming a structure wherein an electrode comprising a refractory metal is deposited
09/16/2004US20040180519 Method of making cavities in a semiconductor wafer
09/16/2004US20040180517 Method for structuring a flat substrate consisting of a glass-type material
09/16/2004US20040180516 Method for electrochemical oxidation
09/16/2004US20040180515 Ultraviolet irradiating method and an apparatus using the same
09/16/2004US20040180514 Process for separating dies on a wafer
09/16/2004US20040180513 Method of identifying wafer cutting positions of different size partial wafers
09/16/2004US20040180512 Bonded substrate for an integrated circuit containing a planar intrinsic gettering zone
09/16/2004US20040180511 Soi wafer producing method, and wafer separating jig
09/16/2004US20040180510 Method to fill deep trench structures with void-free polysilicon or silicon
09/16/2004US20040180509 Shallow trench isolation for strained silicon processes
09/16/2004US20040180508 Metal-insulator-metal capacitor and method for manufacturing the same
09/16/2004US20040180506 Diffusion barriers comprising a self-assembled monolayer
09/16/2004US20040180505 Epitaxial wafer and a method for producing it
09/16/2004US20040180504 Method of manufacturing a MOS transistor of a semiconductor device
09/16/2004US20040180503 Method for manufacturing semiconductor device
09/16/2004US20040180502 Semiconductor devices and methods of fabricating the same
09/16/2004US20040180501 Method of forming an embedded ROM
09/16/2004US20040180500 MOSFET power transistors and methods
09/16/2004US20040180499 Method of forming an element of a microelectronic circuit
09/16/2004US20040180498 Floating gate and fabricating method of the same
09/16/2004US20040180497 Semiconductor device comprising capacitor and method of fabricating the same
09/16/2004US20040180496 Vertical nitride read-only memory cell and method for forming the same
09/16/2004US20040180495 Flash memory and method of fabrication
09/16/2004US20040180494 Method for fabricating semiconductor device
09/16/2004US20040180493 Semiconductor capacitors having tantalum oxide layers and methods for manufacturing the same
09/16/2004US20040180492 Method for forming dual workfunction high-performance support MOSFETs in EDRAM arrays
09/16/2004US20040180491 Memory function body, particle forming method therefor and, memory device, semiconductor device, and electronic equipment having the memory function body
09/16/2004US20040180490 Method of manufacturing a dual gate semiconductor device with a poly-metal electrode
09/16/2004US20040180489 MOS transistor and method for fabricating the same
09/16/2004US20040180488 Method for fabricating complementary metal oxide semiconductor image sensor
09/16/2004US20040180487 Transistor devices, CMOS constructions, capacitor constructions, and methods of forming transistor devices and capacitor constructions
09/16/2004US20040180486 Electronic component and semiconductor device, method of making the same and method of mounting the same, circuit board, and electronic instrument
09/16/2004US20040180485 Integrated circuit with a MOS structure having reduced parasitic bipolar transistor action
09/16/2004US20040180484 Method for selective trimming of gate structures and apparatus formed thereby
09/16/2004US20040180483 Method of manufacturing CMOS transistor with LDD structure
09/16/2004US20040180482 Semiconductor device and manufacturing method thereof
09/16/2004US20040180481 Thin-film transistors on a flexible substrate
09/16/2004US20040180480 Thin film transistor substrate and method for fabricating the same
09/16/2004US20040180479 Thin film transistor array panel and manufacturing method thereof
09/16/2004US20040180478 Silicon-on-insulator ulsi devices with multiple silicon film thicknesses
09/16/2004US20040180477 Semiconductor device and method for its preparation
09/16/2004US20040180476 Flexible electronic circuits and displays
09/16/2004US20040180475 Mold die and method for manufacturing semiconductor device using the same
09/16/2004US20040180474 Electronic assembly having electrically-isolated heat-conductive structure and method therefor
09/16/2004US20040180473 Method of dividing a semiconductor wafer
09/16/2004US20040180472 Method of assembling a semiconductor device including sweeping (with a squeegee) encapsulant over the device repeatedly
09/16/2004US20040180471 Method of manufacturing stacked semiconductor device
09/16/2004US20040180469 SMT passive device noflow underfill methodology and structure
09/16/2004US20040180468 Semiconductor device, method of fabricating the same and semiconductor device fabricating apparatus
09/16/2004US20040180462 Backside thinning of image array devices
09/16/2004US20040180461 Light guide for image sensor
09/16/2004US20040180453 Ferroelectric memory device and method of forming the same
09/16/2004US20040180452 Method and apparatus for the production of a semiconductor compatible ferromagnetic film
09/16/2004US20040180300 Photoresist removal
09/16/2004US20040180297 spacing between neighboring lines is reduced to be less than the resolution limit of a lithographic process, thereby increasing the integration density of the semiconductor device
09/16/2004US20040180296 Novel method to improve bump reliability for flip chip device
09/16/2004US20040180295 Method for fabricating a dual damascene structure using a single photoresist layer
09/16/2004US20040180292 converting an organometallic precursor material to a metal-containing pattern adherent to a substrate
09/16/2004US20040180288 Postitive resist composition
09/16/2004US20040180287 Fluorinated polymers having ester groups and photoresists for microlithography
09/16/2004US20040180278 measuring a change of transmittance depending on a light path of the projection optical system, based on a pattern image of the diffraction light transferred to the wafer
09/16/2004US20040180277 Substrate treating method and apparatus
09/16/2004US20040180274 crystallizing an amorphous silicon film using a sequential lateral solidification; saves time in crystallizing to obtain an increase in productivity
09/16/2004US20040180270 Container for a mask, method of transferring lithographic masks therein and method of scanning a mask in a container
09/16/2004US20040180269 etching an anti-reflective coating (ARC) layer on a substrate in a plasma processing system; one or more gasses collectively containing ammonia (NH3) and a passivation gas is introduced
09/16/2004US20040180223 silica-based organic film containing polyorganosiloxane; etching rate using hydrofluoric acid is reduced
09/16/2004US20040180222 excels in dielectric properties, adhesion, film uniformity and mechanical strength, and has reduced moisture absorption
09/16/2004US20040180188 Silicon-based composition, low dielectric constant film, semiconductor device, and method for producing low dielectric constant film
09/16/2004US20040180158 Chamber having components with textured surfaces and method of manufacture
09/16/2004US20040180144 depositing a complex metal oxide (CMO) memory material on an electrode, the CMO memory material having a structure of either amorphous or small grain polycrystalline; and annealing the CMO memory material using a laser
09/16/2004US20040180142 For forming a coating film on a polygonal substrate by spin coating in an ambient with a descending clean air flow
09/16/2004US20040180141 For coating a coating solution and removing an unnecessary coating solution deposited on the side and back surfaces of a quadrangular substrate
09/16/2004US20040179933 Pedestal/heater assembly lift mechanism with direct drive lead screw
09/16/2004US20040179932 Robotic hand with multi-wafer end effector
09/16/2004US20040179931 Methods and apparatus for retaining a tray stack having a plurality of trays for carrying microelectronic devices
09/16/2004US20040179930 Articulated carrying device
09/16/2004US20040179807 Beam Homogenizer, laser irradiation apparatus, and method of manufacturing a semiconductor device
09/16/2004US20040179767 Semiconductor device and method for manufacturing the same
09/16/2004US20040179727 Pattern inspection method and apparatus
09/16/2004US20040179410 Semiconductor storage device having soft-error immunity
09/16/2004US20040179407 Nonvolatile semiconductor memory
09/16/2004US20040179405 Semiconductor storage, mobile electronic device, and detachable storage
09/16/2004US20040179403 Data writing method for semiconductor memory device and semiconductor memory device
09/16/2004US20040179393 Magnetic random access memory and method of manufacturing the same