Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2004
09/30/2004US20040191929 Integrated circuit devices including an intaglio pattern and methods for fabricating the same
09/30/2004US20040191928 MRAM architecture and a method and system for fabricating MRAM memories utilizing the architecture
09/30/2004US20040191927 Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby
09/30/2004US20040191701 Electron exposure to reduce line edge roughness
09/30/2004US20040191699 Method of fabricating a semiconductor device
09/30/2004US20040191698 Multilayer; forming cathode on substrate, composite layer of carbon nanotubes embedded in matrix ; peeling
09/30/2004US20040191696 UV-activated dielectric layer
09/30/2004US20040191677 Positive-working chemical-amplification photoresist composition
09/30/2004US20040191674 Chemical amplification resist composition
09/30/2004US20040191652 Coating with photoresists; masking; exposure to light; development into latent images patterns
09/30/2004US20040191651 Sputtering; continuous forming thin films on transparent substrate; forming pattern by sputtering
09/30/2004US20040191649 Reduced particle contamination manufacturing and packaging for reticles
09/30/2004US20040191648 Applying optical adjustment to first pattern; dividing into zones; sampling; determination edges; calibration
09/30/2004US20040191646 Sputtering layers of phase shifting mask on substrates; concurrent discharging various targets; reducing defects
09/30/2004US20040191645 Method and apparatus for forming crystalline portions of semiconductor film
09/30/2004US20040191644 Mask pattern generating method and mask pattern generating apparatus
09/30/2004US20040191639 Surface of pattern having organosilicon release agents
09/30/2004US20040191558 Heat spreader module and method of manufacturing same
09/30/2004US20040191557 Method of patterning magnetic products using chemical reaction
09/30/2004US20040191532 comprising metal-oxide-containing layer, which is a ferroelectric or a paraelectsic which is covered by a hydrogen barrier layer, characterized in that the hydrogen barrier provides improved protection of a hydrogen-sensitive dielectric against hydrogen contamination
09/30/2004US20040191510 containing heat-expandable microspheres, and a pressure-sensitive adhesive layer on the other side of the substrate that are peelable from each other by heating.
09/30/2004US20040191479 Anti-reflection film material and a substrate having an anti-reflection film and a method for forming a pattern
09/30/2004US20040191426 chemical vapor deposition by introducing oxygen radicals and organic raw material gases containing metals element into vacuum containers having silicon, to form dielectric layers; semiconductors
09/30/2004US20040191423 spin coating amorphous films of silver-containing precursors such as silver trifluoroacetylacetonate on surfaces of substrates and irradiating to form electroconductive or semiconductor layers; microelectronics
09/30/2004US20040191417 forming layers comprising porometric materials dispersed in matrices on substrates, then curing the to form gels and solvent coating to form multilayers including embedded porous layers; solvent and stress resistance; efficiency
09/30/2004US20040191413 Reactor for thin film deposition and method for depositing thin film on wafer using the reactor
09/30/2004US20040191155 Thermal process for reducing the concentration of dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride
09/30/2004US20040191151 Containing silicon or carbon, boron or nitrogen, gallium or aluminum and oxygen; low temperature thin film deposition on silicon substrate
09/30/2004US20040191140 Keeping thin liquid film rolling and moving on surface; enhancing contaminant transfer to extraction fluid; minimizing waste volume
09/30/2004US20040191046 Substrate processing apparatus
09/30/2004US20040191042 Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system
09/30/2004US20040191034 System for handling microelectronic dies having a compact die ejector
09/30/2004US20040191030 Methods and apparatus for transporting substrate carriers
09/30/2004US20040191029 Tool for handling wafers and epitaxial growth station
09/30/2004US20040191028 Vacuum processing system being able to carry process object into and out of vacuum chamber
09/30/2004US20040191027 Device for loading and unloading silicon wafers in an oven from a multiple-cassette station
09/30/2004US20040190677 Lithographic apparatus, device manufacturing method, and device manufactured thereby
09/30/2004US20040190665 Signal timing adjustment device, signal timing adjustment system, signal timing adjustment amount setting program, and storage medium storing the program
09/30/2004US20040190377 Method and means for isolating elements of a sensor array
09/30/2004US20040190363 Semiconductor memory device
09/30/2004US20040190361 Semiconductor storage device and portable electronic equipment having the same
09/30/2004US20040190359 Apparatus and method for disturb-free programming of passive element memory cells
09/30/2004US20040190350 Semiconductor memory device
09/30/2004US20040190345 Semiconductor memory device
09/30/2004US20040190339 Semiconductor integrated circuit and nonvolatile memory element
09/30/2004US20040190338 Structure for testing NAND flash memory and method of testing NAND flash memory
09/30/2004US20040190337 Selective operation of a multi-state non-volatile memory system in a binary mode
09/30/2004US20040190333 Non-volatile memory cell array having discontinuous source and drain diffusions contacted by continuous bit line conductors and methods of forming
09/30/2004US20040190329 Semiconductor device realized by using partial SOI technology
09/30/2004US20040190323 Semiconductor memory device
09/30/2004US20040190260 Heat sink with heat dissipating fins and method of manufacturing heat sink
09/30/2004US20040190252 Micro-channel heat exchangers and spreaders
09/30/2004US20040190223 Dynamic random access memory (DRAM) circuitry
09/30/2004US20040190222 Methods of forming capacitors, and methods of forming DRAM circuitry
09/30/2004US20040190220 Capacitor having copper electrodes and diffusion barrier layers
09/30/2004US20040190219 Storage capacitor with high memory capacity and low surface area
09/30/2004US20040190215 Electrostatic chuck having dielectric member with stacked layers and manufacture
09/30/2004US20040190189 Method for manufacturing MTJ cell of magnetic random access memory
09/30/2004US20040190151 Objective with fluoride crystal lenses
09/30/2004US20040189996 Method of aligning a template with a substrate employing moire patterns
09/30/2004US20040189995 Position detection apparatus
09/30/2004US20040189994 Liquid in spacing between substrate and template; light activation curable liquid spreading, covering substrate
09/30/2004US20040189986 Optical wafer presence sensor system
09/30/2004US20040189971 Wafer edge exposing apparatus
09/30/2004US20040189970 Exposure device
09/30/2004US20040189969 Drive mechanism, exposure device, optical equipment, and device manufacturing method
09/30/2004US20040189968 Cataoptric projection optical system, exposure apparatus and device fabrication method
09/30/2004US20040189967 Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus
09/30/2004US20040189966 Lithographic apparatus and device manufacturing method
09/30/2004US20040189965 Projection optical system and exposure device having the projection optical system
09/30/2004US20040189963 Exposure apparatus and method
09/30/2004US20040189962 Projection exposure apparatus
09/30/2004US20040189928 Spacers for display devices
09/30/2004US20040189896 Method for manufacturing transflective thin film transistor (TFT) liquid crystal display (LCD)
09/30/2004US20040189883 Display device and manufacturing method thereof
09/30/2004US20040189382 Gain control methods and systems in an amplifier assembly
09/30/2004US20040189373 Method for application of gating signal in double gate FET
09/30/2004US20040189353 Semiconductor device capable of avoiding latchup breakdown resulting from negative variation of floating offset voltage
09/30/2004US20040189350 Semiconductor device including a differential transistor pair
09/30/2004US20040189333 Carrier for receiving and electrically contacting individually separated dies
09/30/2004US20040189329 Charging voltage measuring device for substrate and ion beam irradiating device
09/30/2004US20040189325 Method and apparatus for electron density measurement
09/30/2004US20040189237 Motor controller, semiconductor integrated circuit, indicating instrument and method for controlling a motor
09/30/2004US20040189229 H-bridge drive utilizing a pair of high and low side MOSFET's in a common insulation housing
09/30/2004US20040189184 Light-emitting device, method of fabricating the device, and LED lamp using the device
09/30/2004US20040189173 Group III-nitride layers with patterned surfaces
09/30/2004US20040188866 Vaporizing reactant liquids for chemical vapor deposition film processing
09/30/2004US20040188862 Low stress flip-chip package for low-K silicon technology
09/30/2004US20040188861 Fabrication method of semiconductor device
09/30/2004US20040188860 Chip scale package and method for marking the same
09/30/2004US20040188858 Semiconductor device and method of wire bonding for semiconductor device
09/30/2004US20040188857 Semiconductor device
09/30/2004US20040188853 Semiconductor device
09/30/2004US20040188852 Semiconductor device
09/30/2004US20040188851 Semiconductor device and method for manufacturing same
09/30/2004US20040188850 Method of forming a robust copper interconnect by dilute metal doping
09/30/2004US20040188849 Semiconductor device and pattern generating method
09/30/2004US20040188846 Porous film, composition and manufacturing method, interlayer dielectric film, and semiconductor device
09/30/2004US20040188845 Semiconductor device having multilayer interconnection structure and method for manufacturing the device
09/30/2004US20040188844 Semiconductor device and pattern generating method