Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2004
09/07/2004US6787474 Manufacture method for semiconductor device having silicon-containing insulating film
09/07/2004US6787473 Post-planarization clean-up
09/07/2004US6787472 Utilization of disappearing silicon hard mask for fabrication of semiconductor structures
09/07/2004US6787471 Method of manufacturing a semiconductor device
09/07/2004US6787470 Sacrificial feature for corrosion prevention during CMP
09/07/2004US6787469 Double pattern and etch of poly with hard mask
09/07/2004US6787468 Method of fabricating metal lines in a semiconductor device
09/07/2004US6787467 Method of forming embedded copper interconnections and embedded copper interconnection structure
09/07/2004US6787466 High throughout process for the formation of a refractory metal nucleation layer
09/07/2004US6787465 Method of forming a metal to polysilicon contact in oxygen environment
09/07/2004US6787464 Method of forming silicide layers over a plurality of semiconductor devices
09/07/2004US6787463 Chemical vapor deposition methods, and atomic layer deposition method
09/07/2004US6787462 Method of manufacturing semiconductor device having buried metal wiring
09/07/2004US6787461 Method for forming a plug metal layer
09/07/2004US6787460 Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses and conductive contacts so formed
09/07/2004US6787459 Method for fabricating a semiconductor device
09/07/2004US6787458 Polymer memory device formed in via opening
09/07/2004US6787457 Method of etching and anti-reflection film using substituted hydrocarbon with halogen gas
09/07/2004US6787456 Wafer-level inter-connector formation method
09/07/2004US6787455 Bi-layer photoresist method for forming high resolution semiconductor features
09/07/2004US6787454 Method of manufacturing semiconductor device having dual damascene structure
09/07/2004US6787453 Barrier film integrity on porous low k dielectrics by application of a hydrocarbon plasma treatment
09/07/2004US6787452 Use of amorphous carbon as a removable ARC material for dual damascene fabrication
09/07/2004US6787451 Semiconductor device and manufacturing method thereof
09/07/2004US6787450 High aspect ratio fill method and resulting structure
09/07/2004US6787449 Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics
09/07/2004US6787448 Methods for forming metal interconnections for semiconductor devices using a buffer layer on a trench sidewall
09/07/2004US6787447 Semiconductor processing methods of forming integrated circuitry
09/07/2004US6787446 Fabrication method of semiconductor integrated circuit device
09/07/2004US6787445 Method for fabricating semiconductor device
09/07/2004US6787444 Interconnection structures and methods of fabrication
09/07/2004US6787442 Method of making a semiconductor having multi-layered electrodes including nickel and phosphorus and solder formed with tin and an alkaline earth metal
09/07/2004US6787441 Method for pretreating a polymer substrate using an ion beam for subsequent deposition of indium oxide or indium tin oxide
09/07/2004US6787440 Method for making a semiconductor device having an ultra-thin high-k gate dielectric
09/07/2004US6787439 Method using planarizing gate material to improve gate critical dimension in semiconductor devices
09/07/2004US6787437 Method of making a high-voltage transistor with buried conduction regions
09/07/2004US6787436 Silicide-silicon contacts for reduction of MOSFET source-drain resistances
09/07/2004US6787434 Method of fabricating polysilicon film by nickel/copper induced lateral crystallization
09/07/2004US6787433 Semiconductor device and method of manufacturing the same
09/07/2004US6787432 Semiconductor device
09/07/2004US6787431 Method and semiconductor wafer configuration for producing an alignment mark for semiconductor wafers
09/07/2004US6787430 Semiconductor device and method for manufacturing semiconductor device
09/07/2004US6787429 High-K dielectric materials and processes for manufacturing them
09/07/2004US6787428 Aluminum-filled self-aligned trench for stacked capacitor structure and methods
09/07/2004US6787427 Method to fabricate SiGe HBTs with controlled current gain and improved breakdown voltage characteristics
09/07/2004US6787426 Method for forming word line of semiconductor device
09/07/2004US6787425 Methods for fabricating transistor gate structures
09/07/2004US6787424 Fully depleted SOI transistor with elevated source and drain
09/07/2004US6787423 Strained-silicon semiconductor device
09/07/2004US6787422 Method of body contact for SOI mosfet
09/07/2004US6787421 Method for forming a dual gate oxide device using a metal oxide and resulting device
09/07/2004US6787419 Method of forming an embedded memory including forming three silicon or polysilicon layers
09/07/2004US6787418 Method of making the selection gate in a split-gate flash eeprom cell and its structure
09/07/2004US6787417 Method of fabricating semiconductor device
09/07/2004US6787416 Non volatile embedded memory with poly protection layer
09/07/2004US6787415 Nonvolatile memory with pedestals
09/07/2004US6787414 Capacitor for semiconductor memory device and method of manufacturing the same
09/07/2004US6787413 Capacitor structure forming methods
09/07/2004US6787412 Dielectric element and method for fabricating the same
09/07/2004US6787411 Method of manufacturing semiconductor memory device and semiconductor memory device
09/07/2004US6787410 Semiconductor device having dynamic threshold transistors and element isolation region and fabrication method thereof
09/07/2004US6787409 Method of forming trench isolation without grooving
09/07/2004US6787408 Method for forming an electrical insulating layer on bit lines of the flash memory
09/07/2004US6787407 Method of manufacturing a semiconductor device
09/07/2004US6787406 Systems and methods for forming dense n-channel and p-channel fins using shadow implanting
09/07/2004US6787404 Method of forming double-gated silicon-on-insulator (SOI) transistors with reduced gate to source-drain overlap capacitance
09/07/2004US6787403 Semiconductor device and method of manufacture
09/07/2004US6787402 Double-gate vertical MOSFET transistor and fabrication method
09/07/2004US6787401 Method of making vertical diode structures
09/07/2004US6787399 Plastic lead frames for semiconductor devices, packages including same, and methods of fabrication
09/07/2004US6787397 Semiconductor device protective overcoat with enhanced adhesion to polymeric materials and method of fabrication
09/07/2004US6787395 Method of manufacturing a multi-chip module
09/07/2004US6787394 Methods of wafer level fabrication and assembly of chip scale packages
09/07/2004US6787393 Semiconductor package including a double-faced semiconductor chip having integrated circuitry on both sides thereof and a method of fabricating the semiconductor package
09/07/2004US6787392 Structure and method of direct chip attach
09/07/2004US6787391 Method of forming bumps on a wafer utilizing a post-heating operation, and apparatus therefor
09/07/2004US6787389 Semiconductor device having pads for connecting a semiconducting element to a mother board
09/07/2004US6787385 Method of preparing nitrogen containing semiconductor material
09/07/2004US6787379 Method of detecting spatially correlated variations in a parameter of an integrated circuit die
09/07/2004US6787378 Method for measuring height of sphere or hemisphere
09/07/2004US6787377 Determining method of thermal processing condition
09/07/2004US6787376 Creating a process recipe based on a desired result
09/07/2004US6787375 Microelectronic fabrication die electrical test method providing enhanced microelectronic fabrication die electrical test efficiency
09/07/2004US6787374 Semiconductor device manufacturing method and semiconductor device sorting system to be used with the same
09/07/2004US6787372 Method for manufacturing MTJ cell of magnetic random access memory
09/07/2004US6787371 Method of forming ferroelectric film, ferroelectric memory, method of manufacturing the same, semiconductor device, and method of manufacturing the same
09/07/2004US6787370 Method of forming a weak ferroelectric transistor
09/07/2004US6787293 Mixture of fluoride compound, acid and sugar
09/07/2004US6787290 Positive-working photoresist composition and resist patterning method using same
09/07/2004US6787288 Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices
09/07/2004US6787285 Pattern width slimming-inhibiting method of photoresist pattern using photoresist composition containing thermal acid generator
09/07/2004US6787284 Positive resist composition and base material carrying layer of the positive resist composition
09/07/2004US6787282 An acrylate ester resin that increases a solubility rate in an alkali developing solution by the action of a photoacid generator
09/07/2004US6787274 Mask having dummy features formed at peripheries of isolated edges of features corresponding to each circuit element of an integrated circuit to correct the optical proximity effect (ope)
09/07/2004US6787271 Design and layout of phase shifting photolithographic masks
09/07/2004US6787247 Injection molded heat dissipation device
09/07/2004US6787241 Film obtained from silsesquioxane polymer and method of preparing same
09/07/2004US6787233 Particles
09/07/2004US6787198 Hydrothermal treatment of nanostructured films
09/07/2004US6787193 Method for the formation of silica film, silica film, insulating film, and semiconductor device