| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/02/2004 | DE10260616B3 Verfahren zur Simultanen Bildung von Bauelementenkontakten und Rückseitenkontakten auf Wafern mit einer vergrabenen Isolatorschicht Method for Simultaneous formation of components contacts and back contacts on wafers with a buried insulator layer |
| 09/02/2004 | DE10250621B4 Verfahren zum Erzeugen verkapselter Chips und zum Erzeugen eines Stapels aus den verkapselten Chips A method for generating encapsulated chips and for producing a stack of the encapsulated chips |
| 09/02/2004 | DE10235462B4 Halbleiterspeichervorrichtung mit Immunität gegen Soft-Error A semiconductor memory device with immunity against soft error |
| 09/02/2004 | DE10214272B4 Halterung für einen Wafer Holder for a wafer |
| 09/02/2004 | DE102004008148A1 Sensor mit Membran und Verfahren zur Herstellung des Sensors Sensor with membrane and method of manufacturing the sensor |
| 09/02/2004 | DE102004005868A1 Kupferbadzusammensetzung zur stromlosen und/oder elektrolytischen Füllung von Durchkontaktierungen und Leiterbahnen bei der Herstellung von integrierten Schaltungen Kupferbadzusammensetzung for electroless and / or electrolytic filling of vias and conductive traces in the manufacture of integrated circuits |
| 09/02/2004 | DE10145765B4 Halbleiteraufbau mit hoch dotiertem Kanalleitungsgebiet und Verfahren zur Herstellung eines Halbleiteraufbaus Semiconductor structure with highly doped channel conduction region and method of manufacturing a semiconductor structure |
| 09/02/2004 | DE10049557B4 Vorrichtung zum Umwandeln der Intensitätsverteilung eines Laserstrahls Means for converting the intensity distribution of a laser beam |
| 09/02/2004 | CA2516058A1 Flip-chip component packaging process and flip-chip component |
| 09/02/2004 | CA2515784A1 Methods and apparatus for data analysis |
| 09/02/2004 | CA2515287A1 Reflective ohmic contact for silicon carbide, light emitting diode in including the same, and manufacturing method |
| 09/01/2004 | EP1453159A1 Light emitting device structure using nitride bulk single crystal layer |
| 09/01/2004 | EP1453158A1 Nitride semiconductor laser element, and production method therefor |
| 09/01/2004 | EP1453106A2 Light-receiving device, method for manufacturing the same, and optoelectronic integrated circuit comprising the same |
| 09/01/2004 | EP1453105A2 Vertical field effect transistor having a high withstand voltage |
| 09/01/2004 | EP1453104A2 A vertical bipolar transistor and a method of manufacture thereof |
| 09/01/2004 | EP1453101A2 Photoelectric X-ray converter, its driving method, and system including the photoelectric X-ray converter |
| 09/01/2004 | EP1453096A1 Pasted wafer and method for producing pasted wafer |
| 09/01/2004 | EP1453095A1 Memory device |
| 09/01/2004 | EP1453093A1 Semiconductor device comprising low dielectric material film and its production method |
| 09/01/2004 | EP1453092A2 Semiconductor integrated device and apparatus for designing the same |
| 09/01/2004 | EP1453090A2 Manufacturing method of semiconductor device |
| 09/01/2004 | EP1453088A2 Ultrathin integrated circuit: manufacture and application as label |
| 09/01/2004 | EP1453087A1 Microelectronic assembly |
| 09/01/2004 | EP1453086A2 Thin film semiconductor device and method of manufacturing same |
| 09/01/2004 | EP1453085A2 Post-etch cleaning treatment |
| 09/01/2004 | EP1453084A2 Post-etch cleaning treatment |
| 09/01/2004 | EP1453083A1 Nitriding method for insulation film, semiconductor device and production method for semiconductor device, substrate treating device and substrate treating method |
| 09/01/2004 | EP1453082A1 GAS FOR PLASMA REACTION, PROCESS FOR PRODUCING THE SAME, AND USE |
| 09/01/2004 | EP1453080A1 Process and composition for removing residues from the microstructure of an object |
| 09/01/2004 | EP1453079A2 Outer tube made of silicon carbide and thermal treatment system for semiconductors |
| 09/01/2004 | EP1453076A2 Deflector, method of its manufacture and its use in a charged particle beam exposure apparatus |
| 09/01/2004 | EP1452923A1 Agent for forming coating for narrowing pattern and method for forming fine pattern using the same |
| 09/01/2004 | EP1452922A1 Method for forming fine pattern |
| 09/01/2004 | EP1452921A1 Projection exposure method and apparatus and device manufacturing method |
| 09/01/2004 | EP1452919A1 Positive resist composition and method of forming resist pattern |
| 09/01/2004 | EP1452918A1 Positive resist composition and method of forming resist pattern |
| 09/01/2004 | EP1452917A1 Positive resist composition and method of forming resist pattern from the same |
| 09/01/2004 | EP1452628A1 Copper electroplating method, pure copper anode for copper electroplating, and semiconductor wafer plated thereby with little particle adhesion |
| 09/01/2004 | EP1452626A1 Mixer, and device and method for manufacturing thin film |
| 09/01/2004 | EP1452625A2 Method of cleaning a cvd reaction chamber |
| 09/01/2004 | EP1452619A1 Thin metal oxide film and process for producing the same |
| 09/01/2004 | EP1452561A1 Fluororubber molded article and method for producing the same |
| 09/01/2004 | EP1452510A1 Aluminium nitride materials and members for use in the production of semiconductors |
| 09/01/2004 | EP1452481A2 Fabrication of advanced silicon-based MEMS devices |
| 09/01/2004 | EP1452326A2 Method and apparatus for fixing a functional material onto a surface |
| 09/01/2004 | EP1452267A1 Carrier unit for holding a workpiece by vacuum and vacuum holding head |
| 09/01/2004 | EP1452221A1 Gas supplying method and system |
| 09/01/2004 | EP1451969A2 Semiconductor device having a byte-erasable eeprom memory |
| 09/01/2004 | EP1451892A1 Plasma production device and method and rf driver circuit |
| 09/01/2004 | EP1451890A2 Switch circuit and method of switching radio frequency signals |
| 09/01/2004 | EP1451879A2 Field effect transistor on insulating layer and manufacturing method |
| 09/01/2004 | EP1451877A1 Trench mosfet having low gate charge |
| 09/01/2004 | EP1451876A2 Super self-aligned collector device for mono-and hetero bipolar junction transistors, and method of making same |
| 09/01/2004 | EP1451874A2 Method for the production of image sensors |
| 09/01/2004 | EP1451873A2 Wearable biomonitor with flexible thinned integrated circuit |
| 09/01/2004 | EP1451871A2 Semiconductor device, and means for checking the authenticity |
| 09/01/2004 | EP1451870A2 Semiconductor with multiple rows of bond pads |
| 09/01/2004 | EP1451869A2 Semiconductor device and method of enveloping an integrated circuit |
| 09/01/2004 | EP1451868A2 Process for optically erasing charge buildup during fabrication of an integrated circuit |
| 09/01/2004 | EP1451867A2 Method and apparatus for cascade control using integrated metrology |
| 09/01/2004 | EP1451866A2 Method of manufacturing circuits |
| 09/01/2004 | EP1451865A2 A method of manufacturing a plurality of assemblies |
| 09/01/2004 | EP1451864A2 Self aligned compact bipolar junction transistor layout, and method of making same |
| 09/01/2004 | EP1451863A2 Method for copper cmp using polymeric complexing agents |
| 09/01/2004 | EP1451862A2 Methods of forming capacitors and methods of forming capcitor dielectric layers |
| 09/01/2004 | EP1451861A1 Apparatus and method for reactive atom plasma processing for material deposition |
| 09/01/2004 | EP1451860A1 Cmos process with an integrated, high performance, silicide agglomeration fuse |
| 09/01/2004 | EP1451859A2 Transistor metal gate structure that minimizes non-planarity effects and method of formation |
| 09/01/2004 | EP1451858A1 Interconnects with improved barrier layer adhesion |
| 09/01/2004 | EP1451857A2 Removing an amorphous oxide from a monocrystalline surface |
| 09/01/2004 | EP1451854A1 Transfer member with electric conductivity and its manufacturing method |
| 09/01/2004 | EP1451847A1 Optical particle corrector |
| 09/01/2004 | EP1451825A1 A matrix-addressable array of integrated transistor/memory structures |
| 09/01/2004 | EP1451817A1 Substrate-holder |
| 09/01/2004 | EP1451771A1 Method for making a module comprising at least an electronic component |
| 09/01/2004 | EP1451759A2 Semiconductor device, card, methods of initializing, checking the authenticity and the identity thereof |
| 09/01/2004 | EP1451731A2 Timing model extraction by timing graph reduction |
| 09/01/2004 | EP1451730A2 Assertion handling for timing model extraction |
| 09/01/2004 | EP1451642A1 Chemical rinse composition |
| 09/01/2004 | EP1451641A1 Method and apparatus for image formation |
| 09/01/2004 | EP1451629A1 Homogenizer |
| 09/01/2004 | EP1451619A2 Structures and methods for reducing aberration in optical systems |
| 09/01/2004 | EP1451564A1 X-ray topographic system |
| 09/01/2004 | EP1451561A2 Method for detecting defects in substrates |
| 09/01/2004 | EP1451525A1 A method of alignment by using interferometry |
| 09/01/2004 | EP1451413A2 Real-time component monitoring and replenishment system for multicomponent fluids |
| 09/01/2004 | EP1451387A1 Chemical vapor deposition reactor |
| 09/01/2004 | EP1451386A1 Chemical vapor deposition vaporizer |
| 09/01/2004 | EP1451385A1 Cyclical deposition of refractory metal silicon nitride |
| 09/01/2004 | EP1451099A1 Catalytic reactor apparatus and method for generating high purity water vapor |
| 09/01/2004 | EP1451018A2 Methods of fabricating patterned layers on a substrate |
| 09/01/2004 | EP1399953A4 Opto-electronic device integration |
| 09/01/2004 | EP1388882A9 Particle-optical systems |
| 09/01/2004 | EP1371100A4 A transpinnor-based switch and applications |
| 09/01/2004 | EP1169145B1 Method and device for cleaning substrates |
| 09/01/2004 | EP1149061B1 High purity, siliconized silicon carbide having high thermal shock resistance |
| 09/01/2004 | EP1124912A4 A chemical mechanical polishing slurry system having an activator solution |
| 09/01/2004 | EP1076826B1 Method for producing micromechanical components |
| 09/01/2004 | EP1018151B1 Process for fabricating layered superlattice materials and making electronic devices including same without exposure to oxygen |