Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2004
10/07/2004US20040194843 Method of potting a component
10/07/2004US20040194842 High pressure processing apparatus and high pressure processing method
10/07/2004US20040194818 Hydrophilic components for a spin-rinse-dryer
10/07/2004US20040194817 Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom
10/07/2004US20040194814 Apparatus and process for stripping resist
10/07/2004US20040194813 Process for removing dopant ions from a substrate
10/07/2004US20040194806 IPA concentration interlock detector for substrate dryer
10/07/2004US20040194803 Cleaning of an electronic device
10/07/2004US20040194801 Rotational thermophoretic drying
10/07/2004US20040194799 Efficient control of ultraviolet light and ozone; uniformity, reducing processing time
10/07/2004US20040194798 Dirt removed by irradiating the substrate with ultraviolet rays in an oxygen-containing atmosphere in advance of wet cleaning with pure water; wet cleaning time and the amount of pure water can be reduced; liquid crystal device glass substrates
10/07/2004US20040194713 Bolstered pet bed
10/07/2004US20040194710 Apparatus for vapor deposition
10/07/2004US20040194709 Plasma treatment apparatus
10/07/2004US20040194708 Method of cleaning a cvd device
10/07/2004US20040194707 Silicon dioxide film forming method
10/07/2004US20040194706 Method and apparatus for forming a high quality low temperature silicon nitride layer
10/07/2004US20040194703 Organometallic compounds
10/07/2004US20040194698 Plating apparatus
10/07/2004US20040194692 Silicon annealed wafer and silicon epitaxial wafer
10/07/2004US20040194691 Method of depositing an inorganic film on an organic polymer
10/07/2004US20040194565 Mover device and semiconductor manufacturing apparatus and method
10/07/2004US20040194529 Method and tooling for z-axis offset of lead frames
10/07/2004US20040194392 Polishing compound, method for production thereof, and polishing method
10/07/2004US20040194340 Method and apparatus for surface treatment
10/07/2004US20040194336 Pressure vessel systems and methods for dispensing liquid chemical compositions
10/07/2004US20040194305 Method of manufacture of ceramic composite wiring structures for semiconductor devices
10/07/2004US20040194299 Method of manufacturing a probe card
10/07/2004US20040194294 Methods for manufacturing resistors using a sacrificial layer
10/07/2004US20040194292 Method of manufacturing a magnetic tunnel junction device
10/07/2004US20040194268 Rapid cycle chamber having a top vent with nitrogen purge
10/07/2004DE202004009975U1 Mobile electrostatic substrate holding device for semiconductor wafers has an electrically conductive connection between the rear sides of the holding device and a pinched-in wafer
10/07/2004DE10361257A1 Verfahren zur Herstellung von feinen Mustern A process for producing fine patterns
10/07/2004DE10359214A1 Verfahren zur Schaltkreissimulation eines Transistoren enthaltenden Schaltkreises A process for circuit simulation of a circuit containing transistors
10/07/2004DE10338048A1 Phasenverschiebungsmaske, Verfahren zumBilden eines Musters mit einer Phasenverschiebungsmaske, Verfahren zum Herstellen einer elektronischen Vorrichtung Phase shift mask method zumBilden a pattern having a phase shift mask method for manufacturing an electronic device
10/07/2004DE10335071A1 Verfahren zur Integrierung einer Ausrichtmarkierung und Grabenvorrichtung A method for integrating an alignment device and grave
10/07/2004DE10334633A1 Manufacturing arrangement with two semiconducting chips, involves joining extended contact area on first chip to contact area on second chip by conducting thermal flow process
10/07/2004DE10314383A1 Schnelle Wechselstation für den Wafertransport Fast changing station for the wafer transport
10/07/2004DE10312626A1 Electrostatic carrier for application of a removable compound to an electrically conductive workpiece useful in semiconductor technology, e.g. in production of ultrathin wafers of thickness less than 50 microns
10/07/2004DE10312469A1 Verfahren zum Herstellen einer Halbleiterstruktur A method of fabricating a semiconductor structure
10/07/2004DE10312216A1 Memory cell field manufacturing method using successive lithography masks for formation of trenches between bit lines and implantation of doping material
10/07/2004DE10312202A1 Verfahren zum Herstellen einer Ätzmaske auf einer Mikrostruktur, insbesondere einer Halbleiterstruktur mit Grabenkondensatoren, und entsprechende Verwendung der Ätzmaske A method of manufacturing an etching mask on a microstructure, in particular a semiconductor structure with grave capacitors and corresponding use of the etching mask
10/07/2004DE10311964A1 A chip module with a chip carrier (1), conduction paths (2) on both sides of the chip carrier, an IC-chip with contact surfaces and provided with a bump (sic) and filler composition useful in Flip-Chip technology
10/07/2004DE10311691A1 Method for preparation of a semiconductor structure by provision of Si nitride layer and Si dioxide layers useful for etching of Si dioxide layers with higher selectivity than Si nitride layers
10/07/2004DE10311059A1 Process for preparation of a semiconductor structure with troughs arranged in regions of different electrical conductivity useful in semiconductor technology, especially in miniaturizing processes
10/07/2004DE102004013056A1 Verfahren zur Herstellung eines Halbleiterbauelements und zugehörige Leiterplatte A process for producing a semiconductor device and associated circuit board
10/07/2004CA2520327A1 Surgical holder for a blood vessel
10/06/2004EP1465459A1 Heater inspection apparatus and semiconductor manufacturing apparatus having heater inspection apparatus mounted thereon
10/06/2004EP1465327A2 Vibration-powered and in a substrate integrated generator
10/06/2004EP1465262A2 Zinc oxide film treatment method and method of manufacturing photovoltaic device and utilizing the same
10/06/2004EP1465260A2 High-voltage field-effect transistor
10/06/2004EP1465259A2 Photoelectric X-ray converter, its driving method, and system including the photoelectric X-ray converter
10/06/2004EP1465257A1 Display apparatus
10/06/2004EP1465255A2 Integrated circuit
10/06/2004EP1465248A1 Layer structure having contact hole and method of producing the same
10/06/2004EP1465247A1 Manufacturing method of semiconductor device
10/06/2004EP1465246A2 Method for producing electrical through hole interconnects and devices made thereof
10/06/2004EP1465245A2 Vapor Deposition of Benzotriazole (BTA) for protecting Copper Interconnects
10/06/2004EP1465244A2 Integrated circuit package with exposed die surfaces and auxiliary attachment
10/06/2004EP1465243A2 Dummy copper deprocessing
10/06/2004EP1465242A1 Semiconductor wafer and method for producing the same
10/06/2004EP1465241A2 Apparatus and method for cleaning an electronic device
10/06/2004EP1465201A2 Producing conductive layers
10/06/2004EP1465200A1 Static Random Access Memory cell (SRAM) and ultra-low power memory using the same
10/06/2004EP1465088A2 Hierarchical evaluation of cells
10/06/2004EP1465018A2 Correction in scanning direction of mask-to-object shift due to Z offset and non-perpendicular illumination
10/06/2004EP1465017A2 Semiconductor wafer and exposure mask with alignment marks, mark detecting method and method of exposure
10/06/2004EP1465016A2 Illumination source and photomask optimization
10/06/2004EP1465012A2 Supporting structure for use in a lithographic apparatus
10/06/2004EP1465011A1 Transfer apparatus for transferring an object and method of use thereof and lithographic projection apparatus comprising such a transfer apparatus
10/06/2004EP1465009A2 Photo reticles using channel assist features
10/06/2004EP1464993A1 Optical device with improved mechanical stability for the extreme ultraviolet and lithography mask incorporating the device
10/06/2004EP1464953A1 Biosensor comprising an organic field effect transistor and method for the fabrication of the sensor
10/06/2004EP1464726A2 CVD method for forming a porous low dielectric constant SiOCH film
10/06/2004EP1464725A2 Germanium compounds suitable for use in vapor deposition processes
10/06/2004EP1464724A2 Organometallic compounds suitable for use in vapor deposition processes
10/06/2004EP1464688A1 Heat-peelable double-faced pressure-sensitive adhesive sheet, method for adhering processed material onto said sheet, and electronic part
10/06/2004EP1464647A2 Process for the preparation of group IVA and group VIA compounds
10/06/2004EP1464487A2 Positive photosensitive composition and positive photosensitive lithographic printing plate
10/06/2004EP1464455A1 Scalar type robot for carrying flat plate-like object; and flat plate-like object processing system
10/06/2004EP1464444A1 Abrasive pad
10/06/2004EP1464442A1 Chamfered freestanding nitride semiconductor wafer and method of chamfering nitride semiconductor wafer
10/06/2004EP1464433A1 Method and Aparaturs for testing a wire bond connection
10/06/2004EP1464410A1 Low dielectric materials and methods for making same
10/06/2004EP1464211A1 Electric circuit module and method for its assembly
10/06/2004EP1464118A1 Fpga and embedded circuitry initialization and processing
10/06/2004EP1464088A1 Electroluminescent device
10/06/2004EP1464086A2 Field effect transistor having periodically doped channel
10/06/2004EP1464085A1 Negative differential resistance field effect transistor (ndr-fet) & circuits using the same
10/06/2004EP1464080A2 Bonding device and method for production thereof
10/06/2004EP1464079A1 Ion-implantation and shallow etching to produce effective edge termination in high-voltage heterojunction bipolar transistors
10/06/2004EP1464078A1 Method and device for anisotropic etching of high aspect ratio
10/06/2004EP1464077A2 Method for producing a capacitor
10/06/2004EP1464076A2 Water carrier for semiconductor process tool
10/06/2004EP1464075A2 Device and method for the treatment of disk-shaped substrates
10/06/2004EP1464074A2 Method for limiting divot formation in post shallow trench isolation processes
10/06/2004EP1464067A1 Uniformity control for plasma doping systems
10/06/2004EP1464055A1 Apparatus and method for non-destructive data storage and retrieval
10/06/2004EP1463770A1 Organic composition
10/06/2004EP1463740A2 Materials and methods for forming hybrid organic-inorganic dielectric materials