Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2004
10/13/2004EP1467401A2 A Capacitor Having a Dielectric Layer Including a Group 17 Element and a Method of Manufacture Therefor
10/13/2004EP1467400A2 Capacitor
10/13/2004EP1467399A1 Apparatus and method for holding and transporting thin opaque plates
10/13/2004EP1467255A1 Lithographic apparatus, device manufacturing method and computer program
10/13/2004EP1467253A1 Lithographic apparatus and device manufacturing method
10/13/2004EP1467252A1 Device manufacturing method and mask set for use in the method
10/13/2004EP1467251A1 Positive resist composition
10/13/2004EP1467004A1 Tin alloy electroplating compositions and methods
10/13/2004EP1466963A1 Cleaning liquid composition for semiconductor substrate
10/13/2004EP1466707A2 A method of removing selected portions of material from a base material
10/13/2004EP1466370A1 Non-volatile two-transistor semiconductor memory cell and method for producing the same
10/13/2004EP1466367A2 Non-volatile two-transistor semiconductor memory cell and method for producing the same
10/13/2004EP1466365A2 Method of manufacturing an integrated circuit, integrated circuit obtained in accordance with said method, wafer provided with an integrated circuit obtained in accordance with the method, and system comprising an integrated circuit obtained by means of the method
10/13/2004EP1466364A1 Electronic component and panel and method for the production thereof
10/13/2004EP1466362A2 System for the production of electric and integrated circuits
10/13/2004EP1466361A2 Method for enhancing electrode surface area in dram cell capacitors
10/13/2004EP1466360A1 Feedthrough contacts and method for producing the same
10/13/2004EP1466359A2 Use of conductive electrolessly deposided etch stop layers, liner layers and via plugs in interconnect structures
10/13/2004EP1466358A2 Copper interconnect doped with carbon and silicon
10/13/2004EP1466357A1 Surface mounted package with die bottom spaced from support board
10/13/2004EP1466356A2 Organic compositions
10/13/2004EP1466355A2 Organic compositions
10/13/2004EP1466354A2 Dielectric films for narrow gap-fill applications
10/13/2004EP1466353A1 Contamination suppression in chemical fluid deposition
10/13/2004EP1466352A1 Method of forming copper interconnections for semiconductor integrated circuits on a substrate
10/13/2004EP1466351A1 Method for masking a recess in a structure with a large aspect ratio
10/13/2004EP1466350A2 Barrier stack with improved barrier properties
10/13/2004EP1466349A2 Method for making a semiconductor photodetector, in particular in the low-energy uv-x domain, and photodetector obtained by said method
10/13/2004EP1466348A2 Optical chip packaging via through hole
10/13/2004EP1466330A2 Resistive memory elements with reduced roughness
10/13/2004EP1466329A2 Magnetic device with magnetic tunnel junction, memory array and read/write methods using same
10/13/2004EP1466327A1 Memory cell utilizing negative differential resistance field-effect transistors
10/13/2004EP1466216A1 Process for producing an image using a first minimum bottom antireflective coating composition
10/13/2004EP1466215A1 Negative deep ultraviolet photoresist
10/13/2004EP1466214A2 Negative-working photoimabeable bottom antireflective coating
10/13/2004EP1466212A1 Multi-image reticles
10/13/2004EP1466137A2 Stereoscopic three-dimensional metrology system and method
10/13/2004EP1466063A1 Wafer carrier door and latching mechanism
10/13/2004EP1466033A1 Emissivity-change-free pumping plate kit in a single wafer chamber
10/13/2004EP1466032A1 Volatile copper(ii) complexes for deposition of copper films by atomic layer deposition
10/13/2004EP1466030A1 Vaporiser/delivery vessel for volatile/thermally sensitive solid and liquid compounds
10/13/2004EP1465957A1 Cmp systems and methods utilizing amine-containing polymers
10/13/2004EP1465937A1 Organic compositions
10/13/2004EP1465753A2 Pads for cmp and polishing substrates
10/13/2004EP1465750A1 Abrasive article for the deposition and polishing of a conductive material
10/13/2004EP1465636A2 Compositions and methods for enhancing corticosteriod delivery
10/13/2004EP1465479A2 Automated foot bath apparatus and method
10/13/2004EP1347461A4 Device for x-ray lithography
10/13/2004EP1330841B1 Method for assembling planar workpieces
10/13/2004EP1324859A4 Polishing pad with built-in optical sensor
10/13/2004EP1297398B1 Method and device for thermally treating objects
10/13/2004EP1198534B1 Polishing liquid composition
10/13/2004EP1142004B1 Method for boron doping wafers using a vertical oven system
10/13/2004EP1125326B1 Selectively doped trench device isolation
10/13/2004EP1086030A4 Smif pod including independently supported wafer cassette
10/13/2004EP1049641A4 Semiconductor wafer cassette positioning and detection mechanism
10/13/2004EP1005642B1 Method and device for determining a parameter for a metallization bath
10/13/2004EP0917733B1 Integrated circuit device manufacture
10/13/2004EP0910868B1 Method and apparatus for contactless treatment of a semiconductor substrate in wafer form
10/13/2004EP0815585B1 Preferential etch of semiconductor substrate with respect to epitaxial layers
10/13/2004EP0696242B2 Articulated arm transfer device
10/13/2004CN2648596Y Nondestructive separating device for focal plane array device
10/13/2004CN1537407A Electronic component, component mounting equipment, and component mounting method
10/13/2004CN1537405A Antenna structure for inductively coupled plasma generator
10/13/2004CN1537359A ESD Protection devices for differential pair of transistors
10/13/2004CN1537336A Method of fabricating thermally stable MTJ cell and apparatus
10/13/2004CN1537334A Method for structuring on oxide layer applied to substrate material
10/13/2004CN1537333A Silicon-on-insulator (SOI) trench photodiode and method of forming same
10/13/2004CN1537332A 半导体器件 Semiconductor devices
10/13/2004CN1537331A Circuit module and method for mfg. the same
10/13/2004CN1537330A Structural reinforcement of highly porous low k dielectric films by cu diffusion barrier structures
10/13/2004CN1537329A Method of heat-peeling chip cut piexes from heat peel type adhesive sheet, electronic part, and circuit board
10/13/2004CN1537328A High temperature electrostatic chuck
10/13/2004CN1537327A Flip chip interconnection using no clean flux
10/13/2004CN1537326A Electrochemical oxidation
10/13/2004CN1537325A Plasma curing of MSQ-based porouslow-k film materials
10/13/2004CN1537324A Polising method and device
10/13/2004CN1537323A Crystallization apparatus, crystallization method and phase shift mask
10/13/2004CN1537322A Semiconductor mfg. device and method for mfg. semiconductor
10/13/2004CN1537321A Apparatus and method for mounting electronic parts
10/13/2004CN1537320A Temperature-controlled chuck and method for controlling temperature of substantially flat object
10/13/2004CN1537315A Material deposition from liquefied gas solution
10/13/2004CN1537178A CVD process for preparing feeri electric films using bi alcoxides
10/13/2004CN1537151A Pressure sensitive adhesive double coated tape and method for producing IC chip using it
10/13/2004CN1537137A Flame retardant molding compositions
10/13/2004CN1537089A Method of producing tantalum and niobium alkoxides
10/13/2004CN1537038A Apparatus and method for controlling wafer temp. in chemical mechanical polishing
10/13/2004CN1537037A Multiport polishing fluid delivery system
10/13/2004CN1536949A Image forming method, image forming device and its mfg. method
10/13/2004CN1536687A Radio element adopting microelectric mechine system manufacture techqique and its manufacture method
10/13/2004CN1536683A Manufacturing method of photovoltaic element
10/13/2004CN1536679A Semiconductor-structure
10/13/2004CN1536678A Voltage controlled capacity element and semiconductor integrated circuit
10/13/2004CN1536676A Chip with covered silicon on multiaspect insulating layer and its making method
10/13/2004CN1536675A Two-way fetching/programming nonvolatile floating gate storage unit with independent controllable control gate, its array and formation method
10/13/2004CN1536674A Semiconductor storage
10/13/2004CN1536673A 半导体集成电路器件 The semiconductor integrated circuit device
10/13/2004CN1536672A Flash memory and its making method
10/13/2004CN1536671A Flash memory unit and its making method
10/13/2004CN1536670A Flash memory unit with selective grid positioned in substrate and its making method