Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2004
09/21/2004US6794746 Method of manufacturing semiconductor device, semiconductor device, narrow-pitch connector, electrostatic actuator, piezoelectric actuator, ink jet head, ink jet printer, micromachine, liquid crystal panel, and electronic device
09/21/2004US6794745 Lead on chip type semiconductor package
09/21/2004US6794739 Semiconductor device, process for production thereof, and electronic equipment
09/21/2004US6794738 Leadframe-to-plastic lock for IC package
09/21/2004US6794737 Spring structure with stress-balancing layer
09/21/2004US6794733 Increasing the susceptability of an integrated circuit to ionizing radiation
09/21/2004US6794732 Semiconductor device and method of manufacturing the same
09/21/2004US6794730 High performance PNP bipolar device fully compatible with CMOS process
09/21/2004US6794721 Integration system via metal oxide conversion
09/21/2004US6794720 Dynamic threshold voltage metal insulator field effect transistor
09/21/2004US6794719 HV-SOI LDMOS device with integrated diode to improve reliability and avalanche ruggedness
09/21/2004US6794718 High mobility crystalline planes in double-gate CMOS technology
09/21/2004US6794717 Semiconductor device and method of manufacturing the same
09/21/2004US6794714 Transistor and method for fabricating the same
09/21/2004US6794713 Semiconductor device and method of manufacturing the same including a dual layer raised source and drain
09/21/2004US6794712 Nonvolatile semiconductor memory device and process of production and write method thereof
09/21/2004US6794711 Non-volatile memory device having select transistor structure and SONOS cell structure and method for fabricating the device
09/21/2004US6794710 Split-gate flash memory structure and method of manufacture
09/21/2004US6794709 Structure and method for dual gate oxide thicknesses
09/21/2004US6794708 Nonvolatile semiconductor device with floating gate structure
09/21/2004US6794706 Applications of space-charge-limited conduction induced current increase in nitride-oxide dielectric capacitors: voltage regulator for power supply system and others
09/21/2004US6794705 Multi-layer Pt electrode for DRAM and FRAM with high K dielectric materials
09/21/2004US6794704 Method for enhancing electrode surface area in DRAM cell capacitors
09/21/2004US6794703 High pressure reoxidation/anneal of high dielectric constant
09/21/2004US6794702 Semiconductor device and fabrication method thereof
09/21/2004US6794701 Non-volatile memory
09/21/2004US6794700 Capacitor having a dielectric layer including a group 17 element
09/21/2004US6794699 Annular gate and technique for fabricating an annular gate
09/21/2004US6794698 Formation of novel DRAM cell capacitors by integration of capacitors with isolation trench sidewalls
09/21/2004US6794697 Asymmetric patterned magnetic memory
09/21/2004US6794696 Magnetic memory device and method of manufacturing the same
09/21/2004US6794695 Magneto resistive storage device having a magnetic field sink layer
09/21/2004US6794694 Inter-wiring-layer capacitors
09/21/2004US6794693 Semiconductor device and manufacturing method thereof
09/21/2004US6794691 Use of irregularly shaped conductive filler features to improve planarization of the conductive layer while reducing parasitic capacitance introduced by the filler features
09/21/2004US6794690 Group III nitride compound semiconductor light-emitting element
09/21/2004US6794689 High voltage semiconductor component
09/21/2004US6794688 Semiconductor light-emitting device and manufacturing method therefor, and LED lamp and LED display
09/21/2004US6794684 Reflective ohmic contacts for silicon carbide including a layer consisting essentially of nickel, methods of fabricating same, and light emitting devices including the same
09/21/2004US6794682 Semiconductor device, method for manufacturing the same, and radiation detector
09/21/2004US6794681 Substrate of semiconductor device and fabrication method thereof as well as semiconductor device and fabrication method thereof
09/21/2004US6794680 Semiconductor device having pad
09/21/2004US6794679 Semiconductor device that can measure timing difference between input and output signals
09/21/2004US6794677 Semiconductor integrated circuit device and method for fabricating the same
09/21/2004US6794674 Integrated circuit device and method for forming the same
09/21/2004US6794673 Plastic substrate for a semiconductor thin film
09/21/2004US6794666 Electron emission lithography apparatus and method using a selectively grown carbon nanotube
09/21/2004US6794665 Electron beam drawing apparatus
09/21/2004US6794664 Umbilical cord facilities connection for an ion beam implanter
09/21/2004US6794662 Thermosetting resin wafer-holding pin
09/21/2004US6794661 Ion implantation apparatus capable of increasing beam current
09/21/2004US6794660 Long stroke mover for a stage assembly
09/21/2004US6794657 Magnetic shunt assembly for an exposure apparatus
09/21/2004US6794623 Guided heating apparatus and method for using the same
09/21/2004US6794615 Semiconductor wafer tray positioning
09/21/2004US6794605 Method for fabricating chemical mechanical polshing pad using laser
09/21/2004US6794315 Ultrathin oxide films on semiconductors
09/21/2004US6794314 Method of forming ultrathin oxide layer
09/21/2004US6794313 Oxidation process to improve polysilicon sidewall roughness
09/21/2004US6794312 Layering nitrided oxide on a silicon substrate
09/21/2004US6794311 Method and apparatus for treating low k dielectric layers to reduce diffusion
09/21/2004US6794310 Method and apparatus for determining temperature of a semiconductor wafer during fabrication thereof
09/21/2004US6794309 Method for utilizing rough insulator to enhance metal-insulator-semiconductor reliability
09/21/2004US6794307 Method for cleaning residual debris from semiconductor surfaces
09/21/2004US6794306 Semiconductor device having gate all around type transistor and method of forming the same
09/21/2004US6794305 Method of manufacturing a semiconductor integrated circuit device
09/21/2004US6794304 Method and apparatus for reducing microtrenching for borderless vias created in a dual damascene process
09/21/2004US6794303 Two stage etching of silicon nitride to form a nitride spacer
09/21/2004US6794302 Dynamic feed forward temperature control to achieve CD etching uniformity
09/21/2004US6794300 Mechanically scanned wet chemical processing
09/21/2004US6794299 Various methods of controlling conformal film deposition processes, and a system for accomplishing same
09/21/2004US6794298 CF4+H2O plasma ashing for reduction of contact/via resistance
09/21/2004US6794297 Method for etching an antireflective coating and for fabricating a semiconductor device
09/21/2004US6794296 Aperture in a semiconductor material, and the production and use thereof
09/21/2004US6794295 Method to improve stability and reliability of CVD low K dielectric
09/21/2004US6794294 Etch process that resists notching at electrode bottom
09/21/2004US6794293 Trench etch process for low-k dielectrics
09/21/2004US6794292 Extrusion-free wet cleaning process for copper-dual damascene structures
09/21/2004US6794291 Reactor for processing a semiconductor wafer
09/21/2004US6794290 Method of chemical modification of structure topography
09/21/2004US6794288 Method for electroless deposition of phosphorus-containing metal films onto copper with palladium-free activation
09/21/2004US6794286 Process for fabricating a metal wiring and metal contact in a semicondutor device
09/21/2004US6794285 Slurry for CMP, and method of manufacturing semiconductor device
09/21/2004US6794284 Systems and methods for forming refractory metal nitride layers using disilazanes
09/21/2004US6794283 Semiconductor device and fabrication method thereof
09/21/2004US6794282 Three layer aluminum deposition process for high aspect ratio CL contacts
09/21/2004US6794281 Dual metal gate transistors for CMOS process
09/21/2004US6794280 Method of fabricating non-volatile memory
09/21/2004US6794279 Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas
09/21/2004US6794277 Method of doping semiconductor layer, method of manufacturing thin film semiconductor device, and thin film semiconductor device
09/21/2004US6794276 Methods for fabricating a substrate
09/21/2004US6794275 Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis
09/21/2004US6794274 Method for fabricating a polycrystalline silicon film
09/21/2004US6794273 Semiconductor device and manufacturing method thereof
09/21/2004US6794272 Wafer thinning using magnetic mirror plasma
09/21/2004US6794270 Method for shallow trench isolation fabrication and partial oxide layer removal
09/21/2004US6794269 Method for and structure formed from fabricating a relatively deep isolation structure
09/21/2004US6794268 Fabricating deeper and shallower trenches in semiconductor structures
09/21/2004US6794267 Process of manufacturing semiconductor device
09/21/2004US6794266 Method for forming a trench isolation structure