| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/21/2004 | US6794265 Methods of forming quantum dots of Group IV semiconductor materials |
| 09/21/2004 | US6794264 Implantation process using substoichiometric, oxygen doses at different energies |
| 09/21/2004 | US6794263 Method of manufacturing a semiconductor device including alignment mark |
| 09/21/2004 | US6794262 MIM capacitor structures and fabrication methods in dual-damascene structures |
| 09/21/2004 | US6794261 Methods of forming void regions, dielectric regions and capacitor constructions |
| 09/21/2004 | US6794259 Method for fabricating self-aligning mask layers |
| 09/21/2004 | US6794258 High-performance MOS transistor of LDD structure having a gate insulating film with a nitride central portion and oxide end portions |
| 09/21/2004 | US6794257 Method of manufacturing a semiconductor integrated circuit device |
| 09/21/2004 | US6794256 Method for asymmetric spacer formation |
| 09/21/2004 | US6794254 Embedded dual-port DRAM process |
| 09/21/2004 | US6794253 Mask ROM structure and method of fabricating the same |
| 09/21/2004 | US6794252 Method and system for forming dual work function gate electrodes in a semiconductor device |
| 09/21/2004 | US6794251 Method of making a power semiconductor device |
| 09/21/2004 | US6794250 Vertical split gate flash memory cell and method for fabricating the same |
| 09/21/2004 | US6794249 Method for fabricating a memory cell |
| 09/21/2004 | US6794248 Method of fabricating semiconductor memory device and semiconductor memory device driver |
| 09/21/2004 | US6794247 Method of fabricating a semiconductor memory device having resistor |
| 09/21/2004 | US6794246 Method for forming programmable logic arrays using vertical gate transistors |
| 09/21/2004 | US6794245 Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules |
| 09/21/2004 | US6794244 Semiconductor device and method of manufacturing the same |
| 09/21/2004 | US6794243 Method for manufacturing a ferroelectric capacitor |
| 09/21/2004 | US6794242 Extendible process for improved top oxide layer for DRAM array and the gate interconnects while providing self-aligned gate contacts |
| 09/21/2004 | US6794241 Method for fabricating capacitor in semiconductor device |
| 09/21/2004 | US6794240 Method of fabricating a semiconductor device |
| 09/21/2004 | US6794239 Method of fabrication of semiconductor structures by ion implantation |
| 09/21/2004 | US6794238 Process for forming metallized contacts to periphery transistors |
| 09/21/2004 | US6794237 Lateral heterojunction bipolar transistor |
| 09/21/2004 | US6794236 Eeprom device with improved capacitive coupling and fabrication process |
| 09/21/2004 | US6794235 Method of manufacturing a semiconductor device having a localized halo implant |
| 09/21/2004 | US6794234 Dual work function CMOS gate technology based on metal interdiffusion |
| 09/21/2004 | US6794233 Methods of fabricating a MOSFET |
| 09/21/2004 | US6794232 Method of making MOSFET gate electrodes with tuned work function |
| 09/21/2004 | US6794231 Method for manufacturing a liquid crystal display panel having a gate line with at least one opening |
| 09/21/2004 | US6794230 Approach to improve line end shortening |
| 09/21/2004 | US6794229 Manufacturing method for semiconductor device |
| 09/21/2004 | US6794228 Transflective liquid crystal display device and fabricating method thereof |
| 09/21/2004 | US6794227 Method of producing an SOI wafer |
| 09/21/2004 | US6794226 Semiconductor device incorporating elements formed of refractory metal-silicon-nitrogen and method for fabrication |
| 09/21/2004 | US6794225 Surface treatment for microelectronic device substrate |
| 09/21/2004 | US6794224 Semiconductor device including leads in communication with contact pads thereof and a stereolithographically fabricated package substantially encapsulating the leads and methods for fabricating the same |
| 09/21/2004 | US6794222 HDI module with integral conductive electromagnetic shield |
| 09/21/2004 | US6794221 Method of placing elements into receptors in a substrate |
| 09/21/2004 | US6794220 Organic thin-film semiconductor element and manufacturing method for the same |
| 09/21/2004 | US6794219 Method for creating a lateral overflow drain, anti-blooming structure in a charge coupled device |
| 09/21/2004 | US6794218 Glass attachment over micro-lens arrays |
| 09/21/2004 | US6794215 Method for reducing dark current in image sensor |
| 09/21/2004 | US6794210 Method for growing GaN compound semiconductor crystal and semiconductor substrate |
| 09/21/2004 | US6794207 Method of manufacturing integrated circuit |
| 09/21/2004 | US6794206 Method of polishing a film |
| 09/21/2004 | US6794205 Chip scale marker and method of calibrating marking position |
| 09/21/2004 | US6794204 Semiconductor manufacturing method and semiconductor manufacturing apparatus |
| 09/21/2004 | US6794203 Method of calculating the real added defect counts |
| 09/21/2004 | US6794202 Assemblies for temporarily connecting microelectronic elements for testing and methods therefor |
| 09/21/2004 | US6794201 Method of fabricating semiconductor device |
| 09/21/2004 | US6794200 Method for determining a preceding wafer, method for determining a measuring wafer, and method for adjusting the number of wafers |
| 09/21/2004 | US6794199 Ferroelectric memory and method for fabricating the same |
| 09/21/2004 | US6794198 MOCVD selective deposition of c-axis oriented Pb5Ge3O11 thin films on high-k gate oxides |
| 09/21/2004 | US6794118 Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
| 09/21/2004 | US6794113 Comprises alkali-soluble polymer (polyvinylphenol), photoacid generator (triphenyl sulfonium trifluoromethanesulfonic acid), and adamantyl alcohol capable of dehydration bonding with polymer; antiswelling; improved resolution |
| 09/21/2004 | US6794112 Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices |
| 09/21/2004 | US6794110 Development of latent images |
| 09/21/2004 | US6794098 Capacitor with plasma deposited dielectric |
| 09/21/2004 | US6794047 Tool for semiconductor, liquid crystals |
| 09/21/2004 | US6794038 Latent hardener, manufacturing method for latent hardener, and adhesive |
| 09/21/2004 | US6793969 Method of forming an oxidation-resistant TiSiN film |
| 09/21/2004 | US6793965 Clog resistant injection valve |
| 09/21/2004 | US6793905 Method for producing high-purity hydrochloric acid |
| 09/21/2004 | US6793837 Process for material-removing machining of both sides of semiconductor wafers |
| 09/21/2004 | US6793836 Puddle etching method of thin film by using spin-processor |
| 09/21/2004 | US6793835 System level in-situ integrated dielectric etch process particularly useful for copper dual damascene |
| 09/21/2004 | US6793834 Apparatus for and method of processing an object to be processed |
| 09/21/2004 | US6793833 Etching method of organic insulating film |
| 09/21/2004 | US6793832 Plasma etching method |
| 09/21/2004 | US6793797 Alternately electrodepositing and electro- mechanically polishing to selectively fill a semiconductor feature with metal including a) providing an anode assembly and a semiconductor wafer disposed in spaced apart relation |
| 09/21/2004 | US6793795 Utilizing ferrous and/or ferric salts and dimensionally stable insoluble anodes; full surface uniform deposition; rapidly and completely filling small width and diameter recesses; avoiding gas or liquid inclusions |
| 09/21/2004 | US6793792 Passing electrical current through conductive surface of metal and the adjacent electroplating solution to determine/maintain the voltage based on the current |
| 09/21/2004 | US6793785 Magnetic control oscillating-scanning sputter |
| 09/21/2004 | US6793779 Sputtering method for filling holes with copper |
| 09/21/2004 | US6793769 Substrate processing apparatus |
| 09/21/2004 | US6793768 Plasma-assisted processing apparatus |
| 09/21/2004 | US6793767 Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage |
| 09/21/2004 | US6793766 Apparatus having platforms positioned for precise centering of semiconductor wafers during processing |
| 09/21/2004 | US6793765 Situ monitoring of microloading using scatterometry with variable pitch gratings |
| 09/21/2004 | US6793764 Chemical dispensing system for semiconductor wafer processing |
| 09/21/2004 | US6793762 Method of using a pressure sensitive adhesive sheet |
| 09/21/2004 | US6793759 Method for creating adhesion during fabrication of electronic devices |
| 09/21/2004 | US6793749 Automated method of attaching flip-chip devices to a substrate |
| 09/21/2004 | US6793736 Improving chemical vapor deposition treatment of workpieces |
| 09/21/2004 | US6793735 Integrated cobalt silicide process for semiconductor devices |
| 09/21/2004 | US6793734 Heating furnace and semiconductor wafer-holding jig assembly and process of manufacturing semiconductor devices |
| 09/21/2004 | US6793733 Gas distribution showerhead |
| 09/21/2004 | US6793731 Method for recrystallizing an amorphized silicon germanium film overlying silicon |
| 09/21/2004 | US6793612 Industrial sponge roller device having reduced residuals |
| 09/21/2004 | US6793209 MEMS die holder |
| 09/21/2004 | US6793116 Solder ball and interconnection structure using the same |
| 09/21/2004 | US6793066 Conveying apparatus for plate-form members |
| 09/21/2004 | US6792991 Device for detaching a carrier from a semi-conductor disk |
| 09/21/2004 | US6792959 Single wafer type cleaning method and apparatus |
| 09/21/2004 | US6792958 System for processing substrate with liquid |
| 09/21/2004 | US6792957 Wet etching apparatus and method |